Silicon oxide high-barrier film layer production equipment

Abstract

The utility model relates to the technical field of silicon oxide high-barrier film layer production, and discloses silicon oxide high-barrier film layer production equipment which comprises a high-temperature reaction box, the top of the high-temperature reaction box is provided with a filtering assembly for filtering impurities in oxygen and a movable assembly without stopping equipment operation, and the high-temperature reaction box is provided with a high-temperature reaction box. According to the production equipment for the silicon oxide high-barrier film layer, the rubber plug can be separated from inlets and outlets of the three-way pipe I and the three-way pipe II by arranging a movable assembly, rotating rockers, and enabling a gear II, a tooth groove, a concentric-square-shaped plate, a rotating rod, a gear I, a rack, a sliding plate and the rubber plug to be close to one another; the other group of rubber plugs block the inlets and outlets of the first three-way pipe and the second three-way pipe, the other group of filter plates conduct filtering work, the second sealing doors corresponding to the filter plates needing to be replaced are opened, the filter plates are pulled out, replacement can be conducted, equipment operation does not need to be stopped, and the machining efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon oxide high barrier film production technology, specifically to a silicon oxide high barrier film production equipment. Background Technology

[0002] High-barrier silicon oxide films are high-performance thin films sintered from silicon oxide materials. They possess a variety of excellent properties and are widely used in many fields.

[0003] During processing, a high-temperature reactor is used to provide a high-temperature environment, causing the silicon material to undergo an oxidation reaction with oxygen. At high temperatures, oxygen is introduced into the reactor, and the silicon oxide film generated by the oxidation reaction of silicon material with oxygen gradually covers the surface of the silicon material, forming a high-barrier film layer.

[0004] However, existing high-temperature reactors use filtration equipment during operation. When connecting to the oxygen supply equipment, it is necessary to prevent the introduction of impurities into the oxygen supply. These impurities may adhere to the surface of the silicon material, affecting the quality and performance of the silicon oxide film. After prolonged use, the filtration efficiency of the filter plates decreases, requiring replacement. Replacement can only be performed by stopping the equipment, which affects processing efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a silicon oxide high-barrier film production equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a silicon oxide high-barrier film production equipment, comprising a high-temperature reaction chamber, wherein a filter assembly for filtering impurities in oxygen and a movable component that does not require stopping the equipment are installed on the top of the high-temperature reaction chamber; a sealing door is installed on the surface of the high-temperature reaction chamber; the filter assembly comprises: a chamber body, a second sealing door, a first three-way pipe, a second three-way pipe, a partition, a concave frame, and a filter plate; the movable component comprises:

[0007] A sliding plate is slidably connected to the inner wall of the box. A rubber stopper is fixed to the surface of the sliding plate, and a rack is fixed to the surface of the sliding plate. A gear is rotatably connected to the inner wall of the box, and the gear meshes with the rack.

[0008] Preferably, the movable component further includes a rotating rod that passes through gear one and is fixedly connected to gear one. The end of the rotating rod away from gear one passes through the housing and is rotatably connected to the housing. A gear two passes through the end of the rotating rod away from gear one, and the rotating rod is fixedly connected to gear two. Two sets of gear one, gear two, rotating rod, sliding plate, rubber plug, and rack are provided, and both sets of gear one, gear two, rotating rod, sliding plate, rubber plug, and rack are symmetrically arranged about the center line of the housing. A rocker arm is mounted on the surface of one of the two sets of gear two, and the surface of the housing is slidably connected. A U-shaped plate is connected, and the surface of the U-shaped plate has toothed grooves that mesh with gear two. The surface of the housing is also provided with a limiting component. By rotating the rocker arm, gear two, toothed grooves, U-shaped plate, rotating rod, gear one, rack, sliding plate, and rubber plug come closer to each other, causing the rubber plug to disengage from the inlet and outlet of T-pipe one and T-pipe two. Reversing the other set of rocker arms and repeating the above steps causes another set of rubber plugs to block the inlet and outlet of T-pipe one and T-pipe two. At this time, another set of filter plates performs filtration. Personnel can then open the second set of sealing doors corresponding to the filter plate that needs to be replaced and pull out the filter plate for replacement.

