Michelson interference vibration measurement system

Abstract

The utility model provides a Michelson interference vibration measurement system, which relates to the technical field of interference vibration measurement and comprises a laser, a first spectroscope, a balance detector, a reflective mirror, a movable reflective mirror, an object placing table, a second spectroscope, a photoelectric detector, a camera, a light intensity sensor, a beam expanding lens, a display screen and a demodulator. The laser beam is divided into reference light and measuring light through the first spectroscope; the reference light firstly passes through the balance detector, and phase modulation is carried out on the reference light; the modulated reference light is reflected on a reflective mirror to obtain first reflected light; the measuring light enters the object to be measured to obtain second reflected light; the angle of the movable reflecting mirror is adjustable; the reflected light forms frequency mixing light in the first spectroscope; the frequency-mixed light enters a second spectroscope to obtain first frequency-mixed light and second frequency-mixed light; the first frequency mixing light can irradiate on the light display screen to display light spots and light intensity values; the second frequency mixing light enters a photoelectric detector; and determining the measured amplitude of the to-be-measured object.

Description

Technical Field

[0001] This utility model relates to the field of interferometric vibration measurement technology, and in particular to a Michelson interferometric vibration measurement system. Background Technology

[0002] The Michelson interferometer is a vibration measuring instrument based on the Michelson interferometry principle. It uses the interference phenomenon to accurately measure the vibration displacement and velocity of an object. The Michelson interferometer consists of two optical paths. One part of the beam is reflected, and the other part is reflected by a reference mirror. By adjusting the position of the mirror or detecting the change in the phase of the reflected beam, interference fringes can be obtained. The changes in these fringes correspond to the minute displacement changes of the measured object.

[0003] The Michelson interferometric vibration measurement system can provide high-precision vibration measurements at the nanometer level. By using a non-contact method, it avoids the interference and risks associated with traditional contact measurements. It is particularly suitable for high-speed rotating components or high-temperature and high-pressure environments where direct contact is not possible. Its portability and flexibility enable it to quickly detect vibrations in complex or space-constrained environments, helping to promptly identify equipment failures or structural hazards, thereby improving diagnostic efficiency and maintenance reliability. This system has broad application value in fields such as mechanical equipment monitoring, structural health assessment, and precision scientific research.

[0004] However, traditional vibration measuring instruments do not consider whether the beam is perpendicular to the surface of the object being measured during the vibration detection process. Since the surface of the object being measured is not always horizontal, it is difficult to ensure the perpendicularity, which in turn affects the quality of the reflected light and the stability of the interference signal, i.e., the mixed light. This results in a large deviation in the vibration measurement results and low measurement accuracy. Utility Model Content

[0005] To address the technical problem that traditional vibration measuring instruments do not consider whether the beam is perpendicular to the surface of the object being measured during vibration detection, and since the surface of the object is not always horizontal, it is difficult to ensure a perpendicular state, which affects the quality of the reflected light and the stability of the interference signal, i.e., the mixed light, resulting in large deviations in vibration measurement results and low measurement accuracy, this utility model provides a Michelson interferometric vibration measuring system.

[0006] The technical solution provided by this utility model embodiment is as follows:

[0007] This utility model provides a Michelson interferometric vibration measurement system, comprising: a laser, a first beam splitter, a balanced detector, a reflector, a movable reflector, a stage, a second beam splitter, a photodetector, a camera, a light intensity sensor, a beam expander, a display screen, and a demodulator;

[0008] The laser beam emitted by the laser is split into a reference beam and a measurement beam by the first beam splitter;

[0009] The reference light is phase-modulated by a balanced detector, and the phase-modulated reference light is then incident into a reflector to obtain the first reflected light returned by the reflector.

[0010] The measuring light passes through a movable mirror and enters the object to be measured on the stage, and the second reflected light returned by the movable mirror is obtained;

[0011] The angle of the movable reflector is adjustable;

[0012] The first reflected light and the second reflected light form a mixed light in the first beam splitter;

[0013] The mixed light is incident on the second beam splitter to obtain the first mixed light and the second mixed light;

[0014] Both the camera and the light intensity sensor are connected to the display screen. The camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed light, respectively.

