Quartz boat transferring device with fragment removing function

Abstract

The utility model discloses a quartz boat transferring device with a fragment removing function, which comprises an X-direction moving module and a carrying assembly driven by the X-direction moving module to move along the X direction, the carrying assembly is used for positioning a plurality of quartz boats, the quartz boats are used for inserting a plurality of silicon wafers side by side, and the X direction is located in a horizontal plane; the supporting assembly comprises a supporting plate, a plurality of positioning mechanisms located on the supporting plate and a plurality of air blowing pipes located on the two sides of the positioning mechanisms in the Y direction, the portion, below the positioning mechanisms, of the supporting plate is hollowed out, the air blowing pipes are provided with a plurality of air blowing holes with the air blowing direction facing silicon wafer gaps, and the Y direction is located in the horizontal plane and perpendicular to the X direction. According to the utility model, in the translation process of the quartz boat, the air blowing pipe can be used for blowing air to gaps of silicon wafers, so that fragments in the silicon wafers are blown away in the moving process and then fall down from the hollow positions of the supporting plates, the cleaning time is not increased, the surface of the silicon wafers is ensured to be clean in the subsequent treatment, and the product quality is ensured.

Description

Technical Field

[0001] This utility model belongs to the field of conveying technology, and in particular relates to a quartz boat transfer device with a fragment removal function. Background Technology

[0002] In the production of silicon solar cells, diffusion is a critical process that requires inserting silicon wafers into a quartz boat. Many silicon wafers are inserted parallel to each other in the quartz boat, and during the feeding process into the equipment, some fragments may adhere to the wafers, which is detrimental to the quality of subsequent processing.

[0003] In the prior art, Chinese patent CN215856457U discloses an air blowing device for automated buffering in a diffusion furnace. It includes a base positioned on one side of a quartz boat within the automated buffering area of ​​the diffusion furnace. An air knife support reciprocates along the length of the quartz boat above the base. A linear drive mechanism on the base drives the air knife support to reciprocate along the length of the quartz boat. Multiple air knife assemblies are evenly distributed on the air knife support to blow air onto the solar cells inside the quartz boat. Each air knife assembly includes an air pipe inclined above the solar cells inside the quartz boat, with air slits on the air pipe to achieve surface blowing of the solar cells inside the quartz boat. This effectively separates the tightly bonded solar cells after diffusion, reducing the breakage rate when the automated diffusion equipment's suction cups pick up the cells. However, this device requires a separate operating station, increasing the required space and involving loading and unloading issues, increasing downtime and affecting operational efficiency.

[0004] Therefore, it is necessary to improve the structure to solve the above-mentioned technical problems. Utility Model Content

[0005] The main purpose of this invention is to provide a quartz boat transfer device with a debris removal function, which directly removes debris by blowing air during the transfer of the quartz boat without occupying extra space.

[0006] This utility model achieves the above-mentioned objective through the following technical solution: a quartz boat transfer device with a debris removal function, comprising an X-axis moving module and a support assembly driven by the X-axis moving module to move along the X-axis. The support assembly is used to position several quartz boats, and the quartz boats are used to insert multiple silicon wafers side by side. The X-axis is located in a horizontal plane. The support assembly includes a support plate, several sets of positioning mechanisms located on the support plate, and several air blowing pipes located on both sides of the positioning mechanisms in the Y-axis direction. The support plate is hollowed out in the lower part of the positioning mechanisms. The air blowing pipes are provided with multiple air blowing holes with the air blowing direction facing the gaps between the silicon wafers. The Y-axis is located in a horizontal plane and perpendicular to the X-axis.

[0007] Specifically, each positioning mechanism includes two X-axis reference blocks, one X-axis push cylinder, one X-axis pressure bar, two Y-axis reference blocks, two Y-axis push cylinders, and two Y-axis pressure blocks. The X-axis push cylinders drive the X-axis pressure bars to move along the X-axis. The X-axis pressure bars have two contact points, each corresponding to the position of the two X-axis reference blocks. Each Y-axis push cylinder drives one Y-axis pressure block, and the positions of the Y-axis pressure blocks correspond one-to-one with the positions of the Y-axis reference blocks.

[0008] Furthermore, it also includes two X-direction limiting blocks and two Y-direction limiting blocks, with the X-direction limiting blocks located below the contact point and the Y-direction limiting blocks located below the Y-direction pressing block.

[0009] Specifically, the positioning mechanism is provided with an upper sensor and a lower sensor on its outer side. The height of the upper sensor matches the highest point of the quartz boat, and the height of the lower sensor matches the highest point of the quartz boat.

