Wafer box and wafer box cleanliness detection device

Abstract

The utility model provides a wafer box and a wafer box cleanliness detection device, comprising a box body, one side of which is provided with a box opening; the protective cover is arranged on one side of the box body, the box opening is located in the protective cover, and a containing cavity is formed between the inner wall of the protective cover and the outer wall of the box body; the cover moving assembly is movably arranged on the protective cover; the box cover seals the box opening and is connected with the cover moving assembly, and the cover moving assembly drives the box cover to move in the direction away from the box opening or close to the box opening; when the box cover moves in the direction away from the box opening, the interior of the box body communicates with the exterior of the box body through the containing cavity. According to the utility model, the pollution of particles in the external environment to the wafer box can be reduced, and the accuracy of detection data is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor devices, in particular to a wafer box and wafer box's cleanliness detection device. BACKGROUND

[0002] The wafer box is a conveying box for storing wafers, and the cleanliness of the wafer box is closely related to the yield of the wafers. In order to ensure the yield of the wafers, the cleanliness of the wafer box needs to be detected before the wafer box is used to transport wafers. However, when the cleanliness of the wafer box is tested, the particles in the external environment are easy to enter the wafer box and cause pollution to the wafer box, resulting in low accuracy of the detection data. SUMMARY

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a wafer box and a wafer box cleanliness detection device. The utility model can improve the accuracy of the detection data when the wafer box is detected.

[0004] To achieve the above-mentioned purpose and other related purposes, the utility model provides a wafer box, which comprises:

[0005] A box body, one side of the box body is provided with a box opening;

[0006] A protective cover is arranged on one side of the box body, the box opening is located in the protective cover, and a containing cavity is formed between the inner wall of the protective cover and the outer wall of the box body;

[0007] A cover moving assembly is movably arranged on the protective cover; and

[0008] A box cover is arranged to close the box opening and is connected to the cover moving assembly. The cover moving assembly drives the box cover to move away from or close to the box opening.

[0009] When the box cover moves away from the box opening, the inside of the box body is in communication with the outside of the box body through the containing cavity.

[0010] In an embodiment of the utility model, one end of the protective cover is provided with an opening, and the opening of the protective cover is arranged opposite to the box opening. The area of the opening of the protective cover is larger than the area of the box opening.

[0011] In an embodiment of the utility model, the opening end of the protective cover extends towards the bottom end of the box body along the height direction of the box body.

[0012] In an embodiment of the utility model, the wafer box further comprises a water inlet pipe arranged on the inner wall of the box body. The water inlet pipe is used to transport liquid, and the water outlet end of the water inlet pipe is arranged around the box opening.

[0013] In an embodiment of the utility model, still include lift subassembly, be connected between the water inlet pipe with the inner wall of box, the water inlet end of water inlet pipe is rotated between the inside of box with the outside of box through lift subassembly.

[0014] In an embodiment of the utility model, the cover moving assembly comprises:

[0015] Handle, be located on the cover surface of protective cover;

[0016] Communication hole, be located on the protective cover;And

[0017] Connecting rod, its through and slidingly connected in the communication hole, the one end of connecting rod that passes out protective cover is connected with handle, the other end of connecting rod is connected with box cover.

[0018] In an embodiment of the utility model, the cover moving assembly further comprises a positioning assembly, and the handle is connected to the protective cover through the positioning assembly.

[0019] In an embodiment of the utility model, the positioning assembly comprises:

[0020] Positioning block, be located on the edge of handle;

[0021] Placement groove, be set up on the protective cover, the handle is placed in the placement groove;And positioning groove, be set up on the side of placement groove, the positioning block is placed in the positioning groove.

[0022] In an embodiment of the utility model, wafer box further comprises:

[0023] Connecting seat, with the box is connected, and the protective cover is installed on the connecting seat;And

[0024] Connecting assembly, be connected between the protective cover with the connecting seat, the protective cover is moved through the connecting assembly to the direction of away from the box mouth or close to the box mouth.

