Fluororubber pressure air bag assembly

Abstract

The fluororubber pressure air bag assembly comprises a stainless steel ring and fluororubber, the fluororubber is arranged on the side face of the stainless steel ring through vacuum hot mold pressing, the edge of the stainless steel ring is wrapped with the fluororubber, the surface of the stainless steel ring is subjected to sand blasting treatment, and the roughness reaches 7.5 gt; regt; a half-moon positioning hole is formed in the side face, away from the fluororubber, of the stainless steel ring. According to the fluororubber pressure air bag assembly, the service life of the pressure air bag assembly is effectively prolonged, the influence caused by corrosion of the pressure air bag assembly is reduced, the huge cost caused by maintenance and replacement is reduced, and the production efficiency is further improved.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, and in particular to a fluororubber pressure airbag assembly. Background Technology

[0002] In the current semiconductor chip processing field, pressure airbag components have two main uses. One is for grinding large silicon wafers in large silicon wafer factories, and the other is for wafer foundries to use a simple device with pressure airbag components to grind large silicon wafers before grinding wafers with circuit diagrams (wafers with circuit diagrams cannot be directly ground without confirming that the grinding equipment is in optimal condition, otherwise there is a risk of scrapping the wafers with circuit diagrams). It is used for preheating and testing the equipment to assess its condition. During the grinding process, a certain amount of grinding fluid is added to ensure full contact with the wafer, producing a chemical reaction that causes corrosion on the wafer surface, which is then combined with mechanical grinding to achieve the purpose of polishing.

[0003] Existing pressure airbag components are not resistant to abrasive fluid corrosion, have a short service life, and require frequent maintenance and replacement, which increases production costs and reduces production efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a fluororubber pressure airbag assembly that effectively extends the service life of the pressure airbag assembly, reduces the impact of corrosion, lowers the huge costs of maintenance and replacement, and further improves production efficiency.

[0005] To achieve the above objectives, this utility model provides a fluororubber pressure airbag assembly, including a stainless steel ring and fluororubber. The fluororubber is vacuum hot-molded onto the side of the stainless steel ring, and the fluororubber wraps around the edge of the stainless steel ring. The surface of the stainless steel ring is sandblasted to achieve a roughness of 7.5 > Ra > 6.0 µm. A crescent-shaped positioning hole is provided on the side of the stainless steel ring away from the fluororubber.

[0006] Preferably, the surface of the stainless steel ring is uniformly coated with a water-based primer.

[0007] Preferably, the water-based primer is applied twice.

[0008] Preferably, the outer side of the water-based primer is coated with a TY-based adhesive.

[0009] Preferably, the TY-based adhesive is applied twice.

[0010] Preferably, the fluororubber is a peroxide-based fluororubber with a fluorine content of 90-95%.

[0011] Preferably, fluororubber is evenly, smoothly, and without cracking spread on the surface of the stainless steel ring.

[0012] Therefore, this utility model adopts the above-mentioned fluororubber pressure airbag assembly, which effectively extends the service life of the pressure airbag assembly, reduces the impact of corrosion, reduces the huge cost of maintenance and replacement, and further improves production efficiency.

[0013] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0014] Figure 1 This is a front view of a fluororubber pressure airbag assembly according to this utility model;

[0015] Figure 2 This is a schematic diagram of the back of a fluororubber pressure airbag assembly according to this utility model;

[0016] Figure 3 This is a schematic diagram of the positioning hole in a fluororubber pressure airbag assembly of this utility model;

[0017] Figure 4 This is a longitudinal sectional view of a fluororubber pressure airbag assembly according to this utility model.

[0018] Figure Labels

[0019] 1. Pressure bladder assembly; 2. Fluororubber; 3. Stainless steel ring; 4. Positioning hole. Detailed Implementation

[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings and embodiments.

[0021] Unless otherwise defined, the technical or scientific terms used in this utility model shall have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] Example

[0023] like Figure 1As shown, a fluororubber 2 pressure airbag assembly 1 includes a stainless steel ring 3 and fluororubber 2, wherein the fluororubber 2 is vacuum-molded onto the side of the stainless steel ring 3. Figure 4 As shown, fluororubber 2 wraps around the edge of the stainless steel ring 3. Fluororubber 2 is a peroxide-based fluororubber with a fluorine content of 90-95%. Fluororubber 2 is evenly, smoothly, and crack-free, spread evenly on the surface of the stainless steel ring 3.

[0024] The stainless steel ring 3 has a sandblasted surface with a roughness of 7.5 > Ra > 6.0. (For example...) Figure 2 and Figure 3 As shown, a crescent-shaped positioning hole 4 is provided on the side of the stainless steel ring 3 facing away from the fluororubber 2. A water-based primer is evenly applied to the surface of the stainless steel ring 3. The water-based primer is applied twice. A TY-based adhesive is applied to the outer side of the water-based primer. The TY-based adhesive is applied twice.

