Monitoring device based on double-Z-axis six-axis linear rail high-precision motion pedestal

Abstract

The utility model belongs to the technical field of pedestal monitoring application, and particularly discloses a monitoring device based on a double-Z-axis six-axis linear rail high-precision motion pedestal. Comprising a marble base, an n-shaped beam, a PLC with a display screen, a first circular fixing seat, a first screw groove, a base vibration sensor, an offset detection part mounting seat, a reflection part mounting seat, an offset signal transmitting end, an offset signal reflection end and the like. Wherein the base vibration sensor and the offset signal transmitting end are respectively connected with the PLC with the display screen. The beneficial effects of the utility model are that real-time vibration detection of a high-precision motion pedestal and an n-shaped beam in work can be realized, whole-course operation can be monitored, and intelligent production management use can be satisfied; the horizontal position deviation detection can be carried out on the marble abutment after long-term vibration through the deviation signal transmitting end and the deviation signal reflecting end, management is convenient, potential safety hazards are avoided, meanwhile, warning information is sent out in time through the early warning component, and the timeliness of management and control is guaranteed.

Description

Technical Field

[0001] This utility model belongs to the field of platform monitoring application technology, specifically relating to a monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion platform. Background Technology

[0002] Abnormal vibration is usually a precursor to equipment failure. Timely detection and appropriate measures can effectively avoid losses caused by sudden failures.

[0003] With the increasing demands for equipment management in the chemical industry, the application of online vibration monitoring technology has become an essential tool for improving equipment management, ensuring production safety, and increasing production efficiency.

[0004] By monitoring vibrations online in real time and employing preventative maintenance, the lifespan of equipment can be significantly extended, its stability improved, and unplanned downtime reduced, thereby lowering overall operating costs. This also ensures the quality of processed or inspected products.

[0005] The six-axis precision motion stage meets the needs of customized product work requiring high speed, high acceleration, and high precision. However, monitoring the stage itself is also an issue during operation. When used for tasks such as glass sheet inspection, glass cutting, laser processing, screen inspection, CCD imaging, and wafer inspection, improper vibration can affect the quality of normal work, and long-term vibration can also cause the stage to shift, posing certain safety hazards.

[0006] Therefore, based on the above problems, this utility model provides a monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage. Utility Model Content

[0007] Purpose of the utility model: The purpose of this utility model is to provide a monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage, and to solve the problem of vibration and offset monitoring when the six-axis precision motion stage is working.

[0008] Technical Solution: The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion platform provided by this utility model includes a marble base, a set of transition plates, an n-shaped beam, and a PLC controller with a display screen. The four corner ends of the bottom surface of the marble base are symmetrically provided with first circular fixing seats. Each of the first circular fixing seats has a first screw groove on one side. A base vibration sensor is mounted on each of the first circular fixing seats via the screw grooves. An offset detection unit mounting seat is provided on the symmetrical centerline end of the bottom surface of the marble base. A reflector mounting seat is fixed vertically downwards on the marble base. The offset detection unit mounting seat and the reflector mounting seat are respectively equipped with a matching offset signal transmitter and an offset signal reflector. The base vibration sensor and the offset signal transmitter are connected to the PLC controller with a display screen.

[0009] The monitoring device based on the dual Z-axis 6-axis linear guide high-precision motion stage of this technical solution further includes a second circular fixed seat set on the n-shaped beam, a second threaded groove set in one side of the second circular fixed seat, and an n-shaped beam vibration sensor connected to the second circular fixed seat through the second threaded groove; wherein, the n-shaped beam vibration sensor is connected to a PLC controller with a display screen.

[0010] The monitoring device based on the dual Z-axis 6-axis linear guide high-precision motion stage of this technical solution also includes an early warning component connected to a PLC controller with a display screen.

[0011] In this technical solution, the offset signal transmitting end and the offset signal reflecting end are laser signal transmitting end and laser signal reflecting end used in conjunction with each other, and ultrasonic signal transmitting end and ultrasonic signal reflecting end.