[0009] Preferably, the limiting component includes a limiting groove formed on the surface of the housing. A fixing block is fixed to the surface of the U-shaped plate. A sliding groove is formed on the surface of the fixing block. A locking block is slidably connected to the inner wall of the sliding groove. The locking block passes through the U-shaped plate. A spring is fixed to the surface of the locking block. The end of the spring away from the locking block is fixed to the inner wall of the sliding groove. A linkage groove is formed on the surface of the locking block. A knob is rotatably connected to the surface of the fixing block. The output shaft of the knob passes through the fixing block. A long rod is fixed to the surface of the output shaft of the knob. A round block is fixed to the surface of the fixing block. A connecting groove is formed on the inner side of the round block. The inner wall of the groove has a sliding limit block. A second spring is fixed to the surface of the limit block. The end of the second spring away from the limit block is fixed to the surface of the limit block. A stabilizing groove is opened on the surface of the knob. A stop block is fixed to the end of the long rod away from the knob. The cross-section of the limit block and the stop block away from the second and first springs is set as a triangle. When the knob is rotated, the position of the stop block is parallel to the linkage groove. When the cyclic plate moves, the fixed block and the stop block move. At the same time, the stop block enters the linkage groove without affecting the normal movement of the cyclic plate. When the surface of the stop block contacts the surface of the stop block, the stop block can no longer move, thus limiting the cyclic plate and preventing the cyclic plate from moving on its own.

[0010] Preferably, the movable components are provided in two sets, and the two sets of movable components are symmetrically arranged with the center line of the box as the axis of symmetry, and can be used alternately.

[0011] Preferably, the chamber is fixed to the top of the high-temperature reaction chamber. A second sealing door is connected to the surface of the chamber. A partition is fixed to the inner wall of the chamber. A concave frame is fixed to the surface of the partition and the inner wall of the chamber. A filter plate is placed on the inside of the concave frame. A first three-way pipe is opened at the top of the chamber, and a second three-way pipe is opened at the bottom of the chamber. Two sets of the second sealing door and the filter plate are provided, and the two sets of the second sealing door and the filter plate are symmetrically arranged with the center line of the chamber as the axis of symmetry. The oxygen supply equipment is connected through the thread of the second three-way pipe. At this time, the oxygen is filtered through the filter plate and then enters the chamber through the second three-way pipe, which can prevent impurities from entering the high-temperature reaction chamber.

[0012] Preferably, there are four sets of connecting grooves, spring two, limiting block, and stabilizing groove, and the four sets of connecting grooves, spring two, limiting block, and stabilizing groove are arranged in a circumferential array with the center of the circular block as the axis, thereby improving the stability of the knob.

[0013] Preferably, the top surface of the tee pipe is threaded, and a sealing ring is fixed on the surface of the tee pipe for easy connection and installation.

[0014] Compared with the prior art, this utility model provides a silicon oxide high-barrier film production equipment, which has the following beneficial effects:

[0015] 1. This silica high-barrier film production equipment, through its movable components, allows for the rotation of a rocker arm. This, via gear two, a toothed groove, a rotating plate, a rotating rod, gear one, a rack, a sliding plate, and a rubber plug, brings the rubber plugs closer together, causing them to disengage from the inlet and outlet of three-way pipe one and three-way pipe two. Reversing the rocker arm causes another set of rubber plugs to block the inlet and outlet of three-way pipe one and three-way pipe two, allowing another set of filter plates to perform filtration. Opening the corresponding sealing door two, which requires filter plate replacement, allows for the removal and replacement of the filter plate without stopping the equipment, thus improving processing efficiency.

