Adjustable quantitative liquid adding container and grinding liquid mixing device

Abstract

The utility model provides an adjustable quantitative liquid adding container and a grinding liquid mixing device, and belongs to the technical field of quantitative adding. The container comprises a constant volume container body and an overflow pipe. The constant volume container body is used for measuring first liquid of a specific volume. The constant volume device body comprises a first liquid adding opening used for adding first liquid into the constant volume device body and a first liquid discharging opening used for discharging the first liquid. The first liquid adding device is connected with the first liquid adding opening, an opening and closing valve is arranged at the first liquid discharging opening, and a mounting hole is formed in the constant volume device body. One end of the overflow pipe extends into the constant volume container main body through the mounting hole, the other end of the overflow pipe is exposed outside the constant volume container main body, the length of the overflow pipe extending into the constant volume container main body is adjustable, and first liquid higher than the top of the overflow pipe in the constant volume container main body can be completely discharged through the overflow pipe. The adjustable quantitative liquid adding container disclosed by the utility model can ensure that a solution can be accurately measured, and excessive liquid adding is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to quantitative adding technical field especially, relates to adjustable quantitative liquid adding container and grinding liquid mixing device. BACKGROUND

[0002] With the continuous progress of the semiconductor field and the continuous expansion of the semiconductor manufacturing industry, the demand for chemicals related to semiconductor manufacturing is also increasing. In semiconductor manufacturing process, the same kind of chemical with different concentrations is often needed, such as HF49%, HF5%, HF1%, HF0.5% and the like. Before preparation, the amount of the required stock solution and the amount of pure water for dilution are calculated, and then the two are mixed to obtain the required concentration of chemical.

[0003] In the preparation of the above-mentioned chemical with a specific concentration, a specific amount of dilution water is first added to the mixing barrel according to the previous calculation, and then a specific amount of stock solution is added to the dilution water for mixing according to the previous calculation. Therefore, accurately measuring a specific amount of stock solution is crucial for preparing a specific concentration of chemical.

[0004] The method used by the prior art to measure a specific amount of stock solution is that under the control of the control end, the liquid adding device directly adds a specific amount of solution to the measuring cylinder, and then pours the solution in the measuring cylinder into pure water for dilution to obtain the diluted mixed solution. However, when a system failure occurs or an error is input by the operator at the control end, the amount of stock solution added to the measuring cylinder will exceed the required amount, resulting in a substandard concentration of the prepared mixed solution, which affects subsequent semiconductor manufacturing. INVENTION CONTENTS

[0005] An object of the present utility model is to solve the problem that in the prior art, when measuring a specific amount of stock solution, a system failure or an operator's mistake causes the amount of stock solution added to the measuring cylinder to exceed the required amount.

[0006] In particular, the present utility model provides an adjustable quantitative liquid adding container, comprising:

[0007] A constant volume container body for measuring a specific volume of a first liquid, the constant volume container body comprising a first liquid adding port for adding the first liquid to the inside of the constant volume container body and a first liquid discharge port for discharging the first liquid, a first liquid adding device connected to the first liquid adding port, an on-off valve provided at the first liquid discharge port, and a mounting hole provided on the constant volume container body;

[0008] An overflow pipe, one end of which extends into the constant container body through the mounting hole and the other end of which is exposed outside the constant container body, the length of the overflow pipe extending into the constant container body being adjustable and the overflow pipe being capable of discharging all the first liquid in the constant container body above the top of the overflow pipe.

[0009] Further, the overflow pipe is defined in a pipe fixing member defined in the mounting hole.

[0010] Further, the constant container body is a sealed body, and the region of the constant container body at the top of the overflow pipe is provided with a first air inlet pipe and a first air outlet pipe, the first air inlet pipe being used to increase the air pressure in the constant container body and accelerate the discharge of the first liquid from the first liquid outlet hole.

