Vertical quartz boat

Abstract

The utility model provides a vertical quartz boat, which comprises an upper end plate and a lower end plate, supporting columns are oppositely arranged between the upper end plate and the lower end plate, a plurality of gaskets are inserted on the supporting columns, and the gaskets are arranged to be of an integral structure and are used for placing silicon wafers, so that the lower surfaces of the silicon wafers are placed on the gaskets. The utility model has the beneficial effects that by adopting the technical scheme, the silicon wafer is effectively prevented from being adhered to the quartz boat by arranging the gasket, the appearance defect of the silicon wafer caused by adhesion is reduced, the processing quality of the silicon wafer is ensured, and the service life of the gasket is prolonged by reducing the contact area of the gasket and the quartz boat.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of silicon wafer production, especially relates to a vertical quartz boat. BACKGROUND

[0002] In the production process of silicon wafer, the silicon wafer needs to be placed on the quartz boat in the diffusion equipment for diffusion process. The reaction gas forms a polycrystalline film on the surface of the silicon wafer and the quartz boat, and the polycrystalline film is easy to adhere the silicon wafer and the quartz boat together. When the silicon wafer is taken out of the quartz boat, it is easy to cause the concave defect on the surface of the silicon wafer, which affects the processing quality of the silicon wafer and further affects the subsequent use. UTILITY MODEL CONTENTS

[0003] To solve the above technical problems, the utility model provides a vertical quartz boat, which effectively solves the adhesion problem of the silicon wafer and the quartz boat and overcomes the shortcomings of the prior art.

[0004] The technical scheme adopted by the utility model is as follows: a vertical quartz boat, comprising an upper end plate and a lower end plate, a support column is oppositely arranged between the upper end plate and the lower end plate, a plurality of lining sheets are inserted on the support column, the lining sheet is arranged in an integral structure and is used for placing a silicon wafer, and the lower surface of the silicon wafer is placed on the lining sheet.

[0005] Further, the support column comprises a first support column, a second support column, a third support column and a fourth support column, the first support column and the second support column are oppositely arranged, the third support column and the fourth support column are oppositely arranged, the third support column and the fourth support column are arranged on one side of the first support column and the second support column, and the side, away from the third support column and the fourth support column, of the first support column and the second support column is provided with an open mouth.

[0006] Further, the side, away from the first support column and the second support column, of the third support column and the fourth support column is provided with a positioning stop rod, and the two ends of the positioning stop rod are connected with the upper end plate and the lower end plate respectively.

[0007] Further, the side, close to the lining sheet, of the positioning stop rod is provided with a plane.

[0008] Further, the lining sheets are distributed at equal intervals along the height of the support column.

[0009] Further, the side, on which the lining sheets are inserted, of the support column is provided with a slot.

[0010] Further, the side, on which the lining sheet lower surface is in contact, of the slot is provided with an inclined surface, and the inclined surface is inclined downward.

[0011] Further, the inclination angle of the inclined surface is 3°-6°.

[0012] Further, the depth of the slot on the third and fourth support columns is greater than the depth of the slot on the first and second columns.

[0013] Further, the bottom of the lower end plate is provided with a positioning block.

[0014] The utility model has the advantages and positive effects that: due to the above technical scheme, by setting the lining piece, the adhesion of the silicon wafer and the quartz boat is effectively prevented, the appearance defects caused by the adhesion of the silicon wafer are reduced, the processing quality of the silicon wafer is ensured, and the service life of the lining piece is prolonged by reducing the contact area between the lining piece and the quartz boat. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a bottom view of the vertical quartz boat of the utility model embodiment.

[0016] Figure 2 It is a front view of the vertical quartz boat without the lining piece of the utility model embodiment.

[0017] Figure 3 It is an A-A sectional view of the vertical quartz boat of the utility model embodiment.

[0018] Figure 4 It is a B-B sectional view of the vertical quartz boat of the utility model embodiment.

