Washing pipe for treating tail gas of epitaxial furnace

Abstract

The utility model relates to a washing pipe for treating tail gas of an epitaxial furnace, which belongs to the technical field of tail gas treatment of the epitaxial furnace and comprises a main gas inlet pipe, a washing pipe body is arranged at the bottom end of the main gas inlet pipe, and propelling pipes are fixedly connected to two sides of the washing pipe body. The water washing pipe has the advantages that when a large amount of sediment exists at the inlet of the water washing pipe body, water can be conveyed into the propelling pipe through the water inlet pipe, at the moment, the electric telescopic rod can be controlled to be started, and therefore the propelling plate can be pushed to slide in the propelling pipe; a plurality of dredging rods can be driven to move through movement of the boosting plate, hard sediments blocking an inlet can be dredged through a dredging brush cap, the dredging effect of the dredging brush cap is improved, and the service life of the dredging brush cap is prolonged, so that the service life of the dredging brush cap is prolonged, and the service life of the dredging brush cap is prolonged. And the cleaning effect on the precipitate is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to epitaxial furnace tail gas treatment technical field especially relates to be used for processing epitaxial furnace tail gas's water washing pipe. BACKGROUND

[0002] At present, the tail gas discharged in epitaxial growth mainly has two processing methods in the domestic: the first, it is wet processing method, that is with tap water and tail gas reaction, the treatable tail gas is dissolved in water or deposited in water after reaction, and for the special gas such as H2, N2 that can not be dissolved in water, it is discharged through the exhaust port of tail gas treatment device, the second, it is combustion processing method, that is, in the first way, H2 in the tail gas is changed into H2O by combustion, and the remaining N2 is discharged into the atmosphere through the exhaust port.

[0003] Through the retrieval, China patent discloses a water washing pipe for processing epitaxial furnace tail gas (authorized announcement number CN212017370U), including water washing section, having one or more water washing inlets on the water washing section, the water washing mechanism transports the first water flow for water washing into the water washing section from the water washing inlet, the water washing section also has one or more flushing inlets, and the flushing mechanism transports the second water flow for flushing the sediment in the water washing pipe into the water washing section from the flushing inlet, although the patent technology can effectively avoid a large amount of sediment generated in the water washing pipe during tail gas treatment, ensure that the negative pressure in the epitaxial furnace is maintained in a good state, and effectively solve the situation that the gas inlet of the water washing pipe is blocked.

[0004] But the above-mentioned device still has some shortcomings in actual use, and the more obvious one is that the above-mentioned water enters the water washing section through the L-shaped water inlet pipe, so as to realize the water washing operation of the tail gas sediment, but when the water enters the water inlet pipe of the bending part, it will be subjected to a certain buffering effect, thereby reducing the impact amount of the water, so that the sediment at the water washing inlet cannot be flushed clean, thereby causing the blocking phenomenon of the water washing pipe. UTILITY MODEL CONTENTS

[0005] In view of the above problems existing in the prior art, the main purpose of the utility model is to provide a water washing pipe for processing epitaxial furnace tail gas.

[0006] The technical scheme of the utility model is as follows: a water washing pipe for processing epitaxial furnace tail gas, including main air inlet pipe, the bottom end of the main air inlet pipe is provided with a water washing pipe body, the two sides of the water washing pipe body are both fixedly connected with a propelling pipe, the inside of the propelling pipe is slidably installed with a boosting plate, the outside of the propelling pipe is fixedly installed with an electric telescopic rod, the piston rod of the electric telescopic rod is extended into the inside of the propelling pipe and is fixedly connected with the corresponding boosting plate, the side, away from the electric telescopic rod, of the boosting plate is fixedly installed with a plurality of dredging rods, the end, away from the boosting plate, of the dredging rod is fixedly connected with a dredging brush cap, and the top end of the propelling pipe is fixedly connected with a water inlet pipe.

[0007] By adopting the technical scheme, water bodies are delivered to the inside of the propelling pipe through the water inlet pipe, at this time, the electric telescopic rod can be controlled to start, so that the booster plate can slide in the propelling pipe, and the booster plate can play a certain boosting role on the water bodies, the impact force of the water bodies on the sediments is improved, and the flushing effect on the sediments is improved.

[0008] As a preferred implementation form, the outer side of the propelling pipe is provided with a monitoring assembly, the monitoring assembly comprises an electromagnetic valve fixedly installed in the inside of the water inlet pipe, the inside of the booster plate is fixedly installed with a photoelectric sensor, and the outer side of the water washing pipe body is fixedly installed with a controller.

