Cleaning mechanism

Abstract

The utility model relates to the technical field of semiconductors, in particular to a cleaning mechanism which comprises a sealing outer cover, an inlet and outlet arranged on the sealing outer cover, a sealing mechanism used for opening and closing the inlet and outlet, a supporting seat connected to the sealing outer cover and a static electricity removing assembly installed on the sealing outer cover, and the supporting seat is used for bearing materials; when the materials are cleaned, the sealing mechanism opens the inlet and outlet, the materials penetrate through the inlet and outlet and are placed on the supporting base, and the static electricity removing assembly neutralizes static electricity on the surfaces of the materials and blows off dust on the surfaces of the materials. The material cleaning device can smoothly clean materials without generating scratches on the surfaces of the materials, so that the structural attractiveness of the materials is guaranteed, the structural stability of the materials is improved, and the influence on the materials in the cleaning process is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field especially is a kind of cleaning mechanism. BACKGROUND

[0002] Semiconductor is a kind of electronic material with conductivity between conductor and insulator, which can be used to make semiconductor devices and integrated circuits. The excellent performance of semiconductor drives the development of semiconductor processing industry.

[0003] In the process of cleaning and processing the surface of the semiconductor, the traditional processing method has certain disadvantages: when cleaning the surface, the dust removal tool is easy to scratch the surface of the semiconductor, thereby affecting the appearance of the semiconductor, and even affecting the subsequent normal use of the semiconductor. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of cleaning mechanism in view of the deficiency of prior art, material cleaning is smoothly realized and no scratch is generated on the surface of material, so as to guarantee the structure appearance of material, improve material structure stability, reduce the influence on material in cleaning process.

[0005] In order to solve the above technical problems, the utility model adopts the following technical scheme:

[0006] The utility model provides a kind of cleaning mechanism, including sealed outer cover, the entrance and exit of being arranged in sealed outer cover, the sealing mechanism for on-off entrance and exit, the support base being connected to sealed outer cover, the static electricity removal subassembly being installed in sealed outer cover, the support base is used to carry material;

[0007] When cleaning material, the sealing mechanism opens the entrance and exit, the material passes through the entrance and exit and is placed in support base, the static electricity in the static electricity removal subassembly is neutralized on the surface of material, and dust on the surface of material is blown off.

[0008] Among them, the support base is rotatably connected to the sealed outer cover, the sealed outer cover is connected with the driving mechanism driven connected with the support base, and the driving mechanism drives the support base to rotate.

[0009] Among them, the top of the support base is provided with an adsorption area, and the adsorption area is attached to the bottom surface of the material when the material is placed in the support base.

[0010] Among them, the inner side bottom of the sealed outer cover is installed with support frame, the driving mechanism is installed in the support frame, the bottom end of the sealed outer cover is provided with a conical guide cover, and the bottom end of the guide cover is communicated with a conduit.

[0011] Among them, the sealing mechanism includes linear module, and the sealing body driven connected with linear module, the linear module is installed in the inner side of sealed outer cover, the linear module drives the sealing body to move upwards to the required position, so that the sealing body blocks the entrance and exit.

[0012] The inner end of the entrance and exit is communicated with a receiving groove, and one end of the sealing body is located in the receiving groove.

[0013] When the material needs to be placed or taken out, the linear module drives the sealing body to move downward along the receiving groove, the sealing body is away from the entrance and exit, so that the entrance and exit are communicated, and the material is smoothly placed on the support seat or taken out from the support seat.

[0014] When the material is smoothly placed on the support seat, the linear module drives the sealing body to move upward to the required position, so that the sealing body blocks the entrance and exit, and one end of the material extends into the accommodation space.

[0015] The outer end of the conduit is connected with a dust collector.

[0016] The electrostatic removal assembly comprises a wind knife and an ion generator, the wind knife is installed on the inner side of the sealing cover, and the ion generator is connected to the air outlet end of the wind knife.

[0017] When the wind knife works, the wind knife blows the ions generated by the ion generator to the surface of the material, so as to neutralize the static electricity on the surface of the material; and the wind knife blows to the surface of the material at the same time, so as to blow off the dust on the surface of the material.

[0018] The sealing cover comprises a cover body and a side plate, the entrance and exit are arranged on the cover body, the sealing mechanism and the support seat are connected to the cover body, the electrostatic removal assembly is installed on the inner side of the cover body, one side of the cover body is provided with a dismounting opening, the side plate covers the dismounting opening and is detachably connected to the cover body, and a handle is installed on the outer side of the side plate.

