Flower basket self-circulation material supplying and receiving equipment

Abstract

The utility model provides flower basket self-circulation material supplying and receiving equipment, and relates to the technical field of semiconductor processing equipment. The flower basket self-circulation material supplying and receiving equipment comprises a first lifting assembly, a second lifting assembly, a transverse moving module, a first lateral moving module and a second conveying line. The second lifting assembly and the first lifting assembly are arranged at intervals in the first direction. The transverse moving module is arranged on the side, located in the second direction, of the first lifting assembly and the second lifting assembly and can drive the flower basket to move in the first direction and the second direction. The first lateral moving module is aligned with the first lifting assembly in the first direction and arranged on the side, away from the first lifting assembly, of the transverse moving module in the second direction. The first conveying line is arranged on the side, close to the second lifting assembly, of the first lateral moving module. The flower basket self-circulation material supplying and receiving equipment can improve the transfer efficiency of the flower basket.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and more specifically, to a flower basket self-circulating feeding and receiving device. Background Art

[0002] In the processing of solar cells, baskets are frequently used for storing cells. A basket-based circulating feeding device, used in conjunction with the processing equipment, is typically installed during cell processing, and combined with the first side-shifting module GV trolley to achieve automated production.

[0003] The existing sequential feeding and receiving device for flower baskets has an unreasonable structural design. The transverse module has to handle both the transfer of flower baskets and the transfer of flower baskets containing unprocessed silicon wafers on top and those containing processed silicon wafers on the bottom. This results in low transfer efficiency of the transverse module and affects the overall working efficiency of the equipment. Utility Model Content

[0004] The purpose of this invention is to provide a self-circulating material supply and collection device for flower baskets, which can improve the efficiency of flower basket transportation.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] This application provides a self-circulating flower basket feeding and receiving device, comprising:

[0007] The first lifting component is configured to fix the basket and drive the basket to move up and down in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment;

[0008] The second lifting component is spaced apart from the first lifting component in the first direction and is configured to fix the flower basket and drive the flower basket to move up and down in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty flower basket in sequence.

[0009] A lateral movement module is disposed on one side of the first lifting component and the second lifting component located in the second direction, and can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular;

[0010] The first side-shifting module is aligned with the first lifting component in a first direction and is disposed on the side of the transverse shifting module away from the first lifting component in a second direction. The first side-shifting module can cooperate with the transverse shifting module or the first lifting component to transport the flower basket in the second direction.

[0011] A first conveyor line is located on the side of the first lateral shift module near the second lifting component. The first conveyor line is used to convey a basket containing silicon wafers to be processed to the lateral shift module.

[0012] In an optional embodiment, the flower basket self-circulating feeding and receiving device further includes a second conveyor line and a second side-shifting module;

[0013] The second side-shifting module is aligned with the second lifting component in the first direction and is disposed on the side of the lateral shifting module away from the second lifting component in the second direction. The second side-shifting module can cooperate with the lateral shifting module or the second lifting component to transport the flower basket in the second direction.

[0014] The second conveyor line is located on the side of the second lateral shift module near the first lifting component. The second conveyor line is used to transfer the basket containing the processed silicon wafers transferred by the lateral shift module outward.

[0015] In an optional embodiment, the first side-shifting module includes a first fixing plate, a first transmission component, and a first driving component;

[0016] The first fixing plate is disposed in the second direction on the side of the transverse module away from the first lifting component;

[0017] The first transmission component is disposed on the first fixed plate and is correspondingly disposed with the first lifting component in the first direction. The first transmission component can drive the flower basket to move in the second direction.

[0018] The first driving component is disposed on the first fixed plate and is connected to the first transmission component in a driving manner;

[0019] The first driving component can drive the first transmission component to move in the second direction toward the first lifting component, so that the first transmission component passes over the lateral module and cooperates with the first lifting component to transfer the flower basket;

[0020] The first driving component can also drive the first transmission component to move in the second direction away from the first lifting component, so that the first transmission component cooperates with the transverse module to transfer the flower basket.

[0021] In an optional embodiment, the second side-shifting module includes a second fixing plate, a second transmission component, and a second drive component;

[0022] The second fixing plate is disposed in the second direction on the side of the transverse module away from the second lifting component;

[0023] The second transmission component is disposed on the second fixed plate and is correspondingly disposed with the second lifting component in the first direction. The second transmission component can drive the flower basket to move in the second direction.

[0024] The second drive component is disposed on the second fixed plate and is connected to the second transmission component in a driving manner;

[0025] The second drive component can drive the second transmission component to move in the second direction toward the direction of the second lifting component, so that the second transmission component passes over the lateral module and cooperates with the second lifting component to transfer the flower basket;

[0026] The second drive component can also drive the second transmission component to move away from the second lifting component in the second direction, so that the second transmission component cooperates with the transverse module to transfer the flower basket.

[0027] In an optional embodiment, the transverse module includes a third fixing plate, a third transmission component, and a third drive component;

[0028] The third fixing plate is disposed between the second lifting assembly and the second fixing plate and the first fixing plate in the second direction, and the third fixing plate extends from the first lifting assembly to the second lifting assembly in the first direction;

[0029] The third transmission component is disposed on the third fixed plate, and the third drive component is disposed on the third fixed plate and is connected to the third transmission component in a driving manner.

