Graphite boat end floating pressing mechanism

Abstract

The utility model discloses a floating pressing mechanism for the end part of a graphite boat. The device comprises a support, a horizontal pushing air cylinder fixed to the support, a supporting plate driven by the horizontal pushing air cylinder to move front and back, a sliding rail fixed to the supporting plate and extending in the left-right direction, and a floating pressing plate arranged on the sliding rail in a left-right sliding mode. According to the utility model, the problem that the original roller floating pressing mechanism cannot be suitable for positioning and pressing the end part of the graphite boat with the hollow windowing cross beam barrier strip is solved.

Description

[Technical Field]

[0001] This utility model belongs to the technical field of silicon wafer manufacturing equipment, and in particular relates to a floating clamping mechanism at the end of a graphite boat. [Background Technology]

[0002] When silicon wafers are deposited in an atomic layer deposition (ALD) system, they are placed on a fixed graphite boat and then fed into the ALD system for deposition. After deposition, the wafers are removed from the graphite boat. To ensure accurate placement and removal of the silicon wafers, the two ends and sides of the graphite boat are typically positioned.

[0003] Existing technology patent CN221140004U discloses a high-precision feeding and receiving positioning device for graphite boats, such as Figure 1 As shown, the graphite boat 200 typically has outwardly protruding crossbeams 201 at both ends. These serve two purposes: firstly, similar to a car bumper, providing end-impact protection for the graphite boat; and secondly, facilitating lifting and transportation. In this device, the positioning of the graphite boat's ends is achieved by a cylinder-driven horizontal clamping method using limiting plates. Since the left and right sides of the graphite boat require precise fine-tuning, it also needs lateral freedom of movement after being clamped at both ends. Therefore, the device includes a front-end blocking roller assembly on the limiting plate. This roller assembly clamps the ends of the graphite boat in the front-rear direction. Simultaneously, during precise positioning of the left and right sides, the graphite boat can also move laterally relative to the roller assembly. Generally, the roller assembly is clamped onto the end crossbeams of the graphite boat.

[0004] Since the original graphite boat's crossbeam retainer had an outward-facing flat surface without any perforations, the roller assembly could meet the requirements for end clamping and left-right floating. However, to achieve a lightweight design for the graphite boat, the customer added several perforations 202 to the outward-facing flat surface of the crossbeam retainer. If the roller assembly structure is still used for end clamping and left-right floating, the roller assembly will get stuck at the perforations 202, losing the left-right floating function, and the accuracy of the end clamping position will also be affected. Furthermore, when the rollers roll the crossbeam retainer, the contact between the two is a line contact, which can easily form rolling marks on the surface of the crossbeam retainer after long-term use, thus affecting the positioning accuracy of the graphite boat.

[0005] Therefore, it is necessary to provide a new floating clamping mechanism at the end of a graphite boat to solve the above-mentioned technical problems. [Utility Model Content]

[0006] The main purpose of this utility model is to provide a floating clamping mechanism for the end of a graphite boat, which solves the problem that the original roller floating clamping mechanism cannot be applied to the end positioning and clamping of graphite boats with hollowed-out windowed crossbeams.

[0007] This utility model achieves the above-mentioned objective through the following technical solution: a graphite boat end floating pressing mechanism, which includes a support, a horizontal pushing cylinder fixed on the support, a support plate driven by the horizontal pushing cylinder to move back and forth, a slide rail fixed on the support plate and extending in the left and right direction, and a floating pressure plate slidably disposed on the slide rail.

[0008] Furthermore, a protective pad is provided on the outward-facing surface of the floating pressure plate to achieve surface contact with the crossbeam baffle at the end of the graphite boat.

[0009] Furthermore, it also includes a reset module for adjusting the floating pressure plate back to its original position; the reset module is integrally disposed at the bottom or top of the support plate.