[0012] Compared with the existing technology, the beneficial effects of the monitoring device based on the dual Z-axis 6-axis linear guide high-precision motion stage of this utility model are as follows: 1. It can meet the real-time vibration detection problem of high-precision motion stage and n-shaped beam during operation, so that it can be monitored throughout the operation and meet the requirements of intelligent production management; 2. The offset signal transmitting end and offset signal reflecting end can detect the horizontal position offset of the marble base after long-term vibration, which is convenient for management and can prevent the occurrence of safety hazards. At the same time, the early warning component can issue warning information in a timely manner to ensure the timeliness and effectiveness of control. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage of this utility model.

[0015] The components in the diagram are numbered as follows: 100-Marble base, 101-Transition plate, 102-n-shaped beam, 103-First circular fixing seat, 104-First screw groove, 105-Base vibration sensor, 106-Offset detection unit mounting seat, 107-Offset signal transmitter, 108-Reflector mounting seat, 109-Offset signal reflector, 110-Second circular fixing seat, 111-Second screw groove, 112-n-shaped beam vibration sensor, 113-PLC controller with display screen, 114-Early warning component. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0017] In the description of this utility model, it should be noted that the terms "top," "bottom," "one side," "the other side," "front," "back," "middle part," "inner," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0018] Example 1

[0019] like Figure 1 The monitoring device shown is based on a dual Z-axis 6-axis linear guide high-precision motion stage, including a marble base 100, a set of transition plates 101, an n-shaped beam 102, and a PLC controller 113 with a display screen (such as H0U series, Vision560, Siemens SMART700).

[0020] The marble base 100 has first circular fixing seats 103 symmetrically arranged at the four corners of its bottom surface.

[0021] The first circular fixing base 103 has a first screw groove 104 provided in one side.

[0022] A base vibration sensor 105 (such as SW-420) is mounted on the first circular fixed base 103 via screw grooves 104.

[0023] An offset detection unit mounting base 106 is provided on the symmetrical centerline end face of the bottom of the marble base 100.

[0024] A reflector mounting base 108 is fixed vertically downward on the marble base 100.

[0025] The offset detection unit mounting base 106 and the reflector mounting base 108 are respectively equipped with a matching offset signal transmitter 107 and an offset signal reflector 109.

[0026] Among them, the base vibration sensor 105 and the offset signal transmitter 107 are respectively connected to the PLC controller 113 with display screen.

[0027] The working principle is as follows: the base vibration sensor 105 is used to detect the vibration parameter information of the marble base 100 when it is working; the offset signal transmitter 107 and the offset signal reflector 109 are used to detect the vibration offset parameter information of the marble base 100 when it is working; the PLC controller 113 with display screen receives the parameter information fed back by the base vibration sensor 105 and the offset signal transmitter 107 respectively, and performs corresponding comparison, storage and output processing.

[0028] The PLC controller 113 with display screen presets the vibration parameter range values ​​for the marble base 100 during operation. When the vibration parameter values ​​fed back by each part of the base vibration sensor 105 are within the preset values ​​of the PLC controller 113 with display screen, it meets the working vibration standard; when the vibration parameter values ​​fed back by each part of the base vibration sensor 105 exceed the preset values ​​of the PLC controller 113 with display screen, it does not meet the working vibration standard, and the PLC controller 113 with display screen will issue a warning, such as displaying the warning text "Marble base vibration exceeds".

[0029] The PLC controller 113 with display screen presets the vibration offset parameter range value of the marble base 100 during operation. When the marble base 100 experiences a large offset after long-term use (posing a safety hazard), the PLC controller 113 with display screen will issue a warning, such as displaying the warning text "Marble base offset exceeds".

[0030] Example 2

[0031] Based on Embodiment 1, the monitoring device based on the dual Z-axis 6-axis linear high-precision motion stage also includes a second circular fixed seat 110 set on the n-shaped beam 102, a second threaded groove 111 set in one side of the second circular fixed seat 110, and an n-shaped beam vibration sensor 112 (such as SW-420) connected to the second circular fixed seat 110 through the second threaded groove 111.

