Harp process equipment

Abstract

The utility model relates to the technical field of semiconductor processing and manufacturing, in particular to Harp process equipment. The utility model provides Harp process equipment. The Harp process equipment comprises a process cavity; the air pump is indirectly connected with the first pump pipeline through a second pump pipeline so as to be connected with the process cavity; and the dust bin is positioned below the process cavity, is connected with the process cavity through a first pump pipeline and is connected with the air pump through a second pump pipeline. According to the utility model, the problems of low production efficiency, high maintenance cost and production risk caused by dust accumulation of the pipeline of the Harp process equipment can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing and manufacturing, and particularly relates to a Harp process equipment. BACKGROUND

[0002] In a semiconductor manufacturing process, the Harp (high aspect ratio via filling) process equipment has the problem that various gas reactions generate by-products in the form of powder that accumulate in the pump pipe line below the outlet of the process cavity when the process cavity is in operation; the pump pipe line is connected to the air pump arranged below the process cavity, and the dust in the pipe line accumulates slowly over time, and after a long time of accumulation, the dust blocks and falls into the air pump, which can cause the air pump to jam and pose a safety risk.

[0003] The usual way of handling this is to periodically shut down, disassemble the pipe line connecting the process cavity to the air pump, clean the dust, and then reassemble the pipe line; at the same time, the air pump is periodically replaced.

[0004] This requires frequent periodic shutdowns, which affects production efficiency; in addition, frequent replacement of the pump for maintenance increases production costs. At the same time, regular cleaning of the pipe line also requires certain maintenance costs.

[0005] Therefore, a solution is needed to reduce the problems of reduced production efficiency, high maintenance costs, and production risks caused by dust accumulation in the pipe line. SUMMARY

[0006] In view of the above, the utility model provides a Harp process equipment to solve the problems of reduced production efficiency, high maintenance costs, and production risks caused by dust accumulation in the pipe line of the Harp process equipment.

[0007] The utility model provides a Harp process equipment, which comprises: a process cavity; an air pump indirectly connected to a first pump pipe line and then connected to the process cavity through a second pump pipe line; a dust bin located below the process cavity and not higher than the air pump, connected to the process cavity through a first pump pipe line and connected to the air pump through a second pump pipe line.

[0008] Optionally, the first pump pipe line comprises a plurality of sub-pipe lines, and the process cavity is connected to the dust bin through the plurality of sub-pipe lines in a zigzag manner.

[0009] Optionally, the plurality of sub-pipe lines comprise a first sub-pipe and a third sub-pipe arranged in a staggered manner, and the first sub-pipe and the third sub-pipe are connected through a second sub-pipe; the inlet of the first sub-pipe is connected to the process cavity, and the outlet of the third sub-pipe is connected to the dust bin.

[0010] Optionally, the first sub-pipe is a straight pipe vertically downward from the bottom of the process cavity; the third sub-pipe is a straight pipe staggered with the first sub-pipe; the inlet height of the third sub-pipe is lower than the outlet height of the first sub-pipe.

[0011] Optionally, the second sub-pipe is an oblique straight pipe connecting the outlet of the first sub-pipe and the inlet of the third sub-pipe.

[0012] Optionally, the third sub-pipe is provided with a third valve near one side of the dust bin, and the third valve controls the communication or isolation of the first pump pipe and the dust bin through switching of the open and close states of the third valve.

[0013] Optionally, the second pump pipe is an independent pipe connecting the dust bin and the air pump; the second pump pipe is provided with a fourth valve, and the fourth valve controls the communication or isolation of the second pump pipe and the dust bin through switching of the open and close states of the fourth valve.

[0014] Optionally, the second pump pipe is a branch pipe extending from the third sub-pipe and connecting the dust bin through the tail section of the third sub-pipe; the third valve controls the communication or isolation of the first pump pipe and the dust bin and the communication or isolation of the second pump pipe and the dust bin through switching of the open and close states of the third valve; the third valve is arranged on the pipe section of the third sub-pipe near the dust bin; the second pump pipe is connected to the third sub-pipe at the pipe section far away from the dust bin.

[0015] Optionally, the second pump pipe is a curved pipe connecting the dust bin and the air pump, and the curved pipe is connected to the dust bin from above the dust bin and connected to the air pump from above the air pump.