[0015] The second mixed light enters the photodetector and outputs an electrical signal corresponding to the second mixed light;

[0016] The photodetector is connected to the demodulator, and the measured amplitude of the object is determined by combining the light spot and light intensity value displayed on the screen.

[0017] The beneficial effects of the technical solution provided by this utility model embodiment include at least the following:

[0018] In this invention, by combining a camera, a light intensity sensor, a movable reflector, and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value. This ensures the perpendicularity of the light beam to the object being measured in a direct manner, improving the stability of the mixed light, reducing the deviation of vibration measurement results, and increasing measurement accuracy. The combination of the light intensity sensor, camera, and display screen allows for real-time acquisition and display of measurement results, making data transmission more convenient and improving detection efficiency and flexibility. The demodulator precisely demodulates the electrical signal, making the measurement data more accurate and reliable. The knob adjustment enhances the ease of operation and measurement accuracy. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1A schematic diagram of the structure of a Michelson interferometric vibration measurement system provided in an embodiment of this utility model;

[0021] Figure 2 A schematic diagram of the structure of the Michelson interferometric vibration meter provided in this embodiment of the utility model;

[0022] Figure 3 A schematic flowchart of a vibration testing method provided for an embodiment of this utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the movable reflector provided in an embodiment of the present invention. Detailed Implementation

[0024] The technical solution of this utility model will now be described with reference to the accompanying drawings.

[0025] In the embodiments of this utility model, words such as "exemplarily" and "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design described as "exemplary" in this utility model should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the word "exemplary" is intended to present the concept in a concrete manner. Furthermore, in the embodiments of this utility model, the meaning expressed by "and / or" can be both, or it can be either one or the other.

[0026] To make the technical problems, technical solutions and advantages of this utility model clearer, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0027] Reference manual attached Figure 1 The diagram shows a schematic representation of a Michelson interferometric vibration measurement system provided in an embodiment of the present invention.

[0028] Reference manual attached Figure 2 The diagram shows a schematic of the structure of the Michelson interferometric vibration meter provided in an embodiment of the present invention.

[0029] like Figure 2This is a schematic diagram of a Michelson interferometric vibrometer, specifically including: a laser, a first beam splitter, a balance detector, a reflector, a movable reflector adjustment device, a second beam splitter, a camera, an optical display screen, an electronic display screen, a beam splitter holder, and a beam expander. The laser beam emitted by the laser is split into a reference beam and a measurement beam by the first beam splitter. The reference beam passes through the balance detector and enters the reflector, receiving a first reflected beam returned by the reflector. The measurement beam passes through the movable reflector adjustment device and enters the object to be measured outside the Michelson interferometric vibrometer, receiving a second reflected beam returned by the movable reflector. The first and second reflected beams form a mixed beam in the first beam splitter. This mixed beam enters the second beam splitter, resulting in a first mixed beam and a second mixed beam. The light intensity sensors in the camera and the optical display screen are both connected to the electronic display screen.

[0030] This utility model provides a Michelson interferometric vibration measurement system, including: a laser, a first beam splitter, a balanced detector, a reflector, a movable reflector, a stage, a second beam splitter, a photodetector, a camera, a light intensity sensor, a beam expander, a display screen, and a demodulator.

[0031] Among them, the laser is the device that generates the light beam, usually a stable monochromatic light source. In the Michelson interferometric vibratory system, the laser provides highly coherent laser light as the light source for interferometric measurements. The beam splitter is an optical element that splits the incident laser beam into two beams. The balanced detector is used to measure the optical signal in the reference light path. The balanced detector is usually used to detect the intensity or sinusoidal changes of the optical signal for subsequent interference signal analysis and demodulation. The reflector is an optical element used to reflect the light beam. On the reference light path, the reflector reflects the reference light back to the beam splitter or detector of the system. The movable mirror is an optical element used to reflect and change the propagation direction of the light beam. The stage is a support device for placing the object to be measured. The photodetector is a device that converts the optical signal into an electrical signal. The camera is an imaging device used to collect the spot information of the mixed light, which can monitor and display the changes in the interference pattern in real time, helping to adjust and observe the alignment of the beam. The light intensity sensor can be used to detect the intensity of the mixed light. The light intensity sensor measures the intensity change of a light beam and displays it on a screen for precise adjustment and optimization of the interference signal. The screen displays the measurement results, the position of the light spot, and the changes in light intensity. The screen displays the data information collected by the light intensity sensor and the camera in real time to help operators make adjustments and observations. The demodulator processes the electrical signal generated by the mixed light and demodulates the vibration amplitude and frequency of the object under test through a specific algorithm (such as the PGC algorithm).