[0030] The third driving component can drive the third transmission component to reciprocate in the first direction, and the third transmission component can drive the flower basket to move in the second direction;

[0031] The bearing surface of the third transmission component is on the same plane as the bearing surface of the second transmission component, the bearing surface of the first transmission component, the bearing surface of the second conveyor line, and the bearing surface of the first conveyor line.

[0032] Both the first transmission component and the second transmission component can pass over the third fixed plate when moving towards the lateral module.

[0033] In an optional embodiment, the first driving component includes a first slide rail, a first slider, and a first driving motor;

[0034] The first slide rail is fixedly installed on the first fixed plate, and the first slider is movably installed on the first slide rail;

[0035] The first drive motor is mounted on the first slide rail and is connected to the first slider in a transmission manner. The first drive motor can drive the first slider to reciprocate in the second direction.

[0036] The first transmission component is mounted on the first slider.

[0037] In an optional embodiment, the first transmission component includes a first support member and a first belt module. The first support member is connected to the first slider, the first belt module is disposed above the first support member, and a first clearance space is formed on the side of the first support member near the transverse module.

[0038] In an optional embodiment, the second drive component includes a second slide rail, a second slider, and a second drive motor;

[0039] The second slide rail is fixedly mounted on the second fixed plate, and the second slider is movably mounted on the second slide rail;

[0040] The second drive motor is mounted on the second slide rail and is connected to the second slider in a transmission manner. The second drive motor can drive the second slider to reciprocate in the second direction.

[0041] The second transmission component is mounted on the second slider.

[0042] In an optional embodiment, the second transmission component includes a second support member and a second belt module. The second support member is connected to the second slider, the second belt module is disposed above the second support member, and the side of the second support member near the transverse module forms a second clearance space.

[0043] In an optional embodiment, the first lifting component and the second lifting component are arranged opposite to each other.

[0044] The beneficial effects of the self-circulating flower basket feeding and receiving device provided in this embodiment of the utility model include:

[0045] This application positions the first side-shifting module on the side of the horizontal shifting module away from the first lifting assembly, and aligns the first side-shifting module with the first lifting assembly. The horizontal shifting module transfers a basket containing silicon wafers to be processed to a position aligned with the first lifting assembly in a first direction. Simultaneously, the horizontal shifting module, the first side-shifting module, and the first lifting assembly move in a second direction, transferring the basket. This allows the empty basket on the first lifting assembly to be transferred to the horizontal shifting module, while the first side-shifting module and the horizontal shifting module work together to transfer the basket containing the silicon wafers to be processed from the horizontal shifting module to the first horizontal shifting module. Afterward, the horizontal shifting module only needs to move in the first direction towards the second lifting assembly with the empty basket to transfer the empty basket to the second lifting assembly. At the same time, the first side-shifting module, working with the first lifting assembly, can transfer the basket containing the silicon wafers to be processed from the first side-shifting module to the first lifting assembly for releasing the silicon wafers. The entire system, through the cooperation of the first side-shifting module, the transverse shifting module, and the first lifting component, allows the transfer of empty flower baskets and the transfer of flower baskets containing silicon wafers to be processed to the first lifting component to be carried out simultaneously, thereby improving the overall working efficiency of the flower basket self-circulating material receiving equipment. Attached Figure Description

[0046] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 This is a schematic diagram of the structure of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0048] Figure 2 This is a schematic diagram of the structure of the first lifting component of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0049] Figure 3 This is a schematic diagram of the structure of the first side-shifting module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0050] Figure 4 This is a schematic diagram of the second side-shifting module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0051] Figure 5 This is a structural schematic diagram of the second conveying component of the second side-shifting module of the self-circulating flower basket feeding and receiving device provided in this embodiment when the second conveying component is extended.

[0052] Figure 6 This is a schematic diagram of the transverse movement module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0053] Figure 7 This is a schematic diagram of the first and second transmission modules of the self-circulating flower basket feeding and receiving device provided in this embodiment in the retracted state.

[0054] Figure 8 This is a schematic diagram of the structure of the first and second transmission modules of the self-circulating flower basket feeding and receiving device provided in this embodiment in the extended state.

[0055] Icons: 100 - Self-circulating flower basket feeding and receiving device; 110 - First lifting assembly; 111 - First guide column; 112 - First flower basket fixing component; 113 - First driving component; 114 - First mounting plate; 115 - First base plate; 116 - First top plate; 117 - First conveyor belt; 118 - First clamping component; 120 - Second lifting assembly; 121 - Second guide column; 122 - Second flower basket fixing component; 123 - Second driving component; 124 - Second mounting plate; 125 - Second base plate; 126 - Second top plate; 127 - Second conveyor belt; 128 - Second clamping component; 130 - First side-shifting module; 131 - First fixing plate; 13 2 – First transmission component; 133 – First drive component; 134 – First slide rail; 135 – First slider; 136 – First drive motor; 137 – First support member; 138 – First belt module; 140 – Second lateral movement module; 141 – Second fixing plate; 142 – Second transmission component; 143 – Second drive component; 144 – Second slide rail; 145 – Second slider; 146 – Second drive motor; 147 – Second support member; 148 – Second belt module; 150 – Lateral movement module; 151 – Third fixing plate; 152 – Third transmission component; 153 – Third drive component; 160 – First conveyor line; 170 – Second conveyor line. DETAILED DESCRIPTION

[0056] The existing sequential feeding and receiving device for flower baskets has an unreasonable structural design. The transverse module has to handle both the transfer of flower baskets and the transfer of flower baskets containing unprocessed silicon wafers on top and those containing processed silicon wafers on the bottom. This results in low transfer efficiency of the transverse module and affects the overall working efficiency of the equipment.

