Coating equipment

Abstract

The utility model discloses coating equipment, and relates to the technical field of coating. The coating equipment comprises a shell, an electrode assembly and a grounding assembly. The shell comprises a cavity, and a mounting part is arranged on the inner wall of the cavity; the electrode assembly is connected in the shell and comprises a first electrode plate for bearing a workpiece to be coated; the grounding assembly is arranged in the cavity, and the grounding assembly is detachably connected with the shell and the first electrode plate so that the first electrode plate can be electrically connected with the shell. By applying the film coating equipment disclosed by the invention, the uniformity of film coating can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to, but is not limited to, the technical field of coating, and particularly to a coating equipment. BACKGROUND

[0002] In the coating equipment, a parallel plate electrode plasma discharge structure is usually adopted. The parallel plate electrode is usually divided into an upper electrode plate and a lower electrode plate. A substrate to be coated is placed on the lower electrode plate. Process gas enters a process chamber through a gas inlet of the process chamber, forms a plasma zone between the upper electrode plate and the lower electrode plate, and forms a coating on the substrate through reaction.

[0003] In the related art, the radio frequency return path difference between the lower electrode plate and the upper electrode plate affects the uniformity of the coating. CONTENT OF THE UTILITY MODEL

[0004] The coating equipment provided by the present application can improve the uniformity of the coating.

[0005] The present application provides a coating equipment, which comprises a housing, an electrode assembly and a grounding assembly. The housing comprises a chamber, and an installation portion is arranged on the inner wall of the chamber; the electrode assembly is connected in the housing, and the electrode assembly comprises a first electrode plate for carrying a workpiece to be coated; the grounding assembly is arranged in the chamber, and the grounding assembly is detachably connected to the installation portion and the first electrode plate respectively to electrically connect the first electrode plate and the housing.

[0006] The coating equipment provided by the present application can communicate between the first electrode plate and the housing through the grounding assembly, so that the radio frequency current flows from the first electrode plate to the housing, thereby forming a current path in the chamber, forming a stable electric field around the first electrode plate in the chamber, and improving the uniformity of the coating.

[0007] In a possible implementation manner of the present application, at least two grounding assemblies are arranged on each side edge of the first electrode plate, and the at least two grounding assemblies are arranged at equal intervals along the corresponding side edge.

[0008] Here, the first electrode plate of different shapes can be adapted, the electric field caused by the shape of the first electrode plate is uniformly improved, and the uniformity of the coating is improved.

[0009] In a possible implementation manner of the present application, the first electrode plate comprises a first side edge and a second side edge, the size of the first side edge is greater than or equal to the size of the second side edge, and the interval of the grounding assemblies on the first side edge is greater than or equal to the interval of the grounding assemblies on the second side edge.

[0010] Here, the influence of the plasma region between the first electrode plate and the second electrode plate on the grounding assemblies can be reduced, and the formation of the coating on the grounding assemblies can be reduced.

[0011] In a possible implementation of the present application, the electrode assembly further comprises a second electrode plate for connecting with the radio frequency source, the second electrode plate is arranged opposite to the first electrode plate, and the grounding assembly is connected to the side of the first electrode plate away from the second electrode plate.

[0012] Here, the influence of the plasma region between the first electrode plate and the second electrode plate on the grounding assembly can be reduced, and the case of forming a plated film on the grounding assembly can be reduced.

[0013] In a possible implementation of the present application, the first electrode plate comprises a body part and a detachable part arranged opposite to the mounting part, the detachable part is detachably connected to the body part, and the grounding assembly is connected to the position of the first electrode plate corresponding to the detachable part.

[0014] Here, the detachable part is detached from the first electrode plate, and the grounding assembly can be conveniently disassembled and assembled.

[0015] In a possible implementation of the present application, the first electrode plate comprises a dismounting opening, the dismounting opening penetrates the first electrode plate in a direction perpendicular to the electrode plate and is located at the edge of the first electrode plate, and the detachable part is detachably connected in the dismounting opening.

[0016] Here, by detaching the detachable part at the position of the grounding assembly corresponding to the dismounting opening, only the faulty grounding assembly can be repaired and replaced, and the operation is facilitated.

[0017] In a possible implementation of the present application, the material conveying member is used for conveying the workpiece to be plated in the chamber; wherein the material conveying member is disassembled and assembled along the direction parallel to the first electrode plate, and the dismounting opening is arranged opposite to the material conveying member.

[0018] Here, the collision between the material conveying member and the first electrode plate is reduced, and the material conveying member can be disassembled and assembled without removing the first electrode plate, and the operation is simple.

[0019] In a possible implementation of the present application, the plating device further comprises a supporting assembly, and the housing further comprises a mounting through hole, and the supporting assembly passes through the mounting through hole to connect the first electrode plate.

[0020] Here, the space occupied by the supporting assembly in the cavity can be reduced, and the complexity of the structure in the chamber can be reduced.

[0021] In a possible implementation of the present application, the plating device further comprises a pipeline, the pipeline is connected to the first electrode plate, and the pipeline passes through the mounting through hole to extend to the outside of the housing.

[0022] Here, the number of holes in the housing can be reduced, the structure is simple, and the cost is saved.

[0023] In a possible implementation of the present application, the coating equipment further comprises a cooling assembly connected to the first electrode plate to absorb and carry away part of the heat of the first electrode plate.

[0024] Here, the time for waiting for the first electrode plate to cool down is reduced, and the efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 A perspective view of the coating equipment provided by the embodiment of the present application is provided;

[0026] Figure 2 A front view of the coating equipment provided by the embodiment of the present application is provided;

[0027] Figure 3 A perspective view of the coating equipment provided by the embodiment of the present application is provided; Figure 2 A sectional view in the A-A perspective of the coating equipment provided by the embodiment of the present application is provided;

[0028] Figure 4 A distribution structure schematic diagram of the electrode assembly in the coating equipment provided by the embodiment of the present application is provided;

[0029] Figure 5 A top view of the coating equipment provided by the embodiment of the present application is provided;

[0030] Figure 6 A perspective view of the coating equipment provided by the embodiment of the present application is provided; Figure 5 A sectional view in the B-B perspective of the coating equipment provided by the embodiment of the present application is provided;

[0031] Figure 7 A perspective view of the coating equipment provided by the embodiment of the present application is provided; Figure 5 A sectional view in the C-C perspective of the coating equipment provided by the embodiment of the present application is provided;

[0032] Figure 8 A perspective view of the coating equipment provided by the embodiment of the present application is provided; Figure 6 A local enlarged view at D of the coating equipment provided by the embodiment of the present application is provided;

[0033] Figure 9 A structure schematic diagram of the grounding assembly in the coating equipment provided by the embodiment of the present application is provided;

[0034] Figure 10 A partial structure schematic diagram provided by the embodiment of the present application is provided;

[0035] Figure 11 A perspective view of the coating equipment provided by the embodiment of the present application is provided; Figure 10 A local enlarged view at E of the coating equipment provided by the embodiment of the present application is provided;

[0036] Figure 12 A structure schematic diagram of the support assembly and the sliding assembly of the coating equipment provided by the embodiment of the present application is provided.