[0032] The laser beam emitted by the laser is split into a reference beam and a measurement beam by the first beam splitter.

[0033] The reference light is the portion of the laser beam emitted by the laser that is split off after passing through the first beam splitter. It typically does not pass through the object under test. The main function of the reference light is to provide a stable reference signal. Its intensity and phase remain unchanged during the measurement process. It is used to interfere and compare with the measurement light, thereby detecting the vibration or displacement change of the object under test. The measurement light is the light that enters the object under test after being split off from the laser beam emitted by the laser through the first beam splitter. After the measurement light illuminates the object under test, it will undergo a phase change due to the influence of the object's surface condition and vibration.

[0034] It should be noted that the reference light and the measurement light propagate along different paths to ensure optical path stability and accuracy, improve the system's sensitivity to minute vibrations, and provide a reference signal for the system, which helps to eliminate the influence of environmental noise on the measurement results and enhances anti-interference capabilities.

[0035] The reference light is phase-modulated by a balanced detector, and the phase-modulated reference light is then incident into a reflector to obtain the first reflected light returned by the reflector.

[0036] Specifically, the balanced detector ensures the stability of the reference light signal, reduces environmental noise interference, and improves measurement accuracy. The first reflected light reflected by the mirror provides a stable reference signal for interferometric measurement, making subsequent interferometric analysis more accurate. Maintaining the stability of the reference light path enables the entire system to better capture the subtle vibration information of the object under test, thereby improving the system's anti-interference and signal sensitivity.

[0037] Measuring light is incident on the object to be measured on the stage through a movable mirror, and the second reflected light returned by the movable mirror is obtained.

[0038] It should be noted that the movable reflector can precisely guide the measuring light to illuminate the object under test, ensuring the stability and accuracy of the optical path. The second reflected light carries the vibration information of the object under test. By interfering and comparing with the reference light, high-sensitivity vibration detection is achieved. This design allows for flexible adjustment of the angle of the movable reflector to adapt to the measurement needs of different objects, improving the system's adaptability and measurement efficiency.

[0039] The angle of the movable mirror is adjustable. By adjusting the reflection angle of the movable mirror, the reference light and the second reflected light can be made to coincide, which can significantly improve the accuracy of the interferometric measurement system, ensure that the two beams of light are accurately superimposed in space, thereby producing a stable interference pattern and ensuring the accuracy and sensitivity of the measurement results.

[0040] The first reflected light and the second reflected light form a mixed light in the first beam splitter.

[0041] It should be noted that the generation of mixed light is based on the interference principle of reference light and measurement light, which can accurately reflect the minute vibration characteristics of the object under test and provide high-resolution measurement results. During the interference process, the phase difference between the reference light and the measurement light is used to enhance the sensitivity of the signal to minute changes, which greatly improves the vibration detection accuracy of the system.

[0042] The mixed light is incident on the second beam splitter to obtain the first mixed light and the second mixed light.

[0043] It should be noted that this optical path separation can process different signal channels simultaneously, improving the parallelism and efficiency of the measurement. The first and second mixed light are used for different sensors and detectors, which helps to collect light spots, light intensity values ​​and electrical signals, further enriching the dimensions of vibration information acquisition.

[0044] Both the camera and the light intensity sensor are connected to the display screen. The camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed light, respectively.

[0045] Among them, the light spot is a bright spot or pattern formed on the sensor or display after the laser beam is interfered or reflected. It is used to determine the coincidence of the beam path and the interference state. The light intensity value is the intensity value of the light, which represents the energy or brightness of the beam. It is detected by the sensor and used to reflect the intensity change of the interference light.

