Silane combustion cylinder with tail gas filtering device

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to a silane combustion cylinder with a tail gas filtering device, which comprises a combustion cylinder body, the upper side of the combustion cylinder body is fixedly connected with a tail gas filtering cylinder, and the inner side of the tail gas filtering cylinder is provided with a filtering net. An exhaust pipeline and an air inlet pipeline are fixedly connected to the upper side and the lower side of the side face of the combustion barrel correspondingly, the lower end of the air inlet pipeline is fixedly connected with the combustion barrel, and an ash removal mechanism is arranged on the inner side of the combustion barrel. The ash removing mechanism comprises a material collecting box, a material storage box, a material collecting hopper, a limiting block, a baffle, a water conveying pipe, a flow dividing pipe, a water spraying head, a sealing cover plate, an electric motor, a threaded rod and a transmission rod; the water spraying head moves up and down to clean the surface of the filter screen, the filter screen is kept unblocked, dust is continuously filtered, the filter screen keeps the best filtering effect all the time, when the storage box is cleaned, the lower end of the collection hopper is blocked by the baffle, the equipment works continuously, and the dust filtering treatment efficiency of the equipment is effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, specifically to a silane combustion cylinder with an exhaust gas filtration device. Background Technology

[0002] Silane exhaust gas is one of the common exhaust gases in the semiconductor manufacturing industry. It needs to be treated with silane combustion chambers to reduce harm to the environment and people. However, when the exhaust gas is emitted after the combustion of silane exhaust gas, dust will remain inside the exhaust gas, which is not conducive to environmental protection.

[0003] Among them, announcement number CN221155959U discloses a silane combustion cylinder with a tail gas filtration device, which relates to the field of silane combustion cylinder technology. It addresses the problem in existing technologies where dust remains inside the tail gas after silane combustion, which is detrimental to environmental protection. A filter box is fixedly installed above the combustion cylinder, and an output pipe is fixedly installed above the filter box. A water supply pipe is provided on one side of the filter box and extends into the interior of the filter box. A nozzle is provided inside the filter box along the lower part of the water supply pipe. A filter bag is provided at the lower part of the filter box, and a drain pipe is fixedly installed below the filter box. The upper part of the combustion cylinder is cylindrical, and the lower part is inverted conical. An air inlet pipe is fixedly installed at the front end of the combustion cylinder, tangential to the cylinder cavity. An air pipe is fixedly installed above the air inlet pipe.

[0004] The device uses a nozzle to spray water mist to adsorb dust in the exhaust gas and filters the dust through a filter bag. However, during long-term use, dust will gradually accumulate inside the filter bag, reducing the filtration effect. At this time, the filter bag needs to be removed and replaced for cleaning. When replacing and cleaning the filter bag, the equipment needs to be shut down to prevent the exhaust gas from continuing to be emitted, which will reduce the efficiency of treating silane waste gas.

[0005] Therefore, it is necessary to invent a silane combustion chamber with an exhaust gas filtration device to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a silane combustion cylinder with a tail gas filtration device to solve the problem in the technology that the equipment needs to be shut down to prevent the continued emission of tail gas when replacing and cleaning the filter bag, which leads to a decrease in the efficiency of silane waste gas treatment.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a silane combustion cylinder with an exhaust gas filtration device, comprising a combustion cylinder body, an exhaust gas filter cylinder fixedly connected to the upper side of the combustion cylinder body, a filter screen provided on the inner side of the exhaust gas filter cylinder, an exhaust pipe and an intake pipe fixedly connected to the upper and lower sides of the side of the combustion cylinder body respectively, the lower end of the intake pipe being fixedly connected to the combustion cylinder body, and a dust removal mechanism provided on the inner side of the combustion cylinder body, the dust removal mechanism comprising a collection box, a storage box, a collection hopper, a limiting block, a baffle plate, a water supply pipe, a diversion pipe, a water spray head, a sealing cover plate, an electric motor, a threaded rod, and a transmission rod.

