Automatic cleaning machine for semiconductor industrial alcohol

Abstract

The utility model relates to the technical field of mechanical appliances, in particular to an automatic cleaning machine for semiconductor industrial alcohol. Comprising a workbench, a pure water tank is fixedly connected to the top of the workbench, an alcohol tank is arranged on the inner wall of the pure water tank, the inner bottom face of the alcohol tank is of a funnel-shaped structure with the center sunken, a collecting pipe is fixedly connected to the center of the bottom of the alcohol tank, and a sleeve is arranged at the center of the interior of the pure water tank; the upper end and the lower end of the sleeve are fixedly connected with the top and the bottom of the pure water tank respectively, and the sleeve slidably sleeves the outer side of the collecting pipe. The ultrasonic oscillator drives the water body in the pure water tank to oscillate, industrial alcohol in the alcohol tank is indirectly oscillated, the semiconductor rotary joint is cleaned, the ultrasonic oscillator is not in direct contact with the industrial alcohol, and meanwhile, the industrial alcohol is indirectly cooled by controlling the temperature of the water body in the pure water tank. The temperature rise of the industrial alcohol in the cleaning process is strictly controlled, and the use safety of the industrial alcohol is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical appliance technical field, concretely relates to a kind of automatic cleaning machine for semiconductor industry alcohol. BACKGROUND

[0002] Semiconductor rotary joint belongs to the key components of core equipment in chip production process, and in chip production engineering, with the promotion of technology grade and process, the number of dust particles generated and existing in rotary joint body, cleanliness and grease condition are strictly limited, and industrial alcohol is flammable and explosive, needs to consider the premise of safety, and the cleaning effect expected to be reached by comprehensive cleaning equipment is designed.

[0003] When the existing cleaning equipment uses industrial alcohol to clean semiconductor rotary joint, ultrasonic oscillator is usually directly installed in the inside of alcohol tank, so that ultrasonic oscillator is directly contacted with industrial alcohol, after the start of ultrasonic oscillator, local temperature of industrial alcohol close to ultrasonic oscillator is raised, which produces safety hazard, and impurities washed from semiconductor rotary joint are accumulated in the inside of alcohol tank, which is difficult to clean, in view of this, a kind of automatic cleaning machine for semiconductor industry alcohol is provided. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of automatic cleaning machine for semiconductor industry alcohol to solve the problems raised in the above background.

[0005] To achieve the above object, one of the purposes of the utility model is to provide an automatic cleaning machine for semiconductor industry alcohol, which comprises a workbench, a pure water tank is fixedly connected to the top of the workbench, an alcohol tank is arranged on the inner wall of the pure water tank, the inner bottom surface of the alcohol tank is in the form of a funnel with a depressed center, a collection pipe is fixedly connected to the center of the bottom of the alcohol tank, a sleeve pipe is arranged at the center of the pure water tank, the upper end and the lower end of the sleeve pipe are fixedly connected to the top and the bottom of the pure water tank respectively, the sleeve pipe is slidably sleeved on the outside of the collection pipe, a block valve is installed inside the collection pipe below the sleeve pipe, an ultrasonic oscillator is installed inside the pure water tank, and a cooling assembly is arranged on the pure water tank.

[0006] As a further improvement of the technical solution, the cooling assembly comprises a water cooler arranged outside the workbench, and the water suction pipe and the water outlet pipe of the water cooler extend through the workbench and communicate with the inside of the pure water tank.

[0007] As a further improvement of the technical solution, the cooling assembly further comprises a plurality of pull ropes fixedly connected to the inner wall of the pure water tank, and the pull ropes are arranged in horizontal array along the inner wall of the pure water tank, one end of the pull rope close to the sleeve pipe is fixedly connected with a floating ball, and the floating ball and the pull rope are both located above the ultrasonic oscillator.

[0008] As a further improvement of the technical solution, the top of the workbench is fixedly connected with a protective cover, an opening is formed in one side of the protective cover, door plates are symmetrically arranged on the inner wall of the opening, an exhaust pipeline is fixedly connected to the side of the protective cover away from the door plates, one end of the exhaust pipeline is in communication with the inside of the workbench, the other end of the exhaust pipeline extends to the outside of the workbench, and the pure water tank and the alcohol tank are arranged inside the protective cover.