[0057] To address the aforementioned problems, this utility model provides a self-circulating flower basket feeding and receiving device, which can improve the transfer efficiency of flower baskets and thus enhance the overall working efficiency of the equipment.

[0058] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0059] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0060] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0061] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0062] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0063] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0064] Please refer to Figures 1 to 8 In this embodiment, the basket self-circulating material receiving device 100 includes a first lifting assembly 110, a second lifting assembly 120, a lateral movement module 150, a first side-moving module 130, and a first transmission line. The first lifting assembly 110 is configured to fix the basket and move it up and down in the height direction to cooperate with the processing equipment in conveying unprocessed silicon wafers from the basket to the processing equipment. The second lifting assembly 120 is spaced apart from the first lifting assembly 110 in a first direction and is configured to fix the basket and move it up and down in the height direction to cooperate with the processing equipment in placing processed silicon wafers sequentially into empty baskets. The lateral movement module 150 is located on one side of the first lifting assembly 110 and the second lifting assembly 120 in a second direction, and can move the basket along both the first and second directions. The first and second directions are perpendicular. The first lateral shift module 130 is aligned with the first lifting assembly 110 in a first direction and is disposed on the side of the lateral shift module 150 away from the first lifting assembly 110 in a second direction. The first lateral shift module 130 can cooperate with the lateral shift module 150 or the first lifting assembly 110 to transfer the basket in the second direction. The first conveyor line 160 is disposed on the side of the first lateral shift module 130 near the second lifting assembly 120. The first conveyor line 160 is used to convey the basket containing the silicon wafer to be processed to the lateral shift module 150.

[0065] In this embodiment, the first side-shifting module 130 is positioned on the side of the transverse shifting module 150 away from the first lifting assembly 110, and the first side-shifting module 130 is aligned with the first lifting assembly 110. During the transfer of the basket, the transverse shifting module 150 first moves in the first direction to align with the first conveyor line 160. The two work together to transfer the basket containing unprocessed silicon wafers stored on the first conveyor line 160 to the transverse shifting module 150 in the second direction. Afterward, the transverse shifting module 150 transfers the basket containing the silicon wafers to be processed to a position aligned with the first lifting assembly 110 in the first direction. Then, the transverse shifting module 150, the first side-shifting module 130, and the first lifting assembly 110 simultaneously move in the second direction to transfer the basket. This allows the empty basket on the first lifting assembly 110 to be transferred to the transverse shifting module 150, while the first side-shifting module 130 and the transverse shifting module 150 work together to transfer the basket containing the silicon wafers to be processed on the transverse shifting module 150 to the first transverse shifting module 150. Subsequently, the lateral shift module 150 only needs to move towards the second lifting assembly 120 in the first direction with the empty basket to transfer the empty basket to the second lifting assembly 120. At the same time, the first side shift module 130, in cooperation with the first lifting assembly 110, can transfer the basket containing the silicon wafers to be processed on the first side shift module 130 to the first lifting assembly 110 for releasing the silicon wafers. The entire process, through the cooperation of the first side shift module 130, the lateral shift module 150, and the first lifting assembly 110, allows the transfer of the empty basket and the transfer of the basket containing the silicon wafers to be processed to the first lifting assembly 110 to occur simultaneously, thereby improving the overall working efficiency of the basket self-circulation feeding and receiving equipment 100.

[0066] It should be noted that the basket transfer process involves transferring the empty basket containing unprocessed silicon wafers from the first lifting assembly 110 to the second lifting assembly 120 for stacking processed silicon wafers. Because the transfer process involves empty baskets, baskets loaded with unprocessed silicon wafers, and baskets containing processed silicon wafers, in the prior art without the first side-shifting module 130, the structure of the transverse module 150 is relatively complex, requiring at least two basket storage stations, and the transfer process is also cumbersome. With the first side-shifting module 130 in this application, the transverse module 150 does not need to transfer baskets containing unprocessed silicon wafers to the first lifting assembly, and the transverse module 150 only needs one basket storage station. Overall, this allows for a smaller structure of the transverse module 150 and improves equipment efficiency.