[0008] By adopting the above technical solution, the filter screen filters the exhaust gas after combustion. The dust in the exhaust gas is blocked on the outer surface of the filter screen. At this time, the electric motor drives the diverter pipe to move up and down, causing the water spray head to move up and down to clean the dust on the surface of the filter screen. The water mist mixed with the dust slides into the inside of the collection hopper, and then into the storage box. At the same time, the bottom of the collection hopper is blocked by the baffle plate. At this time, the storage box can be removed for cleaning. During the cleaning process, the equipment can continuously filter the dust, allowing the equipment to operate without interruption and effectively improving the dust filtration efficiency of the equipment.

[0009] Optionally, a support ring is fixedly connected to the inside of the exhaust gas filter cartridge near the upper side, a mounting plate is fixedly connected to the inner side of the support ring, a support frame is fixedly connected to the lower surface of the mounting plate, and the filter screen is fixedly connected to the outer surface of the support frame.

[0010] By adopting the above technical solution, the mounting plate is installed on the inside of the support ring and fixed by screws.

[0011] Optionally, the hopper is fixedly connected to the interior of the exhaust gas filter cartridge near the lower side, the limiting block is fixedly connected to the side wall of the hopper and the side wall of the combustion cylinder, the limiting block has a limiting groove inside, and the baffle plate is slidably connected to the limiting groove.

[0012] By adopting the above technical solution, the baffle plate slides inside the limiting groove, opening and closing the lower end of the hopper.

[0013] Optionally, the collection box is fixedly connected to the lower end of the exhaust gas filter cartridge, and the storage box is slidably connected to the inside of the collection box.

[0014] By adopting the above technical solution, the storage box slides inside the collection box, making it easy to remove and clean the storage box.

[0015] Optionally, the surface of the mounting plate is slidably connected with two sets of symmetrically distributed water supply pipes, the upper ends of the two sets of water supply pipes are provided with threaded grooves, and the diversion pipe is fixedly connected to the lower end of the water supply pipes.

[0016] By adopting the above technical solution, the upper end of the water supply pipe is connected to the water supply module, and the water supply pipe delivers water to the inside of the branch pipe.

[0017] Optionally, the diversion pipe is sleeved on the outside of the filter screen, and a spray head is fixedly connected to the inside of the diversion pipe.

[0018] By adopting the above technical solution, the spray head sprays water onto the surface of the filter screen to clean the dust adsorbed on the filter screen surface, thereby increasing the service life of the filter screen and enabling the equipment to operate continuously.

[0019] Optionally, the sealing cover is fixedly connected to the upper end of the combustion cylinder, both sets of water supply pipes are slidably connected to the sealing cover, an mounting bracket is fixedly installed on the upper end of the sealing cover, and the electric motor is fixedly installed on the upper end of the mounting bracket.

[0020] Optionally, the middle position of the upper surface of the sealing cover plate is rotatably connected to the lower end of the threaded rod, the output end of the electric motor is fixedly connected to the upper end of the threaded rod, the threaded rod is threadedly connected to the middle of the transmission rod, and the two ends of the transmission rod are respectively fixedly connected to two sets of water supply pipes.

[0021] By adopting the above technical solution, the output end of the electric motor drives the threaded rod to rotate. Under the action of the two sets of water supply pipes, the threaded rod drives the transmission rod to rise and fall, thereby driving the two sets of water supply pipes to rise and fall.

[0022] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0023] 1. This utility model uses an electric motor to drive the diversion pipe to move up and down, causing the water spray head to move up and down to clean the dust on the surface of the filter screen. The water mist mixed with dust slides into the inside of the collection hopper, and then into the storage box. At the same time, the bottom of the collection hopper is blocked by a baffle plate. At this time, the storage box can be removed for cleaning. During the cleaning process, the equipment can continuously filter dust, allowing the equipment to operate without interruption, effectively improving the dust filtration efficiency of the equipment, increasing the service life of the filter screen, and ensuring that the filter screen always maintains the best filtration effect.