[0025] The utility model also provides a kind of cleanliness detection device of wafer box, comprising:

[0026] Multiple water inlet pipes, are respectively located at the four sides of the box mouth of wafer box;

[0027] Ultra-pure water pipe, is connected to the water inlet end of multiple water inlet pipes;

[0028] Liquid particle counter, be located outside wafer box;And

[0029] Sampling pipeline, be connected to liquid particle counter, and the sampling pipeline extends into wafer box;

[0030] The wafer box comprises:

[0031] A box body, one side of the box body being provided with a box opening;

[0032] A protective cover arranged on one side of the box body, the box opening being located in the protective cover, and a containing cavity being formed between the inner wall of the protective cover and the outer wall of the box body;

[0033] A cover moving assembly movably arranged on the protective cover; and

[0034] A box cover closing the box opening and connected with the cover moving assembly, the cover moving assembly driving the box cover to move towards the direction away from or close to the box opening;

[0035] When the box cover moves towards the direction away from the box opening, the inside of the box body and the outside of the box body are communicated through the containing cavity.

[0036] As described above, the wafer box and the cleanliness detection device of the wafer box are provided, when the box cover is opened for detection, the protective cover arranged on the wafer box can reduce the pollution of the particles in the external environment to the wafer box, and improve the accuracy of the detection data. The unexpected effect is that through the water inlet pipes around the box opening of the wafer box, the ultrapure water can be uniformly sprayed around the inner wall of the wafer box, the contact area of the ultrapure water and the inner wall of the wafer box is improved, the particles on the inner wall of the wafer box can be fully mixed in the ultrapure water, and the accuracy of the cleanliness detection data is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0038] Figure 1 A structure schematic diagram of the wafer box of the present application is shown;

[0039] Figure 2 A split structure schematic diagram of the wafer box of the present application is shown;

[0040] Figure 3 A structure schematic diagram of the protective cover and the box body of the present application is shown;

[0041] Figure 4 A partial cross-sectional structure schematic diagram of the wafer box of the present application is shown;

[0042] Figure 5A detection state schematic view of a wafer box is shown.

[0043] Element number explanation:

[0044] 10, box body; 11, box opening; 20, box cover; 30, protective cover; 40, cover moving assembly; 41, connecting rod; 42, communication hole; 43, handle; 50, accommodating cavity; 60, ultrapure water pipe; 70, liquid particle counter; 71, sampling pipeline; 72, connecting seat; 80, water inlet pipe; 90, positioning assembly; 91, positioning block; 92, placing groove; 93, positioning groove. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0046] Please refer to Figures 1-5 It should be noted that the diagrams provided in the present embodiment only schematically illustrate the basic concept of the present application, and the diagrams only show the components related to the present application, not the number, shape and size of the components during actual implementation. The shape, number and proportion of each component during actual implementation can be randomly changed, and the component layout pattern can be more complex.

[0047] Please refer to Figure 1 as shown, Figure 1The utility model provides a wafer box, the wafer box can cooperate with the cleanliness detection device to realize the cleanliness detection of wafer box, to improve the accuracy of the detection data of wafer box cleanliness detection, specifically, the wafer box can include box body 10, box cover 20, shield 30 and remove cover assembly 40, wherein, the one side of box body 10 is equipped with box mouth 11, and the wafer can be put into or taken out from box mouth 11, box cover 20 can be covered in box mouth 11, is used to close box mouth 11, shield 30 can be equipped in the one side of box body 10, makes box mouth 11 cover in shield 30, is used to block the particle pollution in external environment, remove cover assembly 40 can be movably equipped on shield 30, and is connected with box cover 20, thereby, remove cover assembly 40 can drive box cover 20 vertical movement, when remove cover assembly 40 drives box cover 20 to move in the direction of deviating from box mouth 11, box mouth 11 opens, and external shield 30 still can play the role of blocking the particle in external environment, reduces the possibility of the particle pollution in external environment in the inside of box body 10, when remove cover assembly 40 drives box cover 20 to move in the direction of approaching box mouth 11, box cover 20 moves to close in box mouth 11, it is needful to point out that, the clearance between the inner wall of shield 30 and the outer wall of box body 10 forms the accommodation cavity 50 that can supply cleanliness detection device to stretch into, when box mouth 11 opens, the outside of box body 10 and the inside of box body 10 can be communicated through the accommodation cavity 50, and cleanliness detection device can stretch into the inside of box body 10 from the accommodation cavity 50 and carry out detection, this kind of wafer box structure can better cooperate with cleanliness detection device to realize the cleanliness detection of wafer box, reduces the particle in external environment to the pollution of wafer box, improves the accuracy of detection data.

