Graphite boat bearing device

Abstract

The utility model relates to the field of solar cell production, in particular to a graphite boat bearing device which comprises a furnace door fixing block 1, a paddle tail fixing block 2, a furnace door supporting rod 3 and a ceramic paddle 4, the ceramic paddle 4 is fixed on the furnace door supporting rod 3, the furnace door fixing block 1 is fixed on the furnace door supporting rod 3, the paddle tail fixing block 2 is fixed on the ceramic paddle 4, and the furnace door fixing block 1 is fixed on the furnace door supporting rod 3. And two ends of the graphite boat are respectively positioned on the furnace door fixing block 1 and the rotor tail fixing block 2. By changing the position of the furnace door fixing block, part of the weight of the graphite boat is distributed to the furnace door supporting rod, and therefore the service life of the ceramic rod is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of solar cell production, in particular to a graphite boat bearing device. Background Art

[0002] In the production of crystalline silicon cells, equipment upgrades represent process upgrades, often revolutionary. During equipment upgrades, replacing various spare parts can also improve product yields or extend equipment life.

[0003] Plasma-enhanced chemical vapor deposition (PECVD) can deposit a variety of dielectric films, including silicon nitride, silicon oxynitride, and amorphous silicon. During the deposition process, a graphite boat is used as a carrier, which is fed into the furnace tube by a ceramic paddle for reaction. In existing equipment, the ceramic paddle acts as a load-bearing device throughout the entire graphite boat reaction process, causing the ceramic paddle to bear the weight continuously. This can easily cause fractures at the junction of the ceramic paddle and the metal support rods of the furnace door, leading to significant production accidents and economic losses. Utility Model Content

[0004] The technical problem to be solved by the present invention is: how to reduce the continuous load of the ceramic paddle and reduce or avoid the fracture at the junction between the ceramic paddle and the metal support rod of the furnace door.

[0005] The technical solution adopted in this utility model is:

[0006] A graphite boat load-bearing device includes a furnace door fixing block 1, a paddle tail fixing block 2, a furnace door support rod 3, and a ceramic paddle 4. The ceramic paddle 4 is fixed on the furnace door support rod 3, the furnace door fixing block 1 is fixed on the furnace door support rod 3, and the paddle tail fixing block 2 is fixed on the ceramic paddle 4. The two ends of the graphite boat are respectively located on the furnace door fixing block 1 and the paddle tail fixing block 2.

[0007] The furnace door fixing block 1 includes a furnace door fixing block clamp 13, a furnace door fixing block baffle 12, and a furnace door fixing block support plate 11. The furnace door fixing block clamp 13 is a clamp connected to the furnace door support rod 3 through a detachable connection. The furnace door fixing block support plate 11 is a parallel plate fixed on the furnace door fixing block clamp 13. The lower edge of the furnace door fixing block clamp 13 does not contact the ceramic paddle 4. The furnace door fixing block baffle 12 is an inclined plate.

[0008] The upper part of the furnace door fixing block clamp 13 is two parallel long strips, and the lower part of the furnace door fixing block clamp 13 is a concave structure with two through holes. The diameter of the through holes is the same as the diameter of the furnace door support rod 3. During use, two adjacent furnace door support rods 3 are inserted into the two through holes.

[0009] The two through holes on the furnace door fixing block clamp 13 are a furnace door fixing block clamp right hole 131 and a furnace door fixing block clamp left hole 132, the diameters of the furnace door fixing block clamp right hole 131 and the furnace door fixing block clamp left hole 132 are 7-10 cm, and the spacing between the furnace door fixing block clamp left hole 132 and the furnace door fixing block clamp right hole 131 is 15-30 cm; the thickness of the furnace door fixing block support plate 11 is 1-5 cm.

[0010] The stern fixed block 2 comprises a stern fixed block clamp 23, a stern fixed block baffle 22 and a stern fixed block support plate 21, the stern fixed block clamp 23 is a clamp connected with the ceramic paddle 4 through a detachable connection mode, the stern fixed block support plate 21 is a parallel plate fixed on the stern fixed block clamp 23, and the stern fixed block baffle 22 is an inclined plate.

[0011] The lower part of the stern fixed block clamp 23 is a concave structure with two through holes, the diameters of the two through holes are the same as the diameter of the ceramic paddle 4, and in the use process, two adjacent ceramic paddles 4 are inserted into the two through holes.