[0009] By adopting the technical scheme, when a large amount of sediments are generated at the water washing pipe body, the light emitted by the photoelectric sensor is blocked, a signal change is generated, the existence of the sediments at the inlet can be determined, the signal is sent to the controller, and the electromagnetic valve and the electric telescopic rod are controlled to be opened through the controller.

[0010] As a preferred implementation form, the two sides of the main air inlet pipe are fixedly connected with auxiliary air inlet pipes, and the top ends of the main air inlet pipe and the auxiliary air inlet pipes are fixedly installed with connecting flanges.

[0011] By adopting the technical scheme, the auxiliary air inlet pipes and the main air inlet pipe are connected with the connecting pipelines of the epitaxial furnace through the connecting flanges.

[0012] As a preferred implementation form, a sealing assembly is arranged between the main air inlet pipe and the water washing pipe body, the sealing assembly comprises a fixed ring fixedly connected to the outside of the water washing pipe body, a sealing ring is fixedly connected to the top end of the fixed ring, and a sealing groove that cooperates with the sealing ring is formed in the inside of the main air inlet pipe.

[0013] By adopting the technical scheme, the sealing performance between the main air inlet pipe and the water washing pipe body can be improved through the cooperation of the sealing groove and the sealing ring.

[0014] As a preferred implementation form, the sealing groove is engaged with the sealing ring, and the photoelectric sensor is arranged on the side of the booster plate close to the dredging rod.

[0015] By adopting the technical scheme, the sediments can be monitored through the arrangement of the photoelectric sensor.

[0016] As a preferred implementation form, a limiting assembly is arranged in the inside of the propelling pipe, the limiting assembly comprises limiting grooves formed in the two sides of the inner wall of the propelling pipe, limiting rods are fixedly connected to the insides of the limiting grooves, and limiting blocks are slidingly connected to the outsides of the limiting rods.

[0017] By adopting the technical scheme, through cooperation of the limiting grooves, the limiting blocks and the limiting rods, stability of the boost plate during movement can be improved, so as to ensure normal operation of various components.

[0018] As a preferred implementation form, the two limiting blocks are fixedly connected with two sides of the corresponding boost plate respectively, and the limiting blocks are in sliding connection with inner walls of the corresponding limiting grooves.

[0019] By adopting the technical scheme, through the sliding connection mode, stability of the limiting block during sliding can be improved.

[0020] As a preferred implementation form, the electric telescopic rod, the electromagnetic valve and the photoelectric sensor are electrically connected with the controller.

[0021] By adopting the technical scheme, the electric telescopic rod, the electromagnetic valve and the photoelectric sensor can be controlled to start and stop through the controller.

[0022] Compared with the prior art, the utility model has the advantages and positive effects that,

[0023] 1. In the utility model, when a large amount of precipitates exist at the inlet of the water washing pipe body, water bodies can be delivered to the inside of the propelling pipe through the water inlet pipe, at this time, the electric telescopic rod can be controlled to start, so as to push the boost plate to slide in the propelling pipe, and the boost plate can play a certain boosting role on the water bodies, the impact force of the water bodies on the precipitates is improved, the washing effect on the precipitates is improved, and the movement of the boost plate can drive the plurality of dredging rods to move, so that the hard precipitates blocking the inlet can be dredged by the dredging brush cap, and the cleaning effect on the precipitates is further improved.

[0024] 2. In the utility model, when a large amount of precipitates are generated at the water washing pipe body, the light emitted by the photoelectric sensor is shielded, and a signal change is generated, so that it can be determined that precipitates exist at the inlet, and the signal is sent to the controller, and the electromagnetic valve and the electric telescopic rod are controlled to open through the controller, so that the purpose of automatically cleaning the precipitates is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 An overall perspective view of the water washing pipe for treating tail gas of an epitaxial furnace is provided for the utility model;

[0026] Figure 2 A sectional view of the water washing pipe for treating tail gas of an epitaxial furnace is provided for the utility model;

[0027] Figure 3 A propelling pipe structure schematic view of the water washing pipe for treating tail gas of an epitaxial furnace is provided for the utility model;

[0028] Figure 4 The utility model provides a water washing pipe for treating epitaxial furnace tail gas Figure 2 The enlarged view of A in the middle.