[0067] The processing equipment can be laser cleaning equipment, coating equipment, etc. Generally, these processing equipment are arranged side-by-side with infeed conveyor lines, outfeed conveyor lines, and processing modules. The silicon wafers to be processed are conveyed to the processing module by the infeed conveyor line, and the silicon wafers processed by the processing module are conveyed out by the outfeed conveyor line. A basket-type self-circulating material receiving device 100 is located at the ends of the infeed and outfeed conveyor lines, with the infeed conveyor line corresponding to the first lifting assembly 110 and the outfeed conveyor line corresponding to the second lifting assembly 120. Generally, both the infeed and outfeed conveyor lines are equipped with telescopic belts at their ends. The telescopic belt of the infeed conveyor line can extend into the basket fixed in the first lifting assembly 110, transferring the silicon wafers to be processed from the basket to the infeed conveyor line until the basket is emptied. The empty basket then needs to be transferred to the second lifting assembly 120 by the basket-type self-circulating material receiving device 100. The telescopic belt at the end of the discharge conveyor line works in conjunction with the second lifting component 120 to stack the processed silicon wafers in the empty basket, thereby realizing the automatic sequential operation of the baskets and the automatic removal of silicon wafers from the baskets and the automatic stacking of the processed silicon wafers back into the baskets.

[0068] Please refer to Figures 1 to 8 In this embodiment, the first lifting component 110 and the second lifting component 120 are arranged opposite to each other. This arrangement of the first lifting component 110 and the second lifting component 120 opposite to each other better saves space in the first direction. Of course, in other embodiments of this application, the first lifting component 110 and the second lifting component 120 may also be arranged opposite each other.

[0069] The first lifting assembly 110 includes a first guide post 111, a first flower basket fixing member 112, and a first driving member 113. The first flower basket fixing member 112 is movably mounted on the first guide post 111 and is located on the side of the first guide post 111 away from the second guide post 121. The first driving member 113 is located on the first guide post 111 and is configured to drive the first flower basket fixing member 112 to lift. The first flower basket fixing member 112 is configured to fix the flower basket. The second lifting assembly 120 includes a second guide post 121, a second flower basket fixing member 122, and a second driving member 123. The second flower basket fixing member 122 is movably mounted on the second guide post 121 and is located on the side of the second guide post 121 opposite to the first guide post 111. The second driving member 123 is located on the second guide post 121 and is configured to drive the second flower basket fixing member 122 to lift. The second flower basket fixing component 122 is configured to fix the flower basket.

[0070] Normally, the first basket fixing member 112 is correspondingly arranged with the feeding conveyor line in the first direction, so that the telescopic belt at the end of the feeding conveyor line extends into the basket fixed by the first basket fixing member 112 to transfer the silicon wafers outward. The second basket fixing member 122 is correspondingly arranged with the discharging conveyor line in the first direction, so that the telescopic belt at the end of the discharging conveyor line extends into the basket fixed by the second basket fixing member 122 to stack the processed silicon wafers sequentially on the basket. If the first lifting assembly 110 and the second lifting assembly 120 are arranged opposite each other, due to the first guide post 111 and the second guide post 121, the overall size of the basket self-circulating feeding and receiving device 100 in the first direction will be larger than the size of the basket self-circulating feeding and receiving device 100 in the first direction when the first lifting assembly 110 and the second lifting assembly 120 are arranged opposite each other.

[0071] Please refer to Figures 1 to 8 Specifically, the first flower basket fixing component 112 includes a first mounting plate 114, a first base plate 115, a first top plate 116, a first conveyor belt 117, and a first clamping member 118. The first mounting plate 114 is movably mounted on the side of the first guide post 111 away from the second guide post 121. The first base plate 115 is disposed at the bottom of the first mounting plate 114. The first top plate 116 is disposed at the top of the first mounting plate 114. The first conveyor belt 117 is disposed at the top of the first base plate 115. The first clamping member 118 is disposed on the first top plate 116. The first conveyor belt 117 can transport the flower basket in a second direction. The first clamping member 118 can apply pressure from the top of the flower basket to fix it in place.

[0072] The second flower basket fixing component 122 includes a second mounting plate 124, a second base plate 125, a second top plate 126, a second conveyor belt 127, and a second clamping member 128. The second mounting plate 124 is movably mounted on the side of the second guide post 121 away from the first guide post 111. The second base plate 125 is located at the bottom of the second mounting plate 124. The second top plate 126 is located at the top of the second mounting plate 124. The second conveyor belt 127 is located at the top of the second base plate 125. The second clamping member 128 is located on the second top plate 126. The second conveyor belt 127 can transport the flower basket in a second direction. The second clamping member 128 can apply pressure to the flower basket from the top to secure it.

[0073] Generally, both the first clamping member 118 and the second clamping member 128 are clamping cylinders. For example, after the flower basket is transported to the preset position by the first conveyor belt 117, the clamping cylinder extends and abuts against the top of the flower basket, thereby preventing the flower basket from swaying or tipping over during the lifting and lowering process. The first driving member 113 and the second driving member 123 can both be screw motors, which are threadedly connected to the first mounting plate 114 and the second mounting plate 124, respectively.

[0074] In this embodiment, the self-circulating basket feeding and receiving device 100 further includes a second conveyor line 170 and a second lateral shifting module 140. The second lateral shifting module 140 is aligned with the second lifting assembly 120 in a first direction and is located on the side of the lateral shifting module 150 away from the second lifting assembly 120 in a second direction. The second lateral shifting module 140 can cooperate with the lateral shifting module 150 or the second lifting assembly 120 to transfer the basket in the second direction. The second conveyor line 170 is located on the side of the second lateral shifting module 140 close to the first lifting assembly 110. The second conveyor line 170 is used to transfer the basket containing the processed silicon wafers transferred by the lateral shifting module 150 outward.