[0019] In the drawing:

[0020] 1, upper end plate 2, lower end plate 3, lining piece

[0021] 4, first support column 5, second support column 6, third support column

[0022] 7, fourth support column 8, positioning stopper 9, slot

[0023] 10, positioning block 11, silicon wafer 12, flat surface DETAILED DESCRIPTION

[0024] The utility model embodiment provides a vertical quartz boat, and the following will be described with reference to the drawings.

[0025] In the description of the embodiments of the utility model, it is understood that the orientation or position relationship indicated by the terms "top", "bottom" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In the description of the utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "arrangement", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be directly connected, or indirectly connected through an intermediate medium, or it can be the communication between two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0026] As shown in Figure 1 and Figure 2 The utility model discloses a vertical quartz boat, including upper end plate 1 and lower end plate 2, the relative fixation of support column is arranged between upper end plate 1 and lower end plate 2. A plurality of horizontal placement's lining sheet 3 are inserted on support column, and lining sheet 3 is arranged as whole piece structure, and lining sheet 3 is without any hole, and is non annular structure, and is a whole piece structure. The material of lining sheet 3 is same with silicon wafer 11. In the embodiment, lining sheet 3 is a whole round sheet, and is concentrically arranged with upper end plate 1 and lower end plate 2, and the diameter of lining sheet 3 is greater than silicon wafer 11. Lining sheet 3 is used for placing silicon wafer 11, and the lower surface of silicon wafer 11 is placed on lining sheet 3. In the prior art, silicon wafer 11 directly contacts with boat tooth of quartz boat, and stress is concentrated at the contact position, and silicon atom is faster in film forming rate at the contact position, and it is easy to cause diffusion gas to accumulate, so that silicon wafer 11 is adhered with boat tooth. And in the technical scheme, silicon wafer 11 is placed on lining sheet 3 to diffuse, and silicon wafer 11 is stacked with whole piece structure lining sheet 3, so that stress concentration is not caused, and the flow of diffusion gas is more uniform, and at the same time, the lower surface of silicon wafer 11 is not closely attached with the upper surface of lining sheet 3 when contacting, and there will be a gap between the lower surface of silicon wafer 11 and the upper surface of lining sheet 3, and after diffusion gas permeates into the gap, it will flow quickly, so that it will not be accumulated at a certain place to cause adhesion.

[0027] Specifically, the support column includes a first support column 4, a second support column 5, a third support column 6, and a fourth support column 7. The first support column 4 and the second support column 5 are oppositely arranged. The third support column 6 and the fourth support column 7 are oppositely arranged. The third support column 6 and the fourth support column 7 are arranged on one side of the first support column 4 and the second support column 5. The side of the first support column 4 and the second support column 5 away from the third support column 6 and the fourth support column 7 is provided with an open mouth.

[0028] Specifically, the third support column 6 and the fourth support column 7 are provided with a positioning stop rod 8 on the side away from the first support column 4 and the second support column 5, and the two ends of the positioning stop rod 8 are fixedly connected with the upper end plate 1 and the lower end plate 2 respectively.

[0029] In the embodiment, the support columns are arranged close to the middle part of the quartz boat, and in order to facilitate the placement of the liner 3 and the silicon wafer 11, the first support column 4 and the second support column 5 are arranged closer to the middle part of the quartz boat, and the side of the first support column 4 and the second support column 5 away from the third support column 6 and the fourth support column 7 is formed into an open mouth to facilitate the placement of the liner 3 and the silicon wafer 11. Meanwhile, the third support column 6 and the fourth support column 7 are provided with a vertical positioning stop rod 8 on the side away from the first support column 4 and the second support column 5, and the two ends of the positioning stop rod 8 are fixedly connected with the upper end plate 1 and the lower end plate 2 respectively to prevent the liner 3 and the silicon wafer 11 from sliding out. One end of the silicon wafer 11 is provided with a horizontal flat surface 12, and in order to make the placement direction of the silicon wafer 11 consistent, the flat surface 12 is arranged close to the positioning stop rod 8 when the silicon wafer 11 is placed horizontally.

