Air tightness detection clamp and air tightness detection device

Abstract

The utility model belongs to the technical field of semiconductor equipment welding, and discloses an air tightness detection clamp and an air tightness detection device, and the air tightness detection clamp comprises a limiting body and a sealing mechanism. The to-be-detected piece comprises an axial top end opening, an axial bottom end opening and a radial opening which are communicated. The limiting body is provided with an exhaust pipeline communicated with the axial bottom end opening, the limiting body abuts against the bottom end of the to-be-detected piece in a sealed mode so as to seal the axial bottom end opening, the sealing mechanism comprises an axial top end sealing assembly and a radial sealing assembly, and when air tightness detection needs to be conducted on the to-be-detected piece, the limiting body seals the axial bottom end opening, and the limiting body seals the radial bottom end opening. The axial top end sealing assembly seals the axial top end opening, the radial sealing assembly seals the radial opening, the axial top end sealing assembly and the limiting body clamp a to-be-detected piece, and then the to-be-detected piece is vacuumized through the exhaust pipeline so as to achieve detection of the sealing performance of the welding position of the to-be-detected piece.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment welding technical field especially relates to airtightness detection clamp and airtightness detection device. BACKGROUND

[0002] Semiconductor refers to the conductivity performance between conductor and insulator at room temperature. Semiconductor has application in integrated circuit, consumer electronics, communication system, photovoltaic power generation, illumination, high -power power conversion etc. field, and diode is the device of adopting semiconductor, for example. No matter from the angle of science and technology or economic development, the importance of semiconductor is very huge. The core unit in most electronic products, such as computer, mobile phone or digital recorder, has extremely close association with semiconductor.

[0003] The existing semiconductor equipment is usually welded by semiconductor workpiece, and the welding quality influences the performance of the whole set of equipment, and leakage at the welding position will cause the whole set of equipment to be unable to use. Therefore, in the production process of semiconductor equipment, the semiconductor equipment after welding often needs to be tested by vacuumizing, that is, the openings of the semiconductor equipment are sealed, and then the sealing performance of the welding position of the semiconductor equipment is tested.

[0004] In the prior art, silicone rubber plates are usually used to plug holes, and multiple people need to cooperate to press the leak-stopping silicone rubber during detection, which is prone to leakage at the opening, and the helium detection equipment cannot normally perform vacuumizing on the semiconductor equipment. Alternatively, independent hole-plugging parts are used, and the hole-plugging parts are fixed by screws, but since the openings of the semiconductor equipment are relatively many, the operation convenience is poor.

[0005] Therefore, there is an urgent need for an airtightness detection clamp and airtightness detection device to solve the above problems. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing an airtightness detection clamp and airtightness detection device to solve the problems of easy leakage at the opening end and poor operation convenience in the prior art.

[0007] According to the above idea, the technical scheme adopted by the utility model is as follows:

[0008] The airtightness detection clamp, the piece to be detected includes an axial top opening, an axial bottom opening and a radial opening in communication, and the airtightness detection clamp includes:

[0009] The limiting body has an exhaust pipeline in communication with the axial bottom opening, and the limiting body is sealed against the bottom end of the piece to be detected to seal the axial bottom opening;

[0010] The sealing mechanism comprises an axial top end sealing assembly and a radial sealing assembly, the axial top end sealing assembly is capable of sealingly abutting to the top end of the to-be-detected member to seal the axial top end opening, and the radial sealing assembly is capable of sealingly abutting to the side of the to-be-detected member to seal the radial opening, and the axial top end sealing assembly and the limiting body cooperatively clamp the to-be-detected member.

[0011] Further, the sealing mechanism further comprises an axial bottom end sealing assembly, the axial bottom end sealing assembly is detachably connected to the limiting body, the axial bottom end sealing assembly is provided with a communication hole, one end of the communication hole is in communication with the exhaust pipeline, and the other end of the communication hole is in communication with the axial bottom end opening, the axial bottom end sealing assembly sealingly abuts to the bottom end of the to-be-detected member to seal the axial bottom end opening, and the axial bottom end sealing assembly and the axial top end sealing assembly cooperatively clamp the to-be-detected member.

[0012] Further, the sealing mechanism further comprises a plurality of fixing members, the limiting body is provided with a plurality of first mounting holes at intervals in the circumferential direction, the axial bottom end sealing assembly is provided with a plurality of second mounting holes at intervals in the circumferential direction, the plurality of first mounting holes and the plurality of second mounting holes correspond to each other, and the plurality of fixing members correspond to the plurality of first mounting holes and the plurality of second mounting holes, and the fixing members are arranged in the corresponding first mounting holes and second mounting holes.

[0013] Further, the exhaust pipeline is sealingly arranged in the limiting body, one end of the exhaust pipeline is in communication with one end of the communication hole, and the other end of the exhaust pipeline extends out of the limiting body.

[0014] Further, the sealing mechanism has a sealing state and an unsealing state.

[0015] When the sealing mechanism is in the sealing state, the axial top end sealing assembly sealingly abuts to the top end of the to-be-detected member to seal the axial top end opening, and the radial sealing assembly sealingly abuts to the side of the to-be-detected member to seal the radial opening.

[0016] When the sealing mechanism is in the unsealing state, the axial top end sealing assembly has a gap with the top end of the to-be-detected member to unseal the axial top end opening, and the radial sealing assembly has a gap with the side of the to-be-detected member to unseal the radial opening.

[0017] Further, the axial top end sealing assembly comprises a first abutting member and a first cover plate, one end of the first abutting member is connected to the limiting body, and the other end of the first abutting member is capable of moving relative to the limiting body.

