Microwave annealing equipment

Abstract

The utility model relates to the technical field of solar cells, in particular to microwave annealing equipment, which comprises a microwave source, an annealing chamber and a magnetic field generator, the annealing chamber is internally provided with an annealing cavity for accommodating a substrate to be annealed, the microwave source is arranged on one side of the annealing chamber and communicated with the annealing cavity, the microwave source can radiate microwaves towards the annealing cavity, and the magnetic field generator is arranged on the outer side of the annealing chamber and faces the annealing chamber; the magnetic field generator is arranged to provide the magnetic field, the microwaves in the annealing chamber are limited, the microwaves are restrained in the annealing chamber, radiation dissipation is prevented, and therefore efficient annealing of the microwave annealing equipment is achieved, and the technical problem that in the prior art, radiation dissipated by the microwave annealing equipment is likely to cause harm to the human body and the environment is solved. And the safety of the microwave annealing equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of solar cell, especially a microwave annealing equipment. BACKGROUND

[0002] At present, in the preparation process of perovskite battery, perovskite annealing refers to the process of heating perovskite thin film or battery assembly to a certain temperature and keeping for a period of time, and then cooling treatment when manufacturing perovskite solar cell. The annealing process is mainly through heating table annealing, solvent assisted annealing and other methods. The heating table annealing is to place the substrate on the heating table, and the annealing is realized by heat transfer. The heating table operation is simple, and the cost is low. The solvent assisted annealing is to add solvent on the substrate by chemical method to achieve the purpose of annealing. The annealing effect is easily affected by the uniformity of the heating table temperature distribution when the heating table annealing is used on a large area substrate, and the solvent assisted annealing needs to strictly control the amount of added solvent, and the process stability and repeatability are poor.

[0003] At present, perovskite annealing through microwave equipment is a new way in the industry. The perovskite crystal is arranged in the vacuum chamber, and the microwave source is used to radiate and heat the perovskite crystal to complete the annealing of the perovskite crystal.

[0004] However, the radiation of the current microwave annealing equipment is easy to cause harm to the human body and the environment. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a kind of microwave annealing equipment to solve the technical problem that the radiation of the microwave annealing equipment in prior art is easy to cause harm to the human body and the environment.

[0006] Firstly, the utility model provides a kind of microwave annealing equipment, including microwave source, annealing chamber and magnetic field generator;

[0007] The annealing chamber is provided with annealing cavity for accommodating the substrate to be annealed, the microwave source is arranged on one side of the annealing chamber, and is communicated with the annealing cavity, the microwave source can radiate microwave to the annealing cavity, and the magnetic field generator is arranged on the outside of the annealing chamber and is arranged towards the annealing chamber.

[0008] Further, the annealing chamber is provided with microwave emission layer, the microwave emission layer is arranged on the inner wall of the annealing chamber, and the microwave emission layer is connected with the microwave source.

[0009] Further, the annealing chamber is further provided with water cooling layer, and the water cooling layer is arranged between the inner wall of the annealing chamber and the microwave emission layer.

[0010] Further, the water cooling layer is provided with a water cooling channel arranged in a serpentine shape.

[0011] Further, the annealing chamber is further provided with a shielding layer arranged between the water cooling layer and the inner wall of the annealing chamber.

[0012] Further, the microwave annealing device further comprises a vacuum air path, one end of the vacuum air path being in communication with the annealing cavity, and the other end of the vacuum air path being provided with a vacuum pump.

[0013] Further, the microwave annealing device further comprises a gas source pipeline, one end of the gas source pipeline being in communication with the annealing cavity, and the other end of the gas source pipeline being provided with a gas atmosphere source.

[0014] Further, the gas source pipeline is provided with a main pipeline and a plurality of gas source branches, one end of the main pipeline being connected to the gas atmosphere source, the other end of the main pipeline being respectively connected to one end of all the gas source branches, and the other end of the gas source branches being uniformly arranged on the side wall of the annealing chamber.

[0015] Further, the microwave annealing device further comprises a temperature measuring element, the temperature measuring element being arranged on the side wall of the annealing chamber, and a temperature measuring end of the temperature measuring element being capable of extending into the annealing cavity.

