Quartz boat and quartz assembly

Abstract

The utility model provides a quartz boat and a quartz assembly. The quartz boat comprises a main body, the main body comprises two end walls and a surrounding wall, two axial ends of the surrounding wall are closed by the two end walls and are lower than the two end walls, and the surrounding wall and the two end walls define an accommodating space; the quartz boat further comprises two groove parts, the two groove parts are connected to the left side and the right side of the main body, each groove part comprises two end walls and an enclosing wall, the two axial ends of the enclosing wall are sealed by the two end walls and are lower than the two end walls, and the enclosing wall and the two end walls define a containing space; the two groove parts are used for enabling the two groove parts and the quartz boat to swing along with the quartz tube when the quartz tube swings in opposite directions around the axial direction in the synthesis process after the quartz boat is arranged in the quartz tube and the quartz tube is arranged in the polycrystalline synthesis furnace, so that dross floating on the surface of a melt is poured into the accommodating space. The quartz assembly comprises the quartz boat and a quartz tube, at least one end of the quartz tube in the axial direction is open, and the inner circumferential surface of the quartz tube is a cylindrical surface.

Description

Technical Field

[0001] This disclosure relates to the field of crystal growth, and more specifically to a quartz boat and a quartz component. Background Technology

[0002] Indium antimonide (InSb) is a narrow-bandgap III-V semiconductor material and is currently one of the best materials for mid-wave infrared detectors. Indium antimonide has a melting point of 525℃. Compared to other III-V compounds, it is easier to purify and grow into single crystals, making it a common choice for solid-state theoretical research on III-V compounds.

[0003] Currently, domestic and international companies and research institutions mainly use the Czochralski method to prepare InSb single crystals. By slowly pulling a seed crystal with a specific crystal orientation and continuously solidifying the InSb melt in the crucible along a specific direction, InSb single crystals with that specific crystal orientation can be obtained. While the Czochralski method does not require a liquid seal during InSb crystal growth, various external factors (such as temperature disturbances, impurity accumulation, and oxide slag on the melt surface) can adversely affect the state of the melt surface, increasing the probability of twinning and severely impacting the yield of high-quality single crystals. Therefore, reducing the formation of slag on the melt surface is beneficial for controlling the InSb single crystal growth process and is a practical factor that must be considered to obtain high-quality single crystals.

[0004] The study on surface impurities in indium antimonide single crystals prepared by the Czochralski method (Dong Tao et al., Infrared, Vol. 40, No. 10, October 2019, pp. 8-13) explored the main sources of surface impurities and their impact in the preparation of indium antimonide single crystals by the Czochralski method, and improved the process measures while still using the Czochralski method in the experiment. Patent document CN109778305A discloses a single crystal furnace and impurity removal method for impurity pretreatment before InSb single crystal growth. Before InSb single crystal growth, the raw material particles are first loaded into the impurity removal crucible of the impurity removal device, and then lowered into the growth crucible by the lifting rod. As the raw material gradually melts, it slowly flows into the growth crucible through the narrow slit at the bottom of the impurity removal crucible. After the raw material has completely melted, the lifting rod is raised and the impurity removal crucible is removed, and then the InSb single crystal is pulled.

[0005] While the two techniques described above provide solutions for removing or reducing dross on the surface of indium antimonide during single-crystal growth, in practice, the dross cannot be completely removed. Therefore, it is necessary to design a new dross removal method. Utility Model Content

[0006] In view of the problems existing in the background art, one object of this disclosure is to provide a quartz boat and quartz components that can completely remove slag during the preparation of indium antimonide.

[0007] Therefore, a quartz boat for the polycrystalline synthesis of indium antimonide is provided. The quartz boat includes a main body, which includes end walls at both ends along an axial direction and a surrounding wall connecting the end walls. The surrounding wall is closed at both ends along the axial direction by the end walls and is lower than the end walls. The surrounding wall and the end walls enclose a receiving space, which opens upward to hold antimony and indium materials that react to form polycrystalline indium antimonide. The quartz boat also includes two recessed portions connected to the left and right sides of the main body. Each recessed portion includes end walls at both ends along the axial direction and a surrounding wall connecting the end walls. The enclosure is closed at both ends of the axial direction by two end walls and is lower than the two end walls. The enclosure and the two end walls form an accommodating space that opens upwards. The two grooves are used for: after the quartz boat is loaded into the quartz tube, it frictionally fits into the inner wall of the quartz tube. When the quartz tube is placed in the polycrystalline synthesis furnace and the quartz tube swings around the axial direction in opposite directions during the polycrystalline synthesis of indium antimonide, the two grooves and the quartz boat swing together with the quartz tube, so that the scum floating on the surface of the melt during the synthesis of antimony and indium materials is poured into the accommodating space of the groove.

