Horizontal centering device for single crystal furnace

Abstract

The utility model provides a horizontal centering device for a single crystal furnace, which relates to the technical field of boilers and comprises a base, an adjusting plate and at least three supporting mechanisms, the supporting mechanisms are arranged between the base and the adjusting plate and used for supporting the adjusting plate, adjusting holes are formed in the adjusting plate corresponding to the supporting mechanisms, and the adjusting holes are communicated with the adjusting plate. The adjusting mechanism and the supporting mechanism are arranged at intervals in the radial direction of the adjusting hole; the first adjusting mechanism is arranged on the supporting mechanism to adjust the height position of the adjusting plate relative to the supporting mechanism; and the second adjusting mechanism is arranged on the supporting mechanism to adjust the position of the projection of the adjusting plate on the base. Adjustment can be sequentially achieved through horizontal adjustment and centering adjustment, the structure is simple, operation is convenient, meanwhile, adjustment precision and stability are high, and production efficiency can be effectively improved in the equipment using process.

Description

TECHNICAL FIELD

[0001] The utility model relates to a boiler technical field, concretely relates to a single crystal furnace horizontal centering device. BACKGROUND

[0002] The principle of preparing single crystal silicon is that polycrystalline silicon is heated and melted into a molten state, the liquid surface is controlled at the crystallization critical point by controlling the heat field, and single crystal silicon is grown by pulling the single crystal seed crystal; in the Czochralski single crystal furnace, the seed crystal at the lower end of the upper driving part is immersed in the polycrystalline silicon molten raw material in the crucible, the seed crystal is pulled while rotating the seed crystal and the crucible, and the crystal bar starts to grow at the lower end of the seed crystal; in order to ensure the stability and quality of crystal growth, it is necessary to ensure that the rotation center maintains high level and concentricity, otherwise the crystal bar will be inclined, thereby affecting the quality of the grown single crystal, in order to ensure the long-term efficient operation of the single crystal furnace, the operator needs to check and adjust the horizontal centering device regularly.

[0003] However, in the prior art, the horizontal and centering adjustment of the upper driving part of the Czochralski single crystal furnace is adjusted separately using different devices, which increases the cost, is relatively complex and inconvenient during adjustment, is easy to be affected by each other, has low efficiency, increases the workload, and has low accuracy and stability after adjustment. Therefore, the utility model provides a single crystal furnace horizontal centering device to improve the above problems. UTILITY MODEL CONTENT

[0004] Therefore, the utility model wants to solve the technical problem in the prior art that the single crystal furnace horizontal centering device is inconvenient to adjust, so as to provide a single crystal furnace horizontal centering device.

[0005] In order to solve the above problems, the utility model provides a single crystal furnace horizontal centering device, which comprises:

[0006] A base;

[0007] An adjusting plate is arranged above the base;

[0008] A supporting mechanism is arranged between the base and the adjusting plate, and at least three supporting mechanisms are arranged between the base and the adjusting plate, the supporting mechanism is used for supporting the adjusting plate, the adjusting plate is provided with adjusting holes corresponding to the supporting mechanism, and the adjusting holes are arranged along the radial direction of the adjusting holes and the gap between the supporting mechanisms;

[0009] A first adjusting mechanism is arranged on the supporting mechanism to adjust the height position of the adjusting plate relative to the supporting mechanism;

[0010] A second adjusting mechanism is arranged on the supporting mechanism to adjust the position of the adjusting plate projected on the base.

[0011] Preferably, the supporting mechanism comprises: supporting seats, adjusting members and L-shaped blocks, the supporting seats are symmetrically arranged at the edges of the base with the center of the base as the center, and the ends of the supporting seats away from the base are provided with adjusting grooves, one end of the adjusting member is slidably inserted into the adjusting groove and is arranged with a gap from the bottom of the adjusting groove, and the end of the adjusting member close to the supporting seat is screwed with the inner wall of the adjusting groove;

[0012] A gap is left between the adjusting member and the adjusting hole;

[0013] The longer side of the L-shaped block is provided with a positioning hole, and the shorter end of the L-shaped block is vertically upward, the L-shaped block is sleeved on the top of the supporting seat and is slidably connected with the outer sidewall of the supporting seat through the positioning hole.

