Refrigerant preparation device for freezing transmission electron microscope

Abstract

The utility model provides a refrigerant preparation device for a freezing transmission electron microscope, which relates to the technical field of transmission electron microscopes and comprises a mixing cavity, a first inlet pipe, a second inlet pipe and an output pipe, a first flow sensor, a first one-way valve and a first diaphragm valve are arranged on the first inlet pipe; a second flow sensor, a second one-way valve and a second diaphragm valve are arranged on the second inlet pipe; the output pipe is provided with a barometer and a third one-way valve, and the end, away from the mixing cavity, of the output pipe is connected with a liquefaction cavity. The device is simple in structure, two kinds of gas are introduced into the mixing cavity to be mixed, then ethane-propane mixed gas is output from the output pipe, the mixed gas is liquefied to obtain a refrigerant which is kept in a liquid state at the ultralow temperature, and the refrigerant is easy to prepare and operate, high in repeatability and low in preparation cost by restraining the flowing direction and flow of the gas.

Description

TECHNICAL FIELD

[0001] The utility model relates to transmission electron microscope technical field especially, the utility model relates to a kind of cryogen preparation device for frozen transmission electron microscope. BACKGROUND

[0002] For frozen transmission electron microscope, sample preparation is not only the first step but also a crucial step. The rapid freezing sample preparation technology needed for sample preparation is simply a process of spreading the sample in solution state on copper mesh to form a very thin sample liquid layer, and then putting the copper mesh into liquid cryogen for rapid freezing. The cryogen is usually obtained by liquefying ethane or propane in a low-temperature container. With the help of the extremely high heat conduction rate of the cryogen, a cooling rate greater than 10 4 K / s can be achieved, thereby ensuring that the water in the sample immersed in the cryogen is converted into amorphous ice. When ice crystals form in the sample, the original structure of the sample will be destroyed and the electron diffraction caused by the ice crystals will interfere with data collection.

[0003] The commonly used cryogen now is liquefied ethane, and its temperature can only reach 90K. To solve the problems of ice crystal pollution and damage to the sample / carbon-based porous membrane that often occur during the sample preparation process of single alkane cryogenic liquid, a mixing and liquefaction system of ethane and propane gas needs to be developed to obtain a cryogen that can maintain a liquid state at 77K, improve the sample cooling rate and reduce ice crystal formation. At the same time, the viscosity of the cryogen is reduced to reduce its damage to the sample and carbon-based porous membrane, and ultimately improve the quality of the prepared cryogenic sample and the success rate of subsequent data collection.

[0004] Nowadays, there is no cryogenic sample preparation equipment for frozen transmission electron microscope that can maintain a liquid state at 77K. To obtain ethane-propane mixed cryogenic liquid, researchers can only achieve it through two ways: one is to sequentially introduce ethane and propane gas for low-temperature cooling; the other is to purchase ethane-propane gas from only a few companies and then liquefy the ethane-propane gas. However, the first way is complicated and has poor experimental repeatability, and it cannot obtain stable ratio of ethane and propane gas, nor can it stably obtain a cryogen that can maintain a liquid state at 77K. The second way is scarce and expensive.

[0005] Therefore, it is necessary for us to design a reasonable and efficient cryogen preparation device for frozen transmission electron microscope to solve the above problems. UTILITY MODEL CONTENT

[0006] The utility model discloses a purpose at providing a kind of for frozen transmission electron microscope's refrigerant preparation device, simple structure is introduced into the mixing cavity by ethane entering pipe and propane entering pipe respectively with two kinds of gas mixing then ethane-propane mixed gas is exported from output pipe, mixed gas can be obtained in super low temperature under maintaining liquid state refrigerant after liquefaction, and by restricting gas flow direction and flow, the mixed gas of target ratio can be obtained, the preparation operation of refrigerant is simple, success is high and reproducible, and preparation cost is low.