[0016] Further, the annealing chamber is provided with an annealing table, the annealing table being arranged in the annealing cavity in a horizontal direction, and a platform plate being arranged on the annealing table to carry the substrate.

[0017] Compared with the prior art, the microwave annealing device provided by the utility model, comprising a microwave source, an annealing chamber and a magnetic field generator, the annealing chamber is provided with an annealing cavity for accommodating a substrate to be annealed, the microwave source is arranged on one side of the annealing chamber and is in communication with the annealing cavity, the microwave source can radiate microwaves towards the annealing cavity, and the magnetic field generator is arranged outside the annealing chamber and faces the annealing chamber, a magnetic field is provided by arranging the magnetic field generator to limit the microwaves in the annealing chamber, the microwaves are constrained in the annealing cavity to prevent radiation from escaping, thereby realizing efficient annealing of the microwave annealing device, solving the technical problem that the radiation escaping from the microwave annealing device in the prior art is easy to cause harm to the human body and the environment, and improving the safety of the microwave annealing device. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings described in the following description are some embodiments of the present application, and all other drawings obtained by those skilled in the art without creative labor on the basis of these drawings also belong to the protection scope of the present application.

[0019] Figure 1 The overall structure schematic diagram of the microwave annealing equipment provided by the embodiments of the present application is shown in the figure.

[0020] Figure 2 The structure schematic diagram of the water cooling layer in the microwave annealing equipment provided by the embodiments of the present application is shown in the figure.

[0021] Reference signs:

[0022] 100, microwave source; 110, microwave emission layer;

[0023] 200, annealing chamber; 210, annealing cavity; 220, water cooling layer; 221, water cooling channel; 230, shielding layer; 240, annealing table; 241, platform plate;

[0024] 300, vacuum air path; 310, vacuum pump;

[0025] 400, gas source pipeline; 410, atmosphere source; 420, main pipeline; 430, gas source branch; 500, temperature measuring piece. Specific embodiments

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor also belong to the protection scope of the present application.

[0028] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0029] In the description of the utility model, it needs to be explained that, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed during use, which is merely for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are merely used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0030] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" merely means that it is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0031] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "setting", "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] Some embodiments of the utility model will be described in detail below in combination with the drawings. In the case of no conflict, the following examples and features in the examples can be combined with each other.

[0033] As shown in Figure 1 and Figure 2 The utility model embodiment provides a microwave annealing equipment, including microwave source 100, annealing chamber 200 and magnetic field generator, annealing chamber 200 is provided with the annealing cavity 210 for accommodating the substrate to be annealed, microwave source 100 is set up at one side of annealing chamber 200, and is communicated with annealing cavity 210, microwave source 100 can radiate microwave towards annealing cavity 210, and magnetic field generator is set up at the outside of annealing chamber 200 and is set towards annealing chamber 200.

[0034] That is, the microwave annealing equipment provided by the embodiment of the utility model, through setting the magnetic field generator to provide the magnetic field, the microwave in the annealing chamber 200 is limited, the microwave is constrained in the annealing chamber, and the radiation is prevented from escaping, so that the efficient annealing of the microwave annealing equipment is realized, the technical problem that the radiation of the microwave annealing equipment escaping in the prior art is easy to cause harm to the human body and the environment is solved, and the safety of the microwave annealing equipment is improved.

[0035] Specifically, the annealing chamber 200 is square as a whole, the annealing cavity is arranged at the center of the annealing chamber 200, the inlet and outlet and the closing door are arranged on one side of the annealing chamber 200, so as to load the material for workers. The microwave source 100 is arranged at the top of the annealing chamber 200 and communicates with the annealing cavity 210, so as to radiate the microwave into the annealing chamber 200 and perform the microwave annealing. The microwave source 100 can be arranged with power and frequency, so as to achieve the purpose of temperature control. The preset power of the microwave can reach 500-4000W, and the frequency can reach 2450MHz. The magnetic field generator can be specifically arranged as a constant magnetic field transmitter and is arranged on the outside of the annealing chamber 200, so as to form a magnetic field towards the center of the annealing chamber 200, and then the microwave is constrained, the microwave radiated by the microwave source 100 is limited in the annealing cavity 210, and the efficient utilization of energy is realized.