[0024] 2. This utility model uses a filter screen in conjunction with a water spray head to filter exhaust gas, effectively blocking dust and further improving the filtration effect of exhaust gas. Moreover, the water flow only needs to wash the dust on the surface of the filter screen, effectively saving water resources. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0026] Figure 2 This is a schematic diagram of the internal structure of the exhaust gas filter cartridge of this utility model;

[0027] Figure 3 This is a schematic diagram of the internal structure of the material collection box of this utility model;

[0028] Figure 4 This is a schematic diagram of the internal structure of the hopper of this utility model;

[0029] Figure 5 This is a schematic diagram of the dust removal mechanism of this utility model;

[0030] Figure 6 This is a schematic diagram of the filter screen structure of this utility model;

[0031] Figure 7 This is a schematic diagram of the sealing plate structure of this utility model.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1. Combustion cylinder; 2. Exhaust gas filter cartridge; 21. Inlet pipe; 22. Exhaust pipe; 23. Collection box; 24. Storage box; 25. Support ring; 26. Collection hopper; 27. Limiting block; 28. Limiting groove; 29. ​​Baffle plate; 3. Mounting plate; 31. Support frame; 32. Filter screen; 33. Water supply pipe; 34. Threaded groove; 35. Diverter pipe; 36. Spray nozzle; 4. Sealing cover plate; 41. Mounting bracket; 42. Electric motor; 43. Threaded rod; 44. Transmission rod. Detailed Implementation

[0034] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0035] This utility model provides, for example Figure 1 and Figure 2 The diagram shows a silane combustion cylinder with an exhaust gas filtration device, comprising a combustion cylinder body 1. An exhaust gas filter cylinder 2 is fixedly connected to the upper side of the combustion cylinder body 1. A filter screen 32 is provided on the inner side of the exhaust gas filter cylinder 2. A support ring 25 is fixedly connected to the upper side of the interior of the exhaust gas filter cylinder 2. An installation plate 3 is fixedly connected to the inner side of the support ring 25. A support frame 31 is fixedly connected to the lower surface of the installation plate 3. The filter screen 32 is fixedly connected to the outer surface of the support frame 31. An exhaust pipe 22 and an intake pipe 21 are fixedly connected to the upper and lower sides of the side of the combustion cylinder body 1, respectively. The lower end of the intake pipe 21 is fixedly connected to the combustion cylinder body 1. A dust removal mechanism is provided on the inner side of the combustion cylinder body 1. The dust removal mechanism includes a collection box 23, a storage box 24, a collection hopper 26, a limiting block 27, a baffle plate 29, a water supply pipe 33, a diversion pipe 35, a water spray head 36, a sealing cover plate 4, an electric motor 42, a threaded rod 43, and a transmission rod 44.

[0036] The mounting plate 3 has two sets of through holes on its surface, and the support ring 25 has two sets of threaded holes on its surface. The mounting plate 3 is snapped onto the upper side of the support ring 25, and then screws are threaded through the through holes and threaded into the threaded holes on the surface of the support ring 25 to fix the mounting plate 3 to the inside of the support ring 25. At this time, the filter screen 32 filters the dust in the exhaust gas after the combustion of silane exhaust gas. At the same time, the upper end of the water supply pipe 33 is connected to the hose in the water supply mechanism. The water supply mechanism delivers water to the inside of the water supply pipe 33 through the hose and sprays it outward through the water nozzle 36 to clean the dust adsorbed on the surface of the filter screen 32, so that the filter screen 32 always maintains the best filtration state.

[0037] In addition, during the use of the equipment, the exhaust gas generated after the combustion of silane waste gas is transported to the lower side of the filter screen 32 through the air inlet pipe 21. At this time, under the action of the fan, the exhaust gas is drawn into the interior of the exhaust pipe 22. During the flow of the exhaust gas, it passes through the filter screen 32. At this time, the filter screen 32 adsorbs and filters the dust in the exhaust gas, preventing the dust from being discharged to the outside with the exhaust gas. When there is a lot of dust on the surface of the filter screen 32, the electric motor 42 drives the water pipe 33 to move downward, and at the same time the water spray head 36 sprays water onto the surface of the filter screen 32 to clean the dust on the surface of the filter screen 32, so that the filter screen 32 can continue to filter the dust.