[0019] The utility model discloses beneficial effects:

[0020] In actual application, the sealing mechanism opens the entrance and exit, the material passes through the entrance and exit and is placed on the support seat, then the sealing mechanism makes the entrance and exit closed, the electrostatic removal assembly neutralizes the static electricity on the surface of the material and blows off the dust on the surface of the material, in the cleaning process, the material does not contact the electrostatic removal assembly, the material cleaning is smoothly realized and no scratch is generated on the surface of the material, so that the structure of the material is guaranteed to be beautiful, the structure stability of the material is improved, and the influence on the material in the cleaning process is reduced. DRAWINGS

[0021] Figure 1 It is the three-dimensional structure schematic diagram of the cleaning mechanism.

[0022] Figure 2 It is the three-dimensional structure schematic diagram of the cleaning mechanism lacking a side plate.

[0023] Figure 3Structure diagram of support seat.

[0024] Figure 4 Structure diagram of explosion of sealing cover.

[0025] Figure 5 Structure diagram of local structure of sealing cover, sealing mechanism and material.

[0026] Figure 6 Structure diagram of sealing cover and dust collector.

[0027] Figure 7 Structure diagram of static electricity removing assembly.

[0028] Figure 8 Structure diagram of cover body and side plate.

[0029] 01, material; 1, sealing cover;

[0030] 11, cover body; 111, dismounting opening; 12, side plate; 121, handle;

[0031] 101, entrance and exit; 1011, receiving groove; 102, support frame; 103, flow guide cover;

[0032] 2, sealing mechanism; 21, linear module; 22, sealing body; 221, containing space;

[0033] 3, support seat; 301, adsorption area;

[0034] 4, static electricity removing assembly; 41, air knife; 42, ion generator;

[0035] 5, driving mechanism; 6, conduit; 7, dust collector. DETAILED DESCRIPTION

[0036] In order to facilitate the understanding of those skilled in the art, the present application will be further described below in conjunction with the embodiments and the accompanying drawings. The specific embodiments of the present application will be described below, and it should be noted that, in the specific description of these embodiments, the present specification cannot describe all the features of the actual embodiments in detail for the purpose of concise and brief description.

[0037] Reference Figures 1 to 8 The utility model provides a kind of cleaning mechanism, including sealing cover 1, the entrance and exit 101 of being arranged in sealing cover 1, the sealing mechanism 2 for the on-off entrance and exit 101, support seat 3 being connected to sealing cover 1, static electricity removing assembly 4 being installed in sealing cover 1, the support seat 3 is used to carry material 01;

[0038] Reference Figure 1 、 2As shown, in actual application, the material 01 is a semiconductor material, which can be a wafer, a graphite ring, a graphite disc, or a combination of any at least two materials 01, so as to place various types of materials 01 and improve the cleaning range of the material 01; the sealing mechanism 2 opens the entrance 101, an external mechanical hand is used, the mechanical hand is provided with a suction arm to smoothly grasp the material 01, pass the material 01 through the entrance 101 and place it on the support seat 3, and then the sealing mechanism 2 closes the entrance 101, the static electricity in the static electricity removing assembly 4 is neutralized on the surface of the material 01, and the dust on the surface of the material 01 is blown off. In the cleaning process, the material 01 does not contact the static electricity removing assembly 4, the cleaning of the material 01 is smoothly realized, and no scratches are generated on the surface of the material 01, so as to protect the structural beauty of the material 01, improve the structural stability of the material 01, and reduce the influence on the material 01 in the cleaning process.

[0039] Reference Figure 2 As shown, in the embodiment, the support seat 3 is rotationally connected to the sealing cover 1, the sealing cover 1 is connected with a driving mechanism 5 drivingly connected with the support seat 3, and the driving mechanism 5 drives the support seat 3 to rotate. In actual application, the driving mechanism 5 is a servo motor or a driving motor, which drives the support seat 3 to rotate, realizes the cleaning and dust removal of the surface in all directions, and improves the cleaning effect of the material 01.

[0040] Reference Figure 3 As shown, in the embodiment, the top of the support seat 3 is provided with a suction area 301, and the suction area 301 is attached to the bottom surface of the material 01 when the material 01 is placed on the support seat 3. In actual application, the suction area 301 is externally connected with negative pressure, and the material 01 is adsorbed by the negative pressure when the material 01 is placed on the support seat 3, so as to stably place the material 01 on the support seat 3, accurately position the material 01, protect the positioning accuracy of the material 01, and improve the cleaning efficiency of the material 01.