[0007] To achieve the above object, the utility model adopts the following technical solutions to be realized:

[0008] A kind of for frozen transmission electron microscope's refrigerant preparation device, including mixing cavity, for the first entering pipe for passing in ethane gas, the second entering pipe for passing in propane gas and the output pipe for output mixed gas;The first entering pipe, second entering pipe and output pipe are all communicated with the mixing cavity;First flow sensor is provided on the first entering pipe, the first flow sensor is provided with first check valve on the side close to the mixing cavity, the side away from the mixing cavity of the first flow sensor is provided with first diaphragm valve;Second flow sensor is provided on the second entering pipe, the second flow sensor is provided with second check valve on the side close to the mixing cavity, the side away from the mixing cavity of the second flow sensor is provided with second diaphragm valve;Barometer and third check valve are provided on the output pipe, and the output pipe is connected with liquefaction cavity at the end away from the mixing cavity.

[0009] As the preferred of the utility model, the output pipe is provided with output interface at the end away from the mixing cavity, and the output interface is connected with the liquefaction cavity by connecting pipe.

[0010] As the preferred of the utility model, the liquefaction cavity is provided with frozen cavity outside;Connecting pipe is communicated with the upper side of the liquefaction cavity.

[0011] As the preferred of the utility model, the first entering pipe is provided with first entering interface at the end away from the mixing cavity, the first entering interface is provided with first filter on the side close to the mixing cavity, and first gas mass controller is arranged between the first flow sensor and first check valve;The second entering pipe is provided with second entering interface at the end away from the mixing cavity, the second entering interface is provided with second filter on the side close to the mixing cavity, and second gas mass controller is arranged between the second flow sensor and second check valve.

[0012] As the preferred of the utility model, first pressure reducing valve is arranged between the first diaphragm valve and first flow sensor;Second pressure reducing valve is arranged between the second diaphragm valve and second flow sensor.

[0013] The third diaphragm valve is arranged between the barometer and the third one-way valve.

[0014] The fourth diaphragm valve is arranged on the waste discharge pipe.

[0015] The fourth diaphragm valve is arranged on the waste discharge pipe.

[0016] The fourth diaphragm valve is arranged on the waste discharge pipe.

[0017] The fourth diaphragm valve is arranged on the waste discharge pipe.

[0018] The fourth diaphragm valve is arranged on the waste discharge pipe. BRIEF DESCRIPTION OF DRAWINGS

[0019] Fig. 1 It is a front view structural schematic diagram of one embodiment of the refrigerant preparation device for the cryogenic transmission electron microscope;

[0020] Fig. 2 It is a front view structural schematic diagram of one embodiment of the refrigerant preparation device for the cryogenic transmission electron microscope;

[0021] Fig. 3 It is a front view structural schematic diagram of one embodiment of the refrigerant preparation device for the cryogenic transmission electron microscope;

[0022] In the figure: 1, first entering pipe, 11, first entering interface, 12, first filter, 13, first diaphragm valve, 14, first pressure reducing valve, 15, first flow sensor, 16, first gas quality controller, 17, first one-way valve, 2, second entering pipe, 21, second entering interface, 22, second filter, 23, second diaphragm valve, 24, second pressure reducing valve, 25, second flow sensor, 26, second gas quality controller, 27, second one-way valve, 3, mixing cavity, 4, output pipe, 41, air pressure gauge, 42, third diaphragm valve, 43, third one-way valve, 44, output interface, 45, output pipe, 5, liquefying cavity, 51, refrigeration cavity, 6, waste pipe, 61, fourth diaphragm valve, 62, fourth one-way valve, 63, waste interface, 7, partition plate, 71, shockproof layer, 72, heat insulation layer. DETAILED DESCRIPTION

[0023] The following is a specific embodiment of the present application, which further describes the technical scheme of the present application, but the present application is not limited to these embodiments.

[0024] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. Note that the relative arrangement and the steps of the modules and steps described in these embodiments are not limiting to the scope of the present application unless otherwise specifically stated.

[0025] Meanwhile, it should be understood that, for the convenience of description, the processes in the drawings are not only carried out separately, but also carried out in a cross manner.

[0026] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only used for differentiation and cannot be understood as indicating or implying relative importance.

[0027] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way limiting to the present application and its application or uses.

[0028] Techniques, methods, and systems known to those of ordinary skill in the relevant art can not be discussed in detail, but where appropriate, the techniques, methods, and systems should be considered as part of the authorized description.