[0011] In particular, the utility model provides a kind of polishing liquid mixing device, including the adjustable liquid container and the mixing barrel connected with the adjustable liquid container and the controller for controlling the operation of the device, and the mixing barrel is used to pass into at least one other liquid different from the first liquid.

[0012] Further, the mixing barrel is provided with an opening, and the opening is connected with the first liquid outlet hole; the mixing barrel is also provided with a second liquid inlet hole for liquid addition, and the second liquid inlet hole is connected with a second liquid inlet device storing a second liquid; the mixing barrel is internally provided with a pump body, and under the driving of the pump body, the first liquid and the second liquid in the mixing barrel are mixed to form a mixed liquid; the controller is electrically connected with the first liquid inlet device and the second liquid inlet device, and when the liquid amount in the constant container body and the mixing barrel reaches a preset value, the controller controls the first liquid inlet device and the second liquid inlet device to stop liquid addition; the mixing barrel also includes a second liquid outlet hole for liquid discharge.

[0013] Further, the mixing barrel is provided with an external pipeline, one end of the external pipeline is connected with the pump body, and the other end of the external pipeline is connected with the mixing barrel; the pump body guides the mixed liquid into the external pipeline, and then the mixed liquid is guided into the mixing barrel through the external pipeline to form a cycle.

[0014] Further, the polishing liquid mixing device also includes a cleaning pipe extending into the mixing barrel and used for cleaning the inner wall of the mixing barrel.

[0015] Further, the cleaning pipe includes a cleaning liquid pipe and a pressurizing pipe connected with the cleaning liquid pipe.

[0016] Further, the cleaning liquid pipe includes a plurality of pipe groups.

[0017] Further, the mixing barrel is a closed barrel, a second air inlet pipe and a second air outlet pipe are arranged at the part of the mixing barrel above the liquid level of the mixing liquid, the second air inlet pipe is used for filling inert gas into the mixing barrel, and the impurity gas in the mixing barrel is discharged through the second air outlet pipe.

[0018] The utility model discloses the beneficial effects are:

[0019] 1. Set overflow pipe in the fixed container body, and adjust the length of the overflow pipe into the fixed container body according to the quantity of the first solution calculated in advance, when the quantity of the first solution added into the fixed container body exceeds the calculated quantity in advance due to system failure or operator's mistake, the redundant first solution can overflow from the overflow pipe, and the quantity of the first solution is more accurate.

[0020] 2. The overflow pipe is arranged in the pipeline fixing part, and further through the cooperation of the snap ring and the sleeve, the length of the overflow pipe into the fixed container body can be adjusted, and the overflow pipe is firmly limited in the pipeline fixing part, and the reliability of the structure is improved.

[0021] 3. By setting the cleaning pipe, the cleanliness of the mixing barrel is ensured, the mixing barrel is prevented from rusting, and the mixture adhered to the inner wall of the mixing barrel in the previous stage is prevented from affecting the quality of the mixing liquid in the subsequent stage. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the structural schematic diagram of the adjustable fixed-quantity liquid adding container according to one embodiment of the utility model;

[0023] Figure 2 It is the schematic diagram of the pipeline fixing part according to one embodiment of the utility model;

[0024] Figure 3 It is the schematic diagram of the grinding fluid mixing device according to one embodiment of the utility model.

[0025] In the drawing:

[0026] 100 - adjustable quantitative liquid adding container; 1 - container main body; 2 - overflow pipe; 3 - first liquid adding port; 4 - first liquid discharging port; 5 - on-off valve; 6 - pipe fixing member; 7 - PFA joint; 8 - PFA nut; 9 - clasp ring; 10 - clasp sleeve; 11 - first air inlet pipe; 12 - first air outlet pipe; 13 - mixing bucket; 14 - controller; 15 - second liquid adding port; 16 - second liquid discharging port; 17 - overflow sensor; 18 - electronic scale; 19 - electronic scale head; 20 - external pipe; 21 - pump body; 22 - nozzle; 23 - measuring instrument; 24 - liquid level sensor; 25 - leakage sensor; 26 - cleaning pipe; 261 - cleaning liquid pipe; 2611 - high-purity water pipe; 2612 - dissolving agent pipe; 262 - pressurizing pipe; 27 - rotary nozzle; 28 - second air inlet pipe; 29 - second air outlet pipe; 30 - pressure sensor. DETAILED DESCRIPTION

