Photoetching positioning device for circular material

By designing a combination of corner blocks, horizontal slide bars, vertical slide bars, and positioning bars, precise positioning of circular materials on the lithography machine's worktable is achieved, solving the problem of inaccurate placement of circular materials and improving lithography processing efficiency and product quality.

CN223471239UActive Publication Date: 2025-10-24NANJING COLLIDE PHOTOELECTRIC MATERIALS CO LTD
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Patent Information

Application Number
CN202423135404.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-19
Publication Date
2025-10-24
Estimated Expiration
2034-12-19

AI Technical Summary

Technical Problem

It is difficult to place circular materials accurately on the workbench of the photolithography machine in one go, resulting in large deviations in positioning accuracy, increasing operational complexity and reducing processing efficiency.

Method used

The photolithography positioning device, consisting of corner blocks, horizontal slide bars, vertical slide bars, and positioning rods, ensures precise positioning of circular materials in the X and Y directions through the cooperation of the longitudinal and transverse positioning rods. Combined with a detachable structure and scale design, it can adapt to circular materials of different sizes.

Benefits of technology

It improves the positional accuracy and processing efficiency of circular materials on the lithography machine stage, reduces subsequent fine-tuning time, enhances the accuracy and consistency of lithography processing, and improves the quality and performance of the final product.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a photoetching positioning device for a circular material, and belongs to the technical field of photoetching processing. The angle block is provided with a transverse plate and a longitudinal plate which are perpendicular to each other; a positioning area is arranged between the transverse plate and the longitudinal plate; the transverse sliding rod is detachably mounted on the transverse plate and is parallel to the transverse plate; the longitudinal positioning rod is perpendicular to the transverse sliding rod; the outer end of the longitudinal positioning rod is slidably installed on the transverse sliding rod, and the inner end of the longitudinal positioning rod extends to the positioning area. The longitudinal sliding rod is detachably mounted on the longitudinal plate and is parallel to the longitudinal plate; the transverse positioning rod is perpendicular to the longitudinal sliding rod; the outer end of the transverse positioning rod is slidably installed on the longitudinal sliding rod, and the inner end of the transverse positioning rod extends to the positioning area. Through the longitudinal positioning rod and the transverse positioning rod, accurate positioning of a circular material in the X direction and the Y direction is achieved, and follow-up fine adjustment time caused by position deviation is shortened; a plurality of pairs of positioning holes are formed in the surface of the transverse plate, scales are arranged on the transverse sliding rod and the longitudinal sliding rod, and adjustment can be conveniently conducted according to the size of the circular material.
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Description

TECHNICAL FIELD

[0001] The utility model relates to photoetching technical field, concretely relates to a photoetching positioning device of circular material. BACKGROUND

[0002] In photoetching process, photoetching machine needs to execute a series of key steps before photoetching, including plate loading, center finding and the like, to ensure that the center of the plate to be processed is accurately aligned with the center of the design drawing, which is the basis for guaranteeing the centering degree of photoetching processing. However, for circular materials or non-square materials, these materials are often difficult to be accurately placed on the center position of the workbench of the photoetching machine at one time due to their shape characteristics. Since the accuracy deviation of the material placement position is large, subsequent fine adjustment needs to be repeatedly performed, which not only increases the operation complexity, but also reduces the overall processing efficiency. SUMMARY

[0003] The utility model aims at providing a photoetching positioning device of circular material for improving the position accuracy of circular material placement and improving the processing efficiency.

[0004] The utility model adopts the following technical scheme: a photoetching positioning device of circular material, comprising:

[0005] The corner block has a horizontal plate and a vertical plate perpendicular to each other; the horizontal plate and the vertical plate are a positioning area;

[0006] The horizontal sliding rod is detachably installed on the horizontal plate and parallel to the horizontal plate;

[0007] The vertical positioning rod is arranged perpendicularly to the horizontal sliding rod; the outer end of the vertical positioning rod is slidingly installed on the horizontal sliding rod, and the inner end of the vertical positioning rod extends to the positioning area;

[0008] The vertical sliding rod is detachably installed on the vertical plate and parallel to the vertical plate;

[0009] The horizontal positioning rod is arranged perpendicularly to the vertical sliding rod; the outer end of the horizontal positioning rod is slidingly installed on the vertical sliding rod, and the inner end of the horizontal positioning rod extends to the positioning area.

[0010] Preferably, in use, the circular material is placed in the positioning area, the inner ends of the vertical positioning rod and the horizontal positioning rod abut against the periphery of the circular material, and the extension lines of the vertical positioning rod and the horizontal positioning rod pass through the center of the circular material.

[0011] Preferably, the corner block is an L-shaped aluminum alloy component.

[0012] Preferably, threaded holes are formed at the two ends of the horizontal sliding rod, and first positioning bolts for connecting the horizontal plate are installed in the threaded holes.

[0013] Preferably, the horizontal plate surface is provided with a plurality of pairs of positioning holes, and the first positioning bolt at the two ends of the horizontal sliding rod is threadedly connected in one of the pairs of positioning holes.