[0016] 2. This silicon oxide high-barrier film production equipment, through the set filter components, supplies oxygen to the equipment through the threaded connection of the three-way pipe two. At this time, the oxygen is filtered through the filter plate and then enters the chamber through the three-way pipe two, which can prevent impurities from entering the high-temperature reaction chamber. Attached Figure Description

[0017] Figure 1 This is a front view structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the rear view structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the internal structure of the box body of this utility model;

[0021] Figure 5 This is a cross-sectional view of the active component of this utility model;

[0022] Figure 6 This is a cross-sectional view of the limiting component of this utility model;

[0023] Figure 7 For this utility model Figure 6 A schematic diagram of the enlarged structure of A in the middle.

[0024] In the diagram: 1. High-temperature reaction chamber; 2. Sealed door one; 3. Heating plate; 4. Base; 5. Filter assembly; 50. Chamber body; 51. Sealed door two; 52. T-pipe one; 53. T-pipe two; 54. Partition; 55. Concave frame; 56. Filter plate; 6. Movable assembly; 60. Slide plate; 61. Rubber stopper; 62. Rack; 63. Gear one; 64. Rotating rod; 65. Gear two; 66. 67. Rectangular plate; 69. Rocker arm; 60. Gear groove; 61. Limiting component; 62. Limiting groove; 63. Fixing block; 64. Sliding groove; 65. Locking block; 66. Spring 1; 67. Linkage groove; 688. Knob; 689. Round block; 600. Connecting groove; 610. Limiting block; 620. Spring 2; 630. Stabilizing groove; 640. Long rod; 650. Abutment block. Detailed Implementation

[0025] like Figures 1-7 As shown, this utility model provides a technical solution: a silicon oxide high-barrier film production equipment, including a high-temperature reaction chamber 1. A filter assembly 5 for filtering impurities in oxygen and a movable assembly 6 that does not require stopping the equipment are installed on the top of the high-temperature reaction chamber 1. A sealing door 2 is installed on the surface of the high-temperature reaction chamber 1. The filter assembly 5 includes: a chamber body 50, a sealing door 51, a three-way pipe 52, a three-way pipe 53, a partition 54, a concave frame 55, and a filter plate 56. Component 6 includes: a sliding plate 60, a rubber plug 61, a rack 62, a first gear 63, a rotating rod 64, a second gear 65, a spiral plate 66, a rocker arm 67, a toothed groove 69, a limiting component 68, a limiting groove 680, a fixing block 681, a sliding groove 682, a locking block 683, a first spring 684, a connecting groove 685, a knob 686, a round block 687, a connecting groove 688, a limiting block 689, a second spring 6800, a stabilizing groove 6801, a long rod 6802, and a stop block 6803.

[0026] The slide plate 60 is slidably connected to the inner wall of the housing 50. A rubber stopper 61 is fixed to the surface of the slide plate 60, and a rack 62 is fixed to the surface of the slide plate 60. A gear 63 is rotatably connected to the inner wall of the housing 50, and the gear 63 meshes with the rack 62. The movable component 6 also includes a rotating rod 64, which passes through the gear 63 and is fixedly connected to the gear 63. The end of the rotating rod 64 away from the gear 63 passes through the housing 50, and the rotating rod 64 is rotatably connected to the housing 50. The rotating rod 64, at the end furthest from gear 63, has gear 65 passing through it. The rotating rod 64 and gear 65 are fixedly connected. Two sets of gears 63, 65, 64, slide plate 60, rubber plug 61, and rack 62 are provided. Both sets of gears 63, 65, 64, slide plate 60, rubber plug 61, and rack 62 are symmetrically arranged about the center line of the housing 50. A rocker arm is mounted on the surface of one set of gears 65. A rocker arm 67 and a sliding plate 66 are connected to the surface of the housing 50. The surface of the sliding plate 66 has a toothed groove 69 that meshes with the second gear 65. The surface of the housing 50 is also provided with a limiting member 68. When the rocker arm 67 is rotated, the second gear 65 rotates, which drives the sliding plate 66 to move through the toothed groove 69, so that the two sets of second gears 65 can rotate synchronously. The rotating rod 64 drives the first gear 63 to rotate. At this time, the rack 62 drives the slide plate 60 and the rubber plug 61 to move closer to each other, so that the rubber plug 61 can disengage from the inlet and outlet of the first three-way pipe 52 and the second three-way pipe 53. At the same time, the other rocker arm 67 is reversed, and the above steps are repeated, so that the other set of rubber plugs 61 blocks the inlet and outlet of the first three-way pipe 52 and the second three-way pipe 53. At this time, the other set of filter plates 56 performs filtration. At this time, the personnel can open the second set of sealing doors 51 corresponding to the filter plate 56 that needs to be replaced, and pull out the filter plate 56 for replacement without stopping the equipment operation, thus improving processing efficiency.