[0018] When the sealing mechanism is in the sealing state, the first cover plate is sealed against the top end of the to-be-detected piece, and the first abutting piece is abutted against one end of the first cover plate away from the top end of the to-be-detected piece to seal the axial top end opening.

[0019] When the sealing mechanism is in the unsealing state, the first cover plate has a gap with the top end of the to-be-detected piece to unseal the axial top end opening.

[0020] Further, the axial top end sealing assembly further comprises a sealing piece, the sealing piece is matched in shape with the top end of the to-be-detected piece, and the sealing piece is located between the top end of the to-be-detected piece and the first cover plate when the sealing mechanism is in the sealing state.

[0021] Further, the radial sealing assembly comprises a second abutting piece and a second cover plate, one end of the second abutting piece is connected with the limiting body, the other end of the second abutting piece is connected with the second cover plate, and the second abutting piece can drive the second cover plate to move relative to the to-be-detected piece.

[0022] When the sealing mechanism is in the sealing state, the second cover plate is abutted against the side of the to-be-detected piece to seal the radial opening.

[0023] When the sealing mechanism is in the unsealing state, the second cover plate has a gap with the side of the to-be-detected piece to unseal the radial opening.

[0024] Further, the to-be-detected piece comprises a plurality of spaced-apart radial openings, and the sealing mechanism comprises a plurality of radial sealing assemblies, the plurality of radial sealing assemblies are spaced apart on the limiting body, the plurality of radial sealing assemblies correspond to the plurality of radial openings one by one, and the radial sealing assembly can be abutted against the side of the to-be-detected piece to seal the corresponding radial opening.

[0025] The air tightness detection device comprises the air tightness detection clamp and a gas detection equipment, and the gas detection equipment is connected in communication with one end of the exhaust pipeline away from the axial bottom end opening.

[0026] The air tightness detection device comprises the air tightness detection clamp and a gas detection equipment, and the gas detection equipment is connected in communication with one end of the exhaust pipeline away from the axial bottom end opening.

[0027] The utility model provides a kind of air tightness detection clamp and air tightness detection device, the air tightness detection clamp includes limit body, and sealing mechanism.To be detected piece includes the axial top end opening, axial bottom end opening and radial opening of intercommunication.The limit body has the exhaust duct with the axial bottom end opening intercommunication, and limit body sealing abuts at the bottom end of to be detected piece, to seal axial bottom end opening, sealing mechanism includes axial top end sealing assembly and radial sealing assembly, axial top end sealing assembly can sealing abuts at the top end of to be detected piece, to seal axial top end opening, radial sealing assembly can sealing abuts at the side of to be detected piece, to seal radial opening, axial top end sealing assembly and limit body mutually cooperate and hold to be detected piece.When needing to carry out air tightness detection to to be detected piece, limit body sealing abuts at the bottom end of to be detected piece, to seal axial bottom end opening, axial top end sealing assembly sealing abuts at the top end of to be detected piece, to seal axial top end opening, radial sealing assembly sealing abuts at the side of to be detected piece, to seal radial opening, axial top end sealing assembly and limit body mutually cooperate and hold to be detected piece, then through the exhaust duct with the axial bottom end opening intercommunication, to be detected piece is pumped, to realize the detection of the sealing property of the welding place of to be detected piece, without using independent hole plugging parts, easy to operate, and to be detected piece will not appear the situation that leakage occurs at opening place by artificial plugging, the sealing property of the opening place of to be detected piece is better, and detection result is accurate. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the drawings needed to be used in the following description of the embodiments of the utility model will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to the contents of the embodiments of the utility model and the drawings by those skilled in the art without creating labor.

[0029] Figure 1 It is the structure schematic view when the air tightness detection clamp provided by the first embodiment of the utility model clamps to be detected piece;

[0030] Figure 2 It is the structure schematic view when the sealing mechanism of the air tightness detection clamp provided by the first embodiment of the utility model is in sealing state;

[0031] Figure 3 It is the structure schematic view of the air tightness detection clamp provided by the first embodiment of the utility model;

[0032] Figure 4 It is the structure schematic view when the sealing mechanism of the air tightness detection clamp provided by the first embodiment of the utility model is in unsealing state;

[0033] Figure 5 is a structure schematic view of the air tightness detection clamp when placing a detected piece, provided by the embodiment one of the utility model;

[0034] Figure 6 is another visual angle structure schematic view of the air tightness detection clamp when the sealing mechanism is in the sealed state, provided by the embodiment one of the utility model;

[0035] Figure 7 is another visual angle structure schematic view of the air tightness detection clamp when clamping the detected piece, provided by the embodiment one of the utility model.

[0036] In the figure:

[0037] 1, limiting body;11, exhaust duct;12, supporting piece;2, sealing mechanism;21, axial top end sealing assembly;211, first abutting piece;212, first cover plate;213, sealing piece;214, first cushion block;22, axial bottom end sealing assembly;221, communication hole;222, second mounting hole;23, radial sealing assembly;231, second abutting piece;232, second cover plate;233, second cushion block;100, detected piece;101, axial top end opening;102, radial opening. DETAILED DESCRIPTION

[0038] In order to make the technical problems solved by the utility model, the technical scheme adopted and the technical effects reached more clear, the following will be further explained by specific implementation manners and combining with the drawings. It can be understood that the specific embodiments described here are only used to explain the utility model, not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the parts related to the utility model are shown in the drawings, not all.

