Flower basket self-circulation material supplying and receiving equipment

Abstract

The utility model provides flower basket self-circulation material supplying and receiving equipment, and relates to the technical field of semiconductor processing equipment. The flower basket self-circulation material supplying and receiving equipment comprises a first lifting assembly, a second lifting assembly, a transverse moving module, a first conveying line and a second conveying line. The second lifting assembly is arranged on one side of the first lifting assembly in the first direction and is configured to fix the flower basket and drive the flower basket to ascend and descend in the height direction. The transverse moving module is arranged on the side, located in the second direction, of the first lifting assembly and the second lifting assembly and can drive the flower basket to move in the first direction and the second direction. The first conveying line is arranged in the second direction of the transverse moving module, and the first conveying line and the transverse moving module are arranged at the same height. The second conveying line is arranged corresponding to the first lifting assembly so as to transfer flower baskets carrying unprocessed silicon wafers to the first lifting assembly. According to the flower basket self-circulation material supplying and receiving equipment, efficient and automatic feeding and discharging can be achieved, and meanwhile occupied transverse space can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and more specifically, to a flower basket self-circulating feeding and receiving device. Background Technology

[0002] In the processing of solar cells, baskets are frequently used for storing the cells. A basket-based circulating feeding system, working in conjunction with the processing equipment, is typically required during the cell manufacturing process, and AGV (Automated Guided Vehicle) carts are then used to achieve automated production.

[0003] The existing sequential feeding device for flower baskets typically has its lateral movement module located between two sets of lifting components. However, the lateral movement module occupies a significant amount of horizontal space, resulting in a large horizontal space requirement for the overall layout of the flower basket circulation equipment. Utility Model Content

[0004] The purpose of this utility model is to provide a self-circulating material feeding and receiving device for flower baskets, which can achieve efficient automatic loading and unloading while reducing the occupation of lateral space.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] This application provides a self-circulating flower basket feeding and receiving device, comprising:

[0007] The first lifting component is configured to fix the basket and drive the basket to move up and down in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment;

[0008] The second lifting component is disposed on one side of the first lifting component in the first direction, and is configured to fix the flower basket and drive the flower basket to lift and lower in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty flower basket in sequence.

[0009] A lateral movement module is disposed on one side of the first lifting component and the second lifting component located in the second direction, which can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular;

[0010] The first conveyor line is disposed in the second direction of the transverse module and is disposed at the same height as the transverse module;

[0011] A second conveyor line is provided corresponding to the first lifting assembly to transfer baskets carrying unprocessed silicon wafers to the first lifting assembly.

[0012] In an optional embodiment, the first lifting component and the second lifting component are arranged opposite to each other.

[0013] In an optional embodiment, the first lifting assembly includes a first guide post, a first basket fixing member, and a first driving member;

[0014] The second lifting assembly includes a second guide column, a second basket fixing component, and a second driving component;

[0015] The first flower basket fixing member is movably mounted on the first guide post, and the first flower basket fixing member is located on the side of the first guide post away from the first guide post. The first driving member is located on the first guide post, and the driving member is configured to drive the first flower basket fixing member to rise and fall. The first flower basket fixing member is configured to fix the flower basket.

[0016] The second flower basket fixing member is movably mounted on the second guide post, and the second flower basket fixing member is located on the side of the second guide post opposite to the first guide post. The second driving member is located on the second guide post, and the second driving member is configured to drive the second flower basket fixing member to rise and fall. The second flower basket fixing member is configured to fix the flower basket.

[0017] In an optional embodiment, the first flower basket fixing member includes a first mounting plate, a first bottom plate, a first top plate, a first conveyor belt, and a first clamping member. The first mounting plate is movably mounted on the side of the first guide post away from the second guide post. The first bottom plate is disposed at the bottom of the first mounting plate, the first top plate is disposed at the top of the first mounting plate, the first conveyor belt is disposed at the top of the first bottom plate, and the first clamping member is disposed at the first top plate. The first conveyor belt can transport the flower basket in the second direction, and the first clamping member can apply pressure to the flower basket from the top of the flower basket to fix the flower basket.