[0029] Embodiment one: asFigs. 1 to 3 As shown in the figure, only one of the embodiments of the utility model, a kind of for frozen transmission electron microscope refrigerant preparation device, a kind of for frozen transmission electron microscope refrigerant preparation device, including mixing cavity 3, first inlet pipe 1 for passing into ethane gas, second inlet pipe 2 for passing into propane gas and output pipe 4 for outputting mixed gas;The first inlet pipe 1, second inlet pipe 2 and output pipe 4 are all communicated with the mixing cavity 3;First flow sensor 15 is provided on the first inlet pipe 1, first one-way valve 17 is provided on the side close to the mixing cavity 3 of first flow sensor 15, first diaphragm valve 13 is provided on the side away from the mixing cavity 3 of first flow sensor 15;Second flow sensor 25 is provided on the second inlet pipe 2, second one-way valve 27 is provided on the side close to the mixing cavity 3 of second flow sensor 25, second diaphragm valve 23 is provided on the side away from the mixing cavity 3 of second flow sensor 25;Barometer 41 and third one-way valve 43 are provided on the output pipe 4, and liquefaction cavity 5 is connected to the end away from the mixing cavity 3 of the output pipe 4.

[0030] In the utility model, ethane gas enters mixing cavity 3 from first inlet pipe 1, propane gas enters mixing cavity 3 from second inlet pipe 2, and ethane gas and propane gas all enter mixing cavity, ethane gas and propane gas are fully mixed in mixing cavity 3, and the obtained ethane-propane mixed gas is finally output from output pipe 4 to liquefaction cavity 5 at the end away from the mixing cavity 3 of the output pipe 4 for liquefaction.

[0031] In order to obtain the required mixed gas, and the refrigerant can be maintained in liquid state at 77K ultra-low temperature after liquefaction, the flow of ethane gas and propane gas needs to be controlled, and then they are fully and uniformly mixed to obtain ethane-propane mixed gas with target mixing ratio, first flow sensor 15 is provided on the first inlet pipe 1, second flow sensor 25 is provided on the second inlet pipe 2, and the amount of gas reaching mixing cavity 3 is obtained through gas flow sensor, so that ethane gas and propane gas with predetermined ratio reach mixing cavity 3 for mixing.

[0032] In the utility model, the first flow sensor 15 is provided with the first check valve 17 on one side close to the mixing cavity 3, the second flow sensor 25 is provided with the second check valve 27 on one side close to the mixing cavity 3, and the output pipe 4 is provided with the third check valve 43, so that the ethane gas and the propane gas can only flow into the mixing cavity 3 from the first inlet pipe 1 and the second inlet pipe 2 respectively, and the ethane-propane mixed gas can only flow from the mixing cavity 3 to the output pipe 4 and the liquefaction cavity 5, preventing gas backflow;When the ethane gas flow at the first flow sensor 15 in the first inlet pipe 1 reaches the first predetermined value, the first check valve 17 is closed;When the propane gas flow at the second flow sensor 25 in the second inlet pipe 2 reaches the second predetermined value, the second check valve 27 is closed;Similarly, when all the ethane-propane mixed gas in the mixing cavity 3 reaches the liquefaction cavity 5, the third check valve 43 is closed.

[0033] The output pipe 4 is provided with the barometer 41 on one end close to the mixing cavity 3, that is, the barometer 41 is located on one side of the third check valve 43 close to the mixing cavity 3, and the gas pressure in the mixing cavity 3 can be obtained through the barometer 41;Before the ethane gas and the propane gas are introduced, the mixing cavity 3 is in a vacuum state, when the barometer 41 shows that the mixing cavity 3 is in a vacuum, the first check valve 17 and the second check valve 27 are opened respectively, and the ethane gas and the propane gas are introduced into the mixing cavity 3 through the first inlet pipe 1 and the second inlet pipe 2;Similarly, after the ethane gas and the propane gas are introduced and fully mixed, according to the readings of the first flow sensor 15 and the second flow sensor 25, the mass of the ethane-propane mixed gas in the mixing cavity 3 can be calculated, and the volume in the mixing cavity 3 is known, so the target pressure in the mixing cavity 3 can be calculated, when the barometer 41 shows that the pressure in the mixing cavity 3 is the target pressure, the third check valve 43 is opened, and the ethane-propane mixed gas flows from the mixing cavity 3 to the liquefaction cavity 5 through the output pipe 4 for liquefaction.