[0037] Figure 13 A local structure schematic diagram of the coating equipment provided by the embodiment of the present application is provided;

[0038] Figure 14 A partial structural schematic view of a sliding assembly in a coating equipment provided by the embodiment of the present application is shown in the figure;

[0039] Figure 15 A structural schematic view of a first electrode plate and a sliding assembly in a coating equipment provided by the embodiment of the present application is shown in the figure;

[0040] Figure 16 A structural schematic view of a first electrode plate and a heating assembly in a coating equipment provided by the embodiment of the present application is shown in the figure.

[0041] Reference signs:

[0042] 1 - housing; 11 - chamber; 12 - mounting through hole; 13 - material conveying hole; 14 - mounting portion; 2 - electrode assembly; 21 - first electrode plate; 211 - heating area; 212 - body portion; 213 - detachable portion; 214 - dismounting opening; 22 - second electrode plate; 3 - support assembly; 31 - support cylinder; 32 - flexible sleeve; 33 - sealing member; 4 - sliding assembly; 41 - guide member; 411 - limiting surface; 42 - moving member; 5 - pipeline; 6 - heating assembly; 61 - heating member; 62 - temperature measuring device; 7 - grounding assembly; 71 - connecting portion; 72 - bent portion; 8 - material conveying member; 81 - roller; 82 - magnetic fluid; 9 - lifting assembly; 91 - bracket; 911 - fixed bracket; 912 - moving bracket; 9121 - extension portion; 9122 - guide through hole; 92 - guide assembly; 921 - guide rod; 93 - driving device; X - first direction; Y - second direction; Z - empty area. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the specific technical solutions of the present application will be further described in detail below with reference to the drawings in the embodiments of the present application. The following embodiments are used to illustrate the present application, but not to limit the scope of the present application.

[0044] In the embodiments of the present application, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0045] In addition, in the embodiments of the present application, the orientation terms such as "upper", "lower", "left" and "right" are defined with respect to the orientation of the components shown in the drawings, and it should be understood that these directional terms are relative concepts, which are used for relative description and clarification, and they can be changed accordingly according to the change of the orientation of the components placed in the drawings.

[0046] In the embodiments of the present application, unless specifically defined and limited otherwise, the term "connection" should be interpreted broadly, for example, "connection" can be fixed connection, or detachable connection, or integral; can be directly connected, or indirectly connected through intermediate medium.

[0047] In the embodiments of the present application, the terms "comprising", "containing" or any other variant thereof are intended to cover a non-exclusive inclusion, so that a process, method, article or apparatus that comprises a list of elements not only includes those elements, but also includes other elements not expressly listed or inherent to such process, method, article or apparatus. Without more limitations, the element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising the element.

[0048] In the embodiments of the present application, the words "exemplary" or "for example" are used to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "for example" should not be construed as being preferred or advantageous over other embodiments or designs. Rather, the exemplary or for example embodiments are intended to convey concepts in a concrete manner.

[0049] Plasma Enhanced Chemical Vapour Deposition (PECVD) systems commonly employ a pair of parallel plate electrodes to generate plasma and provide thin film deposition or etching of a surface. The two electrode plates are respectively a positive electrode grounded and an excitation electrode (negative electrode) used to excite plasma. The excitation electrode is usually connected to a power supply providing plasma excitation power through a Radio Frequency (RF) 13.56 Mega Hertz (MHz) and Very High Frequency (VHF) 40 MHz or 60 MHz impedance matching device.

[0050] The PECVD device mainly includes a process chamber, an upper electrode, a Radio Frequency Power Supply (RF) power source, a lower electrode and a vacuum pump. The upper electrode and the lower electrode are located in the process chamber, the upper electrode is connected to the RF power source, the lower electrode plate carries a workpiece to be plated, process gas enters the process chamber through a gas inlet of the process chamber, and the vacuum pump is used to extract gas in the process chamber to maintain the gas pressure of the process chamber.

[0051] In the process of depositing amorphous silicon film or microcrystalline silicon film by PECVD, a workpiece substrate is placed on a lower electrode, reaction gas such as SiH4 (silane) and H2 (hydrogen) is introduced into a process chamber, and a radio frequency signal is introduced into an upper electrode by a power supply to generate glow discharge and plasma, so as to form a plasma region between the upper electrode and the lower electrode. Electrons in the plasma region react with the reaction gas (such as SiH4) to generate active radicals, which diffuse to the workpiece substrate, adsorb on the workpiece substrate, and form an amorphous silicon or microcrystalline silicon film.

[0052] In the related art, the radio frequency return path difference between the lower electrode plate and the upper electrode plate affects the uniformity of the film coating.

[0053] With reference to Figure 1 , Figure 2 , Figure 3 and Figure 5 , the film coating equipment provided by the embodiments of the present application includes a housing 1, an electrode assembly 2, and a grounding assembly 7. The housing 1 includes a chamber 11, and the inner wall of the chamber 11 is provided with a mounting portion 14. The electrode assembly 2 is connected in the housing 1, and the electrode assembly 2 includes a first electrode plate 21 for carrying a workpiece to be coated. The grounding assembly 7 is arranged in the chamber 11, and the grounding assembly 7 is detachably connected to the mounting portion 14 and the first electrode plate 21 respectively, so as to electrically connect the first electrode plate 21 and the housing 1.

[0054] In the embodiments of the present application, the housing 1 includes the chamber 11, which is a space inside the housing 1. The electrode plate and other devices of the film coating equipment can be arranged in the chamber 11. The chamber 11 can accommodate reaction gas, substrates to be coated, and perform film coating reaction.

[0055] In the embodiments of the present application, a whole plate type electrode plate can be used to improve the space utilization rate in the chamber 11, facilitate the placement of more substrates on the electrode plate, and improve the film coating efficiency. The material of the electrode plate can be selected from aluminum, aluminum alloy, stainless steel, etc.

[0056] In the embodiments of the present application, the mounting portion 14 can be a mounting hole, and the grounding assembly 7 is connected in the mounting portion 14 by a fastener such as a screw. The mounting portion 14 can also be a bayonet, and the grounding assembly 7 is provided with a structure corresponding to the bayonet, and the grounding assembly 7 is clamped in the mounting portion 14 by clamping.