[0018] The second flower basket fixing component includes a second mounting plate, a second bottom plate, a second top plate, a second conveyor belt, and a second clamping member. The second mounting plate is movably mounted on the side of the second guide post away from the first guide post. The second bottom plate is disposed at the bottom of the second mounting plate, the second top plate is disposed at the top of the second mounting plate, the second conveyor belt is disposed at the top of the second bottom plate, and the second clamping member is disposed at the second top plate. The second conveyor belt can transport the flower basket in the second direction, and the second clamping member can apply pressure to the flower basket from the top of the flower basket to fix the flower basket.

[0019] In an optional implementation, the transverse module includes a fixed plate, a transmission component, and a drive component;

[0020] The fixing plate is disposed in the second direction of the first lifting component and the second lifting component, and the fixing plate is disposed at the bottom end of the first lifting component and the second lifting component, and the fixing plate extends from the first lifting component to the second lifting component;

[0021] The transmission component is disposed on the fixed plate, and the driving component is disposed on the fixed plate and is connected to the transmission component in a transmission manner. The driving component can drive the transmission component to reciprocate in the first direction.

[0022] The bearing surface of the transmission component is on the same plane as the bearing surface of the first conveyor line, and the transmission component can drive the flower basket to move in the second direction.

[0023] In an optional embodiment, the transmission component includes a first belt module and a second belt module arranged side by side in a first direction, and the drive component is drivenly connected to both the first belt module and the second belt module. The drive component is configured to drive either or both of the first belt module and the second belt module to reciprocate synchronously along the fixed plate in the first direction.

[0024] In an optional embodiment, the transmission component further includes a fixed base plate;

[0025] The fixed base plate is mounted on the fixed plate, and the fixed base plate is connected to the driving assembly in a transmission manner. The driving assembly can drive the fixed plate to reciprocate in the first direction.

[0026] The first belt module and the second belt module are arranged side by side on the fixing plate in the first direction.

[0027] In an optional implementation, the drive assembly includes a first drive motor and a second drive motor;

[0028] The first belt module and the second belt module are arranged side by side on the fixed plate in the first direction, and each can move independently relative to the fixed plate in the first direction;

[0029] The first drive motor is configured to drive the first belt module to reciprocate in a first direction;

[0030] The second drive motor is configured to drive the second belt module to reciprocate in a first direction.

[0031] In an optional embodiment, the second conveyor line is disposed in the second direction of the transverse module, at the same height as the transverse module, and arranged side by side with the first conveyor line.

[0032] In an optional embodiment, the first lifting component and the second lifting component are arranged opposite to each other.

[0033] The beneficial effects of the self-circulating flower basket feeding and receiving device provided in this embodiment of the utility model include:

[0034] This application places the second lifting component on one side of the first lifting component in a first direction, and the lateral movement module on the side where the first and second lifting components are located in a second direction. The lateral movement module moves the flower basket along either the first or second direction according to the transmission requirements, and the first and second directions are perpendicular. This way, the lateral movement module does not occupy the lateral space between the first and second lifting components, allowing the positions of the first and second lifting components to be set as needed, thereby reducing the overall space occupied by the equipment in the first direction. Most importantly, it prevents the flower basket from getting stuck during transport, thus avoiding disruption to its circulation. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a structural schematic diagram of the self-circulating flower basket feeding and receiving device provided in this embodiment from a first-view perspective.

[0037] Figure 2 This is a structural schematic diagram of the self-circulating flower basket feeding and receiving device provided in this embodiment from a second perspective.

[0038] Figure 3 This is a schematic diagram of the structure of the first lifting component of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0039] Figure 4 This is a schematic diagram of the transverse movement module of the self-circulating flower basket feeding and receiving equipment provided in this embodiment.