[0014] Preferably, the length of each pair of positioning holes from the positioning area is different.

[0015] Preferably, the outer end of the longitudinal positioning rod is provided with a U-shaped sliding sleeve which is slidingly installed on the horizontal sliding rod, and the end of the sliding sleeve away from the longitudinal positioning rod is threadedly connected with a second positioning bolt, and the inner end of the second positioning bolt abuts against one side of the horizontal sliding rod.

[0016] Preferably, the horizontal sliding rod is provided with a scale mark for confirming the position of the sliding sleeve.

[0017] The photolithography positioning device has the advantages that:

[0018] The photolithography positioning device realizes accurate positioning of the circular material in the X and Y directions through the longitudinal positioning rod and the horizontal positioning rod on the horizontal sliding rod and the longitudinal sliding rod, thereby ensuring accurate centering of the circular material on the worktable of the photolithography machine, significantly improving the position accuracy of the circular material, reducing the subsequent fine adjustment time caused by position deviation, and being beneficial to improving the accuracy and consistency of photolithography processing and improving the quality and performance of the final product.

[0019] The horizontal plate surface is provided with a plurality of pairs of positioning holes, and appropriate positioning holes are selected to adapt to circular materials of different sizes; the horizontal sliding rod and the longitudinal sliding rod are both provided with scale marks, which are convenient for confirming the position of the positioning rod in the X and Y directions, and the longitudinal positioning rod and the horizontal positioning rod are both realized as slidable and fixable through the sliding sleeve and the positioning bolt, which is convenient for adjusting according to the size of the circular material; the corner block adopts a central symmetric structure, so that the device is placed more flexibly and conveniently on the worktable of the photolithography machine. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0021] Figure 1 A perspective view of a photolithography positioning device for circular material according to an embodiment of the present application.

[0022] Figure 2 A top view of a photolithography positioning device for circular material according to an embodiment of the present application.

[0023] Figure 3This is a front view of a photolithography positioning device for circular materials provided in an embodiment of the present utility model.

[0024] Figure 4 This is a right side view of a photolithography positioning device for circular materials provided in an embodiment of the present utility model.

[0025] Figure 5 This is a working schematic diagram of a photolithography positioning device for circular materials provided by an embodiment of the present utility model.

[0026] Explanation of the accompanying reference numerals: 1. Corner block; 11. Horizontal plate; 12. Vertical plate; 13. Positioning hole; 21. Horizontal sliding rod; 22. Vertical sliding rod; 31. Vertical positioning rod; 311. Sliding sleeve; 32. Horizontal positioning rod; 41. First positioning bolt; 42. Second positioning bolt; 5. Round material. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] Example 1:

[0029] like Figures 1 to 4 As shown, the present invention provides a photolithography positioning device for circular materials. The corner block 1 is an L-shaped aluminum alloy component with a centrally symmetrical structure. The corner block 1 comprises a horizontal plate 11 and a vertical plate 12, which are perpendicular to each other. The horizontal plate 11 and the vertical plate 12 intersect at one end, creating a positioning area between the horizontal and vertical plates 11 and 12 for placing the circular material 5.

[0030] A transverse sliding rod 21 is detachably mounted on the transverse plate 11 and is parallel to the transverse plate 11. A longitudinal positioning rod 31 is arranged perpendicular to the transverse sliding rod 21. The outer end of the longitudinal positioning rod 31 slides onto the transverse sliding rod 21 and is positioned by a second positioning bolt 42. The inner end of the longitudinal positioning rod 31 extends into the positioning area, where it rests against the round material 5 to ensure alignment in the Y direction. A scale mark is provided on the transverse sliding rod 21 to confirm the position of the longitudinal positioning rod 31 in the X direction.

[0031] Similarly, the longitudinal slide rod 22 is detachably mounted on the longitudinal plate 12, and the longitudinal slide rod 22 is parallel to the longitudinal plate 12. The transverse positioning rod 32 is arranged perpendicular to the longitudinal slide rod 22. The outer end of the transverse positioning rod 32 is slidingly mounted on the longitudinal slide rod 22 and is positioned by another second positioning bolt 42. The inner end of the transverse positioning rod 32 extends to the positioning area and is used to abut against the circular material 5 to realize the alignment of the circular material 5 in the X direction. A scale is provided on the longitudinal slide rod 22 to confirm the position of the transverse positioning rod 32 in the Y direction.

[0032] As shown in Figures 1 to 5 , in use, the positions of the longitudinal positioning rod 31 and the transverse positioning rod 32 in the photolithography positioning device are adjusted according to the size of the circular material 5. Then the photolithography positioning device is placed on the worktable of the photolithography machine at a specified position, and the vacuum suction device is turned on to adsorb the photolithography positioning device. The circular material 5 is placed in the positioning area, and the inner ends of the longitudinal positioning rod 31 and the transverse positioning rod 32 abut against the periphery of the circular material 5, and the extension lines of the longitudinal positioning rod 31 and the transverse positioning rod 32 pass through the center of the circular material 5. Then the vacuum suction device is turned off, and the photolithography positioning device is removed.