[0057] In the embodiments of the present application, the grounding assembly 7 is detachably connected to the first electrode plate 21, and the connection mode can be clamping, bolt connection, etc. The grounding assembly 7 can be a metal component such as a metal wire, a metal braid, or a metal sheet, which can communicate between the first electrode plate 21 and the housing 1. The material can be selected from pure aluminum, aluminum alloy, or copper alloy, etc.

[0058] With reference toFigure 9 In the embodiment of the present application, the grounding assembly 7 includes a connecting portion 71 and a bending portion 72. The connecting portion 71 is used to connect the grounding assembly 7 to the shell 1 and the first electrode plate 21. The bending portion 72 is at least telescopic in the direction perpendicular to the electrode plate, so as to adapt to the movement of the first electrode plate 21 in the direction perpendicular to the electrode plate and adapt to the spacing between the first electrode plate 21 and the shell 1.

[0059] In the embodiment of the present application, in order to facilitate the maintenance of the components inside the chamber 11 and reduce the pollution of the components inside the chamber 11, in some embodiments, the inside of the chamber 11 is kept in an oil-free and water-free environment, and the metal components such as stainless steel can be provided with a protective plating layer.

[0060] The coating equipment in the embodiment of the present application can communicate between the first electrode plate 21 and the shell 1 through the grounding assembly 7, so as to facilitate the flow of radio frequency current from the first electrode plate 21 to the shell 1, so that the current in the chamber 11 forms a path, thereby forming a stable electric field around the first electrode plate 21 in the chamber 11, and further improving the uniformity of the coating.

[0061] Referring to Figure 5 and Figure 10 , in some possible embodiments of the present application, at least two grounding assemblies 7 are arranged on each side edge of the first electrode plate 21, and the at least two grounding assemblies 7 are arranged at equal intervals along the corresponding side edge.

[0062] In the embodiment of the present application, the number of grounding assemblies 7 can be adjusted according to the requirement of the first electrode plate 21 for uniform electric field. In the case of requiring higher coating precision and uniformity, the number of grounding assemblies 7 connected on each side edge can be appropriately increased, and vice versa, the number of grounding assemblies 7 can be reduced to reduce the cost.

[0063] In the embodiment of the present application, equal interval arrangement can be understood as arranging the grounding assemblies 7 on each side edge of the first electrode plate 21 at equal intervals.

[0064] The coating equipment in the embodiment of the present application is provided with at least two grounding assemblies 7 on each side edge of the first electrode plate 21, that is, the grounding assembly 7 is arranged on each side edge of the first electrode plate 21. The at least two grounding assemblies 7 are arranged at equal intervals along the corresponding side edge, which can optimize the distribution of the electric field of the first electrode plate 21, improve the equipotential requirement on the first electrode plate 21, and improve the uniformity and quality of the coating.

[0065] Referring to Figure 5 , Figure 10 , Figure 15 and Figure 16In some possible embodiments of the present application, the first electrode plate 21 comprises a first side and a second side, the size of the first side is greater than or equal to the size of the second side, and the interval of the grounding assembly 7 on the first side is greater than or equal to the interval of the grounding assembly 7 on the second side.

[0066] In the embodiments of the present application, the size of the first side is greater than or equal to the size of the second side. When the size of the first side is greater than the size of the second side, the area of the first side is more likely to have uneven electric field distribution. At this time, by reducing the interval of the grounding assembly 7 on the first side, that is, by arranging more grounding assemblies 7 on the first side, the charge distribution in the area of the first side can be more effectively balanced, the electric field distortion can be reduced, and the uniformity of the coating process in this area can be improved.

[0067] In the embodiments of the present application, when the first electrode plate 21 is rectangular, the length of the two long sides is greater than the length of the two short sides. It can be understood that the two long sides are the first side, and the two short sides are the second side. Therefore, the interval of the grounding assembly 7 arranged on the two long sides is greater than or equal to the interval of the grounding assembly 7 arranged on the two short sides, so as to balance the electric field distribution on the first electrode plate 21.

[0068] In the embodiments of the present application, when the first electrode plate 21 is square, the four sides of the first electrode plate 21 have the same length. It can be understood that the length of the first side is equal to the length of the second side. In this way, the interval of the grounding assembly 7 arranged on the first side and the second side can be the same, so as to balance the electric field distribution on the first electrode plate 21.

[0069] The coating equipment in the embodiments of the present application can adapt to first electrode plates 21 of different shapes by adjusting the interval of the grounding assembly 7 on the sides of different lengths, and can uniform the electric field unevenness caused by the shape of the first electrode plate 21, thereby improving the uniformity of the coating.

[0070] Reference Figure 4 In some possible embodiments of the present application, the electrode assembly 2 further comprises a second electrode plate 22 connected with a radio frequency source, the second electrode plate 22 is arranged opposite to the first electrode plate 21, and the grounding assembly 7 is connected to the side of the first electrode plate 21 away from the second electrode plate 22.

[0071] In the embodiments of the present application, the first electrode plate 21 and the second electrode plate 22 are usually arranged in parallel to form a uniform electric field space. In order to meet the needs of different coating processes, the interval between the first electrode plate 21 and the second electrode plate 22 can be adjustable.

[0072] In the embodiments of the present application, a suitable type of radio frequency source is selected according to the coating material and process requirements, such as a continuous wave radio frequency source or a pulse radio frequency source.

[0073] The coating equipment of the embodiment of the present application, the grounding assembly 7 is connected to the side of the first electrode plate 21 away from the second electrode plate 22, which can reduce the passage formed between the grounding assembly 7 and the second electrode plate 22, reduce the influence of the grounding assembly 7 on the second electrode plate 22, thereby improving the stability of the electric field. At the same time, it can also reduce the influence of the plasma region between the first electrode plate 21 and the second electrode plate 22 on the grounding assembly 7, and reduce the formation of coating on the grounding assembly 7.

[0074] With reference to Figure 5 , Figure 6 , Figure 7 , and Figure 8 In some possible embodiments of the present application, the first electrode plate 21 includes a body part 212 and a detachable part 213 arranged opposite the mounting part 14, the detachable part 213 is detachably connected to the body part 212, and the grounding assembly 7 is connected to the first electrode plate 21 at a position corresponding to the detachable part 213.

[0075] Since the grounding assembly 7 needs to connect the first electrode plate 21 and the inner wall of the shell 1, and the grounding assembly 7 is connected to the side of the first electrode plate 21 away from the second electrode plate 22. Therefore, it can be understood that the mounting part 14 is usually arranged on the inside of the bottom of the shell 1, at this time, along the direction from the top of the shell 1 to the bottom of the shell 1, the first electrode plate 21 will shield the mounting part 14, which is not convenient for disassembling the grounding assembly 7.

[0076] In the embodiment of the present application, the detachable part 213 is arranged opposite the mounting part 14, which can be understood as that the detachable part 213 and the mounting part 14 are arranged in at least two spatial directions. In order to expose the mounting part 14 when the detachable part 213 is detached from the first electrode plate 21, it is convenient for the operator to disassemble the grounding assembly 7.