[0027] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for the purpose of description, only the parts related to the present application are shown in the drawings, but not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0028] The terms "comprising" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0029] In this document, the term "embodiment" means that the specific features, structures or characteristics described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it mutually exclusive or alternative to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0030] Reference should be made to Figure 1The utility model discloses a adjustable quantitative liquid adding container 100, including constant volume container main part 1 and overflow pipe 2. Constant volume container main part 1 is used to measure the specific volume of first liquid according to the calculation in advance. The first liquid is the specific amount of raw liquid in semiconductor manufacturing. The first liquid is added to the inside of constant volume container main part 1 by first liquid adding device (not shown) from first liquid adding port 3, and then is discharged from first liquid discharging port 4 after measuring. To ensure that the first liquid does not leak during measurement and can be discharged in time after measurement, in an embodiment, an open-close valve 5 is arranged at first liquid discharging port 4. When adding the first liquid to the inside of constant volume container main part 1, the open-close valve 5 is closed, and then the first liquid is discharged by opening the open-close valve 5 after measurement.

[0031] Please refer to Figure 1 Constant volume container main part 1 is provided with a mounting hole, and overflow pipe 2 extends into the inside of constant volume container main part 1 from one end through the mounting hole and exposes the other end outside constant volume container main part 1. The length of overflow pipe 2 extending into constant volume container main part 1 is adjustable, and the first liquid inside constant volume container main part 1 higher than the top of overflow pipe 2 can be completely discharged by overflow pipe 2. In specific operation, the length of overflow pipe 2 extending into constant volume container main part 1 is adjusted to an appropriate position according to the calculation in advance, and the open-close valve 5 is closed, and then the first liquid adding device adds the liquid into the inside of constant volume container main part 1. When the added amount of the first liquid is too much due to system failure or operator error, the excess first liquid overflows from overflow pipe 2 according to the overflow effect, and when the liquid level of the first liquid is flush with the top of overflow pipe 2, the first liquid no longer overflows, and the actual amount of the first liquid inside constant volume container main part 1 is the same as the calculated amount. Finally, the open-close valve 5 is opened, and the first liquid is discharged. Through the above arrangement, the actual amount of the first liquid measured in constant volume container main part 1 is always the same as the calculated amount, so that the amount of the measured first liquid is more accurate.

[0032] For the problem of how much the amount of the first liquid obtained is when overflow pipe 2 extends into constant volume container main part 1 at different lengths, the amount can be determined in advance by calculation according to the volume of constant volume container main part 1 and the volume of overflow pipe 2. In an embodiment, constant volume container main part 1 is a transparent body, and scale lines are arranged on the outer side wall of constant volume container main part 1. When the top of overflow pipe 2 is flush with the corresponding scale line, the amount of the measured first liquid is equal to the corresponding scale value.

[0033] Please refer to Figure 1 In the utility model, overflow pipe 2 is limited in pipeline fixing part 6, and pipeline fixing part 6 is limited in the mounting hole. Please refer to Figure 2 In an embodiment, PFA joint 7 is arranged in the mounting hole, PFA joint 7 is threadedly connected with the mounting hole, overflow pipe 2 is fixed in PFA joint 7, and the length of overflow pipe 2 extending into constant volume container main part 1 is adjusted by rotating PFA joint 7, so that the adjustment range is more accurate.