[0041] Reference Figure 2 , 4 As shown, in the embodiment, the inside bottom of the sealing cover 1 is provided with a support frame 102, the driving mechanism 5 is installed on the support frame 102, the bottom end of the sealing cover 1 is provided with a conical fairing 103, and the bottom end of the fairing 103 is communicated with a conduit 6. The driving mechanism 5 is stably supported by the support frame 102, the dust blown off by the material 01 passes through the support frame 102 and is discharged along the fairing 103 and the conduit 6, the fairing 103 guides the dust, the dust is quickly discharged, and the dust cleaning efficiency is improved.

[0042] Reference Figure 5As shown, in the embodiment, the sealing mechanism 2 comprises a linear module 21 and a sealing body 22 drivenly connected with the linear module 21, the linear module 21 is installed inside the sealing cover 1, and the linear module 21 drives the sealing body 22 to move upward to a required position so that the sealing body 22 blocks the access opening 101; in actual application, the linear module 21 can be a pneumatic cylinder, an oil cylinder or an electric cylinder, the sealing body 22 is driven to move by the linear module 21 to smoothly block the access opening 101, which facilitates the sealing of the sealing cover 1 and prevents dust or residues from splashing out of the sealing cover 1 during the cleaning of the material 01, thereby improving the cleaning efficiency of the material 01; when the sealing body 22 is driven by the linear module 21 to move away from the access opening 101, the access opening 101 is communicated, which facilitates the smooth taking and placing of the material 01.

[0043] Reference Figure 5 As shown, in the embodiment, the inner end of the access opening 101 is communicated with a receiving groove 1011, one end of the sealing body 22 is located in the receiving groove 1011, and the other end of the top of the sealing body 22 is provided with a containing space 221; in actual application, when it is necessary to take and place the material 01, the linear module 21 drives the sealing body 22 to move downward along the receiving groove 1011, the sealing body 22 moves away from the access opening 101 so that the access opening 101 is communicated, the material 01 is smoothly placed on the support seat 3 or taken out from the support seat 3, and the taking and placing of the material 01 is smoothly realized; when the material 01 is smoothly placed on the support seat 3, the linear module 21 drives the sealing body 22 to move upward to a required position so that the sealing body 22 blocks the access opening 101 and the one end of the material 01 extends into the containing space 221, the inside of the sealing cover 1 is smoothly closed, and the one end of the material 01 is ingeniously extended into the containing space 221, the sealing body 22 and the material 01 are compactly arranged, and space occupation is saved; specifically, the placement position of the material 01 is opposite to the access opening 101, when the sealing body 22 moves away from the access opening 101, the material 01 is horizontally moved toward the access opening 101, which facilitates the smooth taking and placing of the material 01 and prevents the material 01 from shaking during the transfer.

[0044] Reference Figure 6 As shown, in the embodiment, the outer end of the conduit 6 is connected with a dust collector 7; the dust collector 7 absorbs and processes dust and waste gas generated during the cleaning of the material 01, and then discharges the dust and waste gas to the outside, thereby avoiding the waste gas from remaining in the dust collector 7 and ensuring that the cleaning environment is clean and tidy.

[0045] Reference Figure 7As shown, in the embodiment, the static electricity removing assembly 4 comprises a wind knife 41 and an ion generator 42, the wind knife 41 is installed at the inner top of the sealing cover 1, and the ion generator 42 is connected to the air outlet end of the wind knife 41; in actual application, the material 01 is placed in the sealing cover 1, the entrance 101 is blocked, the sealing cover 1 is closed, then the wind knife 41 and the ion generator 42 are started, the wind knife 41 blows the ions generated by the ion generator 42 to the surface of the material 01, so as to neutralize the static electricity on the surface of the material 01; and the wind knife 41 blows to the surface of the material 01 at the same time, so as to blow off the dust on the surface of the material 01, successfully realize the cleaning and dust removal of the material 01, and effectively eliminate the static electricity on the surface of the material 01.

[0046] Reference Figure 8 As shown, in the embodiment, the sealing cover 1 comprises a cover body 11 and a side plate 12, the entrance 101 is arranged on the cover body 11, the sealing mechanism 2 and the supporting seat 3 are connected to the cover body 11, the static electricity removing assembly 4 is installed on the inner side of the cover body 11, one side of the cover body 11 is provided with a dismounting opening 111, the side plate 12 covers the dismounting opening 111 and is detachably connected to the cover body 11, and a handle 121 is installed on the outer side of the side plate 12; in actual application, the handle 121 is arranged to smoothly pull the side plate 12, the side plate 12 is connected to the cover body 11 through bolts, when the side plate 12 is removed, the sealing mechanism 2, the supporting seat 3 and the static electricity removing assembly 4 in the cover body 11 can be smoothly replaced or maintained, the service life of the structure is improved, and the normal use of the cleaning mechanism is ensured.