[0036] Preferably, the microwave emission layer 110 is arranged in the annealing chamber 200, the microwave emission layer 110 is arranged on the inner wall of the annealing chamber 200, and the microwave emission layer 110 is connected with the microwave source 100.

[0037] Specifically, the microwave emission layer 110 is arranged on the inner side of each inner wall of the annealing chamber 200 and is connected with the microwave source 100 arranged on one side of the annealing chamber 200, so as to radiate the microwave towards the annealing cavity 210, and then the uniformity of the microwave radiation is improved, and the quality of the substrate annealing is ensured.

[0038] Further, the annealing table 240 is arranged in the annealing chamber 210 and rotates along the horizontal direction, and the platform plate 241 is arranged on the annealing table 240 to carry the substrate.

[0039] Specifically, the annealing table 240 is arranged at the bottom of the annealing cavity 210 and rotates along the horizontal direction in the annealing cavity 210 by the motor. The platform plate 241 is arranged on the top of the annealing table 240, so that the substrate can be arranged on the annealing table 240. Through the rotation of the annealing table 240, the substrate can be continuously rotated in the annealing process, and the uniformity of the substrate annealing is ensured.

[0040] Further, the water cooling layer 220 is arranged in the annealing chamber 200 and is arranged between the inner wall of the annealing chamber 200 and the microwave emission layer 110.

[0041] Specifically, the water cooling layer 220 is made of red copper or other high-conductivity metal material, and is arranged between the inner wall of the annealing chamber 200 and the microwave emitting layer 110. The water cooling layer 220 is hollow and connected with an external water source, so that the external cooling water can flow through the water cooling layer 220. By arranging the water cooling layer 220, the heat of the annealing table 240 can be absorbed, the influence of high temperature on the shielding winding and the closed cavity can be reduced, and the microwave radiation can be blocked.

[0042] Preferably, the water cooling layer 220 is provided with a water cooling channel 221, and the water cooling channel 221 is arranged in a serpentine shape.

[0043] Specifically, the water cooling channel 221 is formed by a long strip-shaped channel wall arranged at intervals, and the water cooling channel 221 is formed in a serpentine shape in the single-sided water cooling layer 220. In this way, the cooling water can uniformly and repeatedly flow through the entire water cooling layer 220, so as to ensure the cooling effect of the water cooling layer 220.

[0044] Further, the annealing chamber 200 is further provided with a shielding layer 230, and the shielding layer 230 is arranged between the water cooling layer 220 and the inner wall of the annealing chamber 200.

[0045] Specifically, the shielding layer 230 can be filled in the gap between the water cooling layer 220 and the inner wall of the annealing chamber 200 by a metal material or a carbon fiber material. By arranging the shielding layer 230, the microwave radiation can be effectively shielded, and the harm of the device to the human body and the environment can be reduced.

[0046] Further, the microwave annealing device further comprises a vacuum air path 300, one end of the vacuum air path 300 is communicated with the annealing cavity 210, and the other end of the vacuum air path 300 is provided with a vacuum pump 310.

[0047] Specifically, the vacuum air path 300 is arranged on one side of the annealing chamber 200 and communicated with the annealing cavity 210, and one end of the vacuum air path 300 is provided with the vacuum pump 310. By the vacuum pump 310, the air in the annealing cavity 210 can be exhausted, so that the annealing can be carried out in a vacuum environment.

[0048] Further, the microwave annealing device further comprises a gas source pipeline 400, one end of the gas source pipeline 400 is communicated with the annealing cavity 210, and the other end of the gas source pipeline 400 is provided with a gas atmosphere source 410.

[0049] Specifically, the gas source pipeline 400 is arranged on the side opposite to the vacuum air path 300 of the annealing chamber 200 and communicated with the annealing cavity 210, and one end of the gas source pipeline 400 is provided with the gas atmosphere source 410. By arranging the gas atmosphere source 410, after the annealing cavity 210 is evacuated, different gases can be introduced into the annealing cavity 210, so that the annealing cavity 210 is in different atmospheres, and the requirements of various annealing processes for different annealing atmospheres can be met.

[0050] Preferably, the gas source pipeline 400 is provided with a main pipeline 420 and a plurality of gas source branches 430, one end of the main pipeline 420 is connected with the atmosphere source 410, the other end of the main pipeline 420 is respectively connected with one end of all the gas source branches 430, and the other end of the gas source branches 430 is uniformly arranged on the side wall of the annealing chamber 200.