[0027] The limiting component 68 includes a limiting groove 680 formed on the surface of the housing 50. A fixing block 681 is fixed to the surface of the U-shaped plate 66. A sliding groove 682 is formed on the surface of the fixing block 681. A locking block 683 is slidably connected to the inner wall of the sliding groove 682. The locking block 683 passes through the U-shaped plate 66. A spring 684 is fixed to the surface of the locking block 683. The end of the spring 684 away from the locking block 683 is fixed to the inner wall of the sliding groove 682. A linkage groove 685 is formed on the surface of the locking block 683. A knob 686 is rotatably connected to the surface of the fixing block 681. The output shaft of knob 686 passes through fixed block 681. A long rod 6802 is fixed to the surface of the output shaft of knob 686. A round block 687 is fixed to the surface of fixed block 681. A connecting groove 688 is provided on the inner side of round block 687. A sliding limit block 689 slides on the inner wall of connecting groove 688. A second spring 6800 is fixed to the surface of limit block 689. The end of spring 6800 away from limit block 689 is fixed to the surface of limit block 689. A stabilizing groove 6801 is provided on the surface of knob 686. A stop block is fixed to the end of long rod 6802 away from knob 686. 6803, the cross-section of the end of the limiting block 689 and the locking block 683 away from the second spring 6800 and the first spring 684 is set as a triangle. The connecting groove 688, the second spring 6800, the limiting block 689, and the stabilizing groove 6801 are all provided in four sets, and the four sets of connecting grooves 688, the second spring 6800, the limiting block 689, and the stabilizing groove 6801 are all arranged in a circular array with the center of the circular block 687 as the axis. When the U-shaped plate 66 moves, it drives the fixing block 681 and the locking block 683 to move. The surface of the locking block 683 abuts against the limiting groove 680, and the locking block 683 enters the sliding groove. Inside 682, spring 684 is compressed. When the position of the locking block 683 is parallel to the limiting groove 680, spring 684 is released. At this time, the locking block 683 enters the limiting groove 680, and the abutment block 6803 enters the linkage groove 685. This will not affect the normal movement of the herringbone plate 66. When the knob 686 is turned again, the long rod 6802 will drive the abutment block 6803 to rotate. At this time, the surface of the abutment block 6803 will contact the surface of the locking block 683, so that the locking block 683 can no longer move. This will limit the herringbone plate 66 and prevent the herringbone plate 66 from moving on its own.

[0028] There are two sets of active components 6, and both sets of active components 6 are symmetrically arranged with the center line of the box 50 as the axis of symmetry, and can be used alternately. The chamber 50 is fixed to the top of the high-temperature reaction chamber 1. A second sealing door 51 is connected to the surface of the chamber 50. A partition 54 is fixed to the inner wall of the chamber 50. A concave frame 55 is fixed to the surface of the partition 54 and the inner wall of the chamber 50. A filter plate 56 is placed on the inside of the concave frame 55. A three-way pipe 52 is opened at the top of the chamber 50 and a two-way pipe 53 is opened at the bottom of the chamber 50. Two sets of the second sealing door 51 and the filter plate 56 are provided. The two sets of the second sealing door 51 and the filter plate 56 are symmetrically arranged with the center line of the chamber 50 as the axis of symmetry. The oxygen supply equipment is connected through the thread of the two-way pipe 53. At this time, the oxygen is filtered through the filter plate 56 and then enters the chamber 50 through the two-way pipe 53. The silicon material reacts with the oxygen to carry out an oxidation reaction. The silicon oxide film generated by the reaction will gradually cover the surface of the silicon material to form a high-barrier film layer. The top surface of the tee pipe 52 is threaded, and a sealing ring is fixed on the surface of the tee pipe 52 to facilitate connection and improve sealing.