[0040] Icons: 100 - Self-circulating flower basket feeding and receiving equipment; 110 - First lifting assembly; 111 - First guide column; 112 - First flower basket fixing component; 113 - First driving component; 114 - First mounting plate; 115 - First base plate; 116 - First top plate; 117 - First conveyor belt; 118 - First clamping component; 130 - Second lifting assembly; 131 - Second guide column; 132 - Second flower basket fixing component; 133 - Second driving component; 134 - Second mounting plate; 135 - Second base plate; 136 - Second top plate; 137 - Second conveyor belt; 138 - Second clamping component; 150 - Lateral movement module; 151 - Fixing plate; 152 - Conveying assembly; 153 - Driving assembly; 154 - First belt module; 155 - Second belt module; 156 - Fixed base plate; 170 - First conveyor line; 180 - Second conveyor line; 200 - Flower basket. Detailed Implementation

[0041] The existing sequential feeding device for flower baskets typically has its lateral movement module located between two sets of lifting components. However, the lateral movement module occupies a significant amount of horizontal space, resulting in a large lateral space requirement for the flower basket self-circulation device.

[0042] To address the aforementioned issues, this utility model provides a self-circulating material feeding and receiving device for flower baskets, which can achieve efficient automatic loading and unloading while reducing the overall horizontal space occupied by the device.

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0045] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0046] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0047] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0048] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0049] Please refer to Figures 1 to 4 In this embodiment, the basket self-circulating material receiving device 100 includes a first lifting assembly 110, a second lifting assembly 130, a traversing module 150, a first conveyor line 170, and a second conveyor line 180. The first lifting assembly 110 is configured to fix the basket 200 and move the basket 200 up and down in the height direction to cooperate with the processing equipment in conveying unprocessed silicon wafers from the basket 200 to the processing equipment. The second lifting assembly 130 is disposed on one side of the first lifting assembly 110 in a first direction. The second lifting assembly 130 is configured to fix the basket 200 and move the basket 200 up and down in the height direction to cooperate with the processing equipment in placing processed silicon wafers sequentially into empty baskets 200. The traversing module 150 is disposed on one side of the first lifting assembly 110 and the second lifting assembly 130 in a second direction, and can move the basket 200 along the first direction and the second direction. The first direction and the second direction are perpendicular. The first conveyor line 170 is disposed in the second direction of the transverse module 150, and the first conveyor line 170 and the transverse module 150 are at the same height to convey the basket 200 outward. The second conveyor line 180 is disposed corresponding to the first lifting assembly 110 to transfer the basket 200 carrying the unprocessed silicon wafer to the first lifting assembly 110.

[0050] After the second conveyor line 180 conveys the basket 200 containing the silicon wafers to be processed to the first lifting assembly 110, the silicon wafers are transferred to the processing equipment in cooperation with the first lifting assembly 110. The empty basket 200 after taking the silicon wafers will be conveyed to the transverse module 150 in the second direction in cooperation with the first lifting assembly 110 and the transverse module 150. Then, driven by the transverse module 150, it moves in the first direction to the position corresponding to the second lifting assembly 130. The basket 200 containing the processed silicon wafers on the second lifting assembly 130 will be transferred to the transverse module 150 in cooperation with the second lifting assembly 130 and the transverse module 150. Then, the empty basket 200 on the transverse module 150 will be installed on the second lifting assembly 130 in cooperation with the transverse module 150 and the second lifting assembly 130 to load the processed silicon wafers, thereby realizing the circulation of the basket 200.

[0051] In this embodiment, the second lifting component 130 is positioned on one side of the first lifting component 110 in the first direction, while the lateral movement module 150 is positioned on the other side of the first and second lifting components 110 in the second direction. This allows the lateral movement module 150 to move the flower basket 200 along either the first or second direction, perpendicular to each other, according to transport requirements. This ensures the lateral movement module 150 does not occupy the lateral space between the first and second lifting components 110 and 130, allowing the positions of the first and second lifting components 110 and 130 to be set as needed, thus reducing the overall space occupied by the equipment in the first direction. Most importantly, it prevents the flower basket 200 from getting stuck during transport, thus ensuring its circulation.