[0014] Preferably, the end of the adjusting member away from the supporting seat is provided with a first limiting part, a supporting pad is sleeved on the adjusting member, one end of the supporting pad abuts against the edge of the adjusting hole on the adjusting plate, and the other end of the supporting pad abuts against the first limiting part.

[0015] Preferably, the first adjusting mechanism comprises: an adjusting ring, the inner side of the adjusting ring is provided with a first thread, the end of the supporting seat away from the base is provided with a second thread, and the adjusting ring is screwed with the first thread and the second thread to adjust the height position of the L-shaped block relative to the supporting seat.

[0016] Preferably, the second adjusting mechanism comprises: an adjusting rod, the shorter side of the L-shaped block is provided with a through hole, and a gap is left between the shorter side of the L-shaped block and the adjusting plate, the end of the adjusting rod away from the adjusting plate is provided with a second limiting part, and the adjusting rod is screwed with the L-shaped block through the through hole to adjust the gap between the L-shaped block and the adjusting plate.

[0017] The single crystal furnace horizontal centering device has the following beneficial effects:

[0018] 1. The height position of the adjusting plate relative to the supporting mechanism is adjusted through the first adjusting mechanism, so that the upper driving part on the adjusting plate and the seed crystal are also synchronously adjusted under the driving of the adjusting plate, and when the height of the adjusting plate and the at least three supporting mechanisms is synchronously adjusted, the horizontal degree of the adjusting plate can be adjusted; when centering adjustment is performed, the position of the adjusting half-projection on the base is changed through the second adjusting mechanism, and then the adjusting plate is centered, wherein the horizontal adjustment and the centering adjustment can be adjusted in sequence, the structure is simple, the operation is convenient, the adjustment precision and stability are high, and the production efficiency can be effectively improved in the use process of the equipment.

[0019] 2. The utility model discloses still through the first screw thread and second screw thread of adjusting ring make the screw joint between adjusting ring and support seat, when needing to adjust the height position of L type block on support seat, through the screw joint of adjusting ring and support seat, make adjusting ring abuts against L type block bottom, carry out the height adjustment between adjusting plate and support seat, when the height position between multiple support seats and adjusting plate is all adjusted, cooperate and adjust the levelness of adjusting plate;

[0020] 3. The utility model discloses still through the setting screw between the adjusting rod of second adjusting mechanism and through -hole, make the screw joint between adjusting rod and through -hole, change the gap between L type block and adjusting plate through its screw joint, thereby, under the cooperation of multiple support seats, carry out the centering adjustment of adjusting plate. DRAWINGS

[0021] Fig. 1 It is the sectional view structural schematic diagram of the utility model;

[0022] Fig. 2 It is the general assembly solid structure front view structural schematic diagram of the utility model.

[0023] The figure mark shows as follows:

[0024] 1, base; 2, adjusting plate; 3, adjusting hole; 4, support seat; 5, adjusting piece; 6, L type block; 7, adjusting groove; 8, first limit part; 9, support pad; 10, adjusting ring; 11, adjusting rod; 12, second limit part. SPECIFIC IMPLEMENTATION

[0025] As Figs. 1-2 The utility model provides a single crystal furnace horizontal centering device, it includes:

[0026] Base 1;

[0027] Adjusting plate 2, set up in the base 1 top;

[0028] Support mechanism, at least three are provided between the base 1 and the adjusting plate 2, the support mechanism is used to support the adjusting plate 2, the adjusting plate 2 is correspondingly provided with adjusting hole 3 on the support mechanism, and the gap is arranged along the radial direction of the adjusting hole 3 and the support mechanism;

[0029] First adjusting mechanism, set up on the support mechanism to adjust the height position of the adjusting plate 2 relative to the support mechanism;