[0010] Furthermore, the reset module includes a central limiting block fixed on a floating pressure plate, a first elastic component and a second elastic component located on the left and right sides of the central limiting block. The first elastic component and the second elastic component each have a fixed end and a movable end. The fixed end is fixedly disposed on the support plate, and the movable end presses the central limiting block in the left and right direction. The movable end of the first elastic component abuts against the left side surface of the central limiting block, and the movable end of the second elastic component abuts against the right side surface of the central limiting block.

[0011] Furthermore, the first elastic component and the second elastic component have the same structure, and both include a first mounting base fixed on the support plate, a support screw fixed on the first mounting base, and a first spring sleeved on the support screw. The support screw is threaded with a nut and axially slidably provided with a pressure block. One end of the first spring abuts against the nut and the other end is fixedly connected to the pressure block. The first spring presses the intermediate limiting block by axially pressing the pressure block.

[0012] Furthermore, the first elastic component and the second elastic component include a pair of second mounting seats fixed on the support plate. The two second mounting seats are located on the left and right sides of the intermediate limiting block and are connected by a sliding rod. The sliding rod moves through the intermediate limiting block. A second spring is provided on the left side of the intermediate limiting block and a third spring is provided on the right side of the intermediate limiting block. The left and right sides of the intermediate limiting block are pressed against each other by the second spring and the third spring respectively to achieve reset and centering.

[0013] Furthermore, the crossbeam baffle at the front end of the graphite boat is provided with a foolproof circular hole, and a first sensor is provided on the support plate at the position corresponding to the foolproof circular hole. The floating pressure plate is provided with an avoidance window for the first sensor to sense whether the crossbeam baffle has the foolproof circular hole.

[0014] Furthermore, a second sensor is also provided on the support above the support plate to detect whether the graphite boat has moved into place.

[0015] Compared with the prior art, the beneficial effects of the graphite boat end floating clamping mechanism of this utility model are as follows: a support plate is set at the movable end of the horizontal clamping cylinder that realizes front and rear driving, and a floating pressure plate is slidably set on the support plate. On the one hand, the floating pressure plate can realize the clamping and positioning function in the front and rear direction. On the other hand, it can meet the left and right floating requirements under front and rear clamping. The graphite boat is clamped by the entire plate surface, which effectively avoids the phenomenon of the rolling roller getting stuck in the hollow window in the original structure and the phenomenon of rolling marks forming on the surface of the graphite boat crossbeam and the affecting of positioning accuracy. [Attached Image Description]

[0016] Figure 1 This is a schematic diagram of a partial front end structure of a graphite boat;

[0017] Figure 2 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0018] Figure 3 This is a partial structural schematic diagram of an embodiment of the present utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the reset module in an embodiment of this utility model;

[0020] Figure 5 This is another structural schematic diagram of the reset module in this embodiment of the present invention;

[0021] The numbers in the image represent:

[0022] 100 - Graphite boat end floating clamping mechanism; 200 - Graphite boat; 201 - Crossbeam stop bar; 202 - Hollowed-out window;

[0023] 1-Support; 2-Horizontal push cylinder; 3-Support plate; 4-Slide rail; 5-Floating pressure plate; 51-Avoidance window; 6-Protective pad; 7-Reset module; 71-Intermediate limit block; 72-First elastic component; 721-First mounting base; 722-Support screw; 723-First spring; 724-Nut; 725-Pressure block; 73-Second elastic component; 731-Second mounting base; 732-Slide rod; 733-Second spring; 734-Third spring; 8-First sensor; 9-Second sensor. [Specific implementation method]

[0024] Example 1:

[0025] Please refer to Figure 1-Figure 5 This embodiment is a graphite boat end floating pressing mechanism 100, which includes a support 1, a horizontal pushing cylinder 2 fixed on the support 1, a support plate 3 driven by the horizontal pushing cylinder 2 to move back and forth, a slide rail 4 fixed on the support plate 3 and extending in the left and right direction, and a floating pressure plate 5 slidably disposed on the slide rail 4.