[0039] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0040] In the description of the utility model, unless otherwise explicitly defined and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrated;It can be mechanical connection, or electrical connection;It can be directly connected, or indirectly connected through intermediate medium, it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0041] In the utility model, unless another definite provision and limitation, first feature is in second feature "on" or "under" can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.Moreover, first feature is "on", "above" and "upper surface" of second feature includes that first feature is directly above and obliquely above second feature, or only indicates that horizontal height of first feature is higher than second feature.First feature is "under", "below" and "under surface" of second feature includes that first feature is directly below and obliquely below second feature, or only indicates that horizontal height of first feature is less than second feature.In the description of embodiment, if not special explanation, "multiple" specifically refers to two or more than two.

[0042] In the description of embodiment, the orientation or position relation of the terms "on", "under", "right", etc.is based on the orientation or position relation shown in the drawings, only for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore can not be understood as the limitation of the utility model.In addition, the terms "first", "second" are only used to distinguish in description, and do not have special meaning.

[0043] It should be noted that when an element is referred to as "fixed to" or "set to" another element, it can be directly on another element or there can be a middle element.

[0044] The technical scheme of the utility model will be further illustrated below by specific embodiments in combination with the drawings.

[0045] Embodiment one

[0046] The embodiment provides airtightness detection clamp, and the sealing property of the welding position of the to-be-detected piece is detected, independent plugging parts are not needed, operation is convenient, and the opening of the to-be-detected piece does not appear leakage due to manual plugging, the sealing property of the opening of the to-be-detected piece is better, and the detection result is accurate.

[0047] As Figures 1-4As shown, the to-be-detected piece 100 includes an axially top end opening 101, an axially bottom end opening (not shown in the figure) and a radial opening 102 in communication. The air tightness detection fixture includes a limiting body 1 and a sealing mechanism 2. The limiting body 1 has an exhaust pipeline 11 in communication with the axially bottom end opening, and the limiting body 1 is sealed against the bottom end of the to-be-detected piece 100 to seal the axially bottom end opening. The sealing mechanism 2 includes an axially top end sealing assembly 21 and a radial sealing assembly 23. The axially top end sealing assembly 21 can be sealed against the top end of the to-be-detected piece 100 to seal the axially top end opening 101. The radial sealing assembly 23 can be sealed against the side of the to-be-detected piece 100 to seal the radial opening 102. The axially top end sealing assembly 21 and the limiting body 1 cooperatively clamp the to-be-detected piece 100. It can be understood that when the air tightness of the to-be-detected piece 100 needs to be detected, the limiting body 1 is sealed against the bottom end of the to-be-detected piece 100 to seal the axially bottom end opening. The axially top end sealing assembly 21 is sealed against the top end of the to-be-detected piece 100 to seal the axially top end opening 101. The radial sealing assembly 23 is sealed against the side of the to-be-detected piece 100 to seal the radial opening 102. The axially top end sealing assembly 21 and the limiting body 1 cooperatively clamp the to-be-detected piece 100. Then, the to-be-detected piece 100 is vacuumized through the exhaust pipeline 11 in communication with the axially bottom end opening to realize the detection of the sealing performance of the welded part of the to-be-detected piece 100. No independent hole plugging part is needed, the operation is convenient, and the leakage at the opening of the to-be-detected piece 100 caused by manual plugging does not occur. The sealing performance of the opening of the to-be-detected piece 100 is good, and the detection result is accurate.

[0048] Further, as shown in Figure 1 and Figure 5 The sealing mechanism 2 is arranged at one end of the limiting body 1, and multiple height-adjustable supporting pieces 12 are arranged at the other end of the limiting body 1 in a circumferential direction. It can be understood that by arranging multiple height-adjustable supporting pieces 12, the inclination angle of the limiting body 1 can be adjusted by multiple supporting pieces 12 to be suitable for different support surfaces. Even if the support surface is inclined or uneven, the limiting body 1 can be kept in a horizontal state, further improving the alignment accuracy of the sealing mechanism 2 to the to-be-detected piece 100 and improving the sealing effect of the to-be-detected piece 100.

[0049] Exemplarily, the limiting body 1 is a rectangular plate, the plurality of supporting members 12 are bolts, the axial top end sealing assembly 21 and the radial sealing assembly 23 are arranged at one end of the rectangular plate, the plurality of bolts are arranged at the other end of the rectangular plate, and the other end of the rectangular plate is provided with threaded holes matched with the bolts. The height of the bolts relative to the rectangular plate can be changed by rotating the bolts, and the plurality of bolts are matched together to adjust the inclination angle of the rectangular plate, that is, the inclination angle of the limiting body 1 is adjustable. The supporting member 12 is provided with 2, 3, 4, 5, 6, etc. In this embodiment, four height-adjustable supporting members 12 are arranged at the other end of the limiting body 1 along the circumference thereof.

[0050] Further, as shown in Figure 1 , Figure 3 and Figure 4 , the sealing mechanism 2 further comprises an axial bottom end sealing assembly 22, which is detachably connected to the limiting body 1. The axial bottom end sealing assembly 22 is provided with a communication hole 221, one end of which is in communication with the exhaust pipeline 11, and the other end is in communication with the axial bottom end opening. The axial bottom end sealing assembly 22 sealingly abuts against the bottom end of the detected piece 100 to seal the axial bottom end opening. The axial bottom end sealing assembly 22 and the axial top end sealing assembly 21 cooperate to clamp the detected piece 100. Specifically, the axial bottom end sealing assembly 22 is located at one end of the limiting body 1. It can be understood that by arranging the axial bottom end sealing assembly 22 to sealingly abut against the bottom end of the detected piece 100, the requirement for the surface quality of the limiting body 1 is reduced, and the surface of the limiting body 1 does not need to be completely sealed against the axial bottom end opening of the detected piece 100, which facilitates the production and manufacture of the limiting body 1. In addition, the limiting body 1 sealingly abuts against the bottom end of the detected piece 100, which will cause wear after a long period of use, which is not conducive to the sealing abutment of the limiting body 1 against the bottom end of the detected piece 100, and will affect the sealing effect of the limiting body 1 on the axial bottom end opening. Directly replacing the limiting body 1 also requires disconnection of the axial top end sealing assembly 21 and the radial sealing assembly 23 from the limiting body 1. However, by arranging the detachable axial bottom end sealing assembly 22 to sealingly abut against the bottom end of the detected piece 100, the axial bottom end sealing assembly 22 can be replaced in time when it is worn, the sealing effect of the axial end opening of the detected piece 100 is good, and only the axial bottom end sealing assembly 22 needs to be replaced, which saves time and effort and is convenient to operate.

