Aluminum-steel composite vacuum cavity

Abstract

The utility model discloses an aluminum-steel composite vacuum cavity which comprises a plurality of aluminum-steel composite plates, the plurality of aluminum-steel composite plates are connected through welding seams to form the vacuum cavity, and each aluminum-steel composite plate comprises a steel plate and an aluminum layer fixed on the inner side of the steel plate. According to the utility model, the performance requirements of high vacuum degree and good protection effect and the requirement of low production cost can be met.

Description

Technical Field

[0001] This utility model relates to the field of vacuum cavity technology, and in particular to an aluminum-steel composite vacuum cavity. Background Technology

[0002] A vacuum chamber is a container that maintains an internal vacuum state, commonly used in various industrial and scientific research fields, such as semiconductor manufacturing and vacuum coating. Its operating environment requires the vacuum chamber to possess not only sufficient strength and rigidity but also to not react with the internal gas. Vacuum chambers are typically made of stainless steel, but it is expensive and has high manufacturing costs; carbon steel is inexpensive and its strength is sufficient to meet vacuum requirements, but some coating materials react with the carbon in carbon steel, causing corrosion; aluminum is also a commonly used material, and coating materials generally do not react with aluminum or its internal elements, providing good protection, but its strength is insufficient and its melting point is low, limiting its application to environments with low vacuum requirements and low temperatures. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide an aluminum-steel composite vacuum chamber that can simultaneously meet the performance requirements of high vacuum level, good protective effect, and low production cost.

[0004] According to an embodiment of the present invention, an aluminum-steel composite vacuum cavity includes multiple aluminum-steel composite plates, which are connected by welds to form a vacuum cavity. Each aluminum-steel composite plate includes a steel plate and an aluminum layer fixed to the inner side of the steel plate.

[0005] Because adjacent aluminum-steel composite panels are sealed together by welds, the sealing effect is good and the connection strength between the aluminum-steel composite panels is high, which can meet the requirements of high vacuum. Since the aluminum-steel composite panel includes a steel plate and an aluminum layer fixed to the inner surface of the steel plate, the steel plate has high strength and rigidity, which can meet the vacuum requirements of the high vacuum chamber. At the same time, from an economic perspective, inexpensive steel such as carbon steel can be selected to reduce the production cost of the aluminum-steel composite vacuum chamber of this invention. The aluminum layer is exposed in the cavity of the vacuum chamber and will not react with the coating materials or other materials in the vacuum chamber. Furthermore, the aluminum layer can prevent elements such as carbon in the steel plate from reacting with the coating materials or other materials in the vacuum chamber, resulting in good corrosion resistance and protection of the aluminum-steel composite vacuum chamber.

[0006] In summary, the aluminum-steel composite vacuum chamber of this utility model embodiment can simultaneously meet the performance requirements of high vacuum degree and good protection effect, as well as the requirement of low production cost.

[0007] In some embodiments, the aluminum layer is a friction stir additively deposited aluminum layer located on the surface of the steel plate.

[0008] In some embodiments, the steel plate is a carbon steel plate.

[0009] In some embodiments, the thickness of the aluminum layer is less than the thickness of the steel plate.

[0010] In some embodiments, the weld includes an inner weld and an outer weld, the inner weld connecting the aluminum layers of adjacent aluminum-steel composite panels, and the outer weld connecting the steel plates of the aluminum-steel composite panels.

[0011] In some embodiments, the inner weld is an aluminum weld and the outer weld is a steel weld.

[0012] In some embodiments, the aluminum layer and the steel plate of adjacent aluminum-steel composite panels have a butt joint interface that contacts each other, and the steel plates of adjacent aluminum-steel composite panels have a bevel, the bevel being located at the outer end of the butt joint interface, and the outer weld being located in the bevel.

[0013] In some embodiments, the number of weld layers on the outer side from the inside out is one or more.

[0014] In some embodiments, the width of the mating interface at the steel plate is 1-2 mm.