[0016] Optionally, the first sub-pipe is provided with a first valve at the pipe section near the process cavity, and the first valve controls the communication or isolation of the first pump pipe and the process cavity through switching of the open and close states of the first valve; the second pump pipe is provided with a second valve at the pipe section near the air pump, and the second valve controls the communication or isolation of the second pump pipe and the air pump through switching of the open and close states of the second valve.

[0017] The utility model discloses the beneficial effect lies in:

[0018] The Harp process equipment provided by the utility model is provided with a dust bin between the process cavity and the air pump, and the dust bin is connected with the air pump and the process cavity through pipelines. The air pump is not directly communicated with the process cavity, so that the dust accumulated in the pipeline will fall into the dust bin instead of the air pump, and the production risk is avoided. When cleaning is needed, the dust bin is only needed to be disassembled and cleaned, the pipeline does not need to be disassembled and cleaned, and the air pump does not need to be replaced, so that the time needed is short, the cost is low, and the influence on the production efficiency is small. Therefore, the device can effectively solve the problems of the reduction of the production efficiency, the high maintenance cost and the production risk caused by the dust accumulation in the pipeline of the Harp process equipment. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the drawings needed to be used in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0020] Figure 1 It is a structural schematic view of a Harp process equipment.

[0021] Figure 2 It is a structural schematic view of a Harp process equipment of an embodiment of the utility model.

[0022] Figure 3 It is a structural schematic view of a Harp process equipment of another embodiment of the utility model. SPECIFIC EMBODIMENT

[0023] REFERENCE Figure 1 A Harp process equipment, comprising: a process cavity 100, and an air pump 200 arranged below the process cavity 100 and communicated with an outlet below the process cavity 100 through a pipeline. The air pump 200 is used for air extraction during work. The exhaust gas in the process cavity 100 is discharged. The structure is arranged so that the byproduct dust in the process cavity will continuously deposit in the pipeline communicated with the air pump 200 along with the discharged gas and accumulate on the pipe wall. When the accumulation is large enough, the dust will fall into the air pump 200 from the pipeline, which easily causes the air pump 200 to be stuck and causes safety problems. Regular disassembly and cleaning of the pipeline and regular replacement of the air pump 200 consume a long time, cost a lot of money, and have a great influence on the production efficiency.

[0024] Therefore, the utility model discloses an embodiment of the utility model, which is a Harp process equipment, so as to solve the problems of the reduction of the production efficiency, the high maintenance cost and the production risk caused by the dust accumulation in the pipeline of the Harp process equipment.

[0025] The technical solutions of the present application will be described clearly and completely in connection with the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application. In the description of the present application, it should be noted that the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0026] Embodiment one

[0027] Reference Figure 2 And Figure 3 The embodiment provides a Harp process equipment, which comprises:

[0028] A process cavity 100;

[0029] A gas pump 200 is indirectly connected to the first pump pipe line 410 and then connected to the process cavity 100 through the second pump pipe line 420, and the gas pump 200 is used to exhaust the waste gas in the process cavity 100.

[0030] A dust bin 300 is located below the process cavity 100 and is not higher than the gas pump 200, is connected to the process cavity 100 through the first pump pipe line 410, and is connected to the gas pump 200 through the second pump pipe line 420.

[0031] The Harp process equipment provided by the embodiment adds a dust bin between the process cavity 100 and the gas pump 200, and the dust bin 300 is connected to the gas pump 200 and the process cavity 100 through pipe lines. The gas pump 200 is not directly connected to the process cavity 100, so that the dust accumulated in the pipe line (mainly the first pump pipe line 410) will fall into the dust bin 300 even if it falls. Since the dust bin 300 has a certain bin space, even if the gas pump 200 continues to exhaust, the dust will not enter the gas pump 200 from the dust bin 300, and production risk will not be caused. When cleaning is needed, only the dust bin 300 needs to be disassembled and cleaned separately, without disassembling the pipe line (mainly the first pump pipe line 410) for cleaning, and without replacing the gas pump 200, so that the required time is short, the required cost is low, and the impact on production efficiency is small. Therefore, the present equipment can effectively solve the problems of reduced production efficiency, high maintenance cost and production risk caused by dust accumulation in the pipe line of the Harp process equipment.