[0008] A quartz assembly includes the aforementioned quartz boat and a quartz tube, wherein at least one end of the quartz tube is open in the axial direction and the inner circumferential surface of the quartz tube is cylindrical.

[0009] The beneficial effects of this disclosure are as follows: In the quartz boat and quartz assembly according to this disclosure, by setting two grooves, during the formation of indium antimonide polycrystalline material from antimony and indium materials, due to the surface tension relationship between the quartz boat and the melt, after the melt stabilizes, the scum on the surface of the melt preferentially adheres to the portion of the inner circumferential surface of the quartz boat wall above the melt. Thus, when the quartz tube swings in opposite directions around the axial direction, the two grooves rub against the inner wall of the quartz tube, and the quartz boat, along with its two grooves, swings together with the quartz tube. When the quartz tube swings in opposite directions around the axial direction, the scum floating on the surface of the melt is poured into the receiving space of the corresponding groove. When the swinging in opposite directions ends and the quartz tube returns to its normal position, there is no scum on the surface of the melt compared to before the swinging began. Then, the temperature can be lowered, thereby forming scum-free indium antimonide polycrystalline material in the receiving space. Therefore, the quartz boat and quartz components disclosed herein can completely remove slag during the polycrystalline synthesis stage of indium antimonide, thereby completely solving the slag problem before the preparation of indium antimonide single crystal by Czochralski method, that is, the slag can be completely removed during the preparation of indium antimonide. Attached Figure Description

[0010] Figure 1 This is a three-dimensional schematic diagram of a quartz boat based on the present disclosure.

[0011] Figure 2 It is based on the assembly diagram of the quartz component disclosed herein.

[0012] Figure 3 It is an assembly cross-sectional view of the quartz component according to this disclosure.

[0013] Figure 4 This is a schematic diagram of the operation process of a quartz component in a polycrystalline synthesis furnace according to the present disclosure.

[0014] The reference numerals in the attached figures are explained below.

[0015] 100 Quartz Components 21 End Walls

[0016] D-axis 22 perimeter wall

[0017] 10 Quartz Boats, 23 Capacity Space

[0018] 1 main body 20 quartz tube

[0019] 11 end wall 20a inner wall

[0020] 12 walls, 200 melt

[0021] 13 containment space 2 recessed section 300 scum Detailed Implementation

[0022] The accompanying drawings illustrate embodiments of this disclosure, and it will be understood that the disclosed embodiments are merely examples of this disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but are intended only as the basis for the claims and as an illustrative basis to teach those skilled in the art how to implement this disclosure in various ways.

[0023] [Quartz Boat]

[0024] Reference Figures 1 to 4According to the present disclosure, a quartz boat 10 is used for the synthesis of polycrystalline indium antimonide. The quartz boat 10 includes a main body 1, which includes two end walls 11 at both ends of the axial direction D and a surrounding wall 12 connected between the two end walls 11. The surrounding wall 12 is closed by the two end walls 11 at both ends of the axial direction D and is lower than the two end walls 11. The surrounding wall 12 and the two end walls 11 form a receiving space 13, which is open upward to hold antimony material and indium material that react to form polycrystalline indium antimonide. The quartz boat 10 also includes two recessed portions 2, which are connected to the left and right sides of the main body 1. Each recessed portion 2 includes two end walls 21 at both ends of the axial direction D and a surrounding wall 22 connected between the two end walls 21. The surrounding wall 22 is closed by the two end walls 21 at both ends of the axial direction D and is lower than the two end walls 21. The surrounding wall 22 and the two end walls 21 form a receiving space 23, which is open upward. The two grooves 2 are used to: frictionally fit the inner wall 20a of the quartz tube 20 after the quartz boat 10 is loaded into the quartz tube 20; when the quartz tube 20 is placed in the polycrystalline synthesis furnace and the indium antimonide polycrystalline synthesis process is the process of the quartz tube 20 swinging in opposite directions around the axis D, the two grooves 2 and the quartz boat 10 swing together with the quartz tube 20, so that the scum 300 floating on the surface of the melt 200 during the synthesis process of the antimony material and the indium material forming the melt 200 is poured into the accommodating space 23 of the groove 2.