[0015] In some embodiments, the inner weld is located in the inner corner joint between the aluminum layers of adjacent aluminum-steel composite plates.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1a This is a schematic diagram of the aluminum-steel composite vacuum cavity according to an embodiment of the present invention;

[0019] Figure 1b for Figure 1a Enlarged diagram of point A in the diagram;

[0020] Figure 1c This is a rendering of the aluminum-steel composite vacuum cavity according to an embodiment of the present invention;

[0021] Figure 2aThis is a schematic diagram of the aluminum layer preparation process of the aluminum-steel composite plate in the aluminum-steel composite vacuum cavity preparation process according to an embodiment of the present invention.

[0022] Figure 2b This is a schematic diagram of the aluminum-steel composite plate obtained during the preparation process of the aluminum-steel composite vacuum cavity according to an embodiment of this utility model;

[0023] Figure 3a This is a schematic diagram showing the assembly of multiple aluminum-steel composite plates during the preparation of the aluminum-steel composite vacuum cavity according to an embodiment of the present invention.

[0024] Figure 3b This is a schematic diagram showing the spot welding or short welding on the steel plate side after multiple aluminum-steel composite plates are assembled together during the preparation of the aluminum-steel composite vacuum cavity according to an embodiment of this utility model.

[0025] Figure 3c This is a schematic diagram showing the welding of the first layer of weld (i.e. the first layer of the outer weld) on the steel plate side after multiple aluminum-steel composite plates are joined together and spot-welded or short-welded during the preparation of the aluminum-steel composite vacuum cavity according to an embodiment of the present invention.

[0026] Figure 3d This is a schematic diagram illustrating the process of welding a second layer of weld (i.e., the second layer of the outer weld) after welding the first layer of weld on the steel plate side during the preparation of the aluminum-steel composite vacuum cavity according to an embodiment of this utility model.

[0027] Figure 4 This is a schematic diagram of the welding of the inner weld seam on the aluminum layer side during the preparation process of the aluminum-steel composite vacuum cavity according to an embodiment of the present invention.

[0028] Figure 5a This is a cross-sectional schematic diagram of the aluminum-steel composite plate of the aluminum-steel composite vacuum cavity according to an embodiment of the present utility model;

[0029] Figure 5b for Figure 5a Enlarged schematic diagram at point F in the middle.

[0030] Figure label:

[0031] Aluminum-steel composite plate 10; steel plate 101; aluminum layer 102; butt joint interface 103; bevel 104; weld 20; outer weld 201; inner weld 202. Detailed Implementation

[0032] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0033] The following combination Figures 1a to 5b The following describes the aluminum-steel composite vacuum cavity of this utility model embodiment.

[0034] like Figures 1a to 1c , Figures 5a to 5b As shown, the aluminum-steel composite vacuum cavity according to an embodiment of the present invention includes multiple aluminum-steel composite plates 10. The multiple aluminum-steel composite plates 10 are connected by welds 20 to form a vacuum cavity, that is, the multiple aluminum-steel composite plates 10 are welded together in pairs to form a vacuum cavity. Each aluminum-steel composite plate 10 includes a steel plate 101 and an aluminum layer 102 fixed on the inner surface of the steel plate 101. Here, the material of the aluminum layer 102 is aluminum or aluminum alloy.

[0035] Because adjacent aluminum-steel composite plates 10 are sealed together by welds 20, the sealing effect is good and the connection strength between the aluminum-steel composite plates 10 is high, which can meet the requirements of high vacuum. Since the aluminum-steel composite plate 10 includes a steel plate 101 and an aluminum layer 102 fixed to the inner surface of the steel plate 101, the steel plate 101 has high strength and rigidity, which can meet the vacuum requirements of the high vacuum chamber. At the same time, from an economic perspective, the steel plate 101 can be made of inexpensive steel such as carbon steel to reduce the production cost of the aluminum-steel composite vacuum chamber of this invention. The aluminum layer 102 is exposed in the cavity of the vacuum chamber and will not react with the coating material or other materials in the vacuum chamber. Furthermore, the aluminum layer 102 can prevent elements such as carbon in the steel plate 101 from reacting with the coating material or other materials in the vacuum chamber, resulting in good corrosion resistance and protection of the aluminum-steel composite vacuum chamber.