[0052] It should be noted that the processing equipment can be laser cleaning equipment, coating equipment, etc. Generally, these processing equipment are arranged side-by-side with feeding conveyor lines, discharging conveyor lines, and processing modules. The silicon wafers to be processed are conveyed to the processing module by the feeding conveyor line, and the silicon wafers processed by the processing module are conveyed out by the discharging conveyor line. The basket self-circulating feeding and receiving device 100 is located at the ends of the feeding and discharging conveyor lines, with the feeding conveyor line corresponding to the first lifting assembly 110 and the discharging conveyor line corresponding to the second lifting assembly 130. Generally, both the feeding and discharging conveyor lines are equipped with telescopic belts at their ends. The telescopic belt of the feeding conveyor line can extend into the basket 200 fixed in the first lifting assembly 110, transferring the silicon wafers to be processed from the basket 200 to the feeding conveyor line until the basket 200 is emptied by the feeding conveyor line, at which point the basket 200 becomes an empty basket 200. Empty baskets 200 are then transferred to the second lifting assembly 130 by the basket self-circulation receiving device 100. A telescopic belt at the end of the discharge conveyor works in conjunction with the second lifting assembly 130 to stack the processed silicon wafers into the empty basket 200. This achieves automatic sequential processing of the baskets 200, automatic removal of silicon wafers from the baskets 200, and automatic stacking of processed silicon wafers back into the baskets 200. Combined with AGV trolleys, this enables fully automated processing.

[0053] Please continue to refer to Figures 1 to 4 The first lifting component 110 and the second lifting component 130 are arranged opposite to each other.

[0054] In this embodiment, the first lifting assembly and the second lifting component 130 are arranged opposite each other, which can reduce the space occupied in the first direction.

[0055] Specifically, the first lifting assembly 110 includes a first guide post 111, a first flower basket fixing member 112, and a first driving member 113. The first flower basket fixing member 112 is movably mounted on the first guide post 111, and is located on the side of the first guide post 111 away from the second guide post 131. The first driving member 113 is located on the first guide post 111 and is configured to drive the first flower basket fixing member 112 to rise and fall. The first flower basket fixing member 112 is configured to fix the flower basket 200. The second lifting assembly 130 includes a second guide post 131, a second flower basket fixing member 132, and a second driving member 133. The second flower basket fixing member 132 is movably mounted on the second guide post 131, and is located on the side of the second guide post 131 opposite to the first guide post 111. The second driving member 133 is located on the second guide post 131 and is configured to drive the second flower basket fixing member 132 to rise and fall. The second flower basket fixing component 132 is configured to fix the flower basket 200.

[0056] This embodiment, by setting the first lifting assembly 110 and the second lifting assembly 130 back to back (i.e., setting the first flower basket fixing member 112 on the side of the first guide post 111 away from the second guide post 131, and setting the second flower basket fixing member 132 on the side of the second guide post 131 away from the first guide post 111), can further reduce the overall space occupied by the equipment in the first direction compared to the existing relative arrangement. This is more conducive to reducing the volume occupied by the flower basket self-circulating feeding and collecting equipment 100 in the first direction, and also conducive to the miniaturization of the processing equipment.

[0057] Normally, the first basket fixing member 112 is correspondingly arranged with the feeding conveyor line in the first direction, so that the telescopic belt at the end of the feeding conveyor line extends into the basket 200 fixed by the first basket fixing member 112 to transfer the silicon wafers outward. The second basket fixing member 132 is correspondingly arranged with the discharging conveyor line in the first direction, so that the telescopic belt at the end of the discharging conveyor line extends into the basket 200 fixed by the second basket fixing member 132 to stack the processed silicon wafers sequentially on the basket 200. If the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other, due to the first guide post 111 and the second guide post 131, the overall size of the basket self-circulating feeding and receiving device 100 in the first direction will be larger than the size of the basket self-circulating feeding and receiving device 100 in the first direction when the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other.

[0058] Specifically, the first flower basket fixing component 112 includes a first mounting plate 114, a first base plate 115, a first top plate 116, a first conveyor belt 117, and a first clamping member 118. The first mounting plate 114 is movably mounted on the side of the first guide post 111 away from the second guide post 131. The first base plate 115 is disposed at the bottom of the first mounting plate 114. The first top plate 116 is disposed at the top of the first mounting plate 114. The first conveyor belt 117 is disposed at the top of the first base plate 115. The first clamping member 118 is disposed on the first top plate 116. The first conveyor belt 117 can transport the flower basket 200 in a second direction. The first clamping member 118 can apply pressure from the top of the flower basket 200 to secure it.