[0025] In the quartz boat 10 according to this disclosure, due to the arrangement of the two grooves 2, during the polycrystalline indium antimonide formation stage of the antimony material and indium material, after the melt 200 stabilizes due to the surface tension relationship between them, the scum 300 on the surface of the melt 200 preferentially adheres to the portion of the inner circumferential surface of the wall 12 of the quartz boat 10 above the melt 200. Figure 4 As shown in the upper left figure, when the quartz tube 20 swings in opposite directions around the axial direction D, the two grooves 2 rub against the inner wall 20a of the quartz tube 20, causing the quartz boat 10, along with its two grooves 2, to swing together with the quartz tube 20. Figure 4 As shown in the upper right and lower right figures, when the quartz tube 20 swings in opposite directions around the axis D, the scum 300 floating on the surface of the melt 200 pours into the corresponding receiving space 23 of the groove 2. When the swinging in opposite directions ends and the quartz tube 20 returns to its upright position, as shown in the figures... Figure 4 As shown in the lower left image, compared to Figure 4 Before the swaying begins in the upper left figure, the surface of the melt 200 is free of slag 300. Then, it can be cooled, thereby forming a slag-free polycrystalline indium antimonide within the containment space 13. Thus, the quartz boat 10 according to this disclosure can completely remove slag 300 during the polycrystalline synthesis stage of indium antimonide, thereby completely solving the slag problem before the preparation of indium antimonide single crystals via the Czochralski method, i.e., it can completely remove slag 300 during the preparation of indium antimonide.

[0026] like Figure 1 and Figure 2 As shown, for example, the outer peripheral surface of each groove 2 is arc-shaped, which facilitates the insertion of the quartz boat 10 into the quartz tube 20.

[0027] like Figures 1 to 4 As shown, for example, the inner circumferential surface of the accommodating space 23 of each groove 2 is a concave arc shape, so that the scum 300 poured into the corresponding accommodating space 23 during the swaying of the two grooves 2 together with the quartz boat 10 and the quartz tube 20 will not fall out of the accommodating space 23.

[0028] like Figure 3 and Figure 4 As shown, in one example, the cross-section of the outer peripheral surface of the main body 1 (i.e., the outer peripheral surface formed by the two end walls 11 and the surrounding wall 12) is an arc shape not exceeding a semi-circular arc, which allows it to contact and rub against the inner wall 20a of the quartz tube 20 after the quartz boat 10 is inserted into the quartz tube 20. Therefore, combined with the frictional fit between the two grooves 2 and the inner wall 20a of the quartz tube 20, this allows... Figure 4 The reliability of the quartz boat 10 and the quartz tube 20 swinging synchronously during the swinging process is enhanced.

[0029] like Figure 3 and Figure 4 As shown and combined Figure 1 and Figure 2 The cross-section of the inner circumferential surface of the enclosure 12 of the main body 1 is an arc shape that does not exceed a semi-circular arc. In this way, the scum 300 on the part of the inner circumferential surface of the enclosure 12 of the quartz boat 10 that is attached to the melt 200 will not fall onto the melt 200 due to gravity before it is swung.

[0030] like Figure 1 and Figure 2 As shown, in one example, each end wall 11 and the corresponding end wall 21 are flush on opposite sides of the axial direction D.

[0031] like Figure 1 and Figure 2 As shown, in one example, each end wall 11 and the corresponding end wall 21 are flush with the top surface.

[0032] Quartz components

[0033] The quartz assembly 100 according to this disclosure includes the aforementioned quartz boat 10 and quartz tube 20, at least one end of the quartz tube 20 being open in the axial direction D, and the inner circumferential surface of the quartz tube 20 being cylindrical.

[0034] The specific features, effects, and operation of the quartz boat 10 in the quartz component 100 according to this disclosure are described above and will not be repeated here.

[0035] In one example, the quartz tube 20 is open at both ends along the axial direction D. In another example, as... Figure 2 As shown, the quartz tube 20 is open at one end and closed at the other end along the axial direction D.