[0075] Since the baskets filled with processed silicon wafers on the second lifting assembly 120 need to be transferred out first, the empty baskets transferred by the transverse module 150 can then be transferred to the second lifting assembly 120. This application, by setting a second side-shifting module 140, allows the second side-shifting module 140 and the second lifting assembly 120 to cooperate in transferring the baskets filled with processed silicon wafers from the second lifting assembly 120 to the second side-shifting module 140 before or during the process of the transverse module 150 transferring the empty baskets towards the second lifting assembly 120. Then, when the transverse module 150 transfers the empty baskets to align with the second lifting assembly 120, the second side-shifting module 140, the second conveyor belt 127, and the transverse module 150 move in the second direction. During the transfer of the empty baskets from the transverse module 150 to the second conveyor belt 127, the baskets filled with processed silicon wafers from the second side-shifting module 140 are also transferred to the transverse module 150. Then, the transverse module 150 moves the basket in the first direction to align with the second conveyor line 170, so that the basket filled with processed silicon wafers can be transferred to the second conveyor line 170.

[0076] Please refer to Figures 1 to 8In this embodiment, the transverse module 150 includes a third fixed plate 151, a third transmission component 152, and a third drive component 153. The third fixed plate 151 is disposed between the second lifting component 120 and the second fixed plate 141 and the first fixed plate 131 in the second direction, and extends from the first lifting component 110 to the second lifting component 120 in the first direction. The third transmission component 152 is disposed on the third fixed plate 151, and the third drive component 153 is disposed on the third fixed plate 151 and is drively connected to the third transmission component 152. The third drive component 153 can drive the third transmission component 152 to reciprocate in the first direction, and the third transmission component 152 can drive the flower basket to move in the second direction. The bearing surface of the third transmission component 152 is on the same plane as the bearing surfaces of the second transmission component 142, the first transmission component 132, the second conveyor line 170, and the first conveyor line 160. Both the first transmission component 132 and the second transmission component 142 can pass over the third fixed plate 151 when they move toward the direction of the transverse module.

[0077] This embodiment, by setting the transverse module 150 to the above structure, can better realize the transfer of the flower basket in the first direction, and by setting a third conveying component in the transverse module 150, the flower basket can also be transferred in the second direction.

[0078] Furthermore, the transmission component 152 and the third drive component 153 can be connected by one of the following methods: belt drive, rack and pinion drive, or screw drive. The third drive component 153 can be a motor, and the third transmission component 152 can be a belt module. The third drive component 153 can reciprocate the entire third transmission component 152 in the first reverse direction, while the third transmission component 152 can move the flower basket carried on top of it in the second direction.

[0079] Please refer to Figures 1 to 8 In this embodiment, the third drive component 153 can move the third transmission component 152 in a first direction between a first position, a second position, a third position, and a fourth position. The first position is when the third transmission component 152 is aligned with the first lifting component 110; the second position is when the third transmission component 152 is aligned with the first conveyor line 160; the third position is when the third transmission component 152 is aligned with the second conveyor line 170; and the fourth position is when the third transmission component 152 is aligned with the second lifting component 110.

[0080] In this embodiment, the first lateral shift module 130 includes a first fixed plate 131, a first transmission component 132, and a first drive component 133. The first fixed plate 131 is disposed in the second direction on the side of the lateral shift module 150 away from the first lifting component 110. The first transmission component 132 is disposed on the first fixed plate 131 and corresponds to the first lifting component 110 in the first direction; the first transmission component 132 can drive the flower basket to move in the second direction. The first drive component 133 is disposed on the first fixed plate 131 and is drively connected to the first transmission component 132. The first drive component 133 can drive the first transmission component 132 to move in the second direction toward the first lifting component 110, so that the first transmission component 132 passes over the lateral shift module 150 and cooperates with the first lifting component 110 to transfer the flower basket. The first drive component 133 can also drive the first transmission component 132 to move in the second direction away from the first lifting component 110, so that the first transmission component 132 cooperates with the lateral shift module 150 to transfer the flower basket.

[0081] Since the first lateral shift module 130 needs to cooperate with both the first lifting assembly 110 and the transverse shift module 150 to transport the flower basket, this embodiment movably mounts the first transmission assembly 132 onto the first fixed plate 131, allowing the first transmission assembly 132 to extend and retract relative to the first fixed plate 131. When the first lateral shift module 130 needs to cooperate with the first lifting assembly 110 to transport the flower basket, the first transmission assembly 132 extends beyond the transverse shift module 150 to cooperate with the first lifting assembly 110. Conversely, when the first lateral shift module 130 needs to cooperate with the transverse shift module 150 to transport the flower basket, the first transmission assembly retracts relative to the first fixed plate 131 to cooperate with the transverse shift module 150 to transport the flower basket. This avoids interference between the first transmission assembly and the transverse shift module 150 during movement.