[0051] Exemplarily, the axial bottom end sealing assembly 22 is a circular cover plate, and the communication hole 221 is arranged in the circular cover plate along the axial direction of the circular cover plate.

[0052] Further, with reference to Figure 3The sealing mechanism 2 further comprises a plurality of fixing members (not shown in the figure), the limiting body 1 is provided with a plurality of first mounting holes (not shown in the figure) at intervals in the circumferential direction, the axial bottom end sealing assembly 22 is provided with a plurality of second mounting holes 222 at intervals in the circumferential direction, the plurality of first mounting holes and the plurality of second mounting holes 222 correspond one-to-one, and the plurality of fixing members correspond one-to-one, and the fixing members are arranged in the corresponding first mounting holes and second mounting holes 222. It can be understood that by arranging a plurality of fixing members arranged in the corresponding first mounting holes and second mounting holes 222, the axial bottom end sealing assembly 22 is detachably connected to the limiting body 1, and at the same time, the sealing between the axial bottom end sealing assembly 22 and the limiting body 1 and the stability of the axial bottom end sealing assembly 22 and the axial top end sealing assembly 21 limiting the test piece can be improved.

[0053] Exemplarily, the fixing member is a bolt, the first mounting hole and the second mounting hole 222 are respectively provided with a threaded hole matched with a threaded segment of the bolt, and the second mounting hole 222 is further provided with an accommodating groove communicated with the threaded hole at an end away from the limiting body 1. After the bolt is screwed into the second mounting hole 222 and the first mounting hole, the nut of the bolt is located in the accommodating groove to avoid interference with the butt joint of the test piece and the axial bottom end sealing assembly 22.

[0054] Further, with reference to Figure 3 The exhaust pipeline 11 is sealingly arranged in the limiting body 1, one end of the exhaust pipeline 11 is communicated with one end of the communication hole 221, and the other end of the exhaust pipeline 11 extends out of the limiting body 1. It can be understood that the exhaust pipeline 11 is sealingly arranged in the limiting body 1 and communicated with the communication hole 221, which avoids interference between the exhaust pipeline 11 and other structures arranged on the limiting body 1, damage, blockage and other situations, ensures the stability of the exhaust pipeline 11 for extracting gas, and facilitates the communication between the exhaust pipeline 11 and the gas detection equipment outside the limiting body 1.

[0055] Further, as Figure 2 , Figure 4 and Figure 6As shown, the sealing mechanism 2 has a sealing state and an unsealing state; when the sealing mechanism 2 is in the sealing state, the axial top end sealing assembly 21 is sealed against the top end of the to-be-detected piece 100 to seal the axial top end opening 101, and the radial sealing assembly 23 is sealed against the side of the to-be-detected piece 100 to seal the radial opening 102; when the sealing mechanism 2 is in the unsealing state, the axial top end sealing assembly 21 has a gap with the top end of the to-be-detected piece 100 to unseal the axial top end opening 101, and the radial sealing assembly 23 has a gap with the side of the to-be-detected piece 100 to unseal the radial opening 102. It can be understood that when the air tightness detection of the to-be-detected piece 100 is needed, the sealing mechanism 2 is in the sealing state, the axial top end opening 101 and the radial opening 102 are sealed respectively, and the to-be-detected piece 100 is clamped to realize the air tightness detection of the to-be-detected piece 100; after the air tightness detection of the to-be-detected piece 100 is completed, the sealing mechanism 2 can be in the unsealing state, the sealing of the axial top end opening 101 and the radial opening 102 can be released, and the clamping of the to-be-detected piece 100 can be released, at this time, the to-be-detected piece 100 can be taken out, a new to-be-detected piece 100 can be replaced, and the air tightness detection of the next to-be-detected piece 100 can be performed. Of course, it can be conceived that when the position adjustment of the to-be-detected piece 100 or the position adjustment of other structures is needed, the sealing mechanism 2 can also be in the unsealing state.

[0056] Further, as Figures 5-6As shown, the axial top end sealing assembly 21 comprises a first abutting member 211 and a first cover plate 212, one end of the first abutting member 211 is connected with the limiting body 1, the other end of the first abutting member 211 is movable relative to the limiting body 1, when the sealing mechanism 2 is in the sealing state, the first cover plate 212 is sealingly abutted to the top end of the detected piece 100, the first abutting member 211 is abutted to one end of the first cover plate 212 away from the top end of the detected piece 100, so as to seal the axial top end opening 101, when the sealing mechanism 2 is in the unsealing state, the first cover plate 212 has a gap with the top end of the detected piece 100, so as to unseal the axial top end opening 101. Specifically, the other end of the first abutting member 211 is movable relative to the top of the limiting body 1. It can be understood that the other end of the first abutting member 211 is movable relative to the top of the limiting body 1, when the sealing mechanism 2 is in the sealing state, the first cover plate 212 is sealingly abutted to the top end of the detected piece 100, the first abutting member 211 is abutted to one end of the first cover plate 212 away from the top end of the detected piece 100, so as to seal the axial top end opening 101, and improve the sealing effect, when the sealing mechanism 2 is in the unsealing state, the first cover plate 212 has a gap with the top end of the detected piece 100, the first abutting member 211 no longer applies pressure to the first cover plate 212, and no longer clamps the detected piece 100. Of course, in other embodiments, the first abutting member 211 and the first cover plate 212 can also be in a connected state, the first abutting member 211 directly drives the first cover plate 212 to move relative to the top end of the detected piece 100, so as to seal the axial top end opening 101 or unseal the axial top end opening 101.