[0026] A protective pad 6 is provided on the outward-facing surface of the floating pressure plate 5, which makes surface contact with the crossbeam stop 201 at the end of the graphite boat. The protective pad 6 makes surface contact with the crossbeam stop 201 at the end of the graphite boat. The surface contact between the protective pad 6 and the crossbeam stop 201 prevents hard contact from forming indentations on the surface of the crossbeam stop 201, which would affect the positioning accuracy. On the other hand, the surface contact provides higher positioning accuracy and effectively reduces the occurrence of indentations.

[0027] To ensure that the floating pressure plate 5 remains in its initial position after floating left and right with the graphite boat and being pressed down at the end again, this embodiment also includes a reset module 7 for adjusting the floating pressure plate 5 back to its original position. The reset module 7 is disposed at the bottom or top of the support plate 3.

[0028] In this embodiment, the reset module 7 includes an intermediate limiting block 71 fixed on the floating pressure plate 5, a first elastic component 72 and a second elastic component 73 located on the left and right sides of the intermediate limiting block 71. The first elastic component 72 and the second elastic component 73 each have a fixed end and a movable end. The fixed end is fixedly mounted on the support plate 3, and the movable end presses the intermediate limiting block 71 in the left and right direction. The movable end of the first elastic component 72 abuts against the left side surface of the intermediate limiting block 71, and the movable end of the second elastic component 73 abuts against the right side surface of the intermediate limiting block 71. If the floating pressure plate 5 presses the graphite boat and then floats a certain distance to the left (or right), the first elastic component 72 (or the second elastic component 73) will be squeezed. After the silicon wafer loading or unloading operation in the graphite boat is completed, the horizontally pushed cylinder 2 will retract the support plate 3, and the floating pressure plate 5 will release its pressure on the end of the graphite boat. Under the rebound action of the first elastic component 72 (or the second elastic component 73), the intermediate limit block 71 will be pushed to move to the right (or left) together with the floating pressure plate 5, returning to the initial position to achieve reset.

[0029] In this embodiment, the first elastic component 72 and the second elastic component 73 have the same structure, and both include a first mounting base 721 fixed on the support plate 3, a support screw 722 fixed on the first mounting base 721, and a first spring 723 sleeved on the support screw 722. A nut 724 is threaded onto the support screw 722, and a pressure block 725 is axially slidably mounted thereon. One end of the first spring 723 abuts against the nut 724, and the other end is fixedly connected to the pressure block 725. The first spring 723 presses the intermediate limiting block 71 by axially compressing the pressure block 725. After prolonged use, if the first spring 723 experiences elastic fatigue within its adjustable range, the compression length of the first spring 723 can be adjusted by adjusting the axial position of the nut 724 on the support screw 722 to ensure the reset function.

[0030] In other embodiments, the first elastic component 72 and the second elastic component 73 include a pair of second mounting seats 731 fixed on the support plate 3. The two second mounting seats 731 are located on the left and right sides of the intermediate limiting block 71 and a sliding rod 732 is connected between them. The sliding rod 732 moves through the intermediate limiting block 71. A second spring 733 is provided on the left side of the intermediate limiting block 71 and a third spring 734 is provided on the right side of the intermediate limiting block 71. The left and right sides of the intermediate limiting block 71 are pressed against each other by the second spring 733 and the third spring 734 respectively to achieve reset and centering.

[0031] The graphite boat 200 has a front-to-back orientation. When entering the coating equipment, its front-to-back orientation must not be reversed. Simultaneously, the correct front-to-back orientation of the graphite boat 200 must also be ensured during battery cell loading. To achieve this, a foolproof circular hole 203 is provided at the middle position of the front crossbeam baffle 201 of the graphite boat 200, while the rear crossbeam baffle 201 of the graphite boat 200 does not have this foolproof circular hole 203. A first sensor 8 is provided on the support plate 3 at the position corresponding to the foolproof circular hole 203. The floating pressure plate 5 has an avoidance window 51 for the first sensor 8 to detect whether there is a foolproof circular hole 203 on the crossbeam baffle 201. The avoidance window 51 extends a certain length in the left-right direction to ensure that the floating pressure plate 5 can still avoid the first sensor 8 for detection after floating left and right.