[0059] The second flower basket fixing component 132 includes a second mounting plate 134, a second base plate 135, a second top plate 136, a second conveyor belt 137, and a second clamping member 138. The second mounting plate 134 is movably mounted on the side of the second guide post 131 away from the first guide post 111. The second base plate 135 is disposed at the bottom of the second mounting plate 134. The second top plate 136 is disposed at the top of the second mounting plate 134. The second conveyor belt 137 is disposed at the top of the second base plate 135. The second clamping member 138 is disposed on the second top plate 136. The second conveyor belt 137 can transport the flower basket 200 in a second direction. The second clamping member 138 can apply pressure to the flower basket 200 from the top of the flower basket 200 to fix the flower basket 200.

[0060] In this embodiment, the first flower basket fixing member 112 and the second flower basket fixing member 132 are configured as described above. In this way, the flower basket 200 can move in the second direction under the drive of the first conveyor belt 117 and the second conveyor belt 137 during the fixing and disassembly process and during the circulation process of the flower basket 200. The simple structure and movement will not cause the flower basket 200 to get stuck during the movement.

[0061] In this embodiment, both the first clamping member 118 and the second clamping member 138 are clamping cylinders. For example, after the flower basket 200 is transported to a preset position by the first conveyor belt 117, the clamping cylinder extends and abuts against the top of the flower basket 200, thereby preventing the flower basket 200 from shaking or tipping over during lifting. The first driving member 113 and the second driving member 133 can be screw motors, which are threadedly connected to the first mounting plate 114 and the second mounting plate 134, respectively.

[0062] In one particular embodiment, the first guide post 111 and the second guide post 131 are attached together or form a whole in the first direction, thereby making the overall size of the device smaller and the structure simpler in the first direction.

[0063] In this embodiment, the traverse module 150 is located at the same height as the first conveyor line 170, and is positioned at the bottom of the first lifting assembly 110 and the second lifting assembly 130. The traverse module 150 can also transport the basket 200 containing the processed silicon wafers to the first conveyor line 170.

[0064] In this embodiment, the transverse module 150 and the first conveyor line 170 are set at the same height. This way, when the first lifting component 110 moves the basket 200 downward to pick up the silicon wafer, the basket 200 continues to move downward. After picking up the wafer, the basket 200 is located at the bottom of the first lifting component 110 and on the same plane as the transverse module 150. This allows the empty basket 200 to be quickly transferred to the transverse module 150, thereby improving the efficiency of the basket 200 circulation.

[0065] Furthermore, the transverse module 150 includes a fixed plate 151, a transmission component 152, and a drive component 153. The fixed plate 151 is disposed in a second direction of the first lifting component 110 and the second lifting component 130, and the transverse module 150 is disposed at the bottom end corresponding to the first lifting component 110 and the second lifting component 130. The fixed plate 151 extends from the first lifting component 110 to the second lifting component 130. The transmission component 152 is disposed on the fixed plate 151. The drive component 153 is disposed on the fixed plate 151 and is drively connected to the transmission component 152. The drive component 153 can drive the transmission component 152 to reciprocate in a first direction. The bearing surface of the transmission component 152 is on the same plane as the bearing surface of the first conveyor line 170, and the transmission component 152 can drive the basket 200 to move in a second direction.

[0066] In this embodiment, by setting the transverse module 150 to the above structure, the structure of the transverse module 150 can be made simpler, and the movements in different directions are separated from each other, thereby avoiding jamming of the flower basket 200.

[0067] Furthermore, the transmission assembly 152 includes a first belt module 154 and a second belt module 155 arranged side by side in the first direction, and the drive assembly 153 is drivenly connected to both the first belt module 154 and the second belt module 155. The drive assembly 153 is configured to drive the first belt module 154 and the second belt module 155 to reciprocate synchronously along the fixed plate 151 in the second direction.