[0077] In the embodiment of the present application, the detachable part 213 can be a ring-shaped integral structure arranged at the edge of the first electrode plate 21, or can be a structure independently arranged on each side edge of the first electrode plate 21, or can be multiple and arranged at positions corresponding to the mounting part 14 on the first electrode plate 21.

[0078] In the embodiment of the present application, the detachable part 213 can be used for the same function of the first electrode plate 21, for example, the detachable part 213 is made of conductive material or the same material as the electrode plate; the surface of the detachable part 213 is in the same plane as the surface of the first electrode plate 21 for carrying the workpiece to be coated, so that the detachable part 213 can be used to place the workpiece to be coated, increasing the area of the first electrode plate 21 for placing the workpiece to be coated.

[0079] In the embodiments of the present application, the detachable part 213 and the first electrode plate 21 can be detachably connected by bolt connection, corresponding bolt holes are arranged on the detachable part 213 and the first electrode plate 21 respectively, and the detachable part 213 and the first electrode plate 21 are fastened together by bolts and nuts; or the detachable part 213 and the first electrode plate 21 can be detachably connected by buckle connection, buckle structures are arranged on the detachable part 213 and the first electrode plate 21, and the connection and disconnection are realized by the buckling and releasing of the buckles.

[0080] In the embodiments of the present application, the ground assembly 7 is connected to the position of the first electrode plate 21 where the detachable part 213 is arranged, and the detachable part 213 is arranged at the corresponding position of the mounting part 14. In this way, the detachable part 213 can be easily disassembled from the first electrode plate 21 to facilitate the disassembly and assembly of the ground assembly 7. The detachable part 213 is connected to the body part 212, and the use of the first electrode plate 21 is not affected.

[0081] Referring to Figure 10 and Figure 11 In some possible embodiments of the present application, the first electrode plate 21 comprises a disassembly opening 214, the disassembly opening 214 penetrates the first electrode plate 21 in a direction perpendicular to the first electrode plate 21, and is located at the edge of the first electrode plate 21, and the detachable part 213 is detachably connected in the disassembly opening 214.

[0082] In the embodiments of the present application, the disassembly opening 214 can be one or multiple. Preferably, in order to maintain the ground assembly 7 which is damaged or has poor contact, the disassembly opening 214 in the embodiments of the present application is arranged as multiple, and each disassembly opening 214 corresponds to the position where the ground assembly 7 is connected to the first electrode plate 21.

[0083] In order to make the structure more compact and reduce the occupation of the space in the chamber 11, in the embodiments of the present application, the thickness of the detachable part 213 is smaller than the thickness of the first electrode plate 21, when the detachable part 213 is mounted into the disassembly opening 214, the first surface of the detachable part 213 and the surface of the first electrode plate 21 for carrying the workpiece to be plated are located on the same surface, and there is a height difference between the side surface of the detachable part 213 opposite to the first surface and the other side surface of the first electrode plate 21, so that a stepped structure is formed between the surface of the first electrode plate 21, the disassembly opening 214 and the detachable part 213. The ground assembly 7 can be connected to the surface of the disassembly opening 214, the detachable part 213 can shield the ground assembly 7 outside the plasma reaction area, or the structure between the ground assembly 7 and the first electrode plate 21 can be more compact, and the maintenance of the ground assembly 7 is also facilitated.

[0084] The coating equipment of the embodiment of the present application, if a certain grounding assembly 7 has a problem such as failure or poor contact, can be disassembled without affecting the structure of other grounding assemblies 7 and the detachable part 213, so that only the grounding assembly 7 that fails can be repaired and replaced, which is convenient to operate.

[0085] With reference to Figure 5 , Figure 9 and Figure 7 In some possible embodiments of the present application, the material conveying member 8 is used to convey the workpiece to be coated in the chamber 11; wherein the material conveying member 8 is detachably arranged along the direction parallel to the first electrode plate 21, and the dismounting opening 214 is arranged in position with the material conveying member 8.

[0086] In the embodiment of the present application, the material conveying member 8 can adopt the form of a roller 81, which rotates to drive the workpiece to be coated to enter and exit the chamber 11. The material conveying member 8 is arranged on the side walls on opposite sides of the housing 1, and the housing 1 is provided with a material conveying hole 13 along the direction parallel to the first electrode plate 21, and the material conveying member 8 is arranged in the material conveying hole 13, and the side for conveying materials is arranged in the chamber 11, and a magnetic fluid 82 can be arranged on the outside of the chamber 11 for rotary sealing.

[0087] Since the roller 81 and the detachable part 213 are arranged in position, when the roller 81 needs to be removed and replaced due to normal wear and tear, the detachable part 213 can be removed first, and the dismounting opening 214 provides space for the roller 81 to move into the chamber 11 when dismounting, reducing the collision between the roller 81 and the first electrode plate 21, and the roller 81 can be dismounted without removing the first electrode plate 21, which is simple to operate.

[0088] With reference to Figure 8 In some possible embodiments of the present application, a vacant area Z is formed between the first electrode plate 21 and the inner wall of the chamber 11, and only the grounding assembly 7 is arranged in the vacant area Z.

[0089] In the embodiment of the present application, the surface of the first electrode plate 21 on the side opposite to the side on which the workpiece to be coated is carried and the area between the inner wall of the chamber 11 is a vacant area Z, which can be understood as the area between the bottom surface of the first electrode plate 21 and the inner surface at the bottom of the housing 1, and only the grounding assembly 7 is arranged in this area.

[0090] The coating equipment of the embodiment of the present application, the first electrode plate 21 and the inner wall of the chamber 11 are provided with the grounding assembly 7, which can connect the first electrode plate 21 and the chamber 11 to the same potential, reduce unnecessary glow discharge between the first electrode plate 21 and the support assembly 3 or between the first electrode plate 21 and the chamber 11 due to potential difference, and improve the stability of the electric field between the first electrode plate 21 and the second electrode plate 22.

[0091] With reference to Figure 10 、 12 and Figure 13 In some possible embodiments of the present application, the coating equipment further comprises a support assembly 3 and a sliding assembly 4, and the housing 1 further comprises a mounting through hole 12; the support assembly 3 is arranged outside the housing 1, and the support assembly 3 passes through the mounting through hole 12 to connect the first electrode plate 21; the sliding assembly 4 is connected to the part of the support assembly 3 outside the housing 1, so as to guide the movement of the support assembly 3 in the case of deformation of the first electrode plate 21.