[0030] Preferably, the side of the positioning stop rod 8 close to the liner 3 is arranged as a plane. After the liner 3 and the silicon wafer 11 are stacked, the liner 3 is inserted into the support column and the silicon wafer 11 is inserted into the quartz boat by using a guide piece, and the size of the silicon wafer 11 is smaller than that of the liner 3 and does not contact the support column. In order to prevent the silicon wafer 11 from sliding out of the open mouth, the guide piece pushes the silicon wafer 11 towards the side of the positioning stop rod 8, so that the flat surface 12 of the silicon wafer 11 abuts against the positioning stop rod 8. Arranging the side of the positioning stop rod 8 close to the liner 3 as a plane can make the abutment of the flat surface 12 more stable.

[0031] Preferably, in order to make the diffusion gas flow above each silicon wafer 11 more uniform and ensure the consistency of the polycrystalline film on the upper surface of the silicon wafer 11, the liner 3 is arranged at equal intervals along the height of the support column, so that the diffusion gas flow space above each silicon wafer 11 remains consistent.

[0032] Specifically, the side of the support column into which the liner 3 is inserted is provided with a slot 9, and the liner 3 can be pushed into the slot 9 from the open mouth. The slots 9 on the oppositely arranged support columns are also oppositely arranged. The slots 9 are arranged at equal intervals along the height of the support column.

[0033] Preferably, as shown in FIG. 6, the liner 3 is provided with a plurality of through holes 10, and the through holes 10 are arranged at equal intervals along the length of the liner 3. Figure 3As shown, the side of the slot 9 in contact with the lower surface of the backing sheet 3 is provided as an inclined surface, and the inclined surface is inclined downward. In order to prevent the silicon wafer 11 from being contaminated, the backing sheet 3 is made of the same material as the silicon wafer 11. Therefore, the backing sheet 3 may be adhered to the slot 9 during the diffusion process. When the silicon wafer 11 is taken out of the quartz boat, the backing sheet 3 needs to be taken out together. If the backing sheet 3 is adhered to the slot 9, the backing sheet 3 will be damaged, and the service life of the backing sheet 3 will be affected. The side of the slot 9 in contact with the lower surface of the backing sheet 3 is provided as an inclined surface inclined downward. When the backing sheet 3 is clamped in the slot 9, the lower surface of the backing sheet 3 is in line contact with the slot 9, which reduces the contact area compared with surface contact. When the backing sheet 3 and the silicon wafer 11 are taken out, if the backing sheet 3 is adhered, the contact area of the backing sheet 3 is reduced, so it is easier to take out, and the damage area of the backing sheet 3 is reduced. In some embodiments, in order to further reduce the contact area of the backing sheet 3 and the slot 9, the quartz boat is sandblasted to increase the roughness of the surface.

[0034] Preferably, the inclination angle of the inclined surface is 3°-6°, and can be specifically set as 3°, 4°, 5° or 6°. In the embodiment, the inclination angle of the inclined surface is 5°.

[0035] Preferably, the size of the slot 9 on the third support column 6 and the fourth support column 7 is the same, and the size of the slot 9 on the first support column 4 and the second support column 5 is the same. The depth h2 of the slot 9 on the third support column 6 and the fourth support column 7 is greater than the depth h1 of the slot 9 on the first support column 4 and the second support column 5. When the silicon wafer 11 is placed, the silicon wafer 11 needs to be pushed towards the positioning stopper 8 side, so that the silicon wafer 11 and the backing sheet 3 are not concentrically placed, and the center of gravity of the silicon wafer 11 is more biased towards the third support column 6 and the fourth support column 7 side. The depth h2 of the slot 9 on the third support column 6 and the fourth support column 7 is greater than the depth h1 of the slot 9 on the first support column 4 and the second support column 5, which is more convenient for pushing the silicon wafer 11. At the same time, the slot 9 on the third support column 6 and the fourth support column 7 is deeper, and the center of gravity of the silicon wafer 11 is biased towards the third support column 6 and the fourth support column 7 side. In the use process, the third support column 6 and the fourth support column 7 will be more easily broken compared with the first support column 4 and the second support column 5. At this time, the silicon wafer 11 and the backing sheet 3 will be more easily clamped between the first support column 4, the second support column 5 and the positioning stopper 8, and it is not easy to slide out of the quartz boat and fall into the diffusion equipment to cause damage to the diffusion equipment.