[0033] The photolithography positioning device for circular material provided by the embodiment is used for the centering positioning operation of the photolithography machine on the circular material, and the positioning accuracy of the circular material is greatly improved. At the same time, the convenience of operation is also improved, and the subsequent manual fine-tuning time is greatly reduced, thereby improving the photolithography efficiency.

[0034] Embodiment two:

[0035] On the basis of the above-mentioned embodiment one, as shown in Figures 1 to 4 , the structure of the longitudinal positioning rod 31 is opposite to that of the transverse positioning rod 32. The longitudinal positioning rod 31 is taken as an example for description in the embodiment.

[0036] A plurality of pairs of positioning holes 13 are provided on the surface of the transverse plate 11. Two positioning holes 13 in each pair are arranged transversely, and the lengths of the positioning holes 13 in each pair from the positioning area are different. By selecting appropriate positioning holes 13, different sizes of circular materials 5 can be adapted. Threaded holes are provided at the two ends of the transverse slide rod 21, and the first positioning bolt 41 is mounted in the threaded holes. The first positioning bolts 41 at the two ends are threadedly connected in one pair of positioning holes 13, thereby fixing the transverse slide rod 21.

[0037] The outer end of the longitudinal positioning rod 31 has a "U"-shaped sliding sleeve 311, which is invertedly buckled on the transverse slide rod 21 and can slide transversely along the transverse slide rod 21. The outer end of the sliding sleeve 311 is threadedly connected with the second positioning bolt 42, and the inner end of the second positioning bolt 42 abuts against one side of the transverse slide rod 21. By loosening the second positioning bolt 42, the position of the longitudinal positioning rod 31 can be adjusted transversely. Then, by tightening the second positioning bolt 42, the relative fixation of the longitudinal positioning rod 31 and the transverse slide rod 21 is realized.

[0038] In the embodiment, a plurality of positioning holes 13 are arranged on the surface of the horizontal plate 11, and appropriate positioning holes are selected to adapt to circular materials of different sizes; the horizontal slide rod 21 and the vertical slide rod 22 are both fixed on the corner block 1 through the first positioning bolt 41, which facilitates disassembly and reinstallation according to needs, and enhances the flexibility and adaptability of the device, so that the device can be applied to circular materials of different sizes, and the adjustment cost and time cost when replacing materials of different sizes are reduced.

[0039] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. A photolithographic positioning device for a circular material, characterized by The utility model relates to a kind of angle block and its positioning method, including: Angle block (1), with mutually perpendicular horizontal plate (11) and vertical plate (12);Positioning area between the horizontal plate (11) and vertical plate (12); Horizontal slide bar (21), detachably installed on the horizontal plate (11) and parallel with horizontal plate (11); Longitudinal positioning rod (31), vertically arranged with the horizontal slide bar (21);The outer end of the longitudinal positioning rod (31) is slidably installed on the horizontal slide bar (21), and the inner end of longitudinal positioning rod (31) extends to positioning area; Longitudinal slide bar (22), detachably installed on the vertical plate (12) and parallel with vertical plate (12); Transverse positioning rod (32), vertically arranged with the longitudinal slide bar (22);The outer end of the transverse positioning rod (32) is slidably installed on the longitudinal slide bar (22), and the inner end of transverse positioning rod (32) extends to positioning area.

2. A device for positioning a circular material according to claim 1, characterized in that: When using, circular material (5) is placed to positioning area, the inner end of longitudinal positioning rod (31), transverse positioning rod (32) is resisted at the periphery of circular material (5), and the extension line of longitudinal positioning rod (31), transverse positioning rod (32) passes through the center of circular material (5).

3. A device for positioning a circular material according to claim 1, characterized in that: The angle block (1) is "L" shaped aluminum alloy component.

4. A device for positioning a circular material according to claim 1, characterized in that: Threaded hole is set in both ends of the horizontal slide bar (21), and first positioning bolt (41) for connecting the horizontal plate (11) is installed in threaded hole.

5. A device for positioning a circular material according to claim 4, characterized in that: A plurality of positioning holes (13) are set on the surface of the horizontal plate (11), and the first positioning bolt (41) of both ends of the horizontal slide bar (21) is connected in one of the positioning holes (13) by thread.

6. The photolithography positioning device for circular materials according to claim 5, characterized in that: Each pair of positioning holes (13) is different in length from the positioning area.

7. A device for positioning a circular material according to claim 1, characterized in that: The outer end of the longitudinal positioning rod (31) has "U" shaped sliding sleeve (311), and sliding sleeve (311) is slidably installed on the horizontal slide bar (21);The end of the sliding sleeve (311) away from longitudinal positioning rod (31) is connected with second positioning bolt (42) by thread, and the inner end of second positioning bolt (42) is resisted on one side of the horizontal slide bar (21).

8. A device for positioning a circular material according to claim 7, characterized in that: Scale mark is arranged on the horizontal slide bar (21) for confirming the position of sliding sleeve (311).