[0032] Further, in some embodiments, the first pump pipe line 410 comprises a plurality of sub-pipe lines, and the process cavity 100 is connected to the dust bin through the plurality of sub-pipe lines.

[0033] Further, in some embodiments, the multi-section sub-pipe includes a first sub-pipe 411 and a third sub-pipe 413 arranged in a staggered manner, and the first sub-pipe 411 and the third sub-pipe 413 are connected by a second sub-pipe 412; the inlet of the first sub-pipe 411 is connected to the process cavity, and the outlet of the third sub-pipe 413 is connected to the dust bin 300.

[0034] Further, in some embodiments, the first sub-pipe 411 is a straight pipe vertically downward from the bottom of the process cavity 100; the third sub-pipe 413 is a straight pipe staggered with the first sub-pipe 411; the inlet of the third sub-pipe 413 is lower than the outlet of the first sub-pipe 411. The inlet of the third sub-pipe 413 being lower than the outlet of the first sub-pipe 411 can avoid the tortuosity of the pipe, be conducive to the efficiency of pumping, and greatly reduce the accumulation of dust in the second sub-pipe 412 due to the inlet of the third sub-pipe 413 being higher than the outlet of the first sub-pipe 411.

[0035] Further, in some embodiments, the second sub-pipe 412 is a straight pipe connected to the outlet of the first sub-pipe 411 and the inlet of the third sub-pipe 413. The straight pipe in a slanting manner can further reduce the accumulation of dust in the second sub-pipe 412.

[0036] Further, in some embodiments, the third sub-pipe 413 is provided with a third valve 530 near one side of the dust bin 300, and the third valve 530 controls the communication or isolation between the first pump pipe 410 and the dust bin 300 by switching the opening and closing state of the third valve 530. Through the arrangement of the third valve 530, the communication or isolation between the first pump pipe 410 and the dust bin 300 can be controlled. When working, the third valve 530 remains open, and the pumping and exhaust efficiency is not affected. When it is necessary to replace and clean the dust bin 300, the third valve 530 is closed, the dust bin 300 is removed for cleaning, and then the third valve 530 is opened again.

[0037] Specifically, referring to Figure 2 In some embodiments, the second pump pipe 420 is an independent pipe connected to the dust bin 300 and the air pump 200; the second pump pipe 420 is provided with a fourth valve 540, and the fourth valve 540 controls the communication or isolation between the second pump pipe 420 and the dust bin by switching the opening and closing state of the fourth valve 540. Through the arrangement of the fourth valve 540, the communication or isolation between the second pump pipe 420 and the dust bin 300 can be controlled. When working, the third valve 530 and the fourth valve 540 remain open, and the pumping and exhaust efficiency is not affected. When it is necessary to replace and clean the dust bin 300, the third valve 530 and the fourth valve 540 are closed, the dust bin 300 is removed for cleaning, and then the third valve 530 and the fourth valve 540 are opened again.

[0038] Specifically, referring to Figure 3 In some embodiments, the second pump pipe line 420 is a branch pipe extending from the third sub-pipe 413, the tail section of the third sub-pipe 413 is connected to the dust bin 300; the third valve 530 controls the communication or isolation between the first pump pipe line 410 and the dust bin 300, and the communication or isolation between the second pump pipe line 420 and the dust bin 300 by switching the open and close state of the third valve 530; the third valve 530 is arranged on the pipe section of the third sub-pipe 413 close to the dust bin 300; the second pump pipe line 420 is connected to the third sub-pipe 413 at the pipe section away from the dust bin 300. In this way, the second pump pipe line 420 is connected to the third sub-pipe 413, only one third valve 530 is needed to control the communication between the dust bin 300 and the first pump pipe line 410 and the second pump pipe line 420, which is convenient to operate and simple in structure.