[0046] Specifically, the camera captures the position of the light spot in real time, which can intuitively determine the interference of the light beam and improve the accuracy of light adjustment. The light intensity sensor can provide real-time feedback on changes in light intensity and provide accurate signal strength information, which helps to optimize the measurement results. The display screen shows the light spot and light intensity values ​​in real time, which can make quick judgments and adjustments, improve the visibility and operational efficiency of the measurement process, and ensure the accuracy and stability of the measurement.

[0047] The second mixed light enters the photodetector, and an electrical signal corresponding to the second mixed light is output.

[0048] The photodetector is connected to the demodulator, and the measured amplitude of the object is determined by combining the light spot and light intensity value displayed on the screen.

[0049] Beam expanders are used to increase the diameter of a laser beam, thereby optimizing measurement results.

[0050] In one possible implementation, the light intensity sensor is connected to the display screen via a Bluetooth module.

[0051] It should be noted that the photodetector accurately converts light signals into electrical signals, which helps with subsequent digital signal processing and demodulation, improves measurement accuracy, and, combined with the intuitive feedback of light spot and light intensity values, the system can adjust the optical path in real time to ensure the optimization of interference conditions and improve measurement stability. The demodulator further extracts and outputs the amplitude signal, providing users with accurate vibration amplitude information. It is suitable for high-precision vibration detection scenarios and is easy to operate and highly efficient.

[0052] The beneficial effects of the technical solution provided by this utility model embodiment include at least the following:

[0053] In this invention, by combining a camera, a light intensity sensor, a movable reflector, and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value. This ensures the perpendicularity of the light beam to the object being measured in a direct manner, improving the stability of the mixed light, reducing the deviation of vibration measurement results, and increasing measurement accuracy. The combination of the light intensity sensor, camera, and display screen allows for real-time acquisition and display of measurement results, making data transmission more convenient and improving detection efficiency and flexibility. The demodulator precisely demodulates the electrical signal, making the measurement data more accurate and reliable. The knob adjustment enhances the ease of operation and measurement accuracy.

[0054] Reference manual attached Figure 3 The diagram shows a flow chart of a vibration testing method provided by this utility model.

[0055] This utility model also provides a vibration testing method, applied to the aforementioned Michelson interferometric vibration measurement system, comprising:

[0056] S1: Acquire the object to be tested and place it on the stage of the Michelson interferometric vibration measurement system.

[0057] It should be noted that placing the object to be measured on the stage of the Michelson interferometric vibration measurement system, ensuring that the object is in a fixed and stable measurement position, can improve the accuracy and repeatability of the measurement and reduce errors caused by changes in the object's position.

[0058] S2: Start the Michelson interferometric vibration measurement system.

[0059] S3: Acquire the sinusoidal signal obtained by the reference light passing through the balanced detector.

[0060] Among them, the sine wave signal is a waveform signal caused by the interference or modulation of light, and is often used to reflect information about vibration or phase changes.

[0061] It should be noted that by acquiring sinusoidal signals, the phase change of the reference light can be recorded with high precision, providing basic data for vibration detection. The introduction of the balanced detector ensures the stability and accuracy of the signal, effectively reducing noise interference. The sinusoidal signal can clearly reflect the periodic characteristics of optical interference, facilitating subsequent signal demodulation and processing, and improving the vibration detection accuracy and response speed of the system.

[0062] S4: Obtain the light spot and light intensity value.

[0063] It should be noted that acquiring the light spot and light intensity value can intuitively reflect the interference situation, ensuring that the optical paths of the reference light and the measurement light are accurately aligned. The light spot helps with visual adjustment and simplifies the operation process, while the accurate acquisition of the light intensity value provides a reliable intensity signal for vibration measurement. Combining the two, the system can provide real-time feedback on the effect of light adjustment, improve the accuracy and stability of the measurement, and ensure the reliability of interferometric measurement.

[0064] S5: Determine whether the reference light and the second reflected light overlap based on the first condition that the light spots are in an overlapping state or the second condition that the light intensity value is at its maximum value. If they overlap, proceed to step S7; otherwise, proceed to step S6.

[0065] Specifically, this step ensures precise adjustment of the optical path through two independent judgment methods, increasing the reliability of the measurement. Visual detection of spot overlap can intuitively guide users to make fine adjustments, simplifying the operation process and improving the system's user-friendliness and efficiency. The method of maximizing light intensity helps to achieve automated adjustment, reduce human error, and ensure the optimization of measurement conditions. By combining these two conditions, the system can quickly and accurately reach the optimal interference state, thereby improving measurement accuracy and stability.