[0048] Please refer to Figure 5 It is needful to point out that, for the cleanliness detection of the above-mentioned wafer box, first, cleanliness detection device can include ultrapure water pipe 60 and liquid particle counter 70, when the box mouth 11 of box body 10 opens, through ultrapure water pipe 60 stretches into the inside of box body 10 to inject a certain amount of ultrapure water, and the particle in the inside of box body 10 can mix in ultrapure water, after standing for a period of time, the sampling pipeline 71 of liquid particle counter 70 stretches into the inside of box body 10 and carries out sampling to detect the particle content in the inside of box body 10, to analyze the cleanliness of wafer box.

[0049] Please refer to Figure 1 And Figure 3The protective cover 30 can be a cover structure with a hollow interior and an open end, and the opening of the protective cover 30 can be arranged opposite to the box opening 11, so that the protective cover 30 can cover the box opening 11 downward. In addition, the opening area of the protective cover 30 can be larger than the area of the box opening 11, so that the pipeline of the cleanliness detection device can extend between the protective cover 30 and the box body 10, facilitating detection. Further, the open end of the protective cover 30 also extends along the height direction of the box body 10 to the bottom end of the box body 10 to cover more areas below the box opening 11, so as to better block the particles in the external environment. The cover height of the protective cover 30 can be set based on actual needs, and can play a better role in blocking particles in the external environment.

[0050] Referring to Figure 1 and Figure 4The wafer box can further comprise a connecting seat 72 connected with the box body 10, and the protective cover 30 can be installed on the connecting seat 72. Specifically, the connecting seat 72 is not limited in shape, and can be L-shaped, U-shaped or other shapes, which can be designed according to the shape of the box body 10. The wafer box can further comprise a connecting assembly connected between the protective cover 30 and the connecting seat 72, and the protective cover 30 can be moved on the connecting seat 72 through the connecting assembly. Specifically, when the wafer box needs to be detected for cleanliness, the cover moving assembly 40 drives the box cover 20 to move away from the box opening 11, so that the box opening 11 is opened, and the cleanliness detection device can be inserted into the box body 10 from the containing cavity 50 for detection. At this time, the connecting assembly does not work, and the protective cover 30 is fixed on the connecting seat 72 through the connecting assembly and cannot move, and the protective cover 30 still covers the box opening 11, which can block the particles in the external environment. When the wafer box needs to load or unload wafers, the connecting assembly on the connecting seat 72 can drive the protective cover 30 to move away from the box opening 11. Since the box cover 20 is connected with the protective cover 30 through the cover moving assembly 40, when the protective cover 30 moves, the box cover 20 also moves away from the box body 10, until the box cover 20 and the protective cover 30 are away from the box body 10, the box opening 11 is not blocked, and the wafer box can normally load or unload wafers. When the box opening 11 of the wafer box needs to be closed again, the connecting assembly on the connecting seat 72 can drive the protective cover 30 to move towards the box opening 11. Since the box cover 20 is connected with the protective cover 30 through the cover moving assembly 40, when the protective cover 30 moves, the box cover 20 also moves towards the box opening 11, until the box cover 20 is closed on the box opening 11 and the protective cover 30 covers the area of the box opening 11. It should be noted that the structure of the connecting assembly can not be limited, and can be any manual control assembly or automatic assembly installed between the protective cover 30 and the connecting seat 72 and driving the protective cover 30 to move vertically. For example, the connecting assembly is an electric telescopic rod, and the base of the electric telescopic rod is installed on the connecting seat 72, and the output end of the electric telescopic rod is connected to the outer wall of the protective cover 30.