[0029] During processing, the silicon material is placed on the surface of the base 4, the heating plate 3 is turned on, and the oxygen supply equipment is connected through the threaded connection of the three-way pipe 53. At this time, the oxygen is filtered through the filter plate 56 and then enters the chamber 50 through the three-way pipe 53 to carry out the oxidation reaction between the silicon material and the oxygen. The resulting silicon oxide film will gradually cover the surface of the silicon material, forming a high-barrier film layer. When the filter plate 56 needs to be replaced after long-term use, the knob 686 is turned. At this time, the inner wall of the stabilizing groove 6801 abuts against the surface of the limiting block 689. The limiting block 689 enters the connecting groove 688, and the spring 6800 is compressed. When the position of the limiting block 689 is parallel to the stabilizing groove 6801, the second spring 6800 is released, allowing the limiting block 689 to enter the stabilizing groove 6801 and stabilize the knob 686. Simultaneously, the knob 686 drives the long rod 6802 and the abutment block 6803 to rotate. At this time, the position of the abutment block 6803 is parallel to the linkage groove 685, allowing the rocker arm 67 to rotate normally. At this time, the second gear 65 rotates, driving the guide plate 66 to move through the toothed groove 69, thus causing both sets of second gears 65 to rotate synchronously. This, through the rotating rod 64, drives the first gear 63 to rotate. At this time, the rack 62 drives the sliding plate 60 and the rubber stopper 61 to move closer together. This allows the rubber stopper 61 to disengage from the inlet and outlet of the first tee pipe 52 and the second tee pipe 53. Simultaneously, as the rotary plate 66 moves, it drives the fixing block 681 and the locking block 683 to move. At this time, the surface of the locking block 683 abuts against the limiting groove 680, and the locking block 683 enters the sliding groove 682, compressing the spring 684. When the locking block 683 is parallel to the limiting groove 680, the spring 684 is released, and the locking block 683 enters the limiting groove 680. Simultaneously, the abutment block 6803 enters the linkage groove 685, without affecting the normal movement of the rotary plate 66. Turning the knob 686 again will then drive the long rod 6... 802 drives the stop block 6803 to rotate. At this time, the surface of the stop block 6803 abuts against the surface of the locking block 683, which prevents the locking block 683 from moving further and limits the movement of the U-shaped plate 66, preventing the U-shaped plate 66 from moving on its own. At the same time, the other set of rocker 67 is reversed, and the above steps are repeated, so that the other set of rubber plugs 61 blocks the inlet and outlet of the three-way pipe 1 52 and the three-way pipe 2 53. At this time, the other set of filter plates 56 performs filtration. Personnel can open the second set of sealing doors 51 corresponding to the filter plate 56 that needs to be replaced, and pull out the filter plate 56 for replacement without stopping the equipment operation, thus improving processing efficiency.

[0030] Finally, it should be noted that the above embodiments are merely representative examples of this utility model. Obviously, this utility model is not limited to the above embodiments and can have many variations. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model should be considered to fall within the protection scope of this utility model.

Claims

1. A silicon oxide high-barrier film production equipment, comprising a high-temperature reaction chamber (1), characterized in that: The top of the high-temperature reaction chamber (1) is equipped with a filter assembly (5) for filtering impurities in oxygen and a movable assembly (6) that does not require stopping the operation of the equipment. The surface of the high-temperature reaction chamber (1) is equipped with a sealing door (2). The filter assembly (5) includes: a chamber body (50), a sealing door (51), a three-way pipe (52), a three-way pipe (53), a partition (54), a concave frame (55), and a filter plate (56). The movable assembly (6) includes: a sliding plate (60). The sliding plate (60) is slidably connected to the inner wall of the chamber body (50). A rubber plug (61) is fixed on the surface of the sliding plate (60). A rack (62) is fixed on the surface of the sliding plate (60). A gear (63) is rotatably connected to the inner wall of the chamber body (50). The gear (63) meshes with the rack (62).