[0034] In the utility model, the first flow sensor 15 is provided with the first check valve 17 on one side close to the mixing cavity 3, the second flow sensor 25 is provided with the second check valve 27 on one side close to the mixing cavity 3, and the output pipe 4 is provided with the third check valve 43, so that the ethane gas and the propane gas can only flow into the mixing cavity 3 from the first inlet pipe 1 and the second inlet pipe 2 respectively, and the ethane-propane mixed gas can only flow from the mixing cavity 3 to the output pipe 4 and the liquefaction cavity 5, preventing gas backflow;When the ethane gas flow at the first flow sensor 15 in the first inlet pipe 1 reaches the first predetermined value, the first check valve 17 is closed;When the propane gas flow at the second flow sensor 25 in the second inlet pipe 2 reaches the second predetermined value, the second check valve 27 is closed;Similarly, when all the ethane-propane mixed gas in the mixing cavity 3 reaches the liquefaction cavity 5, the third check valve 43 is closed.

[0035] Similarly, the third diaphragm valve 42 is arranged between the barometer 41 and the third check valve 43, and the third diaphragm valve 42 is closed in an emergency to prevent any gas from passing to the liquefaction cavity 5 when any instrument on the first inlet pipe 1, the second inlet pipe 2 and the output pipe 4 fails.

[0036] The utility model discloses a freezing agent preparation device for frozen transmission electron microscope, simple structure, respectively through the ethane inlet pipe and propane inlet pipe two kinds of gas are introduced to the mixing cavity mixes and then exports ethane-propane mixed gas from the output pipe, and mixed gas can obtain the freezing agent that maintains liquid state under ultralow temperature after liquefaction, and by the restraint gas flow direction and flow, can obtain the mixed gas of target ratio, and the preparation operation of freezing agent is simple, and the success is high and the repeatability is strong, and the preparation cost is low.

[0037] Embodiment two, still as Figs. 1 to 3 Shown, only for one embodiment of the utility model, on the basis of embodiment one, the utility model discloses a freezing agent preparation device for frozen transmission electron microscope, output interface 44 is provided to the one end of output pipe 4 away from mixing cavity 3, and output interface 44 is connected to liquefaction cavity 5 through the pipe 45 of drawing out, and the ethane-propane mixed gas obtained is exported to liquefaction cavity 5 from output pipe 4 and is liquefied, and then can obtain the freezing agent.

[0038] And, the liquefaction cavity 5 outside is provided with freezing cavity 51, and the freezing cavity 51 is filled with liquid nitrogen with the temperature of 77K, and the outer wall of liquefaction cavity 5 is heat conduction piece, so that the liquefaction cavity 5 is surrounded by 77K liquid nitrogen environment, so that the ethane-propane mixed gas can be fully liquefied under 77K ultralow temperature environment after being introduced into liquefaction cavity 5, and the freezing agent that maintains liquid state is obtained, of course, the pipe 45 of drawing out and the upper side of liquefaction cavity 5 are communicated, and the mixed gas is liquefied after entering liquefaction cavity 5 from the upper side, and then falls under gravity, and will not block the pipe 45 of drawing out or backflow from the pipe 45 of drawing out.

[0039] Embodiment three, still as Figs. 1 to 3 Shown, only for one embodiment of the utility model, on the basis of any one of the above embodiments, the utility model discloses a freezing agent preparation device for frozen transmission electron microscope, first entering interface 11 is provided to the one end of first entering pipe 1 away from mixing cavity 3, and first filter 12 is arranged on the side of first entering interface 11 close to mixing cavity 3, and first gas quality controller 16 is arranged between first flow sensor 15 and first one-way valve 17, second entering interface 21 is provided to the one end of second entering pipe 2 away from mixing cavity 3, and second filter 22 is arranged on the side of second entering interface 21 close to mixing cavity 3, and second gas quality controller 26 is arranged between second flow sensor 25 and second one-way valve 27.

[0040] In addition, first pressure reducing valve 14 is arranged between first diaphragm valve 13 and first flow sensor 15, and second pressure reducing valve 24 is arranged between second diaphragm valve 23 and second flow sensor 25.