[0092] With reference to Figure 13 In the embodiments of the present application, the mounting through hole 12 is a part of the housing 1, which is used to communicate the chamber 11 and the outside of the housing 1. The mounting through hole 12 can be arranged on the side surface or the bottom surface of the housing 1, and the shape and size of the mounting through hole 12 can be adjusted according to requirements. For example, since the support assembly 3 passes through the mounting through hole 12 to connect the first electrode plate 21, the mounting through hole 12 can be arranged on the bottom surface of the housing 1, that is, the side of the housing 1 facing the ground.

[0093] In the embodiments of the present application, the support assembly 3 is used to provide support for the first electrode plate 21, and the support assembly 3 and the first electrode plate 21 can be connected by bolts, clamped or the like, so as to facilitate disassembly and installation of the first electrode plate 21 and the support assembly 3, and facilitate maintenance.

[0094] In the embodiments of the present application, the sliding assembly 4 is connected to the part of the support assembly 3 outside the housing 1, and the sliding assembly 4 can provide the support assembly 3 with guidance in at least one direction outside the housing 1. That is, the sliding assembly 4 can limit the movement of the support assembly 3 in the extension plane of the first electrode plate 21, and / or guide the movement of the support assembly 3 in the thickness direction of the first electrode plate 21, wherein the extension plane of the first electrode plate 21 is the plane corresponding to the stretching or contraction of the first electrode plate 21 in the thermal extension direction, and the thermal extension plane radiates in all directions with the centroid of the first electrode plate 21 as the reference. The sliding assembly 4 mainly solves the horizontal thermal extension of the first electrode plate 21.

[0095] The coating equipment of the embodiment of the present application, the shell 1 comprises a mounting through hole 12, the mounting through hole 12 can be connected with the cavity 11 outside the shell 1. The support assembly 3 can pass through the shell 1 from the mounting through hole 12 to enter the cavity 11 and be connected with the first electrode plate 21 in the cavity 11. In this way, the support assembly 3 can provide support for the first electrode plate 21, and the other part of the support assembly 3 is arranged outside the cavity 11 of the shell 1, so as to reduce the space occupied by the support assembly 3 in the cavity 11, thereby simplifying the structure in the cavity 11. When the first electrode plate 21 is deformed due to heating in the coating process, the part of the support assembly 3 located in the cavity 11 is connected with the first electrode plate 21, so that the support assembly 3 connected with the first electrode plate 21 will move with the deformation of the first electrode plate 21. Since the sliding assembly 4 is connected to the part of the support assembly 3 located outside the shell 1, that is, the part of the support assembly 3 located outside the cavity 11 is connected with the sliding assembly 4, the sliding assembly 4 connected with the support assembly 3 can guide the support assembly 3, limit the movement direction of the support assembly 3, and further limit the movement direction of the first electrode plate 21 when the first electrode plate 21 is deformed, thereby improving the flatness of the first electrode plate 21 after deformation. In addition, the sliding assembly 4 is arranged outside the cavity 11 and does not occupy the space inside the cavity 11, further reducing the complexity of the structure in the cavity 11.

[0096] In some possible embodiments of the present application, the coating equipment further comprises a cooling assembly connected to the first electrode plate 21 to absorb and take away part of the heat of the first electrode plate 21.

[0097] In the embodiment of the present application, the cooling assembly can be a liquid cooling system or other components that can be used for heat dissipation, such as heat sinks. For example, in the embodiment of the present application, the side of the first electrode plate 21 away from the second electrode plate 22 is embedded with a sealed pipe, and the sealed pipe can be used to contain cooling liquid or cooling gas (such as water, oil, compressed nitrogen, etc.). The number and arrangement spacing of the pipes can be adjusted according to the data of the heat dissipation demand of the first electrode plate 21. If the heat dissipation demand of the first electrode plate 21 is high, the number of pipes can be increased and the arrangement spacing of the pipes can be reduced; if the heat dissipation demand of the first electrode plate 21 is low, the number of pipes can be reduced and the arrangement spacing of the pipes can be increased.

[0098] In the embodiment of the present application, the liquid inlet and the liquid outlet of the pipe can be arranged from the cavity 11 to the support cylinder 31, and connected to the outside of the shell 1 through the support cylinder 31, so that the refrigerant liquid or gas flows into the cavity 11 from the outside of the cavity 11, and finally flows out of the cavity 11 with heat. The liquid inlet and the liquid outlet of the pipe are sealingly connected with the support cylinder 31 to improve the sealing of the cavity 11.

[0099] The coating equipment provided by the embodiments of the present application needs to wait for the first heating plate to cool down when the coating equipment process is completed or needs to be stopped for maintenance. At this time, cooling liquid or cooling gas can be introduced into the closed pipeline to facilitate the removal of the heat of the first electrode plate 21, reduce the time for waiting for the first electrode plate 21 to cool down, and improve the efficiency.

[0100] With reference to Figure 13 and Figure 14 In some possible embodiments of the present application, the sliding assembly 4 includes a guide 41 and a moving piece 42, the moving piece 42 is slidingly connected to the guide 41 along a first direction X, and the support assembly 3 is connected to the moving piece 42; wherein the first direction X meets the parallel condition with the extension plane of the first electrode plate 21, specifically, the first direction X is directed from the center of the first electrode plate 21 to the outer edge. It can be understood that the first direction X has multiple possible orientations.

[0101] In the embodiments of the present application, the guide 41 provides guidance for the movement of the moving piece 42. The guide 41 can be a guide rail or a component with a guide groove. For example, the guide 41 is a guide rail arranged along the first direction X, and the moving piece 42 can be a slider arranged on the guide rail.

[0102] In the embodiments of the present application, the moving piece 42 can be connected to the end of the support assembly 3 or the side of the support assembly 3. For example, one end of the support assembly 3 is connected to the first electrode plate 21, the other end is connected to the moving piece 42, and the moving piece 42 is arranged on the guide rail.

[0103] In the coating equipment provided by the embodiments of the present application, in the case that the first electrode plate 21 deforms along the extension plane, the first electrode plate 21 will exert a force in the corresponding direction on the support assembly 3. Since the other end of the support assembly 3 is connected to the moving piece 42 and the guide 41, the support assembly 3 can move along the guide rail under the force exerted by the first electrode plate 21, so that the support assembly 3 can adapt to the deformation of the first electrode plate 21 in the first direction X, reduce the restraint of the support assembly 3 on the first electrode plate 21, and effectively ensure the flatness of the first electrode plate 21 after warming up.

[0104] With reference to Figure 14 In some possible embodiments of the present application, the guide 41 is provided with a limiting surface 411, and the limiting surface 411 abuts against the moving piece 42 along a second direction Y. The second direction Y meets the vertical condition with the extension plane of the first electrode plate 21.

[0105] In the embodiments of the present application, the second direction Y meets the vertical condition with the extension plane of the first electrode plate 21. It can be understood that the second direction Y is perpendicular to the first electrode plate 21, or the second direction Y is the height direction of the first electrode plate 21.