[0051] Specifically, the gas source branches 430 are provided in plurality, and the ports thereof are uniformly distributed on the side wall of the annealing chamber 200. The other end of the gas source branches 430 is connected with the main pipeline 420, so as to ensure the uniformity of the gas filled in the annealing cavity 210. The main pipeline 420 is connected with the atmosphere source 410, and a main gas valve is further arranged on the main pipeline 420, so as to facilitate the control of whether the annealing cavity 210 is ventilated.

[0052] Further, the microwave annealing device further comprises a temperature measuring member 500, which is arranged on the side wall of the annealing chamber 200, and the temperature measuring end of the temperature measuring member 500 can extend into the annealing cavity 210.

[0053] Specifically, the temperature measuring member 500 is specifically arranged as an infrared temperature measuring instrument, and the temperature measuring probe thereof is the temperature measuring end of the temperature measuring member 500. The temperature measuring member 500 is fixedly arranged on the side wall of the annealing chamber 200, and the temperature measuring probe extends into the annealing cavity 210 for detecting the atmosphere temperature in the annealing table 240, so as to facilitate the better control of the annealing temperature by the worker, and achieve a better annealing effect.

[0054] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features thereof; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A microwave annealing apparatus, characterized by comprising: The microwave annealing device comprises a microwave source (100), an annealing chamber (200) and a magnetic field generator; The annealing chamber (200) is provided with an annealing cavity (210) for accommodating a substrate to be annealed. The microwave source (100) is arranged on one side of the annealing chamber (200) and communicates with the annealing cavity (210). The microwave source (100) can radiate microwaves towards the annealing cavity (210). The magnetic field generator is arranged outside the annealing chamber (200) and faces the annealing chamber (200).

2. The microwave annealing apparatus of claim 1, wherein The annealing chamber (200) is provided with a microwave emission layer (110). The microwave emission layer (110) is arranged on the inner wall of the annealing chamber (200) and is connected with the microwave source (100).

3. The microwave annealing apparatus of claim 2, wherein, The annealing chamber (200) is further provided with a water cooling layer (220). The water cooling layer (220) is arranged between the inner wall of the annealing chamber (200) and the microwave emission layer (110).

4. The microwave annealing apparatus of claim 3, wherein The water cooling layer (220) is provided with a water cooling channel (221). The water cooling channel (221) is arranged in a serpentine shape.

5. The microwave anneal apparatus of claim 3, wherein, The annealing chamber (200) is further provided with a shielding layer (230). The shielding layer (230) is arranged between the water cooling layer (220) and the inner wall of the annealing chamber (200).

6. The microwave annealing apparatus according to any one of claims 1 to 5, wherein The microwave annealing device further comprises a vacuum air path (300). One end of the vacuum air path (300) communicates with the annealing cavity (210). The other end of the vacuum air path (300) is provided with a vacuum pump (310).

7. The microwave annealing apparatus according to any one of claims 1 to 5, wherein The microwave annealing device further comprises a gas source pipeline (400). One end of the gas source pipeline (400) communicates with the annealing cavity (210). The other end of the gas source pipeline (400) is provided with a gas atmosphere source (410).

8. The microwave anneal apparatus of claim 7, wherein, The gas source pipeline (400) is provided with a main pipeline (420) and a plurality of gas source branches (430). One end of the main pipeline (420) is connected with the gas atmosphere source (410). The other end of the main pipeline (420) is respectively connected with one end of all the gas source branches (430). The other ends of the gas source branches (430) are uniformly arranged on the side wall of the annealing chamber (200).

9. The microwave annealing apparatus according to any one of claims 1 to 5, wherein The microwave annealing device further comprises a temperature measuring member (500). The temperature measuring member (500) is arranged on the side wall of the annealing chamber (200). The temperature measuring end of the temperature measuring member (500) can be inserted into the annealing cavity (210).

10. The microwave annealing apparatus according to any one of claims 1 to 5, wherein The annealing chamber (200) is provided with an annealing table (240). The annealing table (240) is arranged in the annealing cavity (210) and rotates in the horizontal direction. The annealing table (240) is provided with a platform plate (241) for carrying the substrate.

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