[0012] The two through holes of the stern fixed block clamp 23 are a stern fixed block clamp right hole 231 and a stern fixed block clamp left hole 232, the diameters of the stern fixed block clamp right hole 231 and the stern fixed block clamp left hole 232 are 5-8 cm, and the spacing between the stern fixed block clamp left hole 232 and the stern fixed block clamp right hole 231 is 15-30 cm; the thickness of the furnace door fixing block support plate 21 is 3-5 cm.

[0013] Finally, it needs to be further explained that the upper edge of the furnace door fixing block support plate 11 is on the same horizontal line as the upper edge of the stern fixed block support plate 21 and is parallel to the ceramic paddle 4.

[0014] The beneficial effects of the utility model are as follows: by changing the position of the furnace door fixing block, the part of the weight of the graphite boat is distributed to the furnace door support rod, so that the service life of the ceramic rod is improved, and the beneficial effects are as follows:

[0015] 1. The probability of ceramic rod fracture is reduced, and the economic damage of a single line per year is reduced by 100-200 thousand yuan.

[0016] 2. The equipment downtime is reduced, and the operation rate of the equipment is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the structure of the furnace door fixing block;

[0019] Figure 3 It is a schematic diagram of the lower part of the furnace door fixing block clamp.

[0020] Figure 4 Figure 1 is a schematic diagram of the paddle tail fixed block structure;

[0021] Figure 5 Figure 2 is a schematic diagram of the lower part of the paddle tail fixed block clamp;

[0022] Figure 6 Figure 3 is a schematic diagram of the ceramic paddle (4) support in the prior art;

[0023] In the figure: 1 - furnace door fixed block, 2 - paddle tail fixed block, 3 - furnace door support rod, 4 - ceramic paddle, 11 - furnace door fixed block support plate, 12 - furnace door fixed block baffle, 13 - furnace door fixed block clamp, 131 - right hole of furnace door fixed block clamp, 132 - left hole of furnace door fixed block clamp, 21 - paddle tail fixed block support plate, 22 - paddle tail fixed block baffle, 23 - paddle tail fixed block clamp, 231 - right hole of paddle tail fixed block clamp, 232 - left hole of paddle tail fixed block clamp. DETAILED DESCRIPTION

[0024] As shown in Figures 1-6 the utility model discloses on the improvement of prior graphite boat bearing device, a graphite boat bearing device, including furnace door fixed block 1, paddle tail fixed block 2, furnace door support rod 3, ceramic paddle 4, the ceramic paddle 4 is fixed on furnace door support rod 3, furnace door fixed block 1 is fixed on furnace door support rod 3, paddle tail fixed block 2 is fixed on ceramic paddle 4, and both ends of graphite boat are respectively on furnace door fixed block 1 and paddle tail fixed block 2.

[0025] By changing the position of furnace door fixed block, the part of the weight of graphite boat is distributed to furnace door support rod, thereby improve the service life of ceramic rod.

[0026] Furnace door fixed block 1 includes furnace door fixed block clamp 13, furnace door fixed block baffle 12, furnace door fixed block support plate 11, the furnace door fixed block clamp 13 is the clamp that is connected together with furnace door support rod 3 through detachable connection mode, the furnace door fixed block support plate 11 is a parallel plate fixed on furnace door fixed block clamp 13, the lower edge of furnace door fixed block clamp 13 is not contacted with ceramic paddle 4, and the furnace door fixed block baffle 12 is an inclined plate.

[0027] The upper part of furnace door fixed block clamp 13 is two parallel long strip plates, the lower part of furnace door fixed block clamp 13 is the concave structure with two through holes, the diameter of the through hole is same with the diameter of furnace door support rod 3, and in the use process, two adjacent furnace door support rods 3 are inserted into the two through holes.

[0028] The two through holes on the furnace door fixing block clamp 13 are furnace door fixing block clamp right hole 131 and furnace door fixing block clamp left hole 132, the diameters of the furnace door fixing block clamp right hole 131 and the furnace door fixing block clamp left hole 132 are both 7-10 cm, and the distance between the furnace door fixing block clamp left hole 132 and the furnace door fixing block clamp right hole 131 is 15-30 cm; the thickness of the furnace door fixing block support plate 11 is 1-5 cm.

[0029] The diameters of the furnace door fixing block clamp right hole 131 and the furnace door fixing block clamp left hole 132 are determined according to the actual outer diameter of the furnace door support rod (3), and the smaller the diameters of the furnace door fixing block clamp right hole 131 and the furnace door fixing block clamp left hole 132, the better, as long as the furnace door support rod (3) can be inserted into the holes.