[0068] In this embodiment, the transmission component 152 is configured as a first belt module 154 and a second belt module 155 arranged side by side in the first direction. This ensures that the upper and lower flower baskets 200 do not interfere with each other during the circulation of the flower basket 200, thereby improving the transfer efficiency. The first belt module 154 and the second belt module 155 move synchronously in the first direction, which simplifies the structure of the drive component 153.

[0069] In this embodiment, the transmission component 152 further includes a fixed base plate 156; the fixed base plate 156 is mounted on the fixed plate 151, and the fixed base plate 156 is connected to the drive component 153 in a transmission manner, the drive component 153 is capable of driving the fixed plate 151 to reciprocate in the first direction; the first belt module 154 and the second belt module 155 are arranged side by side on the fixed plate 151 in the first direction.

[0070] In this embodiment, the first belt module 154 and the second belt module 155 are mounted on the fixed plate 151 to form a whole. In this way, the drive assembly 153 can drive the first belt module 154 and the second belt module 155 to move as a whole in a first direction, so that the first belt module 154 or the second belt module 155 can be aligned with the first transmission belt 117 or the second transmission belt 137, respectively.

[0071] Of course, in other embodiments of this application, the drive assembly 153 includes a first drive motor and a second drive motor. The first belt module 154 and the second belt module 155 are arranged side by side on the fixed plate 151 in a first direction, and each can move independently relative to the fixed plate 151 in the first direction. The first drive motor is configured to drive the first belt module 154 to reciprocate in the first direction. The second drive motor is configured to drive the second belt module 155 to reciprocate in the first direction. This arrangement allows the first belt module 154 and the second belt module 155 to move independently, resulting in greater maneuverability.

[0072] In this embodiment, the second conveyor line 180 (180) is disposed in the second direction of the transverse module 150 and at the same height as the transverse module 150, and is disposed side by side with the first conveyor line 170 (170).

[0073] In this embodiment, the second conveyor line 180 is set at the same height as the first conveyor line, which facilitates the automated operation of the AGV.

[0074] Secondly, in some other embodiments of this application, the first lifting assembly 110 and the second lifting assembly 130 may also be arranged opposite to each other. The first basket fixing member 112 is positioned on the side of the first guide post 111 near the second guide post 131, while the second basket fixing member 132 is positioned on the side of the second guide post 131 near the first guide post 111. Alternatively, the second conveyor line 180 can be positioned above the first conveyor line 170 and corresponding to the first lifting assembly 110. This arrangement makes feeding the first lifting assembly 110 more efficient and is unaffected by the transverse movement module 150.

[0075] Please combine Figures 1 to 4 The circulation process of the flower basket 200 in the flower basket self-circulating feeding and receiving equipment 100 is as follows:

[0076] The control drive assembly 153 moves the first belt module 154 and the second belt module 155 in a first direction toward the first lifting assembly 110, aligning the second belt module 155 with the second conveyor line 180 in the first direction. Then, the control drive assembly 153 operates the second conveyor line 180 and the second belt module 155 to transfer the basket 200 containing the silicon wafers to be processed, carried on the second conveyor line 180, to a preset position on the second belt module 155. The control drive assembly 153 moves the first belt module 154 and the second belt module 155 in a first direction toward the first lifting assembly 110, aligning the first belt module 154 with the first conveyor belt 117 in the first direction. The control drive assembly 153 operates the first conveyor belt 117 and the first belt module 154 to transfer the empty basket 200 carried on the first conveyor belt 117 to a preset position on the first belt module 154. The control drive assembly 153 drives the first belt module 154 and the second belt module 155 to move in the first direction toward the second lifting assembly 130, aligning the second belt module 155 with the first conveyor belt 117 in the first direction. The control of the second belt module 155 and the first conveyor belt 117 transports the basket 200 containing the silicon wafers to be processed, carried on the second belt module 155, to a preset position on the first conveyor belt 117, and then controls the first clamping member 118 to fix the basket 200. The control drive assembly 153 drives the first belt module 154 and the second belt module 155 to move in the first direction toward the second lifting assembly 130, aligning the second belt module 155 with the second conveyor belt 137 in the first direction. The control of the second conveyor belt 137 and the second belt module 155 transports the basket 200 filled with processed silicon wafers, carried on the second conveyor belt 137, to a preset position on the second belt module 155. The control drive assembly 153 drives the first belt module 154 and the second belt module 155 to move in the first direction toward the first lifting assembly 110, aligning the first belt module 154 with the second conveyor belt 137 in the first direction. The control of the first belt module 154 and the second conveyor belt 137 transports the empty basket 200 to a preset position on the second conveyor belt 137, and then controls the second clamping member 138 to clamp the empty basket 200. The control of the drive assembly 153 then drives the first belt module 154 and the second belt module 155 to move in the first direction toward the first lifting assembly 110, aligning the second belt module 155 with the first conveyor line 170 in the first direction. The control of the second belt module 155 and the first conveyor line 170 then transports the basket 200 filled with processed silicon wafers to the first conveyor line 170.

