Substrate holding mechanism

Abstract

The utility model provides a substrate holding mechanism, which comprises a fixed plate, a driving source, a movable plate and a carrying table, the driving source is arranged on the fixing plate. The movable plate is connected with the driving source and is driven by the driving source to move relative to the fixed plate. The carrying table comprises a plurality of bearing parts and a plurality of holding parts which are arranged alternately, the bearing parts are located beside the fixed plate, and the holding parts are connected with the movable plate. A plurality of substrates are horizontally arranged on the bearing part, and the driving source synchronously drives the holding part to move relative to the bearing part through the moving plate, so that the substrates are limited and held on the carrying table or released from the carrying table. Therefore, the substrate holding mechanism provided by the utility model can limit a plurality of substrates at the same time so as to be beneficial to horizontal conveying.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of substrate holding mechanism. BACKGROUND

[0002] In existing manufacturing factory, to improve work efficiency and stability, mostly use mechanical arm to assist operation, such as using mechanical arm to move goods, move goods, place goods, etc., especially for wafer factory or panel factory, mechanical arm is indispensable equipment.

[0003] Known substrate conveying device, with hand, hold the edge of the substrate of semiconductor component material, namely semiconductor substrate; mechanical arm, equipped with this hand. Generally speaking, chuck hand has flat plate member, one fixed clamping member and one movable clamping member can be clamped with the edge of substrate. Movable clamping member and auxiliary clamping member can move to and fro towards the center of substrate, and act through respective independent drive part. However, the movable clamping member above will lift the substrate and push towards the fixed clamping when clamping the substrate, so that the substrate can be clamped between movable clamping member and auxiliary clamping member. However, the process of pushing is easy to cause friction between substrate and platform and cause substrate wear.

[0004] Furthermore, the aforementioned substrate conveying device is mostly to clamp, transport and release wafers one by one, so there is still deficiency in work efficiency. INVENTION CONTENTS

[0005] The utility model provides a kind of substrate holding mechanism, to provide limit for multiple substrates simultaneously and be beneficial to horizontal transport.

[0006] A kind of substrate holding mechanism of the utility model, including fixed plate, drive source, moving plate and platform. Drive source is arranged in fixed plate. Moving plate is connected drive source and is driven by drive source and moves relative to fixed plate. Platform includes the multiple bearing parts and multiple holding parts of interactive layer, bearing part is located at fixed plate side, and holding part is connected moving plate. Multiple substrates are placed on the bearing part of platform in horizontal state, and drive source is driven holding part relative to bearing part by moving plate to move, to limit and keep multiple substrates on platform or release from platform.

[0007] In the embodiment of the utility model, the drive source described above includes pneumatic cylinder and connecting plate, pneumatic cylinder is arranged in fixed plate, connecting plate is assembled to moving plate, movable push rod of pneumatic cylinder is assembled to connecting plate, so that pneumatic cylinder drives connecting plate and moving plate by the movement of movable push rod.

[0008] In the embodiment of the utility model, the drive source described above further includes abutting portion and baffle, abutting portion is assembled on connecting plate, baffle is arranged on fixed plate, and baffle is located on the action path of abutting portion.

[0009] In the embodiment of the utility model, the stroke of the movable push rod driving the moving plate is 2mm.

[0010] In the embodiment of the utility model, further include track assembly, track assembly includes track and moving block slidably coupled together, track is arranged in fixed plate, moving block is arranged in moving plate, movable direction of track assembly is consistent with driving direction of driving source.

[0011] In the embodiment of the utility model, further include sensing assembly, sensing assembly includes position sensor and sensing sheet, sensing sheet is arranged on moving plate, position sensor is arranged on fixed plate, the movement of sensing sheet will pass through the sensing range of position sensor.

[0012] In the embodiment of the utility model, the fixed plate is assembled in the terminal arm part of the mechanical arm, the moving plate is movably erected in the terminal arm part, the bearing part of the carrier is assembled to the terminal arm part, the moving plate covers the holding part, the substrate is respectively limited by the holding part and the carrier, so that the terminal arm part carries the substrate in a horizontal state.