[0030] In one embodiment, the diameters of the furnace door fixing block clamp right hole 131 and the furnace door fixing block clamp left hole 132 are both 8 cm, and the distance between the furnace door fixing block clamp left hole 132 and the furnace door fixing block clamp right hole 131 is 15 cm; the thickness of the furnace door fixing block support plate 11 is 1.5 cm.

[0031] The stern fixed block 2 includes a stern fixed block clamp 23, a stern fixed block baffle 22, and a stern fixed block support plate 21. The stern fixed block clamp 23 is a clamp connected to the ceramic paddle 4 through a detachable connection. The stern fixed block support plate 21 is a parallel plate fixed to the stern fixed block clamp 23. The stern fixed block baffle 22 is an inclined plate.

[0032] The lower part of the stern fixed block clamp 23 is a concave structure with two through holes. The diameters of the through holes are the same as the diameter of the ceramic paddle 4. In use, two adjacent ceramic paddles 4 are inserted into the two through holes.

[0033] The two through holes of the stern fixed block clamp 23 are stern fixed block clamp right hole 231 and stern fixed block clamp left hole 232. The diameters of the stern fixed block clamp right hole 231 and the stern fixed block clamp left hole 232 are 5-8 cm, and the distance between the stern fixed block clamp left hole 232 and the stern fixed block clamp right hole 231 is 15-30 cm. The thickness of the stern fixed block support plate 21 is 3-5 cm.

[0034] The diameters of the stern fixed block clamp right hole 231 and the stern fixed block clamp left hole 232 are determined according to the outer diameter of the ceramic paddle 4. The smaller the diameters of the stern fixed block clamp right hole 231 and the stern fixed block clamp left hole 232, the better, as long as the stern fixed block clamp right hole 231 and the stern fixed block clamp left hole 232 can pass through.

[0035] In one embodiment, the right hole 231 of the stern fixed block clamp and the left hole 232 of the stern fixed block clamp are 5 cm in diameter, and the distance between the left hole 232 of the furnace door fixed block clamp and the right hole 231 of the furnace door fixed block clamp is 15 cm; the thickness of the furnace door fixed block support plate 21 is 3 cm.

[0036] Finally, the lower edge of the furnace door fixed block support plate 11 is 1.5 cm away from the ceramic paddle 4. The upper edge of the furnace door fixed block support plate 11 and the upper edge of the stern fixed block support plate 21 are on the same horizontal line parallel to the ceramic paddle 4.

Claims

1. A graphite boat load bearing device, characterized by: It includes furnace door fixed block (1), paddle tail fixed block (2), furnace door support rod (3), ceramic paddle (4), the ceramic paddle (4) is fixed on furnace door support rod (3), the furnace door fixed block (1) is fixed on furnace door support rod (3), the paddle tail fixed block (2) is fixed on ceramic paddle (4), the both ends of graphite boat are respectively on furnace door fixed block (1) and paddle tail fixed block (2).

2. The graphite boat supporting device according to claim 1, characterized by: Furnace door fixed block (1) includes furnace door fixed block clamp (13), furnace door fixed block baffle (12), furnace door fixed block support plate (11), the furnace door fixed block clamp (13) is the clamp that is connected together with furnace door support rod (3) through detachable connection mode, the furnace door fixed block support plate (11) is a parallel plate fixed on furnace door fixed block clamp (13), the lower edge of furnace door fixed block clamp (13) is not contacted with ceramic paddle (4), the furnace door fixed block baffle (12) is an inclined plate.

3. The graphite boat supporting device according to claim 2, characterized by: The upper part of the furnace door fixed block clamp (13) is two parallel long strip plates, the lower part of the furnace door fixed block clamp (13) is a concave structure with two through holes, the diameter of the through hole is same with the diameter of furnace door support rod (3), in the use process, two adjacent furnace door support rods (3) are inserted into two through holes.

4. The graphite boat supporting device according to claim 1, characterized by: The paddle tail fixed block (2) includes paddle tail fixed block clamp (23), paddle tail fixed block baffle (22), paddle tail fixed block support plate (21), the paddle tail fixed block clamp (23) is the clamp that is connected together with ceramic paddle (4) through detachable connection mode, the paddle tail fixed block support plate (21) is a parallel plate fixed on paddle tail fixed block clamp (23), the paddle tail fixed block baffle (22) is an inclined plate.

5. The graphite boat supporting device according to claim 4, wherein: The lower part of the paddle tail fixed block clamp (23) is a concave structure with two through holes, the diameter of the through hole is same with the diameter of ceramic paddle (4), in the use process, two adjacent ceramic paddles (4) are inserted into two through holes.

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