[0082] Please refer to Figures 1 to 8In this embodiment, the second lateral shift module 140 and the first lateral shift module 130 have essentially the same structure. The second lateral shift module 140 includes a second fixed plate 141, a second transmission component 142, and a second drive component 143. The second fixed plate 141 is disposed in the second direction on the side of the lateral shift module 150 away from the second lifting component 120. The second transmission component 142 is disposed on the second fixed plate 141 and corresponds to the second lifting component 120 in the first direction; the second transmission component 142 can drive the flower basket to move in the second direction. The second drive component 143 is disposed on the second fixed plate 141 and is drively connected to the second transmission component 142. The second drive component 143 can drive the second transmission component 142 to move in the second direction toward the second lifting component 120, so that the second transmission component 142 passes over the lateral shift module 150 and cooperates with the second lifting component 120 to transfer the flower basket. The second drive component 143 can also drive the second transmission component 142 to move away from the second lifting component 120 in the second direction, so that the second transmission component 142 cooperates with the transverse module 150 to transfer the flower basket.

[0083] Since the second lateral shift module 140 needs to cooperate with both the second lifting assembly 120 and the transverse shift module 150 to transfer the flower basket, this embodiment movably mounts the second transmission assembly 142 to the second fixed plate 141, allowing the second transmission assembly 142 to extend and retract relative to the second fixed plate 141. When the second lateral shift module 140 needs to cooperate with the second lifting assembly 120 to transfer the flower basket, the second transmission assembly 142 extends beyond the transverse shift module 150 to cooperate with the second lifting assembly 120. Conversely, when the second lateral shift module 140 needs to cooperate with the transverse shift module 150 to transfer the flower basket, the second transmission assembly retracts relative to the second fixed plate 141 to cooperate with the transverse shift module 150 to transfer the flower basket. This avoids interference between the second transmission assembly and the transverse shift module 150 during movement.

[0084] Specifically, the first driving assembly 133 includes a first slide rail 134, a first slider 135, and a first driving motor 136. The first slide rail 134 is fixedly mounted on the first fixed plate 131. The first slider 135 is movably mounted on the first slide rail 134. The first driving motor 136 is mounted on the first slide rail 134 and is driveably connected to the first slider 135. The drive connection between the first driving motor 136 and the first slider 135 can be a belt drive, a rack and pinion drive, or a lead screw drive. The first driving motor 136 can drive the first slider 135 to reciprocate in a second direction. The first transmission assembly 132 is mounted on the first slider 135.

[0085] Please refer to Figures 1 to 8 The first transmission component 132 includes a first support member 137 and a first belt module 138. The first support member 137 is connected to the first slider 135. The first belt module 138 is disposed above the first support member 137. A first clearance space is formed on the side of the first support member 137 near the transverse module 150. The first drive component 133 can drive the first support member 137 and the first belt module as a whole to move in a second direction. The first belt module can also move in the second direction carrying the basket. The dimension of the first support member 137 in the second direction is smaller than the dimension of the first belt module in the second direction, and the first support member 137 is disposed at the end of the first belt module 138 away from the transverse module 150, thereby utilizing the length difference to achieve the first clearance space. The main reason for forming the first clearance space is that a transverse module 150 is provided between the first lateral shift module 130 and the first lifting component 110. The first support member 137 is used to raise the first belt module so that the bottom surface of the first belt module is higher than the height of the third fixed plate 151. In this way, the first belt module can pass over the third fixed plate 151 when it extends, thus avoiding interference between the two.

[0086] In this embodiment, the second driving component 143 includes a second slide rail 144, a second slider 145, and a second driving motor 146. The second slide rail 144 is fixedly mounted on the second fixed plate 141, and the second slider 145 is movably mounted on the second slide rail 144. The second driving motor 146 is mounted on the second slide rail 144 and is driveably connected to the second slider 145. The second driving motor 146 can drive the second slider 145 to reciprocate in a second direction. The second transmission component 142 is mounted on the second slider 145. The transmission method between the second driving motor 146 and the second slider 145 can be one of screw drive, belt drive, and rack and pinion drive. The second transmission component 142 includes a second support member 147 and a second belt module 148. The second support member 147 is connected to the second slider 145, the second belt module 148 is disposed above the second support member 147, and the side of the second support member 147 near the transverse module 150 forms a second clearance space. The second drive assembly 143 can drive the second support member 147 and the second belt module to move together in the second direction. The second belt module can also move the basket in the second direction. The dimension of the second support member 147 in the second direction is smaller than that of the second belt module in the second direction, and the second support member 147 is located at the end of the second belt module 148 away from the lateral movement module 150, thus utilizing the length difference to create a second clearance space. The main reason for forming the second clearance space is that the lateral movement module 150 is located between the second lateral movement module 140 and the second lifting assembly 120. The second support member 147 raises the second belt module so that its bottom surface is higher than the height of the third fixed plate 151, allowing the second belt module to pass over the third fixed plate 151 when it extends, thus avoiding interference between the two.