[0013] In the embodiment of the utility model, the holding part includes a driving plate, a pair of stop blocks and a combination block, the central part of the driving plate is inserted into the terminal arm part, and the combination block is assembled to the moving plate, the stop blocks are arranged at the opposite ends of the driving plate and located at the side edges of the bearing part.

[0014] In the embodiment of the utility model, the carrier further has a pair of stop parts, which are located at the other side edges of the bearing part and opposite to the stop blocks, and the stop blocks are driven by the moving plate to move towards or away from the stop parts.

[0015] In the embodiment of the utility model, the stop blocks are symmetrical relative to the center line of the carrier, and the stop parts are symmetrical relative to the center line, so that the substrate is limited between the stop blocks and the stop parts.

[0016] Based on the above, since the substrate holding mechanism is driven by the driving source arranged on the fixed plate, the moving plate can synchronously drive the holding parts stacked with each other, so that the holding parts can move relative to the stacked bearing parts of the carrier. In this way, a plurality of substrates can be placed on the bearing parts of the carrier in a horizontal state, and corresponding holding parts can limit them on the carrier. This enables the substrate holding mechanism to achieve the limiting effect of multiple substrates with a single driving source, which is beneficial to work efficiency.

[0017] In order to make the above features and advantages of the utility model more obvious and easy to understand, the following examples are taken, and the detailed description is as follows in combination with the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1is a schematic diagram of a substrate holding mechanism adapted to a robotic arm;

[0019] Figure 2A yes Figure 1 A schematic diagram of some components of a substrate holding mechanism;

[0020] Figures 2B to 2E 1. It is a schematic diagram of the exploded components of the substrate holding mechanism at different locations;

[0021] Figure 3A and Figure 3B Different states of the substrate holding mechanism are shown respectively. DETAILED DESCRIPTION

[0022] Figure 1 This is a schematic diagram of the substrate holding mechanism adapted to the robotic arm. Figure 1 In this embodiment, the robot arm 10 includes a substrate holding mechanism 100 and an arm module 200. The arm module 200 includes a body 210 and a first arm 220, a second arm 230, and a terminal arm 240 pivotally mounted thereon. The substrate holding mechanism 100 is mounted on the terminal arm 240. The robot arm 10 first receives a substrate 20 through the substrate holding mechanism 100 and then moves the substrate 20 through the arm module 200.

[0023] Figure 2A yes Figure 1 Schematic diagram of some components of the substrate holding mechanism. Figures 2B to 2E This is a schematic diagram of the components of the substrate holding mechanism at different locations. Please refer to Figures 2A to 2C The substrate holding mechanism 100 of this embodiment includes a fixed plate 110, a driving source 130, a movable plate 120 and a carrier 140. The driving source 130 is arranged on the fixed plate 110. The movable plate 120 is connected to the driving source 130 and is driven by the driving source 130 to move relative to the fixed plate 110. The carrier 140 includes a plurality of alternately layered carrying portions 141 and a plurality of holding portions 143. The carrying portion 141 is located next to the fixed plate 110, and the holding portion 143 is connected to the movable plate 120. A plurality of substrates 20 are placed on the carrying portion 141 in a horizontal state, and the driving source 130 synchronously drives these holding portions 143 to move relative to the carrying portion 141 through the movable plate 120, so as to simultaneously limit and hold these substrates 20 on the carrier 140 or release them from the carrier 140.

[0024] like Figure 2AAs shown, the terminal arm portion 240 is provided as a space for the aforementioned components of the substrate holding mechanism 100 to be disposed, in which the fixed plate 110 and the moving plate 120 are respectively erected in the terminal arm portion 240. The bearing portion 141 of the carrier 140 has a bidirectional bifurcated structure, in which one side of the bifurcated structure is inserted into the terminal arm portion 240 and is stacked layer by layer, and the fixed plate 110 and the moving plate 120 assembled are seated in the notches of the bifurcated structure, so that the vertical moving plate 120 can cover the plurality of holding portions 143 in a stacked state, thereby facilitating the layer-by-layer assembly of the holding portions 143 to the moving plate 120.