[0057] Further, as shown in the figure, Figure 4 The axial top end sealing assembly 21 further comprises a sealing member 213, the shape of the sealing member 213 is matched with the top end of the detected piece 100, when the sealing mechanism 2 is in the sealing state, the sealing member 213 is located between the top end of the detected piece 100 and the first cover plate 212. It can be understood that by arranging the sealing member 213, when the first cover plate 212 is abutted to the top end of the detected piece 100, the sealing performance of the axial top end opening 101 can be further improved. Exemplarily, the sealing member 213 is a ring-shaped sealing rubber ring, a plurality of sealing convex points are arranged on the ring-shaped sealing rubber ring along the axial direction, the plurality of sealing convex points are all abutted to the first cover plate 212, and the sealing effect of the axial top end sealing assembly 21 on the axial top end opening 101 is further improved. The specific structure of the ring-shaped sealing rubber ring is prior art, and the present embodiment is not limited in detail.

[0058] Further, as shown in the figure, Figure 6As shown, the axial top end sealing assembly 21 further comprises a first pad 214, one end of the first pad 214 being connected with the limiting body 1, and one end of the first abutting piece 211 being connected with the other end of the first pad 214, so as to improve the height of the first abutting piece 211 relative to the limiting body 1, and facilitate the movement of the other end of the first abutting piece 211 to the top end of the to-be-detected piece 100 to abut against one end of the first cover plate 212 away from the top end of the to-be-detected piece 100, so as to facilitate the first abutting piece 211 to be applicable to to-be-detected pieces 100 of different heights.

[0059] Exemplarily, the first abutting piece 211 is a bottom surface fixed elbow clamp, for example, the first abutting piece 211 comprises a base, a driving shaft, a rocker arm, a clamp head and a connecting rod, the base is located at one end of the first abutting piece 211 and is fixed on the first pad 214, the driving shaft and the rocker arm are both rotationally connected with the base, one end of the connecting rod is rotationally connected with the driving shaft, and the other end of the connecting rod is rotationally connected with the rocker arm, the first cover plate 212 abuts against the top end of the to-be-detected piece 100, the driving shaft can drive the connecting rod to move, so as to drive the rocker arm to rotate, so that the clamp head abuts against one end of the first cover plate 212 away from the top end of the to-be-detected piece 100, or the clamp head is separated from the first cover plate 212. Specifically, the clamp head is located at the other end of the first abutting piece 211 and is adjustably connected with the rocker arm along the length direction of the rocker arm. It can be understood that the driving shaft can drive the clamp head to abut against one end of the first cover plate 212 away from the top end of the to-be-detected piece 100, so as to stably seal the axial top end opening 101 by the first cover plate 212, when the clamp head abuts against one end of the first cover plate 212 away from the top end of the to-be-detected piece 100, in the vertical direction, the clamp head and the rocker arm abut against the first cover plate 212 stably by relying on their own gravity, so as to exert a stable pressure on the first cover plate 212, and thus improve the sealing effect of the first cover plate 212 on the axial top end opening 101. Moreover, the clamp head can also be driven to be separated from the first cover plate 212 to release the limiting of the to-be-detected piece, and by adjusting the position of the clamp head, the first abutting piece 211 can be applicable to to-be-detected pieces 100 of different sizes, and for to-be-detected pieces of different sizes, the clamp head can be located on the axis of the corresponding axial top end opening 101, so as to improve the stability of the abutment of the first cover plate 212, stably seal the axial top end opening 101 by the first cover plate 212, and thus improve the sealing effect on the axial top end opening 101. In addition, the bottom surface fixed elbow clamp has a self-locking mechanism, after clamping the workpiece, it can be self-locked and kept in the clamped state without the need of continuously exerting external force, so as to ensure that the first cover plate 212 stably abuts against the top end of the to-be-detected piece 100 and improve the sealing effect. The specific structure, operation mode and self-locking mechanism of the bottom surface fixed elbow clamp are all prior art, and the present embodiment will not be described in detail.

[0060] Exemplarily, the first cover plate 212 is a circular cover plate, and the first cushion block 214 is a cuboid cushion block. Actual sizes of the circular cover plate and the cuboid cushion block can be determined according to use requirements, and the embodiment does not make specific limitation thereto.

[0061] Exemplarily, as shown in Figure 4 and Figure 7 , a circular boss (not shown in the figure) is coaxially arranged on the first cover plate 212, and the circular boss is located at one end of the first cover plate 212 facing the axial top end opening 101. When the first cover plate 212 abuts against the top end of the piece to be detected 100, the circular boss is located in the axial top end opening 101, and the side surface of the circular boss abuts against the inner wall of the axial top end opening 101. It can be understood that the structure strength of the first cover plate 212 is facilitated to be improved by arranging the circular boss, and the first cover plate 212 is not easy to deform when vacuumizing. In addition, the side surface of the circular boss abuts against the inner wall of the axial top end opening 101, which is beneficial to improve the sealing effect of the first cover plate 212 on the axial top end opening 101. Moreover, the circular boss is located in the axial top end opening 101, and cooperates with the first abutting piece 211 to limit the first cover plate 212 in different directions, thereby improving the stability of the first cover plate 212 sealingly abutting against the top end of the piece to be detected 100.