[0051] Please refer to Figure 2The box opening 11 of the wafer box can be used to load the wafer, unload the wafer or allow the cleanliness detection device to extend in for detection. The internal space of the wafer box can be used to accommodate the wafer. In order to increase the contact area between the inner wall of the wafer box and the ultrapure water and ensure that the particles on the inner wall of the wafer box are more fully mixed in the ultrapure water, a water inlet pipe 80 can be arranged around the inner wall of the box opening 11, and the water outlet end of the water inlet pipe 80 is relative to the periphery of the box opening 11. When the ultrapure water is introduced into the wafer box, the ultrapure water pipe 60 can be connected to the water inlet pipe 80, so that the ultrapure water is uniformly sprayed from the box opening 11 around the inner wall of the wafer box through the water inlet pipe 80, thereby increasing the contact area between the ultrapure water and the inner wall of the wafer box and ensuring that the particles on the inner wall of the wafer box are fully mixed in the ultrapure water.

[0052] Please refer to Figure 2 and Figure 5 In order to facilitate the connection of the water inlet pipe 80 and the ultrapure water pipe 60, a lifting assembly can be installed between the water inlet pipe 80 and the inner wall of the box body 10. The water inlet end of the water inlet pipe 80 can be rotated between the inside of the box body 10 and the outside of the box body 10 through the lifting assembly. Specifically, when the box cover 20 of the wafer box closes the box opening 11, the water inlet pipe 80 is entirely at the inner wall of the box body 10. When the box cover 20 of the wafer box is opened, the lifting assembly can drive the water inlet pipe 80 to rotate until the water inlet end of the water inlet pipe 80 is located outside the box body 10, facilitating the ultrapure water pipe 60 to extend from the accommodating cavity 50 and be connected to the water inlet pipe 80 for water injection testing. After the testing is completed, the lifting assembly can drive the water inlet pipe 80 to rotate to the reset position so as to re-cover the box cover 20. The specific structure of the water inlet pipe 80 can not be limited, for example, it can be four water inlet pipes 80 distributed around the box opening 11. Further, the water outlet angle of the water inlet pipe 80 can be set based on actual needs, which can not be limited here, for example, the part close to the water outlet end of the water inlet pipe 80 can be bent by 20 degrees to match the required water outlet angle. When the box opening 11 is closed, the four water inlet pipes 80 are at the inner wall of the box opening 11. When the box cover 20 is opened, the four water inlet pipes 80 can be lifted by the lifting assembly, and the ultrapure water pipe 60 can be connected to the water inlet end of the four water inlet pipes 80 through the four pipes, so that the ultrapure water is sprayed from the four sides of the box opening 11 on the inner wall of the box body 10, ensuring that the particles on the inner wall of the box body 10 are fully mixed in the ultrapure water. After the cleanliness detection is completed, the four water inlet pipes 80 can be reset to the inner wall of the box opening 11 by the lifting assembly so as to re-close the box opening 11 by the box cover 20. It should be noted that the specific structure of the lifting assembly can not be limited, which can only move the water inlet pipe 80 to a position that is convenient for connection with the ultrapure water pipe 60. For example, the lifting assembly can be a motor installed between the inner wall of the box body 10 and the water inlet pipe 80. The rotation of the output shaft of the motor can drive the water inlet pipe 80 to rotate to change the position.

[0053] Please refer to Figure 2 and Figure 4The specific structure of the box cover 20 is not limited as long as it can seal the box opening 11. For example, it can be circular, square or any other shape. The specific structure of the cover moving assembly 40 is not limited as long as it can move the box cover 20 vertically. For example, the cover moving assembly 40 can be provided with a connecting rod 41, a communication hole 42 and a handle 43. The handle 43, the connecting rod 41 and the box cover 20 are connected in sequence. When the box cover 20 needs to be opened, the handle 43 is pulled to open the box cover 20, and the handle 43 is reset to close the box cover 20. Specifically, the handle 43 can be arranged on the outer cover surface of the protective cover 30. The cover surface of the protective cover 30 facing the box cover 20 can be provided with the communication hole 42, one end of the connecting rod 41 can penetrate the communication hole 42 to connect the handle 43, the other end of the connecting rod 41 can be fixed on the box cover 20, and the connecting rod 41 can slide in the communication hole 42. When the box cover 20 does not need to be opened, the handle 43 and the connecting rod 41 are in the original position, and the box cover 20 at one end of the connecting rod 41 seals the box opening 11. When the box cover 20 needs to be opened for detection, the handle 43 can be pulled away from the wafer box, and the handle 43 and the connecting rod 41 move vertically, until the box cover 20 is away from the box opening 11 by a distance, at this time, the pipeline of the cleanliness detection device can be inserted into the box body 10 for detection.