[0025] Next, please refer to Figures 2C to 2E In the present embodiment, the driving source 130 includes a pneumatic cylinder 131 and a connecting plate 132, the pneumatic cylinder 131 is arranged on the fixed plate 110, the connecting plate 132 is assembled to the moving plate 120 by screws 135, and the movable push rod 131a of the pneumatic cylinder 131 is assembled to the connecting plate 132, so that the pneumatic cylinder 131 drives the connecting plate 132 and the moving plate 120 through the movement of the movable push rod 131a. The driving source 130 further includes an abutting portion 133 assembled on the connecting plate 132 and a stop plate 134 arranged on the fixed plate 110, and the stop plate 134 is located on the action path of the abutting portion 133 to provide a stop purpose, so as to limit the stroke of the movable push rod 131a of the pneumatic cylinder 131 within a certain safety range. The safety range is not limited here, which can be adjusted according to the stroke specification of the pneumatic cylinder 131 and the stroke requirement of the moving plate 120. In the present embodiment, the stroke of the movable push rod 131a driving the moving plate 120 is 2mm, so as to reduce the possibility of friction of the substrate 20 on the bearing portion 141, which will be further described later.

[0026] In the present embodiment, the substrate holding mechanism 100 further includes a track assembly 150, the track assembly 150 includes a track 152 and a moving block 151 slidably coupled together, the track 152 is arranged on the fixed plate 110, and the moving block 151 is arranged on the moving plate 120, and the movable direction of the track assembly 150 is consistent with the driving direction of the driving source 130. Furthermore, the substrate holding mechanism 100 further includes a sensing assembly 160, the sensing assembly 160 includes a position sensor 161 and a sensing sheet 162, the sensing sheet 162 is arranged on the moving plate 120 to move with the moving plate 120, and the position sensor 161 is arranged on the fixed plate 110, and the movement of the sensing sheet 162 passes through the sensing range of the position sensor 161. In this way, the control module (not shown) of the robot arm 10 can further control the pneumatic cylinder 131 (air source) and the sensing assembly 160 in addition to controlling the motors of the aforementioned arm portions. That is, the control module can drive or stop the pneumatic cylinder 131 according to the sensing state of the sensing assembly 160.

[0027] In addition, please refer to Figure 2D With Figure 2E , the holding portion 143 each includes a driving plate 143b, a pair of stoppers 143a and a coupling block 143c, the central part of the driving plate 143b is inserted into the terminal arm portion 240, and is locked to the coupling block 143c by a screw 143e, and is assembled to the fixed hole 121 of the moving plate 120 by a screw 143d passing through the coupling block 143c (shown in Figure 2E ), the stoppers 143a are arranged at opposite ends of the driving plate 143b and located at the side edges of the bearing portion 141.

[0028] Figure 3A With Figure 3B different states of the substrate holding mechanism are shown respectively. Please refer to Figure 2D , Figure 3A With Figure 3B , as mentioned above, the stage 140 of the present embodiment also has a pair of stoppers 142, which are located at the other side edges of the bearing portion 141 and opposite to the stoppers 143a, and the stoppers 143a move towards or away from the stoppers 142 as the moving plate 120 moves. Therefore, when the substrate 20 is placed on the bearing portion 141, the driving source 130 drives the moving plate 120 and drives the holding portion 143, and the stoppers 143a will move towards the stoppers 142, that is, from Figure 3B to Figure 3A , so that the substrate 20 can be positioned on the bearing portion 141. Here, the stoppers 143a are symmetrical with respect to the center line of the stage 140, and the stoppers 142 are also symmetrical with respect to the center line, so that the substrate 20 can be smoothly positioned between the stoppers 143a and the stoppers 142. On the contrary, when the substrate 20 is carried to the appropriate position, the stoppers 143a can be moved away from the substrate 20 (equivalent to moving away from the stoppers 142) by the aforementioned control, that is, from Figure 3A to Figure 3B , so as to achieve the purpose of releasing the substrate 20.

[0029] Since the substrate 20 of the present case is carried in a horizontal state, the substrate holding mechanism 100 only needs to generate a positioning effect on the substrate 20. In the positioning state shown in Figure 3A , the substrate 20 can still move slightly in the bearing portion 141 without being clamped, and the moving range is controlled within 0.5mm by the air cylinder 131 and the sensing assembly 160. The positioning effect can also avoid damage to the substrate 20 caused by clamping.