[0077] It should also be noted that the positions of the first lifting group and the second lifting component 130 can be adjusted to allow material to be fed from the right and unloaded from the left, or to allow material to be fed from the left and unloaded from the right.

[0078] In summary, the self-circulating flower basket feeding and receiving device 100 provided in this embodiment sets the second lifting component 130 on one side of the first lifting component 110 in the first direction, and sets the lateral movement module 150 on the side where the first lifting component 110 and the second lifting component 130 are located in the second direction. This allows the lateral movement module 150 to move the flower basket 200 along the first direction or the second direction according to the transmission requirements, and the first and second directions are perpendicular. In this way, the lateral movement module 150 does not occupy the lateral space between the first lifting component 110 and the second lifting component 130, allowing the positions of the first lifting component 110 and the second lifting component 130 to be set as needed, reducing the overall lateral space occupied by the device. It also prevents the flower basket 200 from getting stuck during transport, thus affecting its circulation.

[0079] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A self-circulating flower basket feeding and receiving device, characterized in that, include: The first lifting assembly (110) is configured to fix the basket (200) and drive the basket (200) to lift in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket (200) to the processing equipment; The second lifting assembly (130) is disposed on one side of the first lifting assembly (110) in the first direction, and is configured to fix the basket (200) and drive the basket (200) to lift in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty basket (200) in sequence. A transverse module (150) is disposed on one side of the first lifting component (110) and the second lifting component (130) in the second direction, and can drive the flower basket (200) to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular; The first conveyor line (170) is disposed in the second direction of the transverse module (150) and is disposed at the same height as the transverse module (150); A second conveyor line (180) is provided corresponding to the first lifting assembly (110) to transfer a basket (200) carrying unprocessed silicon wafers to the first lifting assembly (110).

2. The self-circulating flower basket feeding and receiving device according to claim 1, characterized in that, The first lifting component (110) and the second lifting component (130) are arranged opposite to each other.

3. The flower basket self-circulating feeding and receiving device according to claim 2, characterized in that, The first lifting assembly (110) includes a first guide post (111), a first flower basket fixing member (112), and a first driving member (113); The second lifting assembly (130) includes a second guide post (131), a second basket fixing member (132), and a second driving member (133). The first flower basket fixing member (112) is movably mounted on the first guide post (111), and the first flower basket fixing member (112) is located on the side of the first guide post (111) away from the first guide post (111). The first driving member (113) is located on the first guide post (111), and the driving member (113) is configured to drive the first flower basket fixing member (112) to rise and fall. The first flower basket fixing member (112) is configured to fix the flower basket (200). The second flower basket fixing member (132) is movably mounted on the second guide post (131), and the second flower basket fixing member (132) is located on the side of the second guide post (131) opposite to the first guide post (111). The second driving member (133) is located on the second guide post (131), and the second driving member (133) is configured to drive the second flower basket fixing member (132) to rise and fall. The second flower basket fixing member (132) is configured to fix the flower basket (200).