[0066] Reference manual attached Figure 4 The diagram shows a schematic representation of the movable reflector provided in an embodiment of the present invention.

[0067] like Figure 4 This is a schematic diagram of the structure of a movable reflector. The movable reflector has a parallel knob and a vertical knob. The vertical knob includes a coarse adjustment knob with a large gear and a fine adjustment knob with a small gear. The parallel knob includes a coarse adjustment knob with a large pitch screw and a fine adjustment knob with a small pitch screw.

[0068] Adjust the coarse adjustment knob of the vertical adjustment knob of the movable reflector to make the large gear drive the movable reflector to rotate around the axis perpendicular to its surface at a large angle, roughly aligning it with the light path. Then, adjust the fine adjustment knob of the vertical adjustment knob to increase the reduction ratio of the small gear and slow down the rotation speed, thereby making a more precise angle adjustment of the movable reflector and further adjusting the vertical angle of the movable reflector so that the light spots are precisely overlapped.

[0069] Adjust the coarse adjustment knob of the movable reflector's parallel adjustment knob. The large pitch screw drives the reflector to rotate around an axis parallel to the reflector's edge, greatly adjusting the reflector's tilt angle. Then, use the fine adjustment knob to finely adjust the tilt angle of the movable reflector, precisely controlling the tilt angle of the movable reflector until the reference light and the second reflected light coincide.

[0070] S6: Adjust the reflection angle of the movable mirror until the first or second condition is met, so that the reference light and the second reflected light coincide.

[0071] In one possible implementation, the movable reflector includes a parallel adjustment knob and a vertical adjustment knob.

[0072] In one possible implementation, both the parallel adjustment knob and the vertical adjustment knob include a coarse adjustment knob and a fine adjustment knob.

[0073] It should be noted that the coarse adjustment knob is used for quick, wide-range angle adjustments, while the fine adjustment knob provides precise micro-adjustment control to achieve high-precision alignment. This two-stage adjustment method can not only quickly complete the approximate calibration, but also further optimize the optical path alignment through fine adjustment, thereby effectively improving the measurement accuracy and stability of the system, reducing human error, and ensuring efficient operation.

[0074] In one possible implementation, S6 specifically refers to:

[0075] By adjusting the coarse and fine adjustment knobs of the vertical adjustment knob, the movable reflector is rotated around the central axis perpendicular to the midpoint of the side of the movable reflector, changing the vertical angle of the movable reflector until the first or second condition is met.

[0076] By adjusting the coarse and fine adjustment knobs of the parallel adjustment knob, the movable mirror can be rotated around a central axis parallel to the edge of the movable mirror, changing the tilt angle of the mirror until the reference light and the second reflected light coincide.

[0077] It should be noted that by adjusting the reflection angle of the movable mirror to make the reference light and the second reflected light coincide, the accuracy of the interferometric measurement system can be significantly improved, ensuring that the two beams of light are accurately superimposed in space, thereby producing a stable interference pattern and ensuring the accuracy and sensitivity of the measurement results.

[0078] S7: Acquire electrical signals.

[0079] S8: Demodulate the electrical signal using a demodulator to determine the measured amplitude of the object under test.

[0080] In one possible implementation, S8 specifically includes:

[0081] S801: Inputs electrical signals to the demodulator.

[0082] S802: Demodulates electrical signals using the PGC algorithm.

[0083] It should be noted that demodulating electrical signals using the PGC algorithm can effectively improve the demodulation accuracy of interference signals, ensure accurate acquisition of vibration amplitude, and also has strong anti-noise capability, thus improving measurement stability.

[0084] S803: The demodulated signal is output as the measured amplitude of the object under test.

[0085] In one possible implementation, the measured amplitude is calculated as follows:

[0086]

[0087] Where S(t) represents the demodulated signal, S0 represents the DC bias of the demodulated signal, S1 represents the AC amplitude of the demodulated signal, C represents the phase modulation depth related to the drive signal strength of the balanced detector, and ω c Let d(t) represent the carrier frequency of the demodulator, d(t) represent the measured amplitude of the object under test, and k represent the wavenumber of the mixing light, where k = 2π / λ, and λ represents the wavelength of the mixing light. This indicates the initial phase caused by the initial optical path difference between the measuring arm and the reference arm.