[0009] As a further improvement of the technical solution, the bottom surface and the side surface of the alcohol tank are in extrusion fit with the inner wall of the pure water tank, and an operation window is formed in one side of the workbench.

[0010] Compared with the prior art, the semiconductor industrial alcohol automatic cleaning machine has the following beneficial effects:

[0011] 1. The semiconductor industrial alcohol automatic cleaning machine indirectly causes the industrial alcohol in the alcohol tank to oscillate by making the ultrasonic oscillator drive the water in the pure water tank to oscillate, thereby cleaning the semiconductor rotary joint, the ultrasonic oscillator does not directly contact the industrial alcohol, and the water temperature in the pure water tank is controlled to indirectly cool the industrial alcohol, thereby strictly controlling the temperature rise of the industrial alcohol during cleaning and ensuring the safe use of the industrial alcohol.

[0012] 2. The semiconductor industrial alcohol automatic cleaning machine can concentrate the impurities deposited on the bottom surface of the alcohol tank to the inside of the collection pipe when the alcohol tank oscillates and the industrial alcohol cleans the semiconductor rotary joint, the impurities in the collection pipe are not easy to float and adhere to the surface of the semiconductor rotary joint, thereby improving the cleaning quality of the semiconductor rotary joint, and the impurities in the collection pipe can be quickly cleaned by opening the block valve to discharge the impurities.

[0013] 3. The semiconductor industrial alcohol automatic cleaning machine can make the float on the pull rope irregularly impact the water when the industrial alcohol cleans the semiconductor rotary joint, thereby further accelerating the flow of the water, uniformly mixing the cold and hot water in the pure water tank, keeping the temperature of the water uniform, and uniformly keeping the temperature of the industrial alcohol, thereby eliminating the safety hazards caused by local high temperature of the industrial alcohol. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a sectional view of the utility model;

[0016] Figure 3 It is a schematic diagram of the structure of the pure water tank and the alcohol tank of the utility model;

[0017] Figure 4 The utility model discloses a Figure 3 The sectional view of the utility model discloses a

[0018] Figure 5 The structure diagram of the utility model discloses a pull rope and a floating ball.

[0019] The meanings of various reference numerals in the drawing are as follows:

[0020] 1, workbench;2, pure water tank;3, alcohol tank;4, collecting pipe;5, plugging valve;6, sleeve;7, ultrasonic oscillator;8, cold water machine;9, pull rope;10, floating ball;11, protective cover;12, exhaust pipeline. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be apparently and completely described below with reference to the drawings in the embodiments of the utility model. Apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] Embodiment 1

[0023] Please refer to Figure 1 , Figure 3 and Figure 4 , the embodiment provides a kind of automatic cleaning machine for alcohol in semiconductor industry, including workbench 1, workbench 1 top is fixedly connected with pure water tank 2, pure water tank 2 is filled with water body inside, pure water tank 2 inner wall is provided with alcohol tank 3, alcohol tank 3 is filled with industrial alcohol inside, pure water tank 2 is installed with ultrasonic oscillator 7 inside, ultrasonic oscillator 7 is started, and the water body in pure water tank 2 is subjected to high-frequency oscillation, so that pure water tank 2 as a whole is oscillated, and the oscillation force is transmitted to alcohol tank 3, so that the industrial alcohol in alcohol tank 3 is synchronously oscillated, after semiconductor rotary joint is soaked in the industrial alcohol inside alcohol tank 3, the industrial alcohol of high-frequency oscillation is used to clean semiconductor rotary joint, and the workpiece is cleaned by this pure water interval, indirect transmission oscillation mode, can strictly control the temperature rise of industrial alcohol in cleaning process, and pure water tank 2 is provided with cooling assembly, and cooling assembly is used to control pure water temperature, and the temperature of industrial alcohol is indirectly controlled by heat exchange between pure water and industrial alcohol, to ensure that industrial alcohol is used safely.