[0010] Furthermore, all positioning mechanisms are arranged side by side along the X direction, and the detection paths of the upper sensor and the lower sensor are along the XZ plane and pass through all positioning mechanisms.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] This invention utilizes an air blowing tube to blow air into the gaps of the silicon wafer during the translation of the quartz boat, thereby blowing away fragments from the silicon wafer during the movement and causing them to fall from the hollowed-out position of the support plate. This does not increase cleaning time, ensures that the silicon wafer surface is clean in subsequent processing, and guarantees product quality. Attached Figure Description

[0013] Figure 1 This is a perspective view of the quartz boat transfer device in this embodiment in its working state;

[0014] Figure 2 This is a front view of the supporting components under load of two quartz boats.

[0015] Figure 3 A three-dimensional view of the supporting components under load of a quartz boat;

[0016] Figure 4 for Figure 3 A magnified view of a portion of position A in the middle.

[0017] The numbers in the image represent:

[0018] 1-Quartz boat transfer device,

[0019] 11-X-direction moving module, 12-carrying component, 121-support plate, 122-positioning mechanism, 1221-X-direction reference block, 1222-X-direction pushing cylinder, 1223-X-direction pressure bar, 1224-Y-direction reference block, 1225-Y-direction pushing cylinder, 1226-Y-direction pressure block, 1227-X-direction limiting block, 1228-Y-direction limiting block, 123-air blowing pipe, 124-upper sensor, 125-lower sensor;

[0020] 2-quartz boat;

[0021] 3-Silicon wafer. Detailed Implementation

[0022] Example:

[0023] like Figure 1 As shown, this utility model is a quartz boat transfer device 1 with a debris removal function, including an X-axis moving module 11 and a support assembly 12 driven by the X-axis moving module 11 to move along the X-axis. The support assembly 12 is used to position several quartz boats 2, and the quartz boats 2 are used to insert multiple silicon wafers 3 side by side, with the X-axis located in the horizontal plane.

[0024] One end of the X-axis moving module 11 is located outside the process equipment, and the other end is located inside the process equipment. The carrier component 12 serves as the carrier for the quartz boat 2, enabling the quartz boat 2 to enter and exit the process equipment. The quartz boat 2 originally contains many silicon wafers 3, which enter the process equipment along with the quartz boat 2, and then the silicon wafers 3 are removed one by one inside the process equipment. Because the interior of the process equipment is very long, the X-axis moving module 11 must also have a sufficiently long distance.

[0025] like Figure 2 and Figure 3 As shown, the support assembly 12 includes a support plate 121, several sets of positioning mechanisms 122 located on the support plate 121, several air blowing pipes 123 located on both sides of the positioning mechanism 122 in the Y direction, and an upper sensor 124 and a lower sensor 125 located outside the positioning mechanism 122. The support plate 121 is hollowed out in the lower part of the positioning mechanism 122. The air blowing pipes 123 are provided with multiple air blowing holes with the air blowing direction facing the gap of the silicon wafer 3. All positioning mechanisms 122 are arranged side by side along the X direction. The detection path of the upper sensor 124 and the detection path of the lower sensor 125 are along the XZ plane and pass through all positioning mechanisms 122. The height of the upper sensor 124 matches the highest point of the quartz boat 2, and the height of the lower sensor 125 matches the lowest point of the quartz boat 2. The Y direction is located in the horizontal plane and is perpendicular to the X direction, and the Z direction is the vertical direction.

[0026] This invention utilizes an air blowing pipe 123 to blow air into the gaps of the silicon wafer 3 during the translation of the quartz boat 2. This blows away fragments from the silicon wafer 3 during movement, causing them to fall from the hollowed-out position of the support plate 121. This process does not increase cleaning time, ensuring the surface of the silicon wafer 3 remains clean during subsequent processing and guaranteeing product quality. The support plate 121 supports the bottom of the quartz boat 2, the positioning mechanism 122 helps fix the quartz boat 2 in position, and the air blowing pipe 123 blows air into the gaps of the silicon wafer 3. The upper sensor 124 and the lower sensor 125 detect whether the quartz boat 2 is properly positioned. The more positioning mechanisms 122 there are, the more quartz boats 2 can be supported. Because multiple quartz boats 2 are arranged side by side along the X-direction with the positioning mechanism 122, the detection paths of the upper sensor 124 and the lower sensor 125 will pass over all the positioning mechanisms 122. As long as any quartz boat 2 is in place, it can be detected, and then it can be determined when the device can begin the next step.

[0027] like Figure 3 As shown, each positioning mechanism 122 includes two X-axis reference blocks 1221, one X-axis push cylinder 1222, one X-axis pressure bar 1223, two Y-axis reference blocks 1224, two Y-axis push cylinders 1225, two Y-axis pressure blocks 1226, two X-axis limiting blocks 1227, and two Y-axis limiting blocks 1228. The X-axis push cylinder 1222 drives the X-axis pressure bar 1223 to move along the X-axis. The X-axis pressure bar 1223 has two contact points, each corresponding to the position of the two X-axis reference blocks 1221. Each Y-axis push cylinder 1225 drives one Y-axis pressure block 1226. The position of the Y-axis pressure block 1226 corresponds one-to-one with that of the Y-axis reference block 1224. The X-axis limiting block 1227 is located below the contact point, and the Y-axis limiting block 1228 is located below the Y-axis pressure block 1226.