[0041] Therefore, the gas entering the first inlet pipe 1 and the second inlet pipe 2 is pure and impurity-free, and the gas is pure and high in quality, so that the gas mixing effect is better.

[0042] In summary, the ethane gas enters the first inlet pipe 1 through the first inlet interface 11, sequentially passes through the first filter 12, the first diaphragm valve 13, the first pressure reducing valve 14, the first flow sensor 15, the first gas quality controller 16 and the first check valve 17 and then enters the mixing cavity 3; similarly, the propane gas enters the second inlet pipe 2 through the second inlet interface 21, sequentially passes through the second filter 22, the second diaphragm valve 23, the second pressure reducing valve 24, the second flow sensor 25, the second gas quality controller 26 and the second check valve 27 and then enters the mixing cavity 3.

[0043] In addition, after the ethane-propane mixed gas obtained after uniform mixing in the mixing cavity 3 enters the output pipe 4, sequentially passes through the gas pressure gauge 41, the third diaphragm valve 42 and the third check valve 43 and finally passes through the output interface 44 through the outlet pipe 45 and enters the liquefaction cavity 5.

[0044] Embodiment four, still as Figs. 1 to 3 shown, only one embodiment of the present application, on the basis of any of the above embodiments, the present application is a kind of refrigerant preparation device for cryogenic transmission electron microscope, the mixed cavity 3 is communicated with exhaust pipe 6.

[0045] Before gas mixing, waste gas in the mixing cavity 3 can be discharged through the exhaust pipe 6, or the inhomogeneous gas in the mixing cavity 3 can be discharged when the mixed gas is just introduced and the mixing ratio is not stable, or the residual gas after mixing failure or use can be discharged.

[0046] In the present application, the exhaust pipe 6 is provided with an exhaust interface 63 at one end away from the mixing cavity 3; the fourth diaphragm valve 61 is arranged on the exhaust pipe 6; the fourth check valve 62 is arranged between the fourth diaphragm valve 61 and the exhaust interface 63; the fourth diaphragm valve 61 also plays a role in shutting off the gas in special cases, and the fourth check valve 62 only allows the exhaust gas to flow out of the mixing cavity 3 in one direction.

[0047] After the exhaust gas enters the exhaust pipe 6 from the mixing cavity 3, it sequentially passes through the fourth diaphragm valve 61 and the fourth check valve 62 and is discharged from the exhaust interface 63.

[0048] As one of the embodiments of the utility model, the mixed cavity 3 and the liquefaction cavity 5 are provided with a partition plate 7; in fact, the first inlet pipe 1, the second inlet pipe 2, the mixed cavity 3, the output pipe 4 and the waste pipe 6 are all on one side of the partition plate 7; and then the liquefaction cavity 5 is on the other side of the partition plate 7.

[0049] Here, the partition plate 7 is provided with a shockproof layer 71 on the side close to the mixed cavity 3; the side of the partition plate 7 close to the first inlet pipe 1, the second inlet pipe 2, the mixed cavity 3, the output pipe 4 and the waste pipe 6, namely the side of the shockproof layer 71, is a normal-temperature part, and needs to control pressure and detect data, and needs a shockproof stable working environment; the partition plate 7 is provided with a heat insulation layer 72 on the side close to the liquefaction cavity 5; the side of the partition plate 7 close to the liquefaction cavity 5, namely the side of the heat insulation layer 72, is a low-temperature part; although the outer side of the freezing cavity 51 is certainly a heat insulation material, it is impossible to avoid that the side of the partition plate 7 close to the heat insulation layer 72 is a low-temperature environment side; the heat insulation layer 72 can stably guarantee that the low temperature does not invade the other side when the freezing cavity 51 leaks, and the whole refrigerant preparation is more stable and safe.

[0050] As one of the embodiments of the utility model, the first diaphragm valve 13, the second diaphragm valve 23, the third diaphragm valve 42 and the fourth diaphragm valve 61 are all pneumatic diaphragm valves, and the gas shut-off effect is better.

[0051] As one of the embodiments of the utility model, the first inlet pipe 1 and the second inlet pipe 2 are both in communication with the lower side of the mixed cavity 3; the output pipe 4 and the waste pipe 6 are both in communication with the upper side of the mixed cavity 3.