[0030] Second adjusting mechanism, set up in the support mechanism to adjust the position of the adjusting plate 2 projection on the base 1. As Figs. 1-2As shown, a single crystal furnace horizontal centering device, the base 1 is arranged in the corresponding position in the single crystal furnace factory, which can be a column, beam in the factory, the base 1 plays a supporting role for the whole device, the adjusting plate 2 is used to connect the upper driving part of the single crystal furnace, which is convenient for horizontal or height direction adjustment; wherein, the support mechanism is arranged between the base 1 and the adjusting plate 2 at least three, the support mechanism plays a supporting role for the support plate, the adjusting plate 2 is provided with at least three adjusting holes 3 corresponding to the support mechanism, the radial direction of the adjusting hole 3 and the support mechanism keeps a gap, which is convenient for the centering adjustment of the adjusting plate 2, when the height is adjusted, the first adjusting mechanism adjusts the height position of the adjusting plate 2 relative to the support mechanism, so that the upper driving part and the seed crystal on the adjusting plate 2 are also adjusted synchronously under the driving of the adjusting plate 2, when the height of the adjusting plate 2 and the at least three support mechanisms is adjusted synchronously, the levelness of the adjusting plate 2 can be adjusted; when the centering adjustment is carried out, the position of the adjusting plate 2 projected on the base 1 is changed through the second adjusting mechanism, and then the adjusting plate 2 is centered, wherein, the horizontal adjustment and the centering adjustment can be adjusted in turn, the structure is simple, the operation is convenient, and the adjustment precision and stability are high, which can effectively improve the production efficiency during the use of the equipment.

[0031] In some embodiments, the support mechanism comprises: a support seat 4, an adjusting piece 5 and an L-shaped block 6, the support seat 4 is symmetrically arranged on the edge of the base 1 with the center of the base 1 as the center, one end of the support seat 4 away from the base 1 is provided with an adjusting groove 7, one end of the adjusting piece 5 is slidably inserted into the adjusting groove 7 and is provided with a gap with the bottom of the adjusting groove 7, and the other end of the adjusting piece 5 close to the support seat 4 is screwed with the inner wall of the adjusting groove 7;

[0032] A gap is left between the adjusting piece 5 and the adjusting hole 3;

[0033] The longer side of the L-shaped block 6 is provided with a positioning hole, and the shorter end of the L-shaped block 6 is vertically upward, the L-shaped block 6 is sleeved on the top of the support seat 4 and is slidably connected with the outer sidewall of the support seat 4 through the positioning hole. Figs. 1-2As shown, the support seat 4 of each support mechanism is uniformly and symmetrically arranged at the edge of the base 1 with the center of the base 1 as the center, the connection between the support seat 4 and the base 1 can be bolted, the end of the support seat 4 away from the base 1 is provided with an adjusting groove 7, one end of the adjusting part 5 is inserted into the adjusting groove 7 after passing through the adjusting hole 3 on the adjusting plate 2, and the gap between the bottom of the adjusting groove 7 and the adjusting part 5 facilitates the height adjustment of the adjusting plate 2, wherein, when the height adjustment of the support mechanism is completed, the position between the adjusting part 5 and the adjusting plate 2 is positioned by screwing the adjusting part 5 and the inner wall of the adjusting groove 7, and the screwing of the adjusting part 5 and the adjusting groove 7 can be realized by setting corresponding threads; the gap between the adjusting gap and the adjusting hole 3 can enable the centering adjustment, and the height position of the support seat 4 and the adjusting plate 2 can be changed by adjusting the height position of the L-shaped block 6 relative to the support seat 4, wherein the L-shaped block 6 is sleeved on the support seat 4 through the positioning hole.

[0034] In some embodiments, the end of the adjusting part 5 away from the support seat 4 is provided with a first limiting part 8, a support pad 9 is sleeved on the adjusting part 5, one end of the support pad 9 abuts against the edge of the adjusting hole 3 on the adjusting plate 2, and the other end of the support pad 9 abuts against the first limiting part 8. Figs. 1-2 As shown, after the height position between the support seat 4 and the adjusting part 5 is adjusted, the first limiting part 8 can abut against the support pad 9 by screwing the adjusting part 5 and the adjusting groove 7, and the support pad 9 abuts against the edge of the adjusting hole 3 of the adjusting plate 2, so as to fix the adjusting plate 2 and the support seat 4.