4. The self-circulating flower basket feeding and receiving device according to claim 3, characterized in that, The first flower basket fixing component (112) includes a first mounting plate (114), a first bottom plate (115), a first top plate (116), a first conveyor belt (117), and a first clamping member (118). The first mounting plate (114) is movably mounted on the side of the first guide post (111) away from the second guide post (131). The first bottom plate (115) is disposed at the bottom of the first mounting plate (114). The first top plate (116) is disposed at the top of the first mounting plate (114). The first conveyor belt (117) is disposed at the top of the first bottom plate (115). The first clamping member (118) is disposed at the first top plate (116). The first conveyor belt (117) can transport the flower basket (200) in the second direction. The first clamping member (118) can apply pressure from the top of the flower basket (200) to the flower basket (200) to fix the flower basket (200). The second flower basket fixing member (132) includes a second mounting plate (134), a second bottom plate (135), a second top plate (136), a second conveyor belt (137), and a second clamping member (138). The second mounting plate (134) is movably mounted on the side of the second guide post (131) away from the first guide post (111). The second bottom plate (135) is disposed at the bottom of the second mounting plate (134). The second top plate (136) is disposed at the top of the second mounting plate (134). The second conveyor belt (137) is disposed at the top of the second bottom plate (135). The second clamping member (138) is disposed at the second top plate (136). The second conveyor belt (137) can transport the flower basket (200) in the second direction. The second clamping member (138) can apply pressure to the flower basket (200) from the top of the flower basket (200) to fix the flower basket (200).

5. The flower basket self-circulating feeding and receiving device according to any one of claims 1-4, characterized in that, The transverse module (150) includes a fixed plate (151), a transmission component (152), and a drive component (153); The fixing plate (151) is disposed in the second direction of the first lifting assembly (110) and the second lifting assembly (130), and the fixing plate (151) is disposed at the bottom end of the first lifting assembly (110) and the second lifting assembly (130), and the fixing plate (151) extends from the first lifting assembly (110) to the second lifting assembly (130); The transmission component (152) is disposed on the fixed plate (151), and the driving component (153) is disposed on the fixed plate (151) and is connected to the transmission component (152) in a transmission manner. The driving component (153) can drive the transmission component (152) to reciprocate in the first direction. The bearing surface of the transmission component (152) is on the same plane as the bearing surface of the first conveyor line (170), and the transmission component (152) can drive the flower basket (200) to move in the second direction.

6. The flower basket self-circulating feeding and receiving device according to claim 5, characterized in that, The transmission component (152) includes a first belt module (154) and a second belt module (155) arranged side by side in a first direction. The drive component (153) is connected to both the first belt module (154) and the second belt module (155) in a transmission connection. The drive component (153) is configured to drive either or both of the first belt module (154) and the second belt module (155) to reciprocate along the fixed plate (151) in the first direction.

7. The self-circulating flower basket feeding and receiving device according to claim 6, characterized in that, The transmission component (152) also includes a fixed base plate (156); The fixed base plate (156) is mounted on the fixed plate (151), and the fixed base plate (156) is connected to the driving assembly (153) in a transmission manner. The driving assembly (153) can drive the fixed plate (151) to reciprocate in the first direction. The first belt module (154) and the second belt module (155) are arranged side by side on the fixing plate (151) in the first direction.

8. The self-circulating flower basket feeding and receiving device according to claim 6, characterized in that, The drive assembly (153) includes a first drive motor and a second drive motor; The first belt module (154) and the second belt module (155) are arranged side by side on the fixing plate (151) in the first direction, and each can move independently relative to the fixing plate (151) in the first direction. The first drive motor is configured to drive the first belt module (154) to reciprocate in a first direction; The second drive motor is configured to drive the second belt module (155) to reciprocate in a first direction.

9. The flower basket self-circulating feeding and receiving device according to any one of claims 1-4, characterized in that, The second conveyor line (180) is disposed in the second direction of the transverse module (150), and is disposed at the same height as the transverse module (150), and is disposed side by side with the first conveyor line (170).

10. The self-circulating flower basket feeding and receiving device according to claim 1, characterized in that, The first lifting component (110) and the second lifting component (130) are arranged opposite to each other.

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