[0029] Legend: 1, main air inlet pipe; 2, auxiliary air inlet pipe; 3, connecting flange; 4, water washing pipe body; 5, push pipe; 6, electric telescopic rod; 7, water inlet pipe; 8, booster plate; 9, limiting rod; 10, limiting block; 11, limiting groove; 12, electromagnetic valve; 13, photoelectric sensor; 14, dredging rod; 15, dredging brush cap; 16, sealing groove; 17, sealing ring. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0031] With reference to Figures 1-4 , a water washing pipe for treating epitaxial furnace tail gas, comprising a main air inlet pipe 1, the bottom end of the main air inlet pipe 1 is provided with a water washing pipe body 4, both sides of the water washing pipe body 4 are fixedly connected with a push pipe 5, the inside of the push pipe 5 is slidably installed with a booster plate 8, the outside of the push pipe 5 is fixedly installed with an electric telescopic rod 6, the piston rod of the electric telescopic rod 6 extends to the inside of the push pipe 5 and is fixedly connected with the corresponding booster plate 8, the side, away from the electric telescopic rod 6, of the booster plate 8 is fixedly installed with a plurality of dredging rods 14, one end, away from the booster plate 8, of the dredging rod 14 is fixedly connected with a dredging brush cap 15, the top end of the push pipe 5 is fixedly connected with a water inlet pipe 7, when there are a large amount of precipitates at the inlet of the water washing pipe body 4, water bodies can be delivered to the inside of the push pipe 5 through the water inlet pipe 7, at this time, the electric telescopic rod 6 can be controlled to start, so as to push the booster plate 8 to slide in the push pipe 5, and then the booster plate 8 can play a certain boosting role on the water bodies, improve the impact force of the water bodies on the precipitates, and improve the washing effect on the precipitates, at the same time, the movement of the booster plate 8 drives the plurality of dredging rods 14 to move, and then the dredging brush cap 15 can dredge the hard precipitates blocking the inlet, further improving the cleaning effect on the precipitates.

[0032] With reference to Figure 1The outer side of the propelling pipe 5 is provided with a monitoring assembly, the monitoring assembly comprises an electromagnetic valve 12 fixedly installed inside the water inlet pipe 7, the inside of each of the boost plates 8 is fixedly installed with an optical sensor 13, and the outer side of the water washing pipe body 4 is fixedly installed with a controller. When a large amount of sediment is generated at the water washing pipe body 4, the light emitted by the optical sensor 13 will be blocked, and then a signal change will be generated, so that it can be determined that there is sediment at the inlet, and then the signal is sent to the controller, and the electromagnetic valve 12 and the electric telescopic rod 6 are controlled to be opened by the controller, so that the purpose of automatically cleaning the sediment is achieved.

[0033] With reference to Figure 1 The two sides of the main air inlet pipe 1 are fixedly connected with auxiliary air inlet pipes 2, and the top ends of the main air inlet pipe 1 and the auxiliary air inlet pipes 2 are fixedly installed with connecting flanges 3. The connecting flanges 3 are arranged to facilitate the connection of the auxiliary air inlet pipes 2 and the main air inlet pipe 1 with the connecting pipelines of the external extension furnace.

[0034] With reference to Figure 4 A sealing assembly is arranged between the main air inlet pipe 1 and the water washing pipe body 4, and the sealing assembly comprises a fixed ring fixedly connected to the outer side of the water washing pipe body 4. The top end of the fixed ring is fixedly connected with a sealing ring 17, and the inside of the main air inlet pipe 1 is provided with a sealing groove 16 matched with the sealing ring 17. The sealing groove 16 is clamped with the sealing ring 17. The optical sensor 13 is arranged on the side of the boost plate 8 close to the dredging rod 14. Through the cooperation of the sealing groove 16 and the sealing ring 17, the sealing performance between the main air inlet pipe 1 and the water washing pipe body 4 can be improved.

[0035] With reference to Figure 2 A limiting assembly is arranged in the inside of the propelling pipe 5, and the limiting assembly comprises limiting grooves 11 arranged on the two sides of the inner wall of the propelling pipe 5. The inside of the limiting groove 11 is fixedly connected with a limiting rod 9, and the outer side of the limiting rod 9 is slidably connected with a limiting block 10. The two limiting blocks 10 are fixedly connected with the two sides of the corresponding boost plate 8, and the limiting block 10 is slidably connected with the inner wall of the corresponding limiting groove 11. Through the cooperation of the limiting groove 11, the limiting block 10 and the limiting rod 9, the stability of the boost plate 8 during movement can be improved, so as to ensure that each component can normally operate.

[0036] With reference to Figure 1 The electric telescopic rod 6, the electromagnetic valve 12 and the optical sensor 13 are electrically connected with the controller, and the electric telescopic rod 6, the electromagnetic valve 12 and the optical sensor 13 can be controlled to start and stop through the controller.