[0038] participate Figures 2 to 4 The material collection box 23 is fixedly connected to the lower end of the exhaust gas filter cylinder 2. The material storage box 24 is slidably connected to the inside of the material collection box 23. The material collection hopper 26 is fixedly connected to the inside of the exhaust gas filter cylinder 2 near the lower side. The limiting block 27 is fixedly connected to the side wall of the material collection hopper 26 and the side wall of the combustion cylinder 1. The limiting block 27 has a limiting groove 28 inside. The baffle plate 29 is slidably connected to the limiting groove 28.

[0039] Simultaneously, the baffle plate 29 slides inside the limiting groove 28, opening and closing the lower end of the collecting hopper 26. During the filtration of exhaust gas, the baffle plate 29 is pulled outward, keeping the collecting hopper 26 always open. During the cleaning of the filter screen 32, the dust mixed with water on the surface of the filter screen 32 flows into the storage box 24, collecting the dust generated during cleaning. When the storage box 24 is full of dust, the baffle plate 29 is pushed inward, allowing the collecting hopper to move. The lower end of the hopper 26 is sealed. At this time, the storage box 24 is taken out to the outside for cleaning. Meanwhile, the internal filter screen 32 continuously filters the exhaust gas, and the water spray head 36 can clean the dust on the surface of the filter screen 32. The cleaned dust will be temporarily collected inside the hopper 26. After the storage box 24 is reinstalled, the baffle plate 29 is opened. At this time, the dust in the collection box 26 will slide back into the storage box 24, realizing continuous and uninterrupted filtration of the exhaust gas and improving filtration efficiency.

[0040] See Figure 2 , Figure 5 , Figure 6 and Figure 7 The mounting plate 3 has two sets of symmetrically distributed water pipes 33 slidably connected to its surface. The upper ends of the two sets of water pipes 33 are provided with threaded grooves 34. The diversion pipe 35 is fixedly connected to the lower end of the water pipes 33. The diversion pipe 35 is sleeved on the outside of the filter screen 32. The inner side of the diversion pipe 35 is fixedly connected to the spray head 36. The sealing cover plate 4 is fixedly connected to the upper end of the combustion cylinder 1. Both sets of water pipes 33 are slidably connected to the sealing cover plate 4. The upper end of the sealing cover plate 4 is fixedly mounted with a mounting bracket 41. The electric motor 42 is fixedly mounted on the upper end of the mounting bracket 41. The middle position of the upper surface of the sealing cover plate 4 is rotatably connected to the lower end of the threaded rod 43. The output end of the electric motor 42 is fixedly connected to the upper end of the threaded rod 43. The threaded rod 43 is threadedly connected to the middle of the transmission rod 44. The two ends of the transmission rod 44 are respectively fixedly connected to the two sets of water pipes 33.

[0041] Specifically, the sealing cover 4 is connected to the upper end of the exhaust gas filter cartridge 2 by screws. Both ends of the transmission rod 44 are provided with through holes, through which the water supply pipe 33 passes. The water supply pipe 33 is connected to the transmission rod 44 by two sets of nuts. The electric motor 42 is a bidirectional motor that can rotate in both directions. During the cleaning process, the electric motor 42 rotates forward, driving the threaded rod 43 to rotate clockwise, which in turn pushes the transmission rod 44 downward. At this time, the water supply pipes 33 on both sides are pushed downward, which in turn pushes the diversion pipe 35 and the spray head 36 downward. The water sprayed from the spray head 36 cleans the surface of the filter screen 32 from top to bottom. After cleaning to the bottom, the electric motor 42 reverses, and the threaded rod 43 pulls the water supply pipe 33 upward, and the diversion pipe 35 and the spray head 36 are returned to the top.