2. The silicon oxide high-barrier film production equipment according to claim 1, characterized in that: The movable component (6) also includes a rotating rod (64), which passes through gear one (63) and is fixedly connected to gear one (63). The end of the rotating rod (64) away from gear one (63) passes through the housing (50) and is rotatably connected to the housing (50). The end of the rotating rod (64) away from gear one (63) passes through gear two (65), and the rotating rod (64) is fixedly connected to gear two (65). Gear one (63), gear two (65), rotating rod (64), sliding plate (60), and rubber stopper (61) are also included. Two sets of racks (62) are provided, and the two sets of gear one (63), gear two (65), rotating rod (64), sliding plate (60), rubber plug (61), and rack (62) are symmetrically arranged with the center line of the housing (50) as the axis of symmetry. A rocker arm (67) is installed on the surface of one of the two sets of gear two (65). A spiral plate (66) is slidably connected to the surface of the housing (50). The surface of the spiral plate (66) is provided with tooth grooves (69). The tooth grooves (69) mesh with gear two (65). The surface of the housing (50) is also provided with limiters (68).

3. The silicon oxide high-barrier film production equipment according to claim 2, characterized in that: The limiting component (68) includes a limiting groove (680) formed on the surface of the housing (50). A fixing block (681) is fixed to the surface of the U-shaped plate (66). A sliding groove (682) is formed on the surface of the fixing block (681). A locking block (683) is slidably connected to the inner wall of the sliding groove (682). The locking block (683) passes through the U-shaped plate (66). A spring (684) is fixed to the surface of the locking block (683). One end of the spring (684) away from the locking block (683) is fixed to the inner wall of the sliding groove (682). A linkage groove (685) is formed on the surface of the locking block (683). A knob (686) is rotatably connected to the surface of the fixing block (681). The output shaft of the knob (686) passes through the fixing block (681). A long rod (6802) is fixed to the output shaft surface of the knob (686). A round block (687) is fixed to the surface of the fixing block (681). A connecting groove (688) is provided on the inner side of the round block (687). A sliding limit block (689) is provided on the inner wall of the connecting groove (688). A second spring (6800) is fixed to the surface of the limit block (689). One end of the second spring (6800) away from the limit block (689) is fixed to the surface of the limit block (689). A stabilizing groove (6801) is provided to the surface of the knob (686). A stop block (6803) is fixed to the end of the long rod (6802) away from the knob (686). The cross-sections of the ends of the limit block (689) and the stop block (683) away from the second spring (6800) and the first spring (684) are all set as triangles.

4. The silicon oxide high-barrier film production equipment according to claim 1, characterized in that: The active component (6) is provided in two sets, and both sets of active components (6) are symmetrically arranged with the center line of the box (50) as the axis of symmetry.

5. The silicon oxide high-barrier film production equipment according to claim 1, characterized in that: The box body (50) is fixed on the top of the high temperature reaction box (1). The surface of the box body (50) is connected to a second sealing door (51). The inner wall of the box body (50) is fixed with a partition (54). The surface of the partition (54) and the inner wall of the box body (50) are both fixed with a concave frame (55). A filter plate (56) is placed on the inside of the concave frame (55). A three-way pipe (52) is opened at the top of the box body (50). A three-way pipe (53) is opened at the bottom of the box body (50). Two sets of the second sealing door (51) and the filter plate (56) are provided. The two sets of the second sealing door (51) and the filter plate (56) are symmetrically arranged with the center line of the box body (50) as the axis of symmetry.

6. The silicon oxide high-barrier film production equipment according to claim 3, characterized in that: The connecting groove (688), spring 2 (6800), limiting block (689), and stabilizing groove (6801) are all provided in four sets, and the four sets of connecting groove (688), spring 2 (6800), limiting block (689), and stabilizing groove (6801) are all arranged in a circular array with the center of the circular block (687) as the axis.

7. The silicon oxide high-barrier film production equipment according to claim 1, characterized in that: The top surface of the first tee pipe (52) is threaded, and a sealing ring is fixed on the surface of the first tee pipe (52).

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