[0106] In the embodiments of the present application, the limiting surface 411 can be a plane, a curved surface or an inclined surface with an included angle with the extension plane of the first electrode plate 21. For example, when the limiting surface 411 is a plane, the guide part 41 can include a T-shaped structure, and the moving part 42 can be provided with a T-shaped groove, the T-shaped structure on the guide part 41 can be embedded in the T-shaped groove of the moving part 42, and the surface between the T-shaped structure on the guide part 41 and the T-shaped groove abutting in the second direction Y can be understood as the limiting surface 411. In addition, the guide part 41 can also be provided with a T-shaped groove, and the moving part 42 can include a T-shaped structure.

[0107] In the embodiments of the present application, two electrode plates (such as the first electrode plate 21 and the second electrode plate 22) are arranged in the chamber 11 along the second direction Y, and the area between the first electrode plate 21 and the second electrode plate 22 is the area for coating. The change of the distance between the first electrode plate 21 and the second electrode plate 22 will affect the environment of the coating process, thereby affecting the coating effect.

[0108] The coating equipment in the embodiments of the present application can limit the movement of the moving part 42 relative to the guide part 41 in the second direction Y due to the abutting of the limiting surface 411 of the guide part 41 and the moving part 42 along the second direction Y. When the first electrode plate 21 deforms in the second direction Y (i.e. the height direction), the movement of the first electrode plate 21 in the second direction Y can be limited by the limiting surface 411, thereby reducing the change of the distance between the two first electrode plates 21 and improving the stability of the coating environment.

[0109] Referring to Figure 12 and Figure 15 In some possible embodiments of the present application, along the plane parallel to the first electrode plate 21, one end of the guide part 41 faces the center of the first electrode plate 21, and the other end of the guide part 41 faces the outer edge of the first electrode plate 21.

[0110] In the embodiments of the present application, when the first electrode plate 21 deforms due to temperature change (such as thermal expansion and contraction), the deformation of the edge part of the first electrode plate 21 is usually more obvious than that of the center part. For example, when the first electrode plate 21 is heated, the first electrode plate 21 will expand, and thus the first electrode plate 21 will expand in the direction from the center to the edge in the extension plane and the height direction; conversely, when the first electrode plate 21 cools down, the first electrode plate 21 will contract in the direction from the edge to the center.

[0111] The coating equipment in the embodiments of the present application, one end of the guide part 41 faces the center of the first electrode plate 21, and the other end of the guide part 41 faces the outer edge of the first electrode plate 21, which can make the guide part 41 better adapt to the deformation trend of the first electrode plate 21 from the center to the edge (or vice versa).

[0112] With reference to Figure 10 In some possible embodiments of the present application, the coating equipment further comprises a pipeline 5 connected to the first electrode plate 21, and the pipeline 5 extends to the outside of the shell 1 through the mounting hole 12.

[0113] In the embodiments of the present application, the first electrode plate 21 can be provided with a heating element 61, or a pipeline or a line (such as a cooling water pipe, a gas delivery pipe, etc.) connected with other components. There can be a movement gap between the surface of the mounting hole 12 and the outer surface of the support assembly 3, and the pipeline 5 can pass through the mounting hole 12 from the movement gap, and the pipeline 5 can also pass through the support assembly 3 in the mounting hole 12.

[0114] With reference to Figure 13 In the embodiments of the present application, the coating equipment further comprises a sealing member 33 arranged between the support cylinder 31 and the pipeline 5 to seal the support cylinder 31 and the pipeline 5, thereby increasing the sealing performance of the chamber 11.

[0115] Compared with the prior art in which a through hole for wiring is formed on the shell 1, since the first electrode plate 21 moves in the chamber 11 along the second direction Y during use, at this time, the line arranged on the first electrode plate 21 and the support assembly 3 supporting the first electrode plate 21 will generate a pulling force and a supporting force with different positions and opposite directions on the first electrode plate 21, which is easy to cause the first electrode plate 21 to overturn or deform. The coating equipment of the embodiments of the present application leads the pipeline 5 out of the mounting hole 12 where the support assembly 3 is arranged, which can reduce the number of holes formed on the shell 1, has a simple structure, and saves costs. At the same time, the number of stress points on the first electrode plate 21 can be reduced, and the stability of the first electrode plate 21 can be increased.

[0116] In some possible embodiments of the present application, the support assembly 3 comprises a support cylinder 31 connected to the first electrode plate 21 and the moving member 42, and the pipeline 5 is arranged in the support cylinder 31.

[0117] In the embodiments of the present application, one end of the support cylinder 31 is connected to the first electrode plate 21, and the other end is connected to the moving member 42, and the connection mode can adopt welding, bolt connection, etc. The support cylinder 31 is usually made of high-strength and corrosion-resistant materials, such as aluminum alloy, stainless steel, titanium alloy, etc.

[0118] The coating equipment of the embodiments of the present application provides protection for the pipeline 5 arranged in the support cylinder 31, avoiding damage to the pipeline 5 caused by external factors (such as impact, wear, etc.). At the same time, the layout of the pipeline 5 from the chamber 11 to the outside of the chamber 11 is optimized, and the space utilization of the coating equipment is optimized.

[0119] In some possible embodiments of the present application, the support assembly 3 further comprises a flexible sleeve 32, which is sleeved on the outer circumferential side of the support cylinder 31; one end of the flexible sleeve 32 is sealingly connected to the position of the housing 1 where the mounting through hole 12 is arranged, and the other end is sealingly connected to the support cylinder 31.

[0120] In the embodiments of the present application, the flexible sleeve 32 is used to sealingly connect the support cylinder 31 and the mounting through hole 12, and the position of the housing 1 where the mounting through hole 12 is arranged can also be understood as the surface of the housing 1 located at the edge of the mounting through hole 12, and the size and shape of the surface area can be adjusted according to the shape and size of the flexible sleeve 32.

[0121] In the embodiments of the present application, the cross section of the flexible sleeve 32 in the axial direction can be circular, elliptical, etc., but the projection of the flexible sleeve 32 in the axial direction completely covers the mounting through hole 12, so as to improve the sealing performance at the mounting through hole 12.

[0122] With reference to Figure 1 , Figure 3 , Figure 6 and Figure 7 , in the embodiments of the present application, the flexible sleeve 32 is sleeved on the outer circumferential side of the support cylinder 31, and the flexible sleeve 32 can at least be deformed in the first direction X and / or the second direction Y. For example, the flexible sleeve 32 can be stretched and contracted in the second direction Y, when the support assembly 3 supports the first electrode plate 21 to move in the second direction Y in the cavity 11, the part of the support assembly 3 moving to the inside of the housing 1 increases, the distance between the area where the support assembly 3 and the flexible sleeve 32 are connected and the area where the housing 1 and the flexible sleeve 32 are connected decreases, and the flexible sleeve 32 can be shortened in the second direction Y.