[0052] The utility model discloses a refrigerant preparation device for cryogenic transmission electron microscope, simple structure is introduced to the mixed cavity with the ethane inlet pipe and propane inlet pipe respectively with two kinds of gas mixes and then exports ethane-propane mixed gas from the output pipe, and the mixed gas can obtain the refrigerant that maintains liquid state under ultralow temperature after liquefaction, and through the constraint gas flow direction and flow, can obtain the mixed gas of target ratio, and the preparation operation of refrigerant is simple, and the success is high and the repeatability is strong, and the preparation cost is low.

[0053] The utility model is not limited to the above specific embodiment, and the utility model can have various changes and changes. Any modification, equivalent replacement, improvement etc. according to the technical essence of the utility model to the above embodiment should be included in the protection scope of the utility model.

Claims

1. A cryogen preparation apparatus for a cryogenic transmission electron microscope, characterized by: The utility model provides a mixed cavity (3), first inlet pipe (1) for passing into ethane gas, second inlet pipe (2) for passing into propane gas and output pipe (4) for outputting mixed gas, first inlet pipe (1), second inlet pipe (2) and output pipe (4) all communicate with mixed cavity (3), first inlet pipe (1) is provided with first flow sensor (15), first flow sensor (15) is provided with first check valve (17) near one side of mixed cavity (3), first flow sensor (15) is provided with first diaphragm valve (13) away from one side of mixed cavity (3), second inlet pipe (2) is provided with second flow sensor (25), second flow sensor (25) is provided with second check valve (27) near one side of mixed cavity (3), second flow sensor (25) is provided with second diaphragm valve (23) away from one side of mixed cavity (3), output pipe (4) is provided with barometer (41) and third check valve (43), and one end of output pipe (4) away from mixed cavity (3) is connected with liquefaction cavity (5).

2. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: One end of output pipe (4) away from mixed cavity (3) is provided with output interface (44), and output interface (44) is connected with liquefaction cavity (5) through connecting-out pipe (45).

3. A device for preparing a cryogen for a cryogenic transmission electron microscope according to claim 2, characterized in that: Liquefaction cavity (5) is provided with refrigeration cavity (51) outside, and connecting-out pipe (45) communicates with the upper side of liquefaction cavity (5).

4. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: One end of first inlet pipe (1) away from mixed cavity (3) is provided with first inlet interface (11), first inlet interface (11) is provided with first filter (12) near one side of mixed cavity (3), and first gas quality controller (16) is arranged between first flow sensor (15) and first check valve (17), one end of second inlet pipe (2) away from mixed cavity (3) is provided with second inlet interface (21), second inlet interface (21) is provided with second filter (22) near one side of mixed cavity (3), and second gas quality controller (26) is arranged between second flow sensor (25) and second check valve (27).

5. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: First diaphragm valve (13) and first flow sensor (15) are provided with first pressure reducing valve (14) between, and second diaphragm valve (23) and second flow sensor (25) are provided with second pressure reducing valve (24) between.

6. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: Third diaphragm valve (42) is arranged between barometer (41) and third check valve (43).

7. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: Mixed cavity (3) is communicated with exhaust pipe (6), one end of exhaust pipe (6) away from mixed cavity (3) is provided with exhaust interface (63), fourth diaphragm valve (61) is arranged on exhaust pipe (6), and fourth check valve (62) is arranged between fourth diaphragm valve (61) and exhaust interface (63).

8. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 1, wherein: Partition plate (7) is arranged between mixed cavity (3) and liquefaction cavity (5).

9. A cryogen preparation apparatus for a cryogenic transmission electron microscope according to claim 8, wherein: The partition plate (7) is provided with a shockproof layer (71) on the side close to the mixing cavity (3); the partition plate (7) is provided with a heat insulation layer (72) on the side close to the liquefaction cavity (5).

10. The apparatus for preparing a cryogen for a cryogenic transmission electron microscope of claim 7, wherein: The first entering pipe (1) and the second entering pipe (2) are communicated with the lower side of the mixing cavity (3); the output pipe (4) and the waste pipe (6) are communicated with the upper side of the mixing cavity (3).

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