[0036] In summary, the aluminum-steel composite vacuum chamber of this utility model embodiment can simultaneously meet the performance requirements of high vacuum degree and good protection effect, as well as the requirement of low production cost.

[0037] In some embodiments, as Figures 1a to 2b As shown, aluminum layer 102 is a friction stir additively deposited aluminum layer located on the surface of steel plate 101. For example... Figure 2a and Figure 2b As shown, the aluminum layer deposited by friction stir additive manufacturing is obtained by depositing aluminum material on the surface of steel plate 101 using friction stir additive manufacturing technology. The preparation principle of the aluminum layer deposited by friction stir additive manufacturing is as follows: based on the principle of friction stir welding, aluminum material (aluminum or aluminum alloy), such as aluminum powder, aluminum wire or aluminum rod, is deposited on the surface of steel plate 101 by friction heating and plastic flow. In the additive manufacturing process, aluminum does not melt, and the amount of aluminum-steel intermetallic compound formed by reaction with steel is small, which can obtain an aluminum-steel composite plate 10 with high bonding strength; and friction stir additive manufacturing can realize the connection between aluminum and steel of large area and arbitrary thickness, without being limited by size.

[0038] It should be noted that the aluminum-steel composite plate 10 can also be obtained using other processing methods, such as explosive welding and brazing. Explosive welding is a solid-state welding method that can achieve a high-strength connection between aluminum and steel, but it is difficult to prepare large-area aluminum-steel composite plates 10, resulting in relatively high manufacturing costs. Brazing requires the addition of filler metal and flux, and internal defects are prone to occur when welding large areas of aluminum and steel, resulting in lower connection strength. Therefore, directly depositing a friction stir additive aluminum layer on the surface of the steel plate 101 using friction stir additive manufacturing technology offers superior cost-effectiveness.

[0039] In some embodiments, steel plate 101 is carbon steel plate. Carbon steel plate is inexpensive and its strength can meet the requirements of high vacuum.

[0040] In some embodiments, as Figure 1a and Figure 1c As shown, the thickness of the aluminum layer 102 is less than the thickness of the steel plate 101. The thickness of the aluminum layer 102 can be selected from 0.5-10 mm, while the thickness of the steel plate 101 can be selected from 5-50 mm. The smaller thickness of the aluminum layer 102 saves aluminum material, reduces costs, and still provides protection. The larger thickness of the steel plate 101 allows for the selection of cheaper steel while ensuring the strength and rigidity of the steel plate 101, meeting the high vacuum requirements of the vacuum chamber.

[0041] In some embodiments, as Figure 1b and Figure 1c As shown, weld 20 includes an inner weld 202 and an outer weld 201. The inner weld 202 connects the aluminum layers 102 of adjacent aluminum-steel composite plates 10, and the outer weld 201 connects the steel plates 101 of the aluminum-steel composite plates 10. In other words, adjacent aluminum-steel composite plates 10 are connected by double-sided welds 20, namely the inner weld 202 and the outer weld 201, resulting in high connection strength and good sealing between adjacent aluminum-steel composite plates 10.

[0042] In some embodiments, the inner weld 202 is an aluminum weld, and the outer weld 201 is a steel weld. The aluminum weld connects the aluminum layers 102 of adjacent aluminum-steel composite plates 10, and the steel weld connects the steel plates 101 of adjacent aluminum-steel composite plates 10. Welding between the same materials is easier and results in better strength. Furthermore, the inner side needs to be entirely aluminum; therefore, only aluminum-to-aluminum welding is possible.