[0034] To ensure that the overflow pipe 2 is more firmly installed in the pipe fixing member 6, in an embodiment, the pipe fixing member 6 further comprises a PFA nut 8, and a snap ring 9 and a sleeve 10 installed in the PFA nut 8, the overflow pipe 2 is confined in the PFA nut 8, the snap ring 9 and the sleeve 10, and the PFA nut 8 is screwed with the PFA joint 7. The PFA nut 8 is tightened to make the sleeve 10 press the snap ring 9, and then the snap ring 9 is deformed in the radial direction of the overflow pipe 2 and clamps the overflow pipe 2 to form a hoop, so that the overflow pipe 2 is firmly installed in the pipe fixing member 6, and the reliability of the adjustable quantitative liquid adding container 100 is improved.

[0035] In an embodiment, a pressure sensor 30 is arranged between the first liquid adding device and the first liquid adding port 3 to detect the pressure when the first liquid is added, so as to ensure the safety in operation.

[0036] The container body 1 in the above embodiment can be a barrel body with one end open. In another embodiment, to avoid the first liquid from being contaminated when the first liquid is added, the container body 1 is arranged as a sealed body, and the region at the top of the overflow pipe 2 is provided with a first air inlet pipe 11 and a first air outlet pipe 12, and the first air inlet pipe 11 is used to increase the air pressure inside the container body 1 and accelerate the discharge of the first liquid from the first liquid outlet port 4. Since the container body 1 is a sealed body, and the valve 5 is in the closed state when the first liquid is added, the atmospheric pressure may cause the first liquid to be unable to be added into the container body 1. The first air outlet pipe 12 is arranged to balance the air pressure inside the container body 1, so as to facilitate the addition of the first liquid. To avoid the gas from being leaked when the first air inlet pipe 11 is filled with air into the container body 1, a valve (not shown) is arranged on the first air outlet pipe 12.

[0037] By arranging the container body 1 as a sealed body, the liquid is prevented from being contaminated when the first liquid is added, and the first air inlet pipe is arranged on the container body 1, which is beneficial to the discharge of the first liquid from the container body 1.

[0038] The utility model also provides a kind of grinding fluid mixing device, including above adjustable quantitative liquid adding container 100 and the mixing barrel 13 connected with adjustable quantitative liquid adding container 100, there is also controller 14 for controlling device operation.The mixing barrel 13 is used to introduce at least one other liquid different from the first liquid.In the field of semiconductor manufacturing, to obtain specific concentration of drug solution, according to pre-calculation, specific amount of dilution high-purity water is added into mixing barrel 13, then specific amount of stock solution is added into dilution pure water.

[0039] Please refer to Figure 3The mixing barrel 13 is provided with an opening connected with the first liquid outlet 4 of the liquid metering container to add the first liquid into the mixing barrel 13. The mixing barrel 13 is also provided with a second liquid inlet 15 for adding liquid, which is connected with a second liquid container (not shown) storing the second liquid. In the field of semiconductor manufacturing, the second liquid is high-purity water. The high-purity water is added into the mixing barrel 13 in a pre-calculated amount, and then the stock solution is added for mixing. The mixing methods include, for example, the mixing barrel 13 is provided with a pump body 21, and under the driving of the pump body 21, the first liquid and the second liquid in the mixing barrel 13 are mixed to form a mixed liquid.

[0040] The controller 14 is electrically connected with the first liquid container and the second liquid container, and when the liquid volume in the container body 1 and the mixing barrel 13 reaches a preset value, the controller 14 controls the first liquid container and the second liquid container to stop adding liquid. The mixing barrel 13 also includes a second liquid outlet 16 for discharging the mixed liquid. Specifically, the overflow pipe 2 is provided with an overflow sensor 17, which is triggered when the overflow liquid flows out through the overflow pipe 2. The overflow sensor 17 is electrically connected with the controller 14 and sends an overflow signal to the controller 14. After receiving the overflow signal, the controller 14 controls the first liquid container to stop adding liquid. An electronic scale 18 is arranged on the mixing barrel 13 and electrically connected with an electronic scale head 19 and the controller 14. The electronic scale 18 is used to weigh the mass of the liquid in the mixing barrel 13, and the electronic scale head 19 is used to display the mass information. In specific operation, when the amount of high-purity water added to the mixing barrel 13 reaches the pre-calculated value, the electronic scale 18 sends a weighing signal to the controller 14, and the controller 14 controls the second liquid container to stop adding liquid after receiving the weighing signal. Through the above automatic method, the amount of solution added is accurately determined.