[0030] In the embodiment of the utility model, the substrate holding mechanism is driven to move the moving plate through the driving source arranged on the fixed plate, so that the moving plate can synchronously drive the holding parts stacked with each other, and the holding parts can move relative to the stacked bearing parts of the stage. In this way, multiple substrates placed on the bearing parts of the stage in a horizontal state are all positioned on the stage by the corresponding holding parts. This allows the substrate holding mechanism to achieve the positioning effect of multiple substrates by using a single driving source, thereby reducing energy consumption and improving work efficiency. At the same time, since the driving source 130 is arranged on the terminal arm part, it does not need to have a direct electrical driving relationship with the robot arm, so the substrate holding mechanism can be regarded as an independent modular device, which is convenient for assembly and maintenance, and also facilitates assembly to different equipment to improve the adaptation range.

[0031] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the utility model, but not to limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A substrate holding mechanism, characterized in that: include: Fixed plate; a driving source, disposed on the fixing plate; a movable plate connected to the driving source and driven by the driving source to move relative to the fixed plate; as well as The carrier includes multiple load-bearing parts and multiple holding parts that are alternately layered, the multiple load-bearing parts are located next to the fixed plate, the multiple holding parts are connected to the movable plate, and multiple substrates are placed on the multiple load-bearing parts of the carrier in a horizontal state. A driving source synchronously drives the multiple holding parts to move relative to the multiple load-bearing parts through the movable plate to limit and hold the multiple substrates on the carrier or release them from the carrier.

2. The substrate holding mechanism according to claim 1, wherein: The driving source includes a pneumatic cylinder and a connecting plate, the pneumatic cylinder is arranged on the fixed plate, the connecting plate is assembled to the movable plate, and the movable push rod of the pneumatic cylinder is assembled to the connecting plate so that the pneumatic cylinder drives the connecting plate and the movable plate through the movement of the movable push rod.

3. The substrate holding mechanism according to claim 2, wherein: The driving source further includes an abutting portion and a baffle. The abutting portion is assembled on the connecting plate. The baffle is disposed on the fixing plate, and the baffle is located on a movement path of the abutting portion.

4. The substrate holding mechanism according to claim 2, wherein: The stroke of the movable push rod driving the movable plate is 2 mm.

5. The substrate holding mechanism according to claim 1, wherein: It also includes a track assembly, which includes a track and a moving block slidably coupled to each other, the track is set on the fixed plate, the moving block is set on the moving plate, and the movable direction of the track assembly is consistent with the driving direction of the driving source.

6. The substrate holding mechanism according to claim 1, wherein: It also includes a sensing component, which includes a position sensor and a sensing piece. The sensing piece is arranged on the movable plate, and the position sensor is arranged on the fixed plate. The movement of the sensing piece will pass through the sensing range of the position sensor.

7. The substrate holding mechanism according to claim 1, wherein: The fixed plate is assembled in the terminal arm of the robot arm, the movable plate stands movably in the terminal arm, the multiple carrying parts of the carrier are assembled to the terminal arm, the movable plate covers the multiple layered holding parts, and the multiple substrates are respectively limited by the multiple holding parts and the carrier, so that the terminal arm can transport the multiple substrates in a horizontal state.

8. The substrate holding mechanism according to claim 7, wherein: The multiple retaining parts each include a driving plate, a pair of stop blocks and a coupling block. The center of the driving plate is inserted into the terminal arm and assembled to the movable plate through the coupling block. The pair of stop blocks are arranged at opposite ends of the driving plate and located at the side edges of the bearing part.

9. The substrate holding mechanism according to claim 8, wherein: The carrier further has a pair of stop portions located at the other side edge of the carrying portion and opposite to the pair of stop blocks. The pair of stop blocks are driven by the movable plate to move toward or away from the pair of stop portions.

10. The substrate holding mechanism according to claim 9, wherein: The pair of stoppers are symmetrical with respect to a center line of the carrier, and the pair of stoppers are symmetrical with respect to the center line, so that the substrate is restricted between the pair of stoppers and the pair of stoppers.

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