[0028] The X-direction limiting block 1227, X-direction reference block 1221, Y-direction limiting block 1228, and Y-direction reference block 1224 surround and form the placement area for the quartz boat 2. The X-direction limiting block 1227 and X-direction reference block 1221 are in relative positions, with a distance between them slightly greater than the length of the quartz boat 2. Similarly, the Y-direction limiting block 1228 and Y-direction reference block 1224 are in relative positions, with a distance between them slightly greater than the width of the quartz boat 2. Therefore, before the quartz boat 2 is clamped, the X-direction limiting block 1227 and Y-direction limiting block 1228 can help limit the initial position of the quartz boat 2. The quartz boat 2 is placed into the placement area from top to bottom. The X-direction pressure strip 1223 cooperates with the X-direction reference block 1221 to clamp the two sides of the long side of the quartz boat 2, and the Y-direction pressure block 1226 cooperates with the Y-direction reference block 1224 to clamp the two sides of the wide side of the quartz boat 2. The X-axis push cylinder 1222 in one positioning mechanism is staggered from the two X-axis limit blocks 1227 in the adjacent positioning mechanism. This allows for a shorter support plate 121 length compared to using two X-axis push cylinders to control one X-axis pressure block.

[0029] The working process of this quartz boat transfer device 1 is as follows: The support assembly 12 stops at one end of the X-axis moving module 11 located outside the process equipment. The quartz boat 2 carrying the silicon wafer 3 is placed from top to bottom into the middle of the positioning mechanism 122. At this time, both the X-axis pushing cylinder 1222 and the Y-axis pushing cylinder 1225 are in the retracted state. The quartz boat 2 is placed within the placement area enclosed by two X-axis limiting blocks 1227, two X-axis reference blocks 1221, two Y-axis limiting blocks 1228, and two Y-axis reference blocks 1224. After the quartz boat 2 is in place, it will be simultaneously activated by the upper sensor 124 and the lower sensor 125. Upon sensing the movement, both the X-axis pushing cylinder 1222 and the Y-axis pushing cylinder 1225 are extended, clamping and fixing the quartz boat 2 above the support plate 121. After all the quartz boats 2 are positioned, the X-axis moving module 11 drives the carrier assembly 12 to move into the process equipment. During this process, the air blowing pipe 123 blows air into the gaps of the silicon wafer 3, causing the fragments in the silicon wafer 3 to be blown off and then discharged through the hollowed-out parts of the support plate 121. This also serves as a pre-segmentation function for the silicon wafer 3, preventing adjacent silicon wafers 3 from sticking together and becoming unable to separate during the separation of individual wafers.

[0030] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A quartz boat transfer device with debris removal function, characterized in that: The device includes an X-axis moving module and a support assembly driven by the X-axis moving module to move along the X-axis. The support assembly is used to position several quartz boats, which are used to insert multiple silicon wafers side by side. The X-axis is located in a horizontal plane. The support assembly includes a support plate, several sets of positioning mechanisms on the support plate, and several air blowing pipes on both sides of the positioning mechanisms in the Y-axis direction. The support plate is hollowed out in the lower part of the positioning mechanisms. The air blowing pipes are provided with multiple air blowing holes with the air blowing direction facing the gaps between the silicon wafers. The Y-axis is located in a horizontal plane and perpendicular to the X-axis.

2. The quartz boat transfer device with debris removal function as described in claim 1, characterized in that: Each positioning mechanism includes two X-axis reference blocks, one X-axis push cylinder, one X-axis pressure bar, two Y-axis reference blocks, two Y-axis push cylinders, and two Y-axis pressure blocks. The X-axis push cylinders drive the X-axis pressure bars to move along the X-axis. The X-axis pressure bars have two contact points, each corresponding to the position of the two X-axis reference blocks. Each Y-axis push cylinder drives one Y-axis pressure block, and the position of the Y-axis pressure block corresponds one-to-one with that of the Y-axis reference blocks.

3. The quartz boat transfer device with debris removal function as described in claim 2, characterized in that: It also includes two X-direction limiting blocks and two Y-direction limiting blocks, with the X-direction limiting blocks located below the contact point and the Y-direction limiting blocks located below the Y-direction pressing block.

4. The quartz boat transfer device with debris removal function as described in claim 1, characterized in that: The positioning mechanism is equipped with an upper sensor and a lower sensor on its outer side. The height of the upper sensor matches the highest point of the quartz boat, and the height of the lower sensor matches the highest point of the quartz boat.

5. The quartz boat transfer device with debris removal function as described in claim 4, characterized in that: All positioning mechanisms are arranged side by side along the X direction. The detection paths of the upper sensor and the lower sensor are along the XZ plane and pass through all positioning mechanisms. The Z direction is vertical.

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