[0035] In some embodiments, the first adjusting mechanism comprises an adjusting ring 10, the inner side of the adjusting ring 10 is provided with a first thread, the end of the support seat 4 away from the base 1 is provided with a second thread, and the adjusting ring 10 is screwed through the first thread and the second thread to adjust the height position of the L-shaped block 6 relative to the support seat 4. Figs. 1-2 As shown, the first adjusting mechanism comprises an adjusting ring 10, the adjusting ring 10 and the support seat 4 are screwed through the first thread and the second thread of the adjusting ring 10, when it is necessary to adjust the height position of the L-shaped block 6 on the support seat 4, the adjusting ring 10 abuts against the bottom of the L-shaped block 6 by screwing the adjusting ring 10 and the support seat 4, so as to adjust the height between the adjusting plate 2 and the support seat 4, and when the height positions between the plurality of support seats 4 and the adjusting plate 2 are adjusted, the horizontal degree of the adjusting plate 2 is adjusted.

[0036] In some embodiments, the second adjusting mechanism comprises an adjusting rod 11, the shorter side of the L-shaped block 6 is provided with a through hole, and a gap is left between the shorter side of the L-shaped block 6 and the adjusting plate 2, the adjusting rod 11 is provided with a second limiting part 12 at the end away from the adjusting plate 2, and the adjusting rod 11 is screwed with the L-shaped block 6 through the through hole to adjust the gap between the L-shaped block 6 and the adjusting plate 2. Figs. 1-2 As shown in the figure, the adjusting rod 11 of the second adjusting mechanism and the through hole are provided with threads, so that the adjusting rod 11 and the through hole are screwed, the gap between the L-shaped block 6 and the adjusting plate 2 is changed by screwing, and the adjusting plate 2 is adjusted in the center by the cooperation of the plurality of supporting seats 4; wherein, when the centering adjustment is performed, the adjusting part 5 and the adjusting groove 7 need to be separated or have an adjusting space, so that the adjusting plate 2 can be adjusted in the centering position.

[0037] The above is only the preferred embodiment of the present application, and should not be used to limit the present application, any modification, equivalent replacement and improvement within the spirit and principle of the present application should be included in the protection scope of the present application. The above is only the preferred embodiment of the present application, and should not be used to limit the present application, any modification, equivalent replacement and improvement within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A single crystal furnace level centering device, characterized by, The single crystal furnace horizontal centering device comprises a base, an adjusting plate arranged above the base, at least three support mechanisms arranged between the base and the adjusting plate, the support mechanisms being used for supporting the adjusting plate, adjusting holes corresponding to the support mechanisms being arranged on the adjusting plate, and gaps being arranged between the adjusting holes and the support mechanisms along a radial direction of the adjusting holes.

2. The single crystal furnace horizontal centering device according to claim 1, wherein the support mechanisms comprise support seats, adjusting members and L-shaped blocks, the support seats are symmetrically arranged at edges of the base with the center of the base as a center, adjusting grooves are arranged at ends of the support seats away from the base, one end of the adjusting member is slidably arranged in the adjusting groove and is arranged with a gap with a bottom of the adjusting groove, and the end of the adjusting member close to the support seat is screwed with an inner wall of the adjusting groove.

3. The single crystal furnace horizontal centering device according to claim 2, wherein the end of the adjusting member away from the support seat is provided with a first limiting part, a support pad is arranged on the adjusting member, one end of the support pad abuts against an edge of the adjusting hole on the adjusting plate, and the other end of the support pad abuts against the first limiting part.

4. The single crystal furnace horizontal centering device according to claim 2, wherein the first adjusting mechanism comprises an adjusting ring, a first screw thread is arranged on an inner side of the adjusting ring, a second screw thread is arranged at the end of the support seat away from the base, and the adjusting ring is screwed with the first screw thread and the second screw thread to adjust a height position of the L-shaped block relative to the support seat.

5. The single crystal furnace horizontal centering device according to claim 2, wherein the second adjusting mechanism comprises an adjusting rod, a through hole is arranged on a shorter side of the L-shaped block, a gap is arranged between the shorter side of the L-shaped block and the adjusting plate, a second limiting part is arranged at an end of the adjusting rod away from the adjusting plate, and the adjusting rod is screwed with the L-shaped block through the through hole to adjust the gap between the L-shaped block and the adjusting plate. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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