[0042] The working principle of this utility model is as follows: The electric motor 42 drives the diversion pipe 35 to move up and down, which in turn moves the water spray head 36 up and down to clean the dust on the surface of the filter screen 32. The water mist mixed with dust slides into the storage box 24. At the same time, the lower end of the collection hopper 26 is blocked by the baffle plate 29. At this time, the storage box 24 can be removed for cleaning. During the cleaning process, the equipment can continuously filter dust, so that the equipment can operate without interruption, effectively improving the dust filtration efficiency of the equipment, increasing the service life of the filter screen 32, and ensuring that the filter screen 32 always maintains the best filtration effect.

[0043] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A silane combustion cylinder with an exhaust gas filtration device, comprising a combustion cylinder body (1), characterized in that: The upper side of the combustion cylinder (1) is fixedly connected to the exhaust gas filter cylinder (2), and the inner side of the exhaust gas filter cylinder (2) is provided with a filter screen (32). The upper and lower sides of the side of the combustion cylinder (1) are respectively fixedly connected to the exhaust pipe (22) and the air intake pipe (21). The lower end of the air intake pipe (21) is fixedly connected to the combustion cylinder (1). The inner side of the combustion cylinder (1) is provided with a dust removal mechanism, which includes a material collection box (23), a material storage box (24), a material collection hopper (26), a limiting block (27), a baffle plate (29), a water supply pipe (33), a diversion pipe (35), a water spray head (36), a sealing cover plate (4), an electric motor (42), a threaded rod (43), and a transmission rod (44).

2. A silane combustion chamber with an exhaust gas filtration device according to claim 1, characterized in that: The exhaust gas filter cartridge (2) is fixedly connected to a support ring (25) near the upper side. The support ring (25) is fixedly connected to an mounting plate (3) on its inner side. The mounting plate (3) is fixedly connected to a support frame (31) on its lower surface. The filter screen (32) is fixedly connected to the outer surface of the support frame (31).

3. A silane combustion chamber with an exhaust gas filtration device according to claim 2, characterized in that: The hopper (26) is fixedly connected to the interior of the exhaust gas filter cylinder (2) near the lower side. The limiting block (27) is fixedly connected to the side wall of the hopper (26) and the side wall of the combustion cylinder (1). A limiting groove (28) is opened inside the limiting block (27). The baffle plate (29) is slidably connected to the limiting groove (28).

4. A silane combustion chamber with an exhaust gas filtration device according to claim 1, characterized in that: The material collection box (23) is fixedly connected to the lower end of the exhaust gas filter cylinder (2), and the material storage box (24) is slidably connected to the inside of the material collection box (23).

5. A silane combustion chamber with an exhaust gas filtration device according to claim 2, characterized in that: The surface of the mounting plate (3) is slidably connected to two sets of symmetrically distributed water pipes (33). The upper ends of the two sets of water pipes (33) are provided with threaded grooves (34), and the diversion pipe (35) is fixedly connected to the lower end of the water pipes (33).

6. A silane combustion chamber with an exhaust gas filtration device according to claim 5, characterized in that: The diversion pipe (35) is sleeved on the outside of the filter screen (32), and a spray head (36) is fixedly connected to the inside of the diversion pipe (35).

7. A silane combustion chamber with an exhaust gas filtration device according to claim 6, characterized in that: The sealing cover (4) is fixedly connected to the upper end of the combustion cylinder (1), and both sets of water supply pipes (33) are slidably connected to the sealing cover (4). The upper end of the sealing cover (4) is fixedly installed with a mounting bracket (41), and the electric motor (42) is fixedly installed on the upper end of the mounting bracket (41).

8. A silane combustion chamber with an exhaust gas filtration device according to claim 7, characterized in that: The middle part of the upper surface of the sealing cover (4) is rotatably connected to the lower end of the threaded rod (43), the output end of the electric motor (42) is fixedly connected to the upper end of the threaded rod (43), the threaded rod (43) is threadedly connected to the middle part of the transmission rod (44), and the two ends of the transmission rod (44) are fixedly connected to two sets of water supply pipes (33) respectively.

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