[0054] Please refer to Figure 2, the shifting cover assembly 40 can further comprise a positioning assembly 90, when the box cover 20 is not required to be opened, the handle 43 can be fixed on the protective cover 30 by the positioning assembly 90, avoiding the handle 43 moving to drive the box cover 20 moving, thus ensuring the sealing effect of the box cover 20. When the box cover 20 is required to be opened, the positioning assembly 90 can release the locking of the handle 43, and pulling the handle 43 can drive the box cover 20 moving. Specifically, the specific structure of the positioning assembly 90 can be unrestricted, as long as it can ensure the functions of locking the handle 43 and unlocking the handle 43. For example, the positioning assembly 90 can comprise a positioning block 91, a placing groove 92 and a positioning groove 93. Specifically, the placing groove 92 can be arranged on the protective cover 30, used for placing the handle 43. The specific arrangement position of the placing groove 92 is not limited, for example, it is arranged on the circumference of the through hole 42, when the handle 43 is placed on the placing groove 92, the connecting rod 41 can pass through the through hole 42. The positioning block 91 can be arranged on the edge of the handle 43, and a hook-shaped protrusion can be arranged on the positioning block 91. Corresponding to the positioning block 91, the side of the placing groove 92 can be outwardly arranged with the positioning groove 93, and a groove wall of the positioning groove 93 can be arranged with a groove corresponding to the hook-shaped protrusion, so that the hook-shaped protrusion can be clamped in the groove. Specifically, the length of the positioning groove 93 can be arranged to be greater than the total length of the positioning block 91 and the hook-shaped protrusion. When the handle 43 is placed in the placing groove 92, and the positioning block 91 is placed in the positioning groove 93, the handle 43 can be rotated by a certain angle, so that the positioning block 91 is rotated towards the direction of the groove, and the hook-shaped protrusion on the positioning block 91 can be clamped in the groove, thus the handle 43 can be locked in the placing groove 92. When the locking of the handle 43 is required to be released, the handle 43 can be reversely rotated by a certain angle, so that the positioning block 91 is rotated towards the direction away from the groove, and the hook-shaped protrusion on the positioning block 91 can be separated from the groove, thus the handle 43 can be unlocked, and the box cover 20 can be opened by pulling the handle 43.

[0055] Please refer to Figure 5The utility model also provides a kind of cleanliness detection device of wafer box, can cooperate with above-mentioned wafer box, to improve the accuracy of cleanliness detection data.The cleanliness detection device can include water inlet pipe 80, ultrapure water pipe 60, liquid particle counter 70 and sampling pipeline 71 connected on liquid particle counter 70.Wherein, water inlet pipe 80 can be provided with multiple, multiple water inlet pipe 80 can be distributed in the four sides of the box mouth 11 of wafer box.When the box cover 20 of wafer box is opened, the water inlet end of multiple water inlet pipe 80 can be connected with ultrapure water pipe 60, to inject ultrapure water into wafer box interior.At this time, ultrapure water in ultrapure water pipe 60 is evenly sprayed in the inner wall four around wafer box, improves the contact area of ultrapure water and wafer box inner wall, guarantees that the particle of wafer box inner wall can be fully mixed in ultrapure water, improves the accuracy of subsequent detection data.When ultrapure water is injected a certain amount, stop injection.After a period of time, sampling pipeline 71 of liquid particle counter 70 can be inserted into the inside of box body 10 to sample, to detect the particle content in the inside of box body 10, to analyze the cleanliness of wafer box.

[0056] In conclusion, through the wafer box and the cleanliness detection device of wafer box provided by the utility model, when the box cover is opened for detection, the protective cover arranged on the wafer box can reduce the pollution of particles in the external environment to the wafer box, and improve the accuracy of detection data.The unexpected effect is that the water inlet pipe is arranged around the box mouth of the wafer box, which can make the ultrapure water evenly sprayed around the inner wall of the wafer box, improve the contact area of the ultrapure water and the inner wall of the wafer box, ensure that the particles on the inner wall of the wafer box can be fully mixed in the ultrapure water, and further improve the accuracy of the cleanliness detection data.