[0087] The working process of the self-circulating flower basket feeding and receiving device 100 provided in this application is as follows:

[0088] 1. First, the baskets containing silicon wafers to be processed are transferred from their storage location to the first conveyor line 160 by AGV trolleys;

[0089] 2. The third drive component 153 drives the third transmission component 152 to move in the first direction to the second position and align with the first transmission line;

[0090] 3. The first conveyor line 160 and the third conveyor assembly 152 cooperate to transfer the first basket containing the silicon wafer to be processed on the first conveyor line to the third conveyor assembly 152;

[0091] 4. The third drive component 153 drives the third transmission component 152 to move in the first direction to a first position, aligning it with the first lifting component 110 and the first lateral shift module 130. At this time, the first transmission component 132 is in the retracted position;

[0092] 5. Make the first conveyor belt 117, the third conveyor component 152 and the first conveyor component 132 run, transfer the empty basket on the first conveyor belt 117 to the third conveyor component 152, and at the same time transfer the basket on the third conveyor component 152 containing the silicon wafer to be processed to the first conveyor component 132.

[0093] 6. Simultaneously with steps 4 and 5, the second drive assembly 143 drives the second transmission assembly 142 to extend and cooperate with the second transmission belt 127 of the second lifting assembly 120, transferring the basket loaded with processed silicon wafers on the second transmission belt 127 to the second transmission assembly 142, freeing up the position of the second lifting assembly 120, and then the second drive assembly 143 drives the second transmission assembly 142 to retract.

[0094] 7. The third drive assembly 153 drives the third transmission assembly 152 to move in the first direction to the fourth position, aligning it with the second lifting assembly 120 and the first lateral shift module 130. At this time, the second transmission assembly 142 is in the retracted position;

[0095] 8. The second transmission component 142, the third transmission component 152, and the second transmission belt 127 are operated. At this time, the empty baskets carried on the third transmission component 152 are transferred to the second transmission belt 127 of the second lifting component 120. At the same time, the baskets carrying the processed silicon wafers carried on the second transmission component 142 are transferred to the third transmission component 152.

[0096] 9. The third drive assembly 153 drives the third transmission assembly 152 to move in the first direction to the third position and align with the second conveyor line 170, so that the third transmission assembly 152 and the second conveyor line 170 cooperate to transfer the basket containing the processed silicon wafers carried on the third transmission assembly 152 to the second conveyor line 170.

[0097] 10. Finally, the second conveyor line 170 transfers the baskets containing the processed silicon wafers to AGV carts, which then transport them to other processing nodes or store them.

[0098] As can be seen from the above process of flower basket circulation, the setting of the first side-shifting module 130 and the second side-shifting module 140 allows many steps to be performed simultaneously, thereby improving the time for flower basket transportation.

[0099] In summary, the basket self-circulating feeding and receiving device 100 provided in this embodiment sets the first side-shifting module 130 on the side of the transverse shifting module 150 away from the first lifting component 110, and aligns the first side-shifting module 130 with the first lifting component 110. The transverse shifting module transfers the basket containing the silicon wafers to be processed to the first direction after aligning with the first lifting component 110. The transverse shifting module 150, the first side-shifting module 130, and the first lifting component 110 simultaneously operate in the second direction to transfer the basket. This allows the empty basket on the first lifting component 110 to be transferred to the transverse shifting module 150, while the first side-shifting module 130 and the transverse shifting module 150 cooperate to transfer the basket containing the silicon wafers to be processed on the transverse shifting module 150 to the first transverse shifting module 150. Subsequently, the lateral shift module 150 only needs to move towards the second lifting assembly 120 in the first direction with the empty basket to transfer the empty basket to the second lifting assembly 120. At the same time, the first side shift module 130, in cooperation with the first lifting assembly 110, can transfer the basket containing the silicon wafers to be processed on the first side shift module 130 to the first lifting assembly 110 for releasing the silicon wafers. The entire process, through the cooperation of the first side shift module 130, the lateral shift module 150, and the first lifting assembly 110, allows the transfer of the empty basket and the transfer of the basket containing the silicon wafers to be processed to the first lifting assembly 110 to occur simultaneously, thereby improving the overall working efficiency of the basket self-circulation feeding and receiving equipment 100.

[0100] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A self-circulating flower basket feeding and receiving device, characterized in that, include: The first lifting assembly (110) is configured to fix the basket and drive the basket to lift in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment; The second lifting assembly (120) is spaced apart from the first lifting assembly (110) in the first direction and is configured to fix the flower basket and drive the flower basket to lift in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty flower basket in sequence. A transverse module (150) is disposed on one side of the first lifting assembly (110) and the second lifting assembly (120) located in the second direction, and can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular; The first side-shifting module (130) is aligned with the first lifting component (110) in a first direction and is disposed on the side of the transverse shifting module (150) away from the first lifting component (110) in a second direction. The first side-shifting module (130) can cooperate with the transverse shifting module (150) or the first lifting component (110) to transfer the flower basket in the second direction. A first conveyor line (160) is disposed on the side of the first lateral shift module (130) near the second lifting assembly (120). The first conveyor line (160) is used to convey a basket containing silicon wafers to be processed to the lateral shift module (150).

2. The self-circulating flower basket feeding and receiving device according to claim 1, characterized in that, The flower basket self-circulating feeding and receiving equipment also includes a second conveyor line (170) and a second side-shifting module (140); The second side-shifting module (140) is aligned with the second lifting component (120) in the first direction and is disposed on the side of the transverse shifting module (150) away from the second lifting component (120) in the second direction. The second side-shifting module (140) can cooperate with the transverse shifting module (150) or the second lifting component (120) to transfer the flower basket in the second direction. The second conveyor line (170) is located on the side of the second lateral shift module (140) near the first lifting assembly (110). The second conveyor line (170) is used to transfer the basket containing the processed silicon wafers transferred by the lateral shift module (150) outward.