[0036] [application]

[0037] use Figure 1 Quartz boat 10 and Figure 2 A quartz assembly 100 is formed by a quartz boat 10 and a quartz tube 20. One end of the quartz tube 20 is open along the axial direction D, while the other end is closed. The receiving space 13 of the quartz boat 10 is filled with 7N purity In material and 7N purity Sb material. The quartz boat 10 is then placed inside the quartz tube 20. The quartz tube 20, along with the quartz boat 10, is then placed into a polycrystalline synthesis furnace. After replacing the gas in the polycrystalline synthesis furnace with a nitrogen-hydrogen mixture, the furnace is heated to 525°C and held for 10 hours. Once the In and Sb materials have completely reacted and the melt 200 has stabilized, the process proceeds according to... Figure 4 Rotate the quartz tube 20 to the right, causing the scum 300 on the right side of the receiving space 13 of the quartz boat 10 to pour into the receiving space 23 of the groove 2 on the right side of the quartz boat 10. Then, according to... Figure 4 Then rotate the quartz tube 20 to the left, causing the scum 300 on the left side of the receiving space 13 of the quartz boat 10 to pour into the receiving space 23 of the groove 2 on the left side of the quartz boat 10. Finally, according to... Figure 4 Return the quartz tube 20 to the center, cool it down, and obtain indium antimonide polycrystalline material 300 without scum from the containment space 13.

[0038] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. A quartz boat for polycrystalline synthesis of indium antimonide, the quartz boat (10) comprising a body (1), the body (1) comprising end walls (11) at both ends in an axial direction (D) and a surrounding wall (12) connected between the end walls (11), the surrounding wall (12) being closed by the end walls (11) at both ends in the axial direction (D) and being lower than the end walls (11), the surrounding wall (12) and the end walls (11) forming a receiving space (13), the receiving space (13) being open upward for holding antimony material and indium material reacting to form polycrystalline indium antimonide; It is characterized in that The quartz boat (10) also includes two recessed parts (2), which are connected to the left and right sides of the main body (1). Each recessed part (2) includes two end walls (21) at both ends of the axial direction (D) and a surrounding wall (22) connected between the two end walls (21). The surrounding wall (22) is closed by the two end walls (21) at both ends of the axial direction (D) and is lower than the two end walls (21). The surrounding wall (22) and the two end walls (21) enclose a receiving space (23), which is open upward. The two grooves (2) are used to: frictionally fit the inner wall (20a) of the quartz tube (20) after the quartz boat (10) is inserted into the quartz tube (20), and when the quartz tube (20) swings in opposite directions around the axis (D) during the polycrystalline synthesis process of indium antimonide after the quartz tube (20) is placed in the polycrystalline synthesis furnace, the two grooves (2) and the quartz boat (10) swing together with the quartz tube (20), so that the scum (300) floating on the surface of the melt (200) during the synthesis process of antimony material and indium material forming melt (200) is poured into the accommodating space (23) of the groove (2).

2. The quartz boat according to claim 1, characterized in that, The outer circumferential surface of each groove (2) is arc-shaped.

3. The quartz boat according to claim 1, characterized in that, The inner circumferential surface of the accommodating space (23) of each groove (2) is a concave arc shape.

4. The quartz boat according to claim 1, characterized in that, The cross-section of the outer periphery of the main body (1) is an arc that does not exceed a semi-circular arc and can contact and rub against the inner wall (20a) of the quartz tube (20) after the quartz boat (10) is inserted into the quartz tube (20).

5. The quartz boat according to claim 1, characterized in that, The cross-section of the inner circumferential surface of the enclosure (12) of the main body (1) is an arc shape that does not exceed a semi-circular arc.

6. The quartz boat according to claim 1, characterized in that, Each end wall (11) and the corresponding end wall (21) are flush on opposite sides of the axial direction (D).

7. The quartz boat according to claim 1, characterized in that, Each end wall (11) and the corresponding end wall (21) are flush with the top surface.

8. A quartz component, characterized in that, The quartz boat (10) and quartz tube (20) according to any one of claims 1-7 are included, wherein at least one end of the quartz tube (20) is open in the axial direction (D), and the inner circumferential surface of the quartz tube (20) is cylindrical.

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