[0025] Using peroxide-based ternary fluororubber 2 as raw material, this compound exhibits significantly improved resistance to acids and alkalis, corrosion, and friction. By employing peroxide-based ternary fluororubber 2, the fluorine content can be increased to over 92%, effectively extending the service life of the airbag assembly 1, reducing the impact of corrosion, lowering the substantial costs of maintenance and replacement, and further enhancing the company's operational efficiency.

[0026] Oil and dust removal treatment for stainless steel ring 3: First, use 80-mesh fine steel sand to remove surface stains, then use 24-mesh to increase the surface roughness, and finally use 36-mesh diamond sand to sandblast the surface to achieve a roughness of 7.5>Ra>6.0. Then, use ultrasonic cleaning for 30 minutes to remove oil stains from the surface of stainless steel ring 3. After taking it out, blow it clean and then bake it in an oven at 80 degrees for 10 minutes to remove moisture.

[0027] Pre-treatment of stainless steel ring 3 surface: After cleaning, stainless steel ring 3 needs to be dried in a 100-degree oven for 5 minutes. After removing and cooling, apply water-based primer evenly twice to the area to be bonded. After drying, bake in a 120-degree oven for 5 minutes. After the stainless steel ring 3 has cooled again, apply TY-based adhesive twice more. After drying, bake in a 170-degree oven for 10 minutes.

[0028] Vacuum hot molding: After mold assembly, the vacuum hot press is heated to a vacuum level of less than 10. -4 Pa, slowly and uniformly heat to 190℃ within 0-18 minutes. Open the mold again, measure the surface temperature of the mold in the 155-165℃ range, put the pre-treated stainless steel ring 3 into the mold, and weigh 400 grams of fluororubber 2 raw material into the mold for vacuum thermoforming.

[0029] Quality Inspection: A 3D scanner is used to inspect the flatness of the film coating on the stainless steel ring 3, checking whether the coating surface is flat and free from sagging. A 2D projector is then used to measure the concentricity of the coated stainless steel ring 3, ensuring the uniformity of the outer layer of film coating on the stainless steel ring 3 and preventing eccentricity during product use. The produced pressure airbag component 1, made of fluororubber 2, is evenly, smoothly, and crack-free, laid flat on the surface of the stainless steel ring 3.

[0030] Due to its high fluorine content, the fluororubber 2 in the peroxide system is relatively sticky and has poor flowability. Therefore, it requires special sandblasting treatment on the mold surface during molding to reduce the resistance of the fluororubber 2 passing through the mold surface and allow the rubber to flow more evenly through the mold surface.

[0031] The process involves two rounds of refining, with the shaft spacing of the refining equipment set at 0.9 mm. The refining process lasts for 30 minutes, and 10 thin passes are made to improve the uniformity of the rubber compound and prevent the formation of many pits of varying sizes on the surface of the fluororubber 2.

[0032] Fluororubber 2 wraps around the edge of the stainless steel ring 3. Temperature control is used to address the thermal expansion and contraction of the stainless steel ring 3, preventing cracking at the contact point between the fluororubber 2 film and the stainless steel ring 3. First, the stainless steel ring 3 is baked in an oven at 180 degrees Celsius for 30 minutes before being placed in the mold for production. After baking, the outer diameter of the stainless steel ring 3 expands due to heat. At this point, the temperature of the stainless steel ring 3 matches that of the mold, and it stops expanding, reaching equilibrium upon contact with the fluororubber 2 compound. When the finished product is produced, the temperature drops, and the shrinkage of the fluororubber 2 compound is faster than that of the stainless steel ring 3. Because of the elasticity of the compound, cracking does not occur at the adhesion point between the steel ring and the compound.

[0033] Therefore, the present invention adopts the above-mentioned fluororubber pressure airbag assembly, which effectively extends the service life of the pressure airbag assembly, reduces the impact of corrosion, reduces the huge costs of maintenance and replacement, and further improves production efficiency.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solution of this utility model, and these modifications or equivalent substitutions cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of this utility model.

Claims

1. A fluororubber pressure airbag assembly, characterized in that: It includes a stainless steel ring and fluororubber. The fluororubber is vacuum hot-molded onto the side of the stainless steel ring and wraps around the edge of the stainless steel ring. The surface of the stainless steel ring is sandblasted to achieve a roughness of 7.5 > Ra > 6.0 µm. A crescent-shaped positioning hole is provided on the side of the stainless steel ring away from the fluororubber.

2. The fluororubber pressure airbag assembly according to claim 1, characterized in that: The surface of the stainless steel ring is evenly coated with a water-based primer.

3. The fluororubber pressure airbag assembly according to claim 2, characterized in that: The water-based primer is applied in two coats.

4. A fluororubber pressure airbag assembly according to claim 3, characterized in that: The outer side of the water-based primer is coated with TY-based adhesive.

5. A fluororubber pressure airbag assembly according to claim 4, characterized in that: TY-based adhesives require two applications.

6. A fluororubber pressure airbag assembly according to claim 1, characterized in that: Fluororubber is a peroxide-based fluororubber with a fluorine content of 90-95%.

7. A fluororubber pressure airbag assembly according to claim 1, characterized in that: Fluororubber is evenly, smoothly, and without cracking laid flat on the surface of the stainless steel ring.

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