[0043] In some embodiments, as Figures 1a to 1c , Figures 3a to 3b , Figures 5a to 5bAs shown, the aluminum layer 102 and steel plate 101 of the adjacent aluminum-steel composite plate 10 have a butt interface 103 that contacts each other, and the steel plate 101 of the adjacent aluminum-steel composite plate 10 have a bevel 104. The bevel 104 is located at the outer end of the butt interface 103, and the outer weld 201 is located in the bevel 104. In this design, the butt joint interface 103 between the aluminum layer 102 and the steel plate 101 of the aluminum-steel composite plate 10 can be a chamfered bevel at the connecting end of the aluminum-steel composite plate 10. By setting the butt joint interface 103, it is convenient to splice adjacent aluminum-steel composite plates 10. Since the steel plate 101 is relatively thick, after the adjacent aluminum-steel composite plates 10 are spliced, a bevel 104 is formed between the steel plates 101 and at the outer end of the butt joint interface 103. The adjacent steel plates 101 are connected by welding an outer weld 201 at the bevel 104, which is conducive to the penetration of the weld between the steel plates 101 and the weld quality is good. In addition, since the outer end of the butt joint interface 103 extends to the position of the steel plate 101 near the aluminum layer 102, the aluminum layer 102 on the inner side of the steel plate 101 will not be damaged when the outer weld 201 is welded at the bevel 104.

[0044] In some embodiments, the number of weld layers in the outer weld 201 from the inside out is one or more (e.g., Figure 3c and Figure 3d When the groove depth 104 is small, the number of welding layers of the outer weld can be one. When the groove depth 104 is large, the number of welding layers of the outer weld 201 can be multiple. The purpose is to ensure that the adjacent steel plates 101 are fully penetrated and to ensure the welding quality.

[0045] In some embodiments, as Figure 5b As shown, the width L of the mating interface 103 at the steel plate 101 is 1-2mm, which can ensure that the aluminum layer 102 on the inner side of the steel plate 101 will not be damaged when the outer weld 201 is welded at the bevel 104.

[0046] In some embodiments, the width L of the mating interface 103 at the steel plate 101 is 1.5 mm, which can ensure that the aluminum layer 102 on the inner side of the steel plate 101 will not be damaged when the outer weld 201 is welded at the bevel 104.

[0047] In some embodiments, as Figures 1a to 1c As shown, the inner weld 202 is located in the inner corner seam between the aluminum layers 102 of the adjacent aluminum-steel composite plate 10. In other words, the inner weld 202 can be welded from the inner side of the aluminum-steel composite plate 10 at the inner corner seam, which makes inner welding convenient.

[0048] like Figures 2a to 4 As shown, the fabrication process of the aluminum-steel composite vacuum cavity according to an embodiment of this utility model is described below. The fabrication process includes the following steps:

[0049] S1: Aluminum-steel composite plate 10 is prepared by friction stir additive manufacturing, i.e., aluminum layer 102 is deposited on steel plate 101, such as... Figures 2a to 2b As shown.

[0050] Before additive manufacturing, the surface of steel plate 101 is ground and cleaned to remove contaminants such as rust and grease, and to improve the surface roughness to facilitate the subsequent deposition of aluminum materials.

[0051] During additive manufacturing, the spindle head drives the additive mixing head to rotate and move sequentially until aluminum is pushed to fill the entire surface of the steel plate 101. The aluminum can be fed into the additive mixing head in the form of powder, filament, or rod.

[0052] After additive manufacturing, the aluminum layer 102 on the surface is machined and flattened.

[0053] S2: Assemble multiple aluminum-steel composite plates (10) into a vacuum chamber and fix it in place to facilitate subsequent welding, such as... Figures 3a to 3b As shown.

[0054] like Figure 3a As shown, the aluminum-steel composite panels 10 can be fixed by mechanical means such as tooling or C-clamps; or by other welding methods.

[0055] Preferred, such as Figure 3b As shown, spot or short-segment welding (e.g., tungsten inert gas welding (TIG) or laser welding is performed at multiple bevels 104 on the side of steel plate 101. Figure 3b (As shown by arrow B in the diagram), the adjacent aluminum-steel composite plates 10 are fixed together. Compared to gas metal arc welding (MIG), TIG and laser welding have relatively less heat input, which can prevent the inner aluminum layer 102 from separating from the steel plate 101 due to the high temperature caused by a large amount of heat accumulation, or even melting.