[0041] In terms of the mixing method of the first liquid and the second liquid, in one embodiment, the mixing barrel 13 is provided with an external pipeline 20, one end of which is connected with the pump body 21, and the other end is connected with the mixing barrel 13. The pump body 21 guides the mixed liquid into the external pipeline 20, and then into the mixing barrel 13 to form a circulation, and the mixing of the first liquid and the second liquid is realized in the circulation process. Further, referring to Figure 1 After the external pipeline 20 guides the mixed liquid into the mixing barrel 13, it is released into the mixing barrel 13 through two opposite nozzles 22 to realize the sufficient mixing of the first liquid and the second liquid.

[0042] To check whether the solution concentration in the mixed solution meets the standard, a measuring instrument 23 is arranged on the external pipeline 20 to detect the mixed solution concentration in real time, so as to ensure the quality of the mixed solution. Meanwhile, a liquid level sensor 24 can be arranged on the mixing barrel 13 to detect the liquid level in the mixing barrel 13. Further, a leakage sensor 25 is arranged on the mixing barrel 13 to detect whether the mixing barrel 13 leaks, so as to ensure the safety of the mixing process.

[0043] In one embodiment, the polishing liquid mixing device further comprises a cleaning pipe 26 arranged in the mixing barrel 13 to clean the inner wall of the mixing barrel 13. By arranging the cleaning pipe 26, the mixing barrel 13 can be cleaned before and after the mixing is completed, so as to avoid that the mixture adhering to the inner wall of the mixing barrel 13 after the mixing causes the mixing barrel 13 to rust, and meanwhile, avoid that the mixture left in the previous stage affects the quality of the mixed solution in the subsequent stage.

[0044] Please refer to Figure 3 In one embodiment, the cleaning pipe 26 comprises a cleaning liquid pipe 261 and a pressurizing pipe 262 connected with the cleaning liquid pipe 261. Since part of the mixed solution will adhere to the inner wall of the mixing barrel 13 after the mixing, when the flow of the cleaning liquid is small, it is difficult to clean the stubbornly adhered mixed solution. Therefore, the pressurizing pipe 262 is connected with the cleaning liquid pipe 261, and when the high-pressure gas flow is introduced into the pressurizing pipe 262, the flow rate of the cleaning liquid is increased, and the cleaning effect of the cleaning pipe 26 is improved.

[0045] In one embodiment, a rotating spray head 27 is arranged at the end of the cleaning pipe 26. When the cleaning liquid flows through the rotating spray head 27, the rotating spray head 27 will rotate, so as to realize the dead angle-free cleaning of the inner wall of the mixing barrel 13.

[0046] In one embodiment, the cleaning liquid pipe 261 comprises a plurality of pipe groups. Please refer to Figure 3 The cleaning liquid pipe 261 comprises a high-purity water pipe 2611 and a dissolving agent pipe 2612. When the adhered mixed solution on the inner wall of the mixing barrel 13 is easy to clean, only the high-purity water pipe 2611 is used for cleaning. When the adhered mixed solution on the inner wall of the mixing barrel 13 is difficult to clean, the corresponding dissolving agent can be added, so as to ensure the cleaning effect.

[0047] In one embodiment, the mixing barrel 13 is a closed barrel, and the part of the mixing barrel 13 above the mixed solution liquid level is provided with a second air inlet pipe 28 and a second air outlet pipe 29. The second air inlet pipe 28 is used to fill inert gas into the mixing barrel 13, and the impurity gas in the mixing barrel 13 is discharged through the second air outlet pipe 29. Since part of the liquid is easy to cause oxidation-reduction reaction when contacting with oxygen or other active gas, the quality of the mixed solution is affected. By arranging the mixing barrel 13 as a sealed barrel, and discharging the impurity gas in the mixing barrel 13 through the second air inlet pipe 28 and the second air outlet pipe 29, the quality of the mixed solution is ensured.