[0037] Working principle: first, when a large amount of sediment is generated at the water washing pipe body 4, the light emitted by the photoelectric sensor 13 is blocked, and a signal change is generated, so that the presence of sediment at the inlet can be determined, and the signal is sent to the controller, and the electromagnetic valve 12 and the electric telescopic rod 6 are opened to realize the purpose of automatically cleaning the sediment;

[0038] Subsequently, the water body is delivered to the inside of the propelling pipe 5 through the water inlet pipe 7, at this time, the piston rod of the electric telescopic rod 6 is extended, so that the booster plate 8 can slide in the propelling pipe 5, and the booster plate 8 can play a certain boosting role on the water body, improve the impact force of the water body on the sediment, improve the flushing effect on the sediment, and the movement of the booster plate 8 drives the movement of the plurality of dredging rods 14, so that the hard sediment clogging the inlet can be dredged by the dredging brush cap 15, and the cleaning effect on the sediment is further improved, and the sealing performance between the main air inlet pipe 1 and the water washing pipe body 4 is improved by the cooperation of the sealing groove 16 and the sealing ring 17.

[0039] In the description of the present application, it should be pointed out that, unless otherwise explicitly specified and limited, the terms "installation", "provided with", "connection" and the like should be understood broadly, for example, "connection" can be fixed connection, can also be detachable connection, or integral connection, can be mechanical connection, can also be electrical connection, can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication between two elements, for those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific situation.

[0040] The above is only the preferred embodiment of the present application, and is not used to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A water scrubbing pipe for treating the exhaust gas of an epitaxial furnace, comprising a main gas inlet pipe (1), characterized in that: The bottom end of the main air inlet pipe (1) is provided with a water washing pipe body (4), both sides of the water washing pipe body (4) are fixedly connected with a propelling pipe (5), the inside of the propelling pipe (5) is slidably installed with a booster plate (8), the outside of the propelling pipe (5) is fixedly installed with an electric telescopic rod (6), the piston rod of the electric telescopic rod (6) extends into the inside of the propelling pipe (5) and is fixedly connected with the corresponding booster plate (8), the side, away from the electric telescopic rod (6), of the booster plate (8) is fixedly installed with a plurality of dredging rods (14), one end of the dredging rod (14), away from the booster plate (8), is fixedly connected with a dredging brush cap (15), the top end of the propelling pipe (5) is fixedly connected with a water inlet pipe (7).

2. The water scrubber for treating epitaxial furnace tail gas according to claim 1, wherein: The outside of the propelling pipe (5) is provided with a monitoring assembly, the monitoring assembly comprises an electromagnetic valve (12) fixedly installed in the inside of the water inlet pipe (7), the inside of the booster plate (8) is fixedly installed with a photoelectric sensor (13), the outside of the water washing pipe body (4) is fixedly installed with a controller.

3. The water scrubber for treating epitaxial furnace tail gas according to claim 1, wherein: Both sides of the main air inlet pipe (1) are fixedly connected with a secondary air inlet pipe (2), the top end of the main air inlet pipe (1) and the secondary air inlet pipe (2) are fixedly installed with a connecting flange (3).

4. The water scrubber for treating epitaxial furnace tail gas according to claim 2, wherein: A sealing assembly is arranged between the main air inlet pipe (1) and the water washing pipe body (4), the sealing assembly comprises a fixed ring fixedly connected to the outside of the water washing pipe body (4), the top end of the fixed ring is fixedly connected with a sealing ring (17), the inside of the main air inlet pipe (1) is provided with a sealing groove (16) matched with the sealing ring (17).

5. The water scrubber for treating epitaxial furnace exhaust gas according to claim 4, wherein: The sealing groove (16) is clamped with the sealing ring (17), the photoelectric sensor (13) is arranged on the side of the booster plate (8) close to the dredging rod (14).

6. The water scrubber for treating epitaxial furnace exhaust gas according to claim 1, wherein: The inside of the propelling pipe (5) is provided with a limiting assembly, the limiting assembly comprises a limiting groove (11) formed on both sides of the inner wall of the propelling pipe (5), the inside of the limiting groove (11) is fixedly connected with a limiting rod (9), the outside of the limiting rod (9) is slidably connected with a limiting block (10).

7. The water scrubber for treating epitaxial furnace exhaust gas according to claim 6, characterized by: Both sides of the limiting block (10) are fixedly connected with the corresponding booster plate (8), the limiting block (10) is slidably connected with the inner wall of the corresponding limiting groove (11).

8. The water scrubber for treating epitaxial furnace exhaust gas according to claim 5, wherein: The electric telescopic rod (6), the electromagnetic valve (12) and the photoelectric sensor (13) are electrically connected with the controller.

Images