[0032] The n-shaped beam vibration sensor 112 is connected to the PLC controller 113 with a display screen.

[0033] The working principle is as follows: the n-shaped beam vibration sensor 112 is used to detect the vibration parameter information of the n-shaped beam 102 when it is working, and feeds it back to the PLC controller 113 with display screen.

[0034] The PLC controller 113 with display screen presets the vibration parameter range values ​​for the n-shaped beam 102 during operation. When the vibration parameter value fed back by the n-shaped beam vibration sensor 112 is within the preset value of the PLC controller 113 with display screen, it meets the working vibration standard; when the vibration parameter value fed back by the n-shaped beam vibration sensor 112 exceeds the preset value of the PLC controller 113 with display screen, it does not meet the working vibration standard, and the PLC controller 113 with display screen will issue a warning, such as displaying the warning text "n-shaped beam vibration exceeds".

[0035] Example 3

[0036] Based on Embodiment 1 or Embodiment 2, the monitoring device based on the dual Z-axis 6-axis linear guide high-precision motion stage also includes an early warning component 114 connected to a PLC controller 113 with a display screen.

[0037] Among them, the warning component 114 is a strobe light (such as ES80), and the PLC controller 113 provides warnings through the warning component 114. This can be combined with the warning from the PLC controller 113 with the display screen to complete dual warning information, which facilitates timely and effective control by the controller.

[0038] In addition, preferably, the offset signal transmitting end 107 and the offset signal reflecting end 109 are laser signal transmitting end and laser signal reflecting end used in conjunction (such as CMOS type miniature laser displacement sensor HG-C series HG-C1400), and ultrasonic signal transmitting end and ultrasonic signal reflecting end (PU30 series), so as to realize accurate and stable vibration horizontal offset position monitoring of marble base 100.

[0039] The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage in this structure includes conventional components such as the base vibration sensor 105, the offset signal transmitter 107, the offset signal reflector 109, the n-shaped beam vibration sensor 112, the PLC controller with display screen 113, and the early warning component 114. These components will not be described in detail in this application.

[0040] It should be noted that, in this document, terms such as "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0041] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage, comprising a marble base (100), a set of transition plates (101), an n-shaped beam (102), and a PLC controller (113) with a display screen, characterized in that: The marble base (100) has first circular fixing seats (103) symmetrically arranged at the four corners of its bottom surface. The first circular fixing base (103) has a first screw groove (104) provided in one side. The first circular fixed base (103) is equipped with a base vibration sensor (105) via a screw groove (104). The marble base (100) has an offset detection unit mounting base (106) on the symmetrical center line end face of its bottom surface. A reflector mounting base (108) is fixed vertically downward on the marble base (100). The offset detection unit mounting base (106) and the reflector mounting base (108) are respectively equipped with a matching offset signal transmitter (107) and an offset signal reflector (109); Among them, the base vibration sensor (105) and the offset signal transmitter (107) are respectively connected to the PLC controller (113) with display screen.

2. The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage according to claim 1, characterized in that: The monitoring device based on the dual Z-axis 6-axis linear high-precision motion stage also includes a second circular fixed seat (110) set on the n-shaped beam (102), a second threaded groove (111) set in one side of the second circular fixed seat (110), and an n-shaped beam vibration sensor (112) connected to the second circular fixed seat (110) through the second threaded groove (111). The n-shaped beam vibration sensor (112) is connected to the PLC controller (113) with a display screen.

3. The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage according to claim 1 or 2, characterized in that: The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage also includes an early warning component (114) connected to a PLC controller (113) with a display screen.

4. The monitoring device based on a dual Z-axis 6-axis linear guide high-precision motion stage according to claim 1, characterized in that: The offset signal transmitting end (107) and offset signal reflecting end (109) are laser signal transmitting end and laser signal reflecting end used together, and ultrasonic signal transmitting end and ultrasonic signal reflecting end.

Images