[0048] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but can not therefore be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled person in the art, without departing from the utility model concept, several modifications and improvements can be made, which belong to the protection range of the utility model. Therefore, the protection range of the utility model patent should be subject to the appended claims.

Claims

1. An adjustable dosing container, characterized in that, include: A fixed container body is used to measure a specific volume of a first liquid, the fixed container body comprising a first liquid adding port for adding the first liquid into the fixed container body and a first liquid discharging port for discharging the first liquid, a first liquid adding device is connected to the first liquid adding port, an on-off valve is provided at the first liquid discharging port, and a mounting hole is provided on the fixed container body; An overflow pipe, one end of which extends into the interior of the fixed container body through the mounting hole, and the other end is exposed outside the fixed container body. The length of the overflow pipe extending into the interior of the fixed container body is adjustable and all the first liquid in the interior of the fixed container body that is higher than the top of the overflow pipe can be discharged through the overflow pipe.

2. The adjustable dosing reservoir of claim 1, wherein, The overflow pipe is defined in a pipe fixing member, and the pipe fixing member is defined in the mounting hole.

3. The adjustable dosing reservoir of claim 1, wherein, The fixed container body is a sealed body, and the area of ​​the fixed container body located at the top of the overflow pipe is provided with a first air inlet pipe and a first exhaust pipe. The first air inlet pipe is used to increase the internal air pressure of the fixed container body and accelerate the discharge of the first liquid from the first drainage hole.

4. A polishing liquid mixing device characterized by comprising: It comprises the adjustable quantitative liquid adding container according to any one of claims 1 to 3, a mixing barrel connected to the adjustable quantitative liquid adding container, and a controller for controlling the operation of the device, wherein the mixing barrel is used to introduce at least one other liquid different from the first liquid.

5. The polishing liquid mixing device according to claim 4, wherein The mixing barrel is provided with an opening, which is connected to the first liquid discharge port. The mixing barrel is also provided with a second liquid addition port for adding liquid, and the second liquid addition port is connected to a second liquid charger storing a second liquid. A pump body is provided inside the mixing barrel. Driven by the pump body, the first liquid and the second liquid in the mixing barrel are mixed with each other to form a mixed liquid. The controller is electrically connected to the first liquid charger and the second liquid charger. When the amount of liquid in the fixed container body and the mixing barrel reaches a preset value, the controller controls the first liquid charger and the second liquid charger to stop adding liquid. The mixing barrel also includes a second liquid discharge port for discharging liquid.

6. The polishing liquid mixing device according to claim 5, wherein The mixing barrel is provided with an external pipe, one end of the external pipe is connected to the pump body, and the other end is connected to the mixing barrel. After the pump body introduces the mixed liquid into the external pipe, the mixed liquid is then introduced into the mixing barrel through the external pipe to form a circulation.

7. The polishing liquid mixing device according to claim 5, wherein The utility model also comprises a cleaning pipe which extends into the interior of the mixing barrel and is used for cleaning the inner wall of the mixing barrel.

8. The polishing liquid mixing device according to claim 7, wherein The cleaning pipe includes a cleaning liquid pipe and a pressurizing pipe connected to the cleaning liquid pipe.

9. The polishing liquid mixing device according to claim 8, wherein The cleaning liquid pipe includes a plurality of pipe groups.

10. The polishing liquid mixing device according to claim 5, wherein The mixing barrel is a closed barrel, and the portion of the mixing barrel located above the liquid level of the mixed liquid is provided with a second air inlet pipe and a second air exhaust pipe. The second air inlet pipe is used to fill the mixing barrel with inert gas so that the impurity gas in the mixing barrel is discharged through the second exhaust pipe.

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