Ultrahigh vacuum coupling type source baffle device

Abstract

The utility model relates to the technical field of vacuum sealing, and discloses an ultrahigh vacuum coupling type source baffle device which comprises a driving rotating mechanism, a driving mechanism used for driving the driving rotating mechanism to rotate is installed below the driving rotating mechanism, and a driven rotating mechanism is arranged at the end, away from the driving mechanism, of the driving rotating mechanism. The driving rotating machine and the driven rotating mechanism are magnetically connected and coaxially and synchronously rotate, and a rotating shaft is installed above the driven rotating mechanism. When the ultrahigh vacuum coupling type source baffle device works, the magnetic rotating disc and the magnet base are installed in a completely isolated mode, the magnet base located at the vacuum end is driven to move in a magnetic coupling transmission mode, the sealing effect is remarkably improved, and the purpose of zero leakage is achieved.

Description

Technical Field

[0001] This application relates to the field of vacuum sealing technology, and in particular to an ultra-high vacuum coupled source baffle device. Background Art

[0002] In high vacuum and ultra-high vacuum applications, the vacuum chamber of the equipment needs to maintain an extremely high vacuum level. Since some equipment needs to transmit power from the atmospheric end outside the vacuum chamber to the vacuum end inside the vacuum chamber, the drive shaft must have a certain sealing structure to ensure the airtightness when it passes through the equipment.

[0003] In existing technologies, traditional vacuum rotary seal drives mostly rely on flexible sealing rings to act between the atmosphere and the vacuum. However, this traditional sealing method carries the risk of leakage. Utility Model Content

[0004] To address the issue that traditional vacuum rotary seal drives in existing technologies mostly rely on flexible sealing rings acting between the atmosphere and vacuum, which poses a risk of leakage, this application provides an ultra-high vacuum coupled source baffle device.

[0005] The ultra-high vacuum coupled source baffle device provided in this application adopts the following technical solution:

[0006] An ultra-high vacuum coupled source baffle device includes an active rotating mechanism, a drive mechanism for driving the active rotating mechanism to rotate is installed below the active rotating mechanism, a driven rotating mechanism is provided at the end of the active rotating mechanism away from the drive mechanism, the active rotating mechanism and the driven rotating mechanism are magnetically connected and rotate synchronously on the same axis, and a rotating shaft is installed above the driven rotating mechanism.

[0007] Preferably, the active rotating mechanism is a magnetic turntable, the driven rotating mechanism is a magnet base, and the magnetic turntable and the magnet base are driven by magnetic coupling.

[0008] Preferably, the distance between the magnetic turntable and the magnet base is no more than 6mm.

[0009] Preferably, the driving mechanism is either a rotary cylinder or a servo motor.

[0010] Preferably, the rotating shaft is connected to the magnet base via a vacuum quick connector.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] When this ultra-high vacuum coupled source baffle device is in operation, the magnetic turntable and the magnet base are installed in a completely isolated manner. By using magnetic coupling transmission, the magnet base located at the vacuum end is driven to move, which significantly improves the sealing effect and achieves the goal of zero leakage. Attached Figure Description

[0013] Figure 1 This is a front view of the entire utility model;

[0014] Figure 2 This is a schematic diagram of the overall internal structure of this utility model.

[0015] Explanation of reference numerals in the attached drawings: 1. Drive mechanism; 2. Rotating shaft; 3. Magnetic turntable; 4. Magnet base; 5. Vacuum quick connector. Detailed Implementation

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] Please see Figures 1 to 2 , the utility model provides a technical solution:

[0018] An ultra-high vacuum coupled source baffle device includes an active rotating mechanism, a drive mechanism 1 for driving the active rotating mechanism to rotate is installed below the active rotating mechanism, a driven rotating mechanism is provided at the end of the active rotating mechanism away from the drive mechanism, the active rotating mechanism and the driven rotating mechanism are magnetically connected and rotate synchronously on the same axis, and a rotating shaft 2 is installed above the driven rotating mechanism.

[0019] During operation, the drive mechanism drives the active rotating mechanism located at the atmospheric end to move, which in turn drives the driven rotating mechanism located at the vacuum end to follow the movement, thereby driving the rotating shaft 2 to move. This allows the baffle on the rotating shaft 2 to complete the rotation opening and closing operation, ensuring that there is no risk of leakage during the movement. When the movement at the vacuum end is restricted and the torque reaches a certain level, the moving parts at the atmospheric end automatically disengage, avoiding overload damage to the transmission components.

[0020] The active rotation mechanism is a magnetic turntable 3, and the driven rotation mechanism is a magnet base 4. The magnetic turntable 3 and the magnet base 4 are driven by magnetic coupling. The magnetic turntable 3 and the magnet base 4 are completely isolated from each other. The use of magnetic coupling can ensure zero leakage.

[0021] The distance between the magnetic turntable 3 and the magnet base 4 is no more than 6mm to avoid affecting the effect of transmission through magnetic coupling between the two.

[0022] The drive mechanism 1 is either a rotary cylinder or a servo motor, which drives the magnetic turntable 3 to rotate.

[0023] The rotating shaft 2 is connected to the magnet base 4 via a vacuum quick connector 5, which facilitates quick installation.

[0024] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense, and may refer to mechanical or electrical connections, internal communication between two components, or direct connection. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute positions of the objects being described change, the relative positional relationships may also change.

[0025] Secondly: The accompanying drawings of the embodiments disclosed in this utility model only involve the structures involved in the embodiments disclosed in this utility model. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of this utility model can be combined with each other.

[0026] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

[0027] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A high vacuum coupled source baffle device, characterized in that: It includes an active rotating mechanism, a drive mechanism (1) for driving the active rotating mechanism to rotate is installed below the active rotating mechanism, a driven rotating mechanism is provided at the end of the active rotating mechanism away from the drive mechanism (1), the active rotating mechanism and the driven rotating mechanism are magnetically connected and rotate synchronously on the same axis, and a rotating shaft (2) is installed above the driven rotating mechanism.

2. The ultra-high vacuum coupled source baffle device according to claim 1, characterized in that: The active rotating mechanism is a magnetic turntable (3), and the driven rotating mechanism is a magnet seat (4). The magnetic turntable (3) and the magnet seat (4) are driven by magnetic coupling.

3. The ultra-high vacuum coupled source baffle device according to claim 2, characterized in that: The distance between the magnetic turntable (3) and the magnet base (4) is no greater than 6 mm.

4. The ultra-high vacuum coupled source baffle device according to claim 1, characterized in that: The drive mechanism (1) is either a rotary cylinder or a servo motor.

5. The ultra-high vacuum coupled source baffle device according to claim 3, characterized in that: The rotating shaft (2) is connected to the magnet base (4) via a vacuum quick connector (5).

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