[0062] Further, as shown in Figure 3 , Figure 4 and Figure 6 , the radial sealing assembly 23 comprises a second abutting piece 231 and a second cover plate 232. One end of the second abutting piece 231 is connected with the limiting body 1, and the other end of the second abutting piece 231 is connected with the second cover plate 232. The second abutting piece 231 can drive the second cover plate 232 to move relative to the piece to be detected 100. Specifically, the second abutting piece 231 can drive the second cover plate 232 to move relative to the side of the piece to be detected 100. It can be understood that the second abutting piece 231 can drive the second cover plate 232 to move close to or away from the side of the piece to be detected 100, so as to realize the sealing or unsealing of the radial opening 102, which is convenient to operate.

[0063] It can be further conceived that, when the sealing mechanism 2 is in the sealing state, the second abutting piece 231 abuts against the side of the piece to be detected 100 to seal the radial opening 102. When the sealing mechanism 2 is in the unsealing state, the second cover plate 232 has a gap with the side of the piece to be detected 100 to unseal the radial opening 102.

[0064] Further, with reference to Figure 6The radial sealing assembly 23 further comprises a second pad 233, one end of the second pad 233 being connected with the limiting body 1, and one end of the second abutting piece 231 being connected with the other end of the second pad 233, so as to improve the height of the second abutting piece 231 relative to the limiting body 1, facilitate the other end of the second abutting piece 231 to drive the second cover plate 232 connected therewith to move to the side of the to-be-detected piece 100, and facilitate the second abutting piece 231 to be applicable to to-be-detected pieces 100 of different heights.

[0065] Exemplarily, the second abutting piece 231 is a side-fixed elbow clamp, and the specific component structure and movement mode thereof are similar to those of the bottom-fixed elbow clamp. The second abutting piece 231 is used in cooperation with the second cover plate 232 to abut against the side of the to-be-detected piece 100 and seal the radial opening 102 of the to-be-detected piece 100. It should be noted that the side-fixed elbow clamp comprises a base, a driving shaft, a connecting rod, and a rocker arm. The base is fixed on the limiting body 1, the driving shaft is rotationally connected to the base, one end of the connecting rod is rotationally connected to the driving shaft, the other end of the connecting rod is rotationally connected to the rocker arm, and the end of the rocker arm away from the connecting rod is connected with the second cover plate 232. In use, the driving shaft starts to rotate, the connecting rod rotates accordingly, the movement of the connecting rod causes the rocker arm to move in the horizontal direction, and the second cover plate 232 also moves horizontally to make the second cover plate 232 approach or move away from the radial opening 102. When the sealing mechanism 2 is in the sealing state, the second cover plate 232 is sealingly abutted against the side of the to-be-detected piece 100, the rotationally connected positions of the connecting rod and the driving shaft and the rocker arm and the rotationally connected position of the driving shaft and the base are approximately located on the same straight line, and at this time, the side-fixed elbow clamp is in a dead point position, so that the movement of the rocker arm can be prevented. In addition, in the above state, the side-fixed elbow clamp is in a self-locking mechanism, so that the second cover plate 232 is stably abutted against the side of the to-be-detected piece 100, and the sealing effect on the radial opening 102 is improved. The specific structure, movement mode and self-locking mechanism of the side-fixed elbow clamp are all prior art, and are not limited in the present embodiment. In addition, the second cover plate 232 is a circular cover plate, and the second pad 233 is a cuboid pad. The actual sizes of the circular cover plate and the cuboid pad can be determined according to the use requirements, and are not limited in the present embodiment.

[0066] Further, a sealing ring (not shown in the figure) is arranged on the end of the second cover plate 232 opposite to the side of the to-be-detected piece 100, so as to improve the sealing property between the second cover plate 232 and the radial opening 102, and further improve the accuracy of the air tightness test.