[0032] A second sensor 9 is also installed on the support 1 above the support plate 3 to detect whether the graphite boat 200 has moved into place.

[0033] The working principle of the graphite boat end floating clamping mechanism in this embodiment is as follows: After the graphite boat 200 moves into place, the second sensor 9 detects a signal, and the horizontally pushing cylinder 2 drives the support plate 3 to push out horizontally. The floating pressure plate 5 presses the crossbeam stop 201 at the end of the graphite boat 200 to achieve end positioning. The first sensor 8 detects whether the front and back direction of the graphite boat 200 is correct. If it is correct, the graphite boat 200 is further positioned on the left and right sides by the external left and right side positioning mechanism, and the floating pressure plate 5 floats left and right with the graphite boat 200.

[0034] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A floating clamping mechanism at the end of a graphite boat, characterized in that: It includes a support, a horizontal push cylinder fixed on the support, a support plate driven by the horizontal push cylinder to move back and forth, a slide rail fixed on the support plate and extending in the left and right direction, and a floating pressure plate slidably disposed on the slide rail.

2. The graphite boat end floating clamping mechanism as described in claim 1, characterized in that: The floating pressure plate has a protective pad on its outward-facing surface that makes surface contact with the crossbeam baffle at the end of the graphite boat.

3. The graphite boat end floating clamping mechanism as described in claim 1, characterized in that: It also includes a reset module for adjusting the floating pressure plate back to its original position; the reset module is integrally disposed at the bottom or top of the support plate.

4. The graphite boat end floating clamping mechanism as described in claim 3, characterized in that: The reset module includes a central limiting block fixed on a floating pressure plate, a first elastic component and a second elastic component located on the left and right sides of the central limiting block. The first elastic component and the second elastic component each have a fixed end and a movable end. The fixed end is fixedly disposed on the support plate, and the movable end presses the central limiting block in the left and right direction. The movable end of the first elastic component abuts against the left side surface of the central limiting block, and the movable end of the second elastic component abuts against the right side surface of the central limiting block.

5. The graphite boat end floating clamping mechanism as described in claim 4, characterized in that: The first elastic component and the second elastic component have the same structure, and both include a first mounting base fixed on the support plate, a support screw fixed on the first mounting base, and a first spring sleeved on the support screw. The support screw is threaded with a nut and axially slidably provided with a pressure block. One end of the first spring abuts against the nut and the other end is fixedly connected to the pressure block. The first spring presses the intermediate limiting block by axially compressing the pressure block.

6. The graphite boat end floating clamping mechanism as described in claim 4, characterized in that: The first elastic component and the second elastic component include a pair of second mounting seats fixed on the support plate. The two second mounting seats are located on the left and right sides of the intermediate limiting block and are connected by a sliding rod. The sliding rod moves through the intermediate limiting block. A second spring is provided on the left side of the intermediate limiting block and a third spring is provided on the right side of the intermediate limiting block. The left and right sides of the intermediate limiting block are pressed against each other by the second spring and the third spring to achieve reset and centering.

7. The graphite boat end floating clamping mechanism as described in claim 1, characterized in that: The crossbeam baffle at the front end of the graphite boat is provided with a foolproof circular hole. A first sensor is provided on the support plate at the position corresponding to the foolproof circular hole. The floating pressure plate is provided with an avoidance window for the first sensor to sense whether the crossbeam baffle has the foolproof circular hole.

8. The graphite boat end floating clamping mechanism as described in claim 1, characterized in that: A second sensor is also provided on the support above the support plate to detect whether the graphite boat has moved into place.

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