[0024] When the industrial alcohol with high-frequency oscillation is used to clean the semiconductor rotary joint, the impurities washed from the semiconductor rotary joint are mixed in the industrial alcohol, and after the industrial alcohol stops oscillation, the impurities are deposited at the bottom of the alcohol tank 3. In order to facilitate the cleaning of the impurities in the alcohol tank 3, the bottom surface of the alcohol tank 3 is in a funnel-shaped structure with a center sunken downward. A collecting pipe 4 is fixedly connected to the center of the bottom of the alcohol tank 3. A sleeve pipe 6 is arranged at the center of the pure water tank 2. The upper end and the lower end of the sleeve pipe 6 are fixedly connected to the top and the bottom of the pure water tank 2 respectively. The sleeve pipe 6 is slidingly arranged outside the collecting pipe 4. A block valve 5 is arranged inside the collecting pipe 4 below the sleeve pipe 6. After the impurities are deposited at the bottom of the alcohol tank 3, the impurities will gather to the center along the bottom surface of the alcohol tank 3 under the action of vibration when the alcohol tank 3 oscillates, and then slide to the inside of the collecting pipe 4. The impurities in the collecting pipe 4 will not easily float up and will squeeze out the alcohol in the collecting pipe 4. When the impurities are about to fill the collecting pipe 4, a waste barrel is placed below the collecting pipe 4 through an operation window arranged on one side of the workbench 1. The block valve 5 is opened, so that the impurities in the collecting pipe 4 fall into the waste barrel. The impurities in the alcohol tank 3 are quickly cleaned, the impurities mixed in the industrial alcohol are prevented from adhering to the surface of the semiconductor rotary joint, and the cleaning quality of the semiconductor rotary joint is improved.

[0025] In order to control the temperature of the pure water in the pure water tank 2, the temperature of the industrial alcohol is indirectly controlled through heat exchange between the pure water and the industrial alcohol, so as to ensure the safety of the industrial alcohol. The structure of the cooling assembly is detailed below with reference to Figure 2 and Figure 5 The cooling assembly comprises a water cooler 8 arranged outside the workbench 1. The suction pipe and the outlet pipe of the water cooler 8 extend through the workbench 1 and are in communication with the inside of the pure water tank 2. After the water cooler 8 is started, water at a set temperature is injected into the inside of the pure water tank 2 through the outlet pipe, and the water in the pure water tank 2 is pumped out through the suction pipe. By continuously replacing the water in the pure water tank 2, the temperature of the water in the pure water tank 2 is adjusted and controlled. The bottom surface and the side surface of the alcohol tank 3 are in extrusion fit with the inner wall of the pure water tank 2, so that heat exchange occurs between the alcohol tank 3 and the tank plate of the pure water tank 2, and then heat exchange occurs between the industrial alcohol in the alcohol tank 3 and the water in the pure water tank 2. Through heat exchange, the temperature of the industrial alcohol and the pure water is kept consistent. By controlling the temperature of the water injected into the pure water tank 2 by the water cooler 8, the temperature of the industrial alcohol is indirectly controlled, so as to ensure the safety of the industrial alcohol.

[0026] When the water in the pure water tank 2 cannot be uniformly mixed with the original water body, the temperature of the water in the pure water tank 2 will be uneven, so that the temperature of the industrial alcohol cannot be kept uniform by heat exchange. In order to keep the temperature of the water in the pure water tank 2 uniform, the cooling assembly further comprises a plurality of pull ropes 9 fixedly connected to the inner wall of the pure water tank 2, the plurality of pull ropes 9 are arranged in a horizontal array along the inner wall of the pure water tank 2, one end of the pull rope 9 close to the sleeve 6 is fixedly connected with a floating ball 10, and the floating ball 10 and the pull rope 9 are located above the ultrasonic oscillator 7. When the ultrasonic oscillator 7 starts to make the water in the pure water tank 2 vibrate at high frequency, the pull rope 9 is shaken irregularly by the water, so that the floating ball 10 on the pull rope 9 impacts the water irregularly, further accelerating the flow of the water, uniformly mixing the cold and hot water in the pure water tank 2, keeping the temperature of the water uniform, and then keeping the temperature of the industrial alcohol uniform, eliminating the safety hazard caused by the local high temperature of the industrial alcohol.