[0056] Preferably, to prevent separation between the aluminum layer 102 and the steel plate 101, or even melting of the aluminum, due to the high temperature during welding, a copper internal heat sink is used for the inner aluminum layer 102, or a water-cooled plate is used as a heat sink, or a cooling medium such as cooling gas is applied. During spot welding, the bevel 104 is alternately spot welded.

[0057] S3: Welding is used to fill the entire bevel 104 on the side of steel plate 101, forming an outer weld 201, connecting adjacent steel plates 101, such as... Figures 3c to 3d As shown.

[0058] Preferably, regardless of whether the 101 steel plate thickness requires single-layer or multi-layer welding, the first layer should be TIG welded to reduce damage to the internal aluminum-steel interface during the welding process; for multi-layer welding, the first layer should be TIG welded (e.g., Figure 3cAs shown by arrow C in the image), the welding of the subsequent layers (such as...) Figure 3d As indicated by arrow D in the diagram, various welding methods such as TIG, MIG, MAG, and laser welding can be used. MIG is the preferred choice due to its high efficiency and stable quality.

[0059] Preferably, to prevent separation between the aluminum and steel, or even melting of the aluminum, due to the high temperature during welding, the inner aluminum is cooled by an internal copper heat sink, a water-cooled plate, or a cooling medium such as cooling gas. Multiple bevels are welded alternately for each layer.

[0060] S4: Welding is used to fill the inner corner seam formed by the inner aluminum layer 102, forming an inner weld 202, connecting adjacent aluminum layers 102 to ensure the sealing of the weld 20. Figure 4 As indicated by the middle arrow E.

[0061] Preferably, TIG welding is used to fill the fillet weld 20 with aluminum welding wire to reduce heat accumulation. Alternating welding is used for multiple inner corner welds.

[0062] The order of steps S3 and S4 above can be interchanged.

[0063] S5: CNC machine the specific structure of the vacuum chamber exterior to produce the finished product.

[0064] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0065] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An aluminum-steel composite vacuum cavity, characterized in that, It includes multiple aluminum-steel composite panels, which are connected by welds to form a vacuum cavity. Each aluminum-steel composite panel includes a steel plate and an aluminum layer fixed to the inner side of the steel plate. The weld includes an inner weld and an outer weld. The inner weld connects the aluminum layers of adjacent aluminum-steel composite panels, and the outer weld connects the steel plates of the aluminum-steel composite panels.

2. The aluminum-steel composite vacuum cavity according to claim 1, characterized in that, The aluminum layer is a friction stir additively deposited aluminum layer located on the surface of the steel plate.

3. The aluminum-steel composite vacuum cavity according to claim 2, characterized in that, The steel plate is a carbon steel plate.

4. The aluminum-steel composite vacuum cavity according to claim 1, characterized in that, The thickness of the aluminum layer is less than the thickness of the steel plate.

5. The aluminum-steel composite vacuum cavity according to claim 1, characterized in that, The inner weld is an aluminum weld, and the outer weld is a steel weld.

6. The aluminum-steel composite vacuum cavity according to claim 1, characterized in that, The aluminum layer and the steel plate of the adjacent aluminum-steel composite plate have a butt joint interface that contacts each other, and the steel plates of the adjacent aluminum-steel composite plate have a bevel. The bevel is located at the outer end of the butt joint interface, and the outer weld is located in the bevel.

7. The aluminum-steel composite vacuum cavity according to claim 6, characterized in that, The outer weld seam has one or more weld layers from the inside out.

8. The aluminum-steel composite vacuum cavity according to claim 6, characterized in that, The width of the mating interface at the steel plate is 1-2 mm.

9. The aluminum-steel composite vacuum cavity according to claim 1, characterized in that, The inner weld is located in the inner corner joint between the aluminum layers of the adjacent aluminum-steel composite plates.

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