[0039] Further, referring to Figure 2 Or Figure 3 In some embodiments, the second pump pipe line 420 is a curved pipe connecting the dust bin 300 and the air pump 200, and the curved pipe is connected to the dust bin 300 from above the dust bin 300 and is connected to the air pump 200 from above the air pump 200. Since the dust bin 300 and the air pump 200 are connected from above, the gravity continuously applies a downward force on the dust block falling into the dust bin 300, and the dust block is difficult to overcome the gravity to move upward and leave the dust bin 300, so that the dust block in the dust bin 300 can be further prevented from being transferred into the air pump 200 when the air pump 200 is pumping air.

[0040] Further, in some embodiments, the first sub-pipe 411 is provided with a first valve 510 at the pipe section close to the process cavity, the first valve 510 controls the communication or isolation between the first pump pipe line 410 and the process cavity 100 by switching the open and close state of the first valve 510; the second pump pipe line 420 is provided with a second valve 520 at the pipe section close to the air pump 200, the second valve 520 controls the communication or isolation between the second pump pipe line 420 and the air pump 200 by switching the open and close state of the second valve 520. The first valve 510 and the second valve 520 can be normally opened, and one or both of them can be selectively closed according to the work requirement, so as to control the communication state of the pipe line.

[0041] Obviously, the above embodiments are only examples for clearly illustrating the present application and are not intended to limit the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments are not required to be enumerated. The changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A Harp process apparatus characterized by, It comprises: a process cavity; a gas pump indirectly connected to the process cavity through a second pump pipe circuit and a first pump pipe circuit; a dust bin located below the process cavity and not higher than the gas pump, connected to the process cavity through the first pump pipe circuit and to the gas pump through the second pump pipe circuit.

2. The Harp process equipment according to claim 1, wherein: the first pump pipe circuit comprises multiple sub-pipe circuits, and the process cavity is connected to the dust bin through the multiple sub-pipe circuits.

3. The Harp process equipment according to claim 2, wherein: the multiple sub-pipe circuits comprise a first sub-pipe and a third sub-pipe arranged in a staggered manner, and the first sub-pipe and the third sub-pipe are connected through a second sub-pipe; the inlet of the first sub-pipe is connected to the process cavity, and the outlet of the third sub-pipe is connected to the dust bin.

4. The Harp process equipment according to claim 3, wherein: the first sub-pipe is a straight pipe vertically downward from the bottom of the process cavity; the third sub-pipe is a straight pipe staggered with the first sub-pipe; the inlet height of the third sub-pipe is lower than the outlet height of the first sub-pipe.

5. The Harp process equipment according to claim 4, wherein: the second sub-pipe is an inclined straight pipe connecting the outlet of the first sub-pipe and the inlet of the third sub-pipe.

6. The Harp process equipment according to claim 3, wherein: the third sub-pipe is provided with a third valve near one side of the dust bin, and the third valve controls the communication or isolation between the first pump pipe circuit and the dust bin through switching of its own opening and closing state.

7. The Harp process equipment according to claim 6, wherein: the second pump pipe circuit is an independent pipe circuit connecting the dust bin and the gas pump; the second pump pipe circuit is provided with a fourth valve, and the fourth valve controls the communication or isolation between the second pump pipe circuit and the dust bin through switching of its own opening and closing state.

8. The Harp process equipment according to claim 6, wherein: the second pump pipe circuit is a branch pipe extending from the third sub-pipe and connected to the dust bin through the tail section of the third sub-pipe; the third valve controls the communication or isolation between the first pump pipe circuit and the dust bin and the communication or isolation between the second pump pipe circuit and the dust bin through switching of its own opening and closing state; the third valve is arranged on the pipe section of the third sub-pipe near the dust bin, and the second pump pipe circuit communicates with the third sub-pipe on the pipe section far from the dust bin.

9. The Harp process equipment according to claim 7 or 8, wherein: the second pump pipe circuit is a curved pipe connecting the dust bin and the gas pump, and communicates with the dust bin from above the dust bin and communicates with the gas pump from above the gas pump.

10. The Harp process equipment according to claim 3, wherein: the first sub-pipe is provided with a first valve on the pipe section near the process cavity, and the first valve controls the communication or isolation between the first pump pipe circuit and the process cavity through switching of its own opening and closing state. The second pump pipe line is provided with a second valve at a pipe section close to the air pump, and the second valve controls the communication or isolation between the second pump pipe line and the air pump by switching the open and close state of the second valve.

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