[0027] The industrial alcohol will have enhanced volatility after being heated. In order to avoid the industrial alcohol being inhaled by the operator into the air, which will harm the health of the operator, the workbench 1 is fixedly connected with a protective cover 11 on the top. An opening is formed in one side of the protective cover 11, door plates are symmetrically arranged on the inner wall of the opening, an exhaust pipeline 12 is fixedly connected to the side of the protective cover 11 away from the door plates, one end of the exhaust pipeline 12 communicates with the inside of the workbench 1, and the other end of the exhaust pipeline 12 extends to the outside of the workbench 1. The pure water tank 2 and the alcohol tank 3 are arranged inside the protective cover 11 on the top. When the semiconductor rotary joint is soaked in the industrial alcohol for cleaning, the door plates are in a closed state, the door plates in the closed state block the opening of the protective cover 11, so that the gas generated by the volatilization of the industrial alcohol is blocked in the inside of the protective cover 11 and is discharged to the outside through the exhaust pipeline 12, thereby reducing the possibility of the operator inhaling the volatilized industrial alcohol and protecting the health of the operator.

[0028] In summary, the working principle of the present scheme is as follows: the semiconductor rotary joint is placed in the inside of the alcohol tank 3 through the opening of the protective cover 11, and after the semiconductor rotary joint is soaked in the industrial alcohol, the ultrasonic oscillator 7 is started to make the water in the pure water tank 2 vibrate at high frequency, which indirectly makes the industrial alcohol in the alcohol tank 3 vibrate to clean the semiconductor rotary joint. When the alcohol tank 3 vibrates, the impurities deposited on the bottom surface of the alcohol tank 3 will slide to the inside of the collection pipe 4. When the impurities are about to fill the collection pipe 4, the waste bucket is placed below the collection pipe 4 through the operation window on one side of the workbench 1, the blocking valve 5 is opened, and the impurities in the collection pipe 4 fall into the inside of the waste bucket, so that the impurities in the alcohol tank 3 are quickly cleaned, the industrial alcohol is not mixed with a large amount of impurities, and the cleaning quality of the semiconductor rotary joint is reduced.

[0029] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only preferred examples of the present application and are not intended to limit the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A machine for automatic cleaning of alcohol in the semiconductor industry, comprising a worktable (1), characterized in that: The top of the workbench (1) is fixedly connected with a pure water tank (2), the inner wall of the pure water tank (2) is provided with an alcohol tank (3), the inner bottom surface of the alcohol tank (3) is a funnel-shaped structure with a center sunken, the bottom of the center of the alcohol tank (3) is fixedly connected with a collecting pipe (4), the center of the inside of the pure water tank (2) is provided with a sleeve pipe (6), the upper end and the lower end of the sleeve pipe (6) are fixedly connected with the top and the bottom of the pure water tank (2) respectively, the sleeve pipe (6) is slidingly sleeved on the outside of the collecting pipe (4), the inside of the collecting pipe (4) is provided with a blocking valve (5) below the sleeve pipe (6), the inside of the pure water tank (2) is provided with an ultrasonic oscillator (7), and the pure water tank (2) is provided with a cooling assembly.

2. The automatic cleaning machine for alcohol in the semiconductor industry according to claim 1, wherein: The cooling assembly comprises a water cooler (8) arranged outside the workbench (1), and the water suction pipe and the water outlet pipe of the water cooler (8) extend through the workbench (1) and are communicated with the inside of the pure water tank (2).

3. The automatic cleaning machine for alcohol in the semiconductor industry according to claim 1, wherein: The cooling assembly further comprises a plurality of pull ropes (9) fixedly connected to the inner wall of the pure water tank (2), the plurality of pull ropes (9) are arranged in a horizontal array along the inner wall of the pure water tank (2), one end of the pull rope (9) close to the sleeve pipe (6) is fixedly connected with a float ball (10), and the float ball (10) and the pull rope (9) are both located above the ultrasonic oscillator (7).

4. The automatic cleaning machine for alcohol in the semiconductor industry according to claim 1, wherein: The top of the workbench (1) is fixedly connected with a protective cover (11), one side of the protective cover (11) is provided with an opening, the inner wall of the opening is symmetrically provided with a door plate, the side of the protective cover (11) away from the door plate is fixedly connected with an exhaust pipe (12), one end of the exhaust pipe (12) is communicated with the inside of the workbench (1), the other end of the exhaust pipe (12) extends to the outside of the workbench (1), and the top of the pure water tank (2) and the alcohol tank (3) is arranged in the inside of the protective cover (11).

5. The automatic cleaning machine for alcohol in the semiconductor industry according to claim 1, wherein: The bottom surface and the side surface of the alcohol tank (3) are extruded with the inner wall of the pure water tank (2), and the side of the workbench (1) is provided with an operation window.

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