[0123] In the embodiments of the present application, the flexible sleeve 32 is sealingly connected to the housing 1 and the support cylinder 31 respectively, and the sealing connection can be flange connection, or sealing material such as a sealing ring is arranged in the connection area, or sealing material is added after welding. For example, flange structures are designed on the flexible sleeve 32 and the support cylinder 31 respectively, the flexible sleeve 32 is fixed on the support cylinder 31 through flange connection, and sealing material such as a sealing gasket or a sealing rubber ring is added at the connection position, so as to improve the tightness and sealing performance of the connection.

[0124] In the embodiments of the present application, the flexible sleeve 32 is made of soft and durable material, such as thin-walled stainless steel, rubber, silica gel, etc. In the embodiments of the present application, the flexible sleeve 32 is a bellows.

[0125] In the coating equipment of the embodiments of the present application, the two ends of the flexible sleeve 32 are sealingly connected to the housing 1 and the support cylinder 31 respectively, the mounting through hole 12 on the housing 1 and the support cylinder 31 are sealingly connected, and the sealing performance of the inside of the cavity 11 is improved. At the same time, the flexible sleeve 32 can adapt to the displacement between the support cylinder 31 and the housing 1.

[0126] In some possible embodiments of the present application, the plurality of support assemblies 3 are evenly distributed on the first electrode plate 21, and each support assembly 3 is connected with a sliding assembly 4.

[0127] With reference to Figure 15 In the embodiments of the present application, the number of support assemblies 3 can be two, three, four, or the like. Preferably, the number of support assemblies 3 can be four, and the four support assemblies 3 are evenly distributed and connected to the first electrode plate 21 to provide stable support force for the first electrode plate 21.

[0128] In the embodiments of the present application, each support assembly 3 is connected with a sliding assembly 4. It can be understood that the number of sliding assemblies 4 corresponds to the number of support assemblies 3, that is, in the case of deformation of the first electrode plate 21, each support assembly 3 is limited in the movement direction by the sliding assembly 4.

[0129] In the coating equipment of the embodiments of the present application, since each support assembly 3 is connected to the first electrode plate 21, when the first electrode plate 21 deforms, each support assembly 3 will move with the deformation of the first electrode plate 21. At this time, the sliding assembly 4 can adapt to the movement of each support assembly 3 to improve the adaptability of the support assembly 3 to the deformation of the first electrode plate 21 and improve the stability of the first electrode plate 21 during deformation.

[0130] With reference to Figure 16 In some possible embodiments of the present application, the coating equipment further comprises a heating assembly 6, and the heating assembly 6 comprises at least two heating pieces 61. The at least two heating pieces 61 are distributed in different heating areas 211 of the first electrode plate 21 to heat the first electrode plate 21 respectively.

[0131] In the embodiments of the present application, the heating piece 61 can be a heating piece 61 connected to the first electrode plate 21 or a heating piece 61 embedded in the first electrode plate 21. For example, the first electrode plate 21 can be embedded with a resistance heating wire, and the resistance heating wire is connected to a power supply and can generate heat after being powered on.

[0132] In the embodiments of the present application, the number of heating pieces 61 is at least two, which can be three, four, or the like. The number of heating pieces 61 can be determined according to the shape and size of the first electrode plate 21 and the area of the first electrode plate 21 that needs to be heated.

[0133] In the embodiments of the present application, the plurality of heating pieces 61 can be adjusted simultaneously or separately. For example, an independent control assembly can be connected to each heating piece 61, and the heating piece 61 corresponding to different areas of the first electrode plate 21 can be adjusted according to the heating demand of the different heating areas 211 of the first electrode plate 21.

[0134] In the embodiments of the present application, in order to monitor the temperature of each part of the first electrode plate 21 in real time, the heating assembly 6 can further include a temperature measuring device 62, which can be arranged on the first electrode plate 21, such as a temperature measuring thermocouple, a thermistor, etc. The temperature measuring device 62 can be one or multiple, and the temperature measuring device 62 can be arranged according to the shape and size of the first electrode plate 21. For example, when the first electrode plate 21 is a whole-plate type rectangular first electrode plate 21, the first electrode plate 21 can be equally divided into nine areas, and one temperature measuring device 62 can be arranged at the center of each area.

[0135] The coating equipment in the embodiments of the present application can adjust the heating according to the heating requirements of different areas of the first electrode plate 21, and at the same time, can cover all areas of the first electrode plate 21 that need to be heated as much as possible, so as to stabilize the temperature on the first electrode plate 21.

[0136] In some possible embodiments of the present application, the first electrode plate 21 includes at least two heating areas 211, and the at least two heating areas 211 are arranged in a rectangular array.

[0137] In the embodiments of the present application, one heating element 61 can be arranged in each heating area 211, or multiple heating elements 61 can be arranged. The heating area 211 can be divided according to the shape and size of the first electrode plate 21. For example, when the first electrode plate 21 is rectangular, the first electrode plate 21 can be evenly divided into several rectangular areas with similar shapes and similar sizes, such as nine heating areas 211, and the nine heating areas 211 are arranged in an array on the first electrode plate 21. One heating element 61 is arranged at the center of each heating area 211, and each heating element 61 is configured to be individually controlled in temperature.

[0138] In the embodiments of the present application, the heating area includes at least a center heating area, an edge heating area, and a corner heating area. The center heating area is located in the middle of the first electrode plate 21, the edge heating area is located at the edge of the long side or the short side of the first electrode plate, and the corner heating area is located at the corner position of the adjacent two edges of the first electrode plate 21.

[0139] In the embodiments of the present application, the pipeline 5 corresponding to the heating element 61 is arranged from the chamber 11 to the support cylinder 31, and connected to the outside of the shell 1 through the support cylinder 31. The pipeline 5 and the support cylinder 31 are sealingly connected to improve the sealing performance of the chamber 11.

[0140] In the related art, a plurality of heating elements 61 in a ring array are arranged on the first electrode plate 21, the heating elements 61 located at the edges of the first electrode plate 21 are relatively close to the edges of the first electrode plate 21, the heating elements 61 located at each corner of the first electrode plate 21 are relatively far from the corners of the first electrode plate 21, and by setting different heating temperatures for the heating elements 61, the temperature of each region on the first electrode plate 21 tends to be uniform.

[0141] Compared with the related art, in the embodiments provided in the present application, the heating regions 211 arranged in an array on the first electrode plate 21 can improve the uniformity of the distribution of the heating elements 61 on the first electrode plate 21, and at the same time, by individually controlling each heating element 61, the temperature of the heating elements 61 located at the edges of the first electrode plate 21 can be higher than the temperature of the heating elements 61 located at the middle position of the first electrode plate 21, thereby improving the uniformity of the temperature on the first electrode plate 21.