[0088] Specifically, the demodulator employs the PGC (Phase Generate Carrier) algorithm, which greatly improves the accuracy and anti-interference capability of signal demodulation. By precisely controlling and extracting the phase of the carrier signal, the PGC algorithm can effectively separate the phase information in the signal, reduce the impact of noise on the measurement results, and enable the system to maintain stable performance in complex environments, thereby improving the overall measurement reliability and efficiency of the system.

[0089] In one possible implementation, S802 further includes:

[0090] The demodulated electrical signal is filtered by a low-pass filter to remove high-frequency noise and obtain the measured amplitude of the object under test.

[0091] It should be noted that by demodulating the electrical signal through a demodulator, the measured amplitude information of the object under test can be effectively extracted. The demodulator can separate the phase and amplitude information in the interference signal and convert it into a numerical output corresponding to the vibration of the object. Through this demodulation process, the system can accurately identify minute vibration amplitudes, ensuring high resolution and accuracy of the measurement data. The demodulated signal is clearer and more readable, which is convenient for subsequent analysis and processing. At the same time, it effectively filters out interference noise and improves the reliability and stability of the measurement.

[0092] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

[0093] The following points need to be explained:

[0094] (1) The accompanying drawings of this utility model embodiment only involve the structure involved in this utility model embodiment. Other structures can refer to the general design.

[0095] (2) For clarity, the thickness of layers or regions is enlarged or reduced in the drawings used to describe embodiments of the present invention, i.e., these drawings are not drawn to actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "below" another element, the element may be "directly" located "on" or "below" the other element or there may be intermediate elements.

[0096] (3) Where there is no conflict, the embodiments of this utility model and the features in the embodiments can be combined with each other to obtain new embodiments.

[0097] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. The protection scope of this utility model shall be determined by the protection scope of the claims.

Claims

1. A Michelson interferometric vibration measurement system, characterized in that, include: Laser, first beam splitter, balanced detector, reflector, movable reflector, stage, second beam splitter, photodetector, camera, light intensity sensor, beam expander, display screen and demodulator; The laser beam emitted by the laser is split into a reference beam and a measurement beam by the first beam splitter; The reference light is phase-modulated by the balanced detector, and the phase-modulated reference light is then incident into the reflector to obtain the first reflected light returned by the reflector. The measuring light passes through the movable reflector and enters the object to be measured on the platform, and the second reflected light is obtained by the movable reflector. The angle of the movable reflector is adjustable; The first reflected light and the second reflected light form a mixed light in the first beam splitter; The mixed light is incident on the second beam splitter to obtain the first mixed light and the second mixed light; Both the camera and the light intensity sensor are connected to the display screen, wherein the camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed light, respectively; The second mixed light is incident on the photodetector, and an electrical signal corresponding to the second mixed light is output. The photodetector is connected to the demodulator, and the measured amplitude of the object under test is determined by combining the light spot and light intensity value displayed on the display screen.

2. The Michelson interferometric vibration measurement system according to claim 1, characterized in that, The light intensity sensor is connected to the display screen via a Bluetooth module.

3. The Michelson interferometric vibration measurement system according to claim 1, characterized in that, The movable reflector includes a parallel adjustment knob and a vertical adjustment knob.

4. The Michelson interferometric vibration measurement system according to claim 3, characterized in that, Both the parallel adjustment knob and the vertical adjustment knob include a coarse adjustment knob and a fine adjustment knob.

5. The Michelson interferometric vibration measurement system according to claim 4, characterized in that, By adjusting the coarse and fine adjustment knobs of the vertical adjustment knob, the movable reflector can be rotated around the central axis perpendicular to the midpoint of the side of the movable reflector, thereby changing the vertical angle of the movable reflector. By adjusting the coarse and fine adjustment knobs of the parallel adjustment knob, the movable reflector can be rotated around a central axis parallel to the edge of the movable reflector, thereby changing the tilt angle of the reflector.

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