[0067] Exemplarily, as shown in FIG. 6, the second abutting piece 231 is a side-fixed elbow clamp, and the specific component structure and movement mode thereof are similar to those of the bottom-fixed elbow clamp. The second abutting piece 231 is used in cooperation with the second cover plate 232 to abut against the side of the to-be-detected piece 100 and seal the radial opening 102 of the to-be-detected piece 100. It should be noted that the side-fixed elbow clamp comprises a base, a driving shaft, a connecting rod, and a rocker arm. The base is fixed on the limiting body 1, the driving shaft is rotationally connected to the base, one end of the connecting rod is rotationally connected to the driving shaft, the other end of the connecting rod is rotationally connected to the rocker arm, and the end of the rocker arm away from the connecting rod is connected with the second cover plate 232. In use, the driving shaft starts to rotate, the connecting rod rotates accordingly, the movement of the connecting rod causes the rocker arm to move in the horizontal direction, and the second cover plate 232 also moves horizontally to make the second cover plate 232 approach or move away from the radial opening 102. When the sealing mechanism 2 is in the sealing state, the second cover plate 232 is sealingly abutted against the side of the to-be-detected piece 100, the rotationally connected positions of the connecting rod and the driving shaft and the rocker arm and the rotationally connected position of the driving shaft and the base are approximately located on the same straight line, and at this time, the side-fixed elbow clamp is in a dead point position, so that the movement of the rocker arm can be prevented. In addition, in the above state, the side-fixed elbow clamp is in a self-locking mechanism, so that the second cover plate 232 is stably abutted against the side of the to-be-detected piece 100, and the sealing effect on the radial opening 102 is improved. The specific structure, movement mode and self-locking mechanism of the side-fixed elbow clamp are all prior art, and are not limited in the present embodiment. In addition, the second cover plate 232 is a circular cover plate, and the second pad 233 is a cuboid pad. The actual sizes of the circular cover plate and the cuboid pad can be determined according to the use requirements, and are not limited in the present embodiment. Figure 5 and Figure 7As shown, the second cover plate 232 is coaxially provided with a circular boss (not shown in the figure) at one end thereof facing the radial opening 102. When the second cover plate 232 is sealingly abutted against the side of the piece to be detected 100, the circular boss is located in the radial opening 102, and the side surface of the circular boss is in abutment with the inner wall of the radial opening 102. It can be understood that the provision of the circular boss facilitates the improvement of the structural strength of the second cover plate 232, and the second cover plate 232 is less likely to be deformed when vacuumizing. In addition, the abutment of the side surface of the circular boss with the inner wall of the radial opening 102 is conducive to the improvement of the sealing effect of the second cover plate 232 on the radial opening 102, and the circular boss is located in the radial opening 102, cooperating with the second abutment member 231 to limit the second cover plate 232 in different directions, thereby improving the stability of the second cover plate 232 when sealingly abutting against the side of the piece to be detected 100.

[0068] Further, as shown in Figure 5 The piece to be detected 100 includes a plurality of spaced-apart radial openings 102, and the sealing mechanism 2 includes a plurality of radial sealing assemblies 23. The plurality of radial sealing assemblies 23 are spaced apart on the limiting body 1, and the plurality of radial sealing assemblies 23 correspond one-to-one to the plurality of radial openings 102. The radial sealing assembly 23 can abut against the side of the piece to be detected 100 to seal the corresponding radial opening 102. It can be understood that the plurality of radial sealing assemblies 23 correspond one-to-one to the plurality of radial openings 102, and are used to seal the plurality of radial openings 102, thereby saving labor.

[0069] For example, the radial sealing assembly 23 can be provided with 2, 3, 4, 5, etc. In this embodiment, the sealing mechanism 2 includes three spaced-apart radial sealing assemblies 23, which are respectively a radial first sealing assembly (not shown in the figure), a radial second sealing assembly (not shown in the figure), and a radial third sealing assembly (not shown in the figure), corresponding to three spaced-apart radial openings 102 of the piece to be detected 100, which are respectively a radial first opening (not shown in the figure), a radial second opening (not shown in the figure), and a radial third opening (not shown in the figure). Of course, in other embodiments, the radial sealing assembly 23 can be of other quantities, which can be determined by those skilled in the art according to the actual situation of the piece to be detected 100.

[0070] Embodiment Two

[0071] The embodiment provides a gas tightness detection device, which comprises the gas tightness detection clamp provided in the embodiment and a gas detection equipment (not shown in the figure), the gas detection equipment is connected with one end of the exhaust pipeline 11 away from the axial bottom end opening, so that the vacuumizing is performed on the detection piece 100, so that the detection on the sealing performance of the welding position of the detection piece 100 is realized, the independent hole blocking part is not needed, the operation is convenient, the leakage of the opening of the detection piece 100 caused by the manual blocking is avoided, the sealing performance of the opening of the detection piece 100 is better, and the detection result is accurate.

[0072] Exemplarily, the gas detection equipment is a helium detector, and the bellows of the helium detector is connected with one end of the exhaust pipeline 11 away from the axial bottom end opening. The specific structure and use mode of the helium detector are prior art, and the embodiment does not make specific limitation.

[0073] In the embodiment, the detection piece 100 is a welded vacuum piece, and the working process of the gas tightness detection device is shown in the following examples. Figure 3 Figure 4 Figure 6 The working process of the gas tightness detection device is as follows: first, the sealing mechanism 2 is installed on the limiting body 1, then the gas detection equipment is connected with one end of the exhaust pipeline 11 away from the axial bottom end opening, the other end of the communication hole 221 is blocked, the gas tightness of the exhaust pipeline 11 and the communication hole 221 itself is confirmed, then the welded vacuum piece is placed on the axial bottom end sealing assembly 22 of the sealing mechanism 2, the axial bottom end sealing assembly 22 is sealed and abuts against the bottom end of the welded vacuum piece, so that the axial bottom end opening is sealed, the axial top end sealing assembly 21 is sealed and abuts against the top end of the welded vacuum piece, so that the axial top end opening 101 is sealed, the axial bottom end sealing assembly 22 and the axial top end sealing assembly 21 clamp the welded vacuum piece, then the radial sealing assembly 23 is driven to seal and abut against the side of the welded vacuum piece, so that the radial opening 102 of the welded vacuum piece is sealed, finally the gas detection equipment is started to perform the gas tightness detection, after the detection is completed, the abutment of the radial sealing assembly 23 against the side of the welded vacuum piece and the abutment of the axial top end sealing assembly 21 against the top end of the welded vacuum piece are released, then the welded vacuum piece after the detection is taken out, and the gas tightness detection of the welded vacuum piece is completed. Then the next welded vacuum piece is prepared, and the above process is repeated to perform the gas tightness detection of the next welded vacuum piece.