[0057] In the description of the present specification, the description of the terms "the present embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the utility model. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0058] The above disclosed utility model embodiments are only used to help explain the utility model. The embodiments do not describe all the details, and the utility model is not limited to the specific implementation described. Obviously, according to the content of the specification, many modifications and changes can be made. The embodiments are selected and described in the specification in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the entire scope and equivalents thereof.

Claims

1. A wafer cassette, characterized by, The utility model relates to a kind of wafer box and its cover moving assembly, including: Box body, the side of the box body is opened box mouth; Shield, is located in the side of the box body, the box mouth is located in the shield, and the inner wall of the shield and the outer wall between the box body form accommodating cavity; Cover moving assembly, movably arranged on the shield;And Box cover, which closes the box mouth, is connected with the cover moving assembly, and the cover moving assembly drives the box cover to move towards the direction away from the box mouth or close to the box mouth; Wherein, when the box cover moves towards the direction away from the box mouth, the inside of the box body and the outside of the box body are communicated through the accommodating cavity.

2. The wafer cassette of claim 1, wherein, The shield is opened at one end, and the opening of the shield is opposite to the box mouth, and the area of the opening of the shield is greater than the area of the box mouth.

3. The wafer cassette of claim 2, wherein, The opening end of the shield extends along the height direction of the box body towards the bottom end of the box body.

4. The wafer cassette of claim 1, wherein, It also includes a water inlet pipe arranged on the inner wall of the box body, the water inlet pipe is used for conveying liquid, and the water outlet end of the water inlet pipe is relative to the periphery of the box mouth.

5. The wafer cassette of claim 4, wherein, It also includes a lifting assembly connected between the water inlet pipe and the inner wall of the box body, the water inlet end of the water inlet pipe is rotated between the inside of the box body and the outside of the box body through the lifting assembly.

6. The wafer cassette of claim 1, wherein, The cover moving assembly includes: Handle, arranged on the outer cover surface of the shield; Communication hole, arranged on the shield;And Connecting rod, which is connected through and slidably connected to the communication hole, one end of the connecting rod passes out of the shield and is connected with the handle, and the other end of the connecting rod is connected with the box cover.

7. The wafer cassette of claim 6, wherein, The cover moving assembly also includes a positioning assembly, and the handle is connected to the shield through the positioning assembly.

8. The wafer cassette of claim 7, wherein, The positioning assembly includes: Positioning block, arranged on the edge of the handle; Placing groove, opened on the shield, the handle is placed in the placing groove;And Positioning groove, opened on the side of the placing groove, the positioning block is placed in the positioning groove.

9. The wafer cassette of claim 1, wherein, It also includes: Connecting seat, connected with the box body, and the shield is installed on the connecting seat; And Connecting assembly, connected between the shield and the connecting seat, the shield moves towards the direction away from the box mouth or close to the box mouth through the connecting assembly.

10. A device for detecting cleanliness of a wafer cassette, characterized by comprising: a wafer cassette cleaning degree detecting device according to any one of claims 1 to 9. Including: Multiple water inlet pipes, respectively arranged on the four sides of the box mouth of the wafer box; Ultra-pure water pipe, connected to the water inlet end of the multiple water inlet pipes; Liquid particle counter, arranged outside the wafer box; And Sampling pipeline, connected to the liquid particle counter, and the sampling pipeline extends into the wafer box; Wherein, the wafer box includes: Box body, the side of the box body is opened box mouth; Shield, is located in the side of the box body, the box mouth is located in the shield, and the inner wall of the shield and the outer wall between the box body form accommodating cavity; Cover moving assembly, movably arranged on the shield;And Box cover, which closes the box mouth, is connected with the cover moving assembly, and the cover moving assembly drives the box cover to move towards the direction away from the box mouth or close to the box mouth; Wherein, when the box cover moves towards the direction away from the box mouth, the inside of the box body and the outside of the box body are communicated through the accommodating cavity.

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