[0036] Preferably, in order to facilitate the positioning of the quartz boat in the diffusion equipment, a positioning block 10 is fixed to the bottom of the lower end plate 2. The shape of the positioning block 10 is not limited. In the embodiment, two long strip-shaped positioning blocks 10 are fixed to the bottom of the lower end plate 2 for clamping and positioning with the diffusion equipment.

[0037] The utility model discloses have the advantages and positive effect is:

[0038] 1. By setting the gasket, effectively prevent the silicon wafer and quartz boat adhesion, reduce the silicon wafer due to adhesion caused by appearance defects, ensure the processing quality of silicon wafer.

[0039] 2. By setting the inclined surface on the slot, reduce the contact area of gasket and quartz boat, reduce the damage caused by gasket and quartz boat adhesion, prolong the service life of gasket.

[0040] 3. By setting the positioning pole, prevent the gasket and silicon wafer from falling.

[0041] The above detailed description of the embodiments of the present application, but the content is only the preferred embodiment of the present application, can not be considered for limiting the scope of the present application. Any equivalent changes and improvements made in the scope of the present application, should still belong to the patent scope of the present application.

Claims

1. A vertical quartz boat, comprising an upper end plate and a lower end plate, wherein a supporting column is disposed opposite to the upper end plate and the lower end plate, characterized in that: A plurality of linings are inserted on the supporting columns. The linings are arranged as a whole piece structure and are used for placing silicon wafers so that the lower surface of the silicon wafer is placed on the linings.

2. A vertical quartz boat according to claim 1, characterized in that: The supporting columns include a first supporting column, a second supporting column, a third supporting column and a fourth supporting column. The first supporting column and the second supporting column are arranged opposite to each other, the third supporting column and the fourth supporting column are arranged on one side of the first supporting column and the second supporting column, and an open opening is provided on the side of the first supporting column and the second supporting column away from the third supporting column and the fourth supporting column.

3. A vertical quartz boat according to claim 2, characterized in that: A positioning lever is provided on the side of the third supporting column and the fourth supporting column away from the first supporting column and the second supporting column, and both ends of the positioning lever are connected to the upper end plate and the lower end plate respectively.

4. A vertical quartz boat according to claim 3, characterized in that: A side of the positioning lever close to the lining is configured as a plane.

5. A vertical quartz boat according to any one of claims 2 to 4, characterized in that: The linings are distributed at equal intervals along the height of the supporting pillars.

6. The vertical quartz boat according to claim 5, characterized in that: A slot is provided on one side of the support column where the lining is inserted.

7. The vertical quartz boat according to claim 6, characterized in that: A surface of the slot in contact with the lower surface of the lining is configured as an inclined surface, and the inclined surface is inclined downward.

8. The vertical quartz boat according to claim 7, characterized in that: The inclination angle of the inclined surface is 3° to 6°.

9. A vertical quartz boat according to any one of claims 6 to 8, characterized in that: The depth of the slots on the third supporting column and the fourth supporting column is greater than the depth of the slots on the first supporting column and the second supporting column.

10. A vertical quartz boat according to any one of claims 1-4 and 6-8, characterized in that: A positioning block is provided at the bottom of the lower end plate.

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