[0074] ​​It should be noted that the above only the preferred embodiments of the present application and the use of technical principles. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, those skilled in the art can make various obvious changes, re-adjustment and replacement without departing from the scope of the present application. Therefore, although the above embodiments of the present application has been described in more detail, but the present application is not limited to the above examples, without departing from the concept of the present application, but also can include more other equivalent embodiments, and the scope of the present application is determined by the appended claims.

Claims

1. An air tightness detection jig characterized by, The to-be-detected piece (100) comprises an axial top end opening (101), an axial bottom end opening and a radial opening (102) in communication, and the air tightness detection clamp comprises: a limiting body (1) having an exhaust pipeline (11) in communication with the axial bottom end opening, and the limiting body (1) is sealed against the bottom end of the to-be-detected piece (100) to seal the axial bottom end opening; a sealing mechanism (2) comprising an axial top end sealing assembly (21) and a radial sealing assembly (23), the axial top end sealing assembly (21) is capable of being sealed against the top end of the to-be-detected piece (100) to seal the axial top end opening (101), and the radial sealing assembly (23) is capable of being sealed against the side of the to-be-detected piece (100) to seal the radial opening (102), and the axial top end sealing assembly (21) and the limiting body (1) cooperatively clamp the to-be-detected piece (100).

2. The hermeticity test fixture of claim 1, wherein, The sealing mechanism (2) further comprises an axial bottom end sealing assembly (22) detachably connected to the limiting body (1), the axial bottom end sealing assembly (22) is provided with a communication hole (221), one end of the communication hole (221) is in communication with the exhaust pipeline (11), and the other end of the communication hole (221) is in communication with the axial bottom end opening, the axial bottom end sealing assembly (22) is sealed against the bottom end of the to-be-detected piece (100) to seal the axial bottom end opening, and the axial bottom end sealing assembly (22) and the axial top end sealing assembly (21) cooperatively clamp the to-be-detected piece (100).

3. The hermeticity test fixture of claim 2, wherein, The sealing mechanism (2) further comprises a plurality of fixing members, the limiting body (1) is provided with a plurality of first mounting holes spaced apart in the circumferential direction, the axial bottom end sealing assembly (22) is provided with a plurality of second mounting holes (222) spaced apart in the circumferential direction, the plurality of first mounting holes and the plurality of second mounting holes (222) correspond to each other and correspond to the plurality of fixing members, and the fixing members are arranged in the corresponding first mounting holes and second mounting holes (222).

4. The hermeticity test fixture of claim 2, wherein, The exhaust pipeline (11) is sealed through the limiting body (1), one end of the exhaust pipeline (11) is in communication with one end of the communication hole (221), and the other end of the exhaust pipeline (11) extends out of the limiting body (1).

5. The hermeticity test fixture of claim 1, wherein, The sealing mechanism (2) has a sealed state and an unsealed state; When the sealing mechanism (2) is in the sealed state, the axial top end sealing assembly (21) is sealed against the top end of the to-be-detected piece (100) to seal the axial top end opening (101), and the radial sealing assembly (23) is sealed against the side of the to-be-detected piece (100) to seal the radial opening (102); When the sealing mechanism (2) is in the unsealed state, the axial top end sealing assembly (21) has a gap with the top end of the to-be-detected piece (100) to unseal the axial top end opening (101), and the radial sealing assembly (23) seals the gap with the side of the to-be-detected piece (100) to unseal the radial opening (102).

6. The leak test fixture of claim 5, wherein, The axial top end sealing assembly (21) comprises a first abutting piece (211) and a first cover plate (212), one end of the first abutting piece (211) is connected with the limiting body (1), and the other end of the first abutting piece (211) can move relative to the limiting body (1); When the sealing mechanism (2) is in the sealed state, the first cover plate (212) is sealed against the top end of the to-be-detected piece (100), and the first abutting piece (211) is abutted against one end of the first cover plate (212) away from the top end of the to-be-detected piece (100) to seal the axial top end opening (101); When the sealing mechanism (2) is in the unsealed state, the first cover plate (212) has a gap with the top end of the to-be-detected piece (100) to unseal the axial top end opening (101).

7. The leak test fixture of claim 6, wherein, The axial top end sealing assembly (21) further comprises a sealing piece (213), the sealing piece (213) and the top end of the to-be-detected piece (100) are matched in shape, and when the sealing mechanism (2) is in the sealed state, the sealing piece (213) is located between the top end of the to-be-detected piece (100) and the first cover plate (212).

8. The leak test fixture of claim 5, wherein, The radial sealing assembly (23) comprises a second abutting piece (231) and a second cover plate (232), one end of the second abutting piece (231) is connected with the limiting body (1), the other end of the second abutting piece (231) is connected with the second cover plate (232), and the second abutting piece (231) can drive the second cover plate (232) to move relative to the to-be-detected piece (100); When the sealing mechanism (2) is in the sealed state, the second cover plate (232) is abutted against the side of the to-be-detected piece (100) to seal the radial opening (102); When the sealing mechanism (2) is in the unsealed state, the second cover plate (232) has a gap with the side of the to-be-detected piece (100) to unseal the radial opening (102).

9. The hermeticity test fixture of claim 8, wherein, The to-be-detected piece (100) comprises a plurality of spaced radial openings (102), the sealing mechanism (2) comprises a plurality of radial sealing assemblies (23), a plurality of radial sealing assemblies (23) are spaced on the limiting body (1), a plurality of radial sealing assemblies (23) correspond to a plurality of radial openings (102) one by one, and the radial sealing assembly (23) can abut against the side of the to-be-detected piece (100) to seal the corresponding radial opening (102).

10. Airtightness detection device, characterized in that The gas detection apparatus is connected to the exhaust duct (11) at a position remote from the axial bottom end opening.

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