[0142] Referring to Figure 1 , Figure 2 and Figure 12 In some possible embodiments of the present application, the coating equipment further comprises a lifting assembly 9, the lifting assembly 9 comprises a support 91, a guide assembly 92 and a driving device 93, the sliding assembly 4 is connected to the support 91; the guide assembly 92 is connected between the support 91 and the housing 1, and the guide assembly 92 comprises a guide rod 921 arranged axially along the mounting hole 12, the support 91 is slidingly connected to the guide rod 921, and the driving device 93 is connected between the guide assembly 92 and the support 91 and is used to drive the support 91 to move along the guide rod 921 to drive the support cylinder 31 to move.

[0143] In the embodiments of the present application, the support 91 provides a mounting basis for the support assembly 3, the sliding assembly 4, the guide assembly 92 and the driving device 93. In the embodiments of the present application, the support 91 comprises a moving frame 912 and a fixed frame 911, the fixed frame 911 is used to fix the support 91 on a workbench. The moving frame 912 is arranged between the fixed frame 911 and the housing 1, the driving device 93 is arranged axially along the axis of the support 91 at the position of the mounting hole 12, and one end (output end or fixed end) of the driving device 93 is connected to the fixed frame 911 and the other end (fixed end or output end) is connected to the moving frame 912. The moving frame 912 can be driven to move axially along the mounting hole 12 relative to the fixed frame 911 by the driving device 93.

[0144] In the embodiment of the present application, the sliding assembly 4 is arranged on the mobile frame 912 close to the shell 1. In order to better adapt to the thermal deformation of the first electrode plate 21, one end of the guide piece 41 of the sliding assembly 4 is arranged towards the center of the first electrode plate 21, and the other end of the guide piece 41 is arranged towards the outer edge of the first electrode plate 21. The sliding assembly 4 corresponds to the number of the supporting assembly 3, and is a plurality of sliding assemblies. In order to save cost and reduce the weight of the mobile frame 912, the mobile frame 912 includes an extension part 9121. The extension part 9121 can be arranged in the shape of extending from the center of the first electrode plate 21 towards the outer edge of the first electrode plate 21. The extension part 9121 is arranged in position with the supporting assembly 3, and the sliding assembly 4 is arranged on the extension part 9121.

[0145] In the embodiment of the present application, the guide assembly 92 provides guidance for the movement of the mobile frame 912. The guide assembly 92 includes a guide rod 921 arranged axially along the mounting hole 12. One end of the guide rod 921 is connected with the fixed frame 911. The mobile frame 912 is provided with a guide hole 9122. The guide rod 921 passes through the guide hole 9122, and the other end is connected with the shell 1. When the driving device 93 drives the mobile frame 912 to move, the mobile frame 912 can slide along the guide rod 921 through the guide hole 9122.

[0146] In the coating equipment of the embodiment of the present application, the driving device 93 is connected between the mobile frame 912 and the fixed frame 911. The sliding assembly 4 is arranged on the mobile frame 912. One end of the supporting assembly 3 is connected with the sliding assembly 4, and the other end of the supporting assembly 3 is connected with the first electrode plate 21. The moving part can slide along the guide rod 921. In this way, when the driving device 93 drives the moving part to move, the mobile frame 912 moves along the axis of the mounting hole 12 towards the side close to the shell 1. The mobile frame 912 drives the sliding assembly 4 and the supporting assembly 3 to move at the same time. The supporting assembly 3 drives the first electrode plate 21 to move along the axis of the mounting hole 12. The distance between the first electrode plate 21 and the second electrode plate 22 can be changed, so as to adapt to different process requirements.

[0147] The above-mentioned serial numbers of the embodiments of the present application are only for description, and do not represent the advantages and disadvantages of the embodiments. The above is only the preferred embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation, or direct or indirect application in other related technical fields based on the content of the specification and drawings of the present application, are also included in the patent protection scope of the present application.

Claims

1. A coating apparatus, characterized by, The utility model relates to a coating device, comprising: a housing (1) comprising a chamber (11) with an inner wall provided with a mounting portion (14); an electrode assembly (2) connected in the housing (1), the electrode assembly (2) comprising a first electrode plate (21) for carrying a workpiece to be coated; a grounding assembly (7) provided in the chamber (11) and detachably connected to the mounting portion (14) and the first electrode plate (21) respectively, so as to electrically connect the first electrode plate (21) and the housing (1).

2. The coating apparatus according to claim 1, wherein At least two grounding assemblies (7) are provided on each side of the first electrode plate (21) at equal intervals along the corresponding side.

3. The coating apparatus according to claim 2, wherein The first electrode plate (21) comprises a first side and a second side, the size of the first side is greater than or equal to the size of the second side, and the interval of the grounding assemblies (7) on the first side is greater than or equal to the interval of the grounding assemblies (7) on the second side.

4. The coating apparatus according to any one of claims 1 to 3, characterized in that, The electrode assembly (2) further comprises a second electrode plate (22) for connecting with a radio frequency source, the second electrode plate (22) is provided opposite to the first electrode plate (21), and the grounding assemblies (7) are connected to a side of the first electrode plate (21) away from the second electrode plate (22).

5. The coating apparatus according to claim 4, wherein The first electrode plate (21) comprises a body portion (212) and a detachable portion (213) provided opposite to the mounting portion (14), the detachable portion (213) is detachably connected to the body portion (212), and the grounding assemblies (7) are connected to the first electrode plate (21) at positions corresponding to the detachable portion (213).

6. The coating apparatus of claim 5, wherein, The first electrode plate (21) comprises a dismounting opening (214) penetrating the first electrode plate (21) in a direction perpendicular to the electrode plate and located at an edge of the first electrode plate (21), and the detachable portion (213) is detachably connected in the dismounting opening (214).

7. The coating apparatus according to claim 6, wherein Further comprising a material conveying member (8) for conveying the workpiece to be coated in the chamber (11); wherein the material conveying member (8) is detachably connected to the housing (1) in a direction parallel to the first electrode plate (21), and the dismounting opening (214) is provided opposite to the material conveying member (8).

8. The coating apparatus according to any one of claims 1 to 3, characterized by, Further comprising a support assembly (3), the housing (1) further comprises a mounting through hole (12), and the support assembly (3) passes through the mounting through hole (12) to connect the first electrode plate (21).

9. The coating apparatus of claim 8, wherein, Further comprising a pipeline (5) connected to the first electrode plate (21), and the pipeline (5) passes through the mounting through hole (12) to extend to the outside of the housing (1).

10. The coating apparatus according to any one of claims 1 to 3, characterized in that, Further comprising a cooling assembly connected to the first electrode plate (21) to absorb and carry away part of the heat of the first electrode plate (21).

Images