3. The flower basket self-circulating feeding and receiving device according to claim 2, characterized in that, The first side-shifting module (130) includes a first fixing plate (131), a first transmission component (132), and a first driving component (133); The first fixing plate (131) is disposed in the second direction on the side of the transverse module (150) away from the first lifting assembly (110); The first transmission component (132) is disposed on the first fixed plate (131) and is disposed corresponding to the first lifting component (110) in the first direction. The first transmission component (132) can drive the flower basket to move in the second direction. The first drive component (133) is disposed on the first fixed plate (131) and is connected to the first transmission component (132) in a transmission manner; The first drive component (133) can drive the first transmission component (132) to move in the second direction toward the first lifting component (110), so that the first transmission component (132) can pass over the transverse module (150) and cooperate with the first lifting component (110) to transfer the flower basket; The first drive component (133) can also drive the first transmission component (132) to move away from the first lifting component (110) in the second direction, so that the first transmission component (132) retracts to cooperate with the transverse module (150) to transfer the flower basket.

4. The self-circulating flower basket feeding and receiving device according to claim 3, characterized in that, The second side-shifting module (140) includes a second fixing plate (141), a second transmission component (142), and a second drive component (143); The second fixing plate (141) is disposed in the second direction on the side of the transverse module (150) away from the second lifting assembly (120); The second transmission component (142) is disposed on the second fixed plate (141) and is disposed corresponding to the second lifting component (120) in the first direction. The second transmission component (142) can drive the flower basket to move in the second direction. The second drive component (143) is disposed on the second fixed plate (141) and is connected to the second transmission component (142) in a transmission manner; The second drive component (143) can drive the second transmission component (142) to move in the second direction toward the second lifting component (120), so that the second transmission component (142) can pass over the transverse module (150) and cooperate with the second lifting component (120) to transfer the flower basket; The second drive component (143) can also drive the second transmission component (142) to move away from the second lifting component (120) in the second direction, so that the second transmission component (142) retracts to cooperate with the transverse module (150) to transfer the flower basket.

5. The self-circulating flower basket feeding and receiving device according to claim 4, characterized in that, The transverse module (150) includes a third fixing plate (151), a third transmission component (152), and a third drive component (153); The third fixing plate (151) is disposed between the second lifting assembly (120) and the second fixing plate (141) in the second direction, and in the first direction the third fixing plate (151) extends from the first lifting assembly (110) to the second lifting assembly (120); The third transmission component (152) is disposed on the third fixed plate (151), and the third drive component (153) is disposed on the third fixed plate (151) and is connected to the third transmission component (152) in a transmission manner. The third driving component (153) can drive the third transmission component (152) to reciprocate in the first direction, and the third transmission component (152) can drive the flower basket to move in the second direction; The bearing surface of the third transmission component (152) is on the same plane as the bearing surface of the second transmission component (142), the bearing surface of the first transmission component (132), the bearing surface of the second conveyor line (170), and the bearing surface of the first conveyor line (160). Both the first transmission component (132) and the second transmission component (142) can pass over the third fixed plate (151) when moving toward the lateral module (150).

6. The flower basket self-circulating feeding and receiving device according to claim 4 or 5, characterized in that, The first drive assembly (133) includes a first slide rail (134), a first slider (135), and a first drive motor (136); The first slide rail (134) is fixedly installed on the first fixed plate (131), and the first slider (135) is movably installed on the first slide rail (134); The first drive motor (136) is mounted on the first slide rail (134) and is connected to the first slider (135) in a transmission manner. The first drive motor (136) can drive the first slider (135) to reciprocate in the second direction. The first transmission component (132) is mounted on the first slider (135).

7. The self-circulating flower basket feeding and receiving device according to claim 6, characterized in that, The first transmission component (132) includes a first support member (137) and a first belt module (138). The first support member (137) is connected to the first slider (135). The first belt module (138) is disposed above the first support member (137), and the side of the first support member (137) near the transverse module (150) forms a first clearance space.

8. The self-circulating flower basket feeding and receiving device according to claim 4 or 5, characterized in that, The second drive assembly (143) includes a second slide rail (144), a second slider (145), and a second drive motor (146); The second slide rail (144) is fixedly installed on the second fixed plate (141), and the second slider (145) is movably installed on the second slide rail (144); The second drive motor (146) is mounted on the second slide rail (144) and is connected to the second slider (145) in a transmission manner. The second drive motor (146) can drive the second slider (145) to reciprocate in the second direction. The second transmission component (142) is mounted on the second slider (145).

9. The self-circulating flower basket feeding and receiving device according to claim 8, characterized in that, The second transmission component (142) includes a second support member (147) and a second belt module (148). The second support member (147) is connected to the second slider (145). The second belt module (148) is disposed above the second support member (147), and the side of the second support member (147) near the transverse module (150) forms a second clearance space.

10. The flower basket self-circulating feeding and receiving device according to any one of claims 1-4, characterized in that, The first lifting component (110) and the second lifting component (120) are arranged opposite to each other.

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