[0047] The above is only the preferred embodiment of the present application, and does not limit the present application in any form. Although the present application is disclosed as the preferred embodiment, it is not intended to limit the present application. Any skilled person in the art can make some changes or modifications to the above disclosed technical content without departing from the technical solution of the present application, and any simple modification, equivalent change and modification of the above embodiment within the technical solution of the present application are all within the scope of the present application.

Claims

1. A cleaning mechanism, characterized by, The utility model provides a sealing cover (1), the entrance (101) of setting in sealing cover (1), the sealing mechanism (2) for the on-off entrance (101), the support seat (3) of connecting in sealing cover (1), install in sealing cover (1) static electricity removing subassembly (4), the support seat (3) is used for carrying material (01); When cleaning material (01), the sealing mechanism (2) opens the entrance (101), the material (01) passes through the entrance (101) and places in the support seat (3), the static electricity of the surface of material (01) is neutralized in the static electricity removing subassembly (4), and dust on the surface of material (01) is blown off.

2. The cleaning mechanism of claim 1, wherein, The support seat (3) is rotatably connected to the sealing cover (1), the sealing cover (1) is connected with the driving mechanism (5) drivenly connected with the support seat (3), and the driving mechanism (5) drives the support seat (3) to rotate.

3. The cleaning mechanism of claim 2, wherein, The top of the support seat (3) is provided with an adsorption area (301), and the adsorption area (301) is attached to the bottom surface of the material (01) when the material (01) is placed on the support seat (3).

4. The cleaning mechanism of claim 2, wherein, The inside bottom of the sealing cover (1) is provided with a support frame (102), the driving mechanism (5) is installed on the support frame (102), and the bottom end of the sealing cover (1) is provided with a conical fairing (103), and the bottom end of the fairing (103) is communicated with a conduit (6).

5. The cleaning mechanism of claim 1, wherein, The sealing mechanism (2) comprises a linear module (21) and a sealing body (22) drivenly connected with the linear module (21), the linear module (21) is installed on the inside of the sealing cover (1), the linear module (21) drives the sealing body (22) to move upward to a required position, so that the sealing body (22) blocks the entrance (101).

6. The cleaning mechanism of claim 5, wherein, The inner end of the entrance (101) is communicated with a receiving groove (1011), one end of the sealing body (22) is located in the receiving groove (1011), and the other end of the top of the sealing body (22) is provided with a containing space (221). When it is needed to take or place the material (01), the linear module (21) drives the sealing body (22) to move downward along the receiving groove (1011), the sealing body (22) is away from the entrance (101), so that the entrance (101) is communicated, and the material (01) is smoothly placed on the support seat (3) or taken out from the support seat (3); When the material (01) is smoothly placed on the support seat (3), the linear module (21) drives the sealing body (22) to move upward to a required position, so that the sealing body (22) blocks the entrance (101), and one end of the material (01) extends into the containing space (221).

7. The cleaning mechanism of claim 4, wherein, The outer end of the conduit (6) is connected with a dust collector (7).

8. The cleaning mechanism of claim 1, wherein, The static electricity removing subassembly (4) comprises a wind knife (41) and an ion generator (42), the wind knife (41) is installed on the inside top of the sealing cover (1), and the ion generator (42) is connected to the air outlet end of the wind knife (41). When the air knife (41) works, the air knife (41) blows the ions generated by the ion generator (42) to the surface of the material (01), thereby neutralizing the static electricity on the surface of the material (01); and the air knife (41) blows to the surface of the material (01) at the same time, so as to blow off the dust on the surface of the material (01).

9. The cleaning mechanism of claim 1, wherein, The sealing cover (1) comprises a cover body (11) and a side plate (12), the outlet (101) is arranged on the cover body (11), the sealing mechanism (2) and the supporting seat (3) are connected to the cover body (11), the static electricity removing assembly (4) is installed on the inner side of the cover body (11), one side of the cover body (11) is provided with a dismounting opening (111), the side plate (12) covers the dismounting opening (111) and is detachably connected to the cover body (11), and a handle (121) is installed on the outer side of the side plate (12).

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