Flower basket self-circulation material supplying and receiving equipment

Abstract

The utility model provides flower basket self-circulation material supplying and receiving equipment, and relates to the technical field of semiconductor processing equipment. The flower basket self-circulation material supplying and receiving equipment comprises a first lifting assembly, a second lifting assembly, a first transverse moving module and a lateral moving module. The second lifting assembly and the first lifting assembly are arranged in a spaced mode in the first direction, and the first lifting assembly and the second lifting assembly are both configured to fix the flower basket and drive the flower basket to ascend and descend in the height direction. The first transverse moving module is arranged on the side, located in the second direction, of the first lifting assembly and the second lifting assembly and can drive the flower basket to move in the first direction and the second direction. Wherein the first direction is perpendicular to the second direction. The side moving module is aligned with the second lifting assembly in the first direction and arranged on the side, away from the second lifting assembly, of the first transverse moving module in the second direction, and the side moving module can be matched with the first transverse moving module or the second lifting assembly to transfer the flower basket in the second direction. The flower basket self-circulation material supplying and receiving equipment can improve the transfer efficiency of the flower basket.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and more specifically, to a flower basket self-circulating feeding and receiving device. Background Art

[0002] In the processing of solar cells, baskets are frequently used for storing the cells. A basket-based circulating feeding system, working in conjunction with the processing equipment, is typically required during the cell manufacturing process, and AGV (Automated Guided Vehicle) carts are then used to achieve automated production.

[0003] The existing sequential feeding device for flower baskets uses a transverse module to transfer flower baskets between loading and unloading. The loading, unloading and transfer processes must be carried out sequentially, which leads to some steps not being able to be carried out synchronously during the transfer process, resulting in low transfer efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a self-circulating material supply and collection device for flower baskets, which can improve the efficiency of flower basket transportation.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] This utility model provides a self-circulating flower basket feeding and receiving device, comprising:

[0007] The first lifting component is configured to fix the basket and drive the basket to move up and down in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment;

[0008] The second lifting component is spaced apart from the first lifting component in the first direction and is configured to fix the flower basket and drive the flower basket to move up and down in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty flower basket in sequence.

[0009] A first lateral movement module is disposed on one side of the first lifting component and the second lifting component located in the second direction, and can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular;

[0010] A lateral shift module is provided, which is aligned with the second lifting component in a first direction and disposed on the side of the first lateral shift module away from the second lifting component in a second direction. The lateral shift module can cooperate with the first lateral shift module or the second lifting component to transfer the flower basket in the second direction.

[0011] In an optional embodiment, the lateral shift module includes a first fixing plate, a first transmission component, and a first driving component;

[0012] The first fixing plate is disposed in the second direction on the side of the first transverse module away from the second lifting component;

[0013] The first transmission component is disposed on the first fixed plate and is correspondingly disposed with the second lifting component in the first direction. The first transmission component can drive the flower basket to move in the second direction.

[0014] The first driving component is disposed on the first fixed plate and is connected to the first transmission component in a driving manner;

[0015] The first driving component can drive the first transmission component to move in the second direction toward the direction of the second lifting component, so that the first transmission component passes over the first lateral movement module and cooperates with the second lifting component to transfer the flower basket;

[0016] The first driving component can also drive the first transmission component to move in the second direction away from the second lifting component, so that the first transmission component cooperates with the first lateral movement module to transfer the flower basket.

[0017] In an optional embodiment, the first transverse module includes a second fixed plate, a second transmission component, and a second drive component;

[0018] The second fixing plate is disposed between the second lifting assembly and the first fixing plate in the second direction, and the second fixing plate extends from the first lifting assembly to the second lifting assembly in the first direction;

[0019] The second transmission component is disposed on the second fixed plate, and the first driving component is disposed on the second fixed plate and is connected to the second transmission component in a driving manner;

[0020] The first driving component can drive the second transmission component to reciprocate in the first direction, and the second transmission component can drive the flower basket to move in the second direction;

[0021] The bearing surface of the second transmission component is on the same plane as the bearing surface of the first transmission component;

[0022] When the first transmission component moves toward the second lifting component, it can pass over the second fixed plate;

[0023] After the first transmission component moves away from the second lifting component, the first transmission component is located on the side of the second transmission component away from the second lifting component. When the second transmission component moves in the first direction to align with the first transmission component, the second transmission component and the first transmission component can cooperate to transmit the flower basket.

[0024] In an optional implementation, the first drive component includes a slide rail, a slider, and a drive motor;

[0025] The slide rail is fixedly installed on the first fixed plate, and the slider is movably installed on the slide rail;

[0026] The drive motor is mounted on the slide rail and is connected to the slider in a transmission manner. The drive motor can drive the slider to reciprocate in a second direction.

[0027] The first transmission component is mounted on the slider.

[0028] In an optional embodiment, the first transmission component includes a support member and a belt module. The support member is connected to the slider, the belt module is disposed above the support member, and a clearance space is formed on the side of the support member near the first transverse module.

[0029] In an optional embodiment, the flower basket self-circulating feeding and receiving device further includes a first conveyor line and a second conveyor line, the second conveyor line being spaced above the first conveyor line, one of the first conveyor line and the second conveyor line being at the same height as the first transverse module, and the other being correspondingly arranged with the first lifting component to convey the flower basket to the first lifting component.

[0030] In an optional embodiment, the bearing surface of the second transmission component is on the same plane as the bearing surface of the first conveyor line. The second transmission component can also transmit a basket loaded with processed silicon wafers to the first conveyor line, and the second conveyor line is used to transmit a basket loaded with unprocessed silicon wafers to the first lifting component.

[0031] In an optional embodiment, the first lifting component and the second lifting component are arranged opposite to each other.

[0032] In an optional embodiment, the second conveyor line includes a third and a fourth conveyor belt arranged side by side along the first direction;

[0033] The flower basket self-circulating feeding and receiving device also includes a second transverse moving module, which is located between the second conveyor line and the first lifting component and is at the same height as the second conveyor line. The second transverse moving module can transfer the flower baskets on the third and fourth conveyor belts to the first lifting component.

[0034] In an optional embodiment, the second transverse module includes a third fixing plate, a third transmission component, and a third drive component;

[0035] The third fixing plate is disposed on one side of the first lifting assembly and the second lifting assembly in the second direction, and is located above the first transverse module. The third fixing plate extends from the first lifting assembly to the second lifting assembly.

[0036] The third transmission component is disposed on the third fixed plate, the third driving component is disposed on the third fixed plate, and the third driving component is connected to the third transmission component in a transmission manner. The third driving component can drive the third transmission component to reciprocate in the first direction.

[0037] The bearing surface of the third transmission component is on the same plane as the bearing surface of the second conveyor line, and the third transmission component can drive the flower basket to move in the second direction.

[0038] The beneficial effects of the self-circulating flower basket feeding and receiving device provided in this embodiment of the utility model include:

[0039] This application aligns the lateral shift module with the second lifting component in the first direction and positions the lateral shift module in the second direction on the side of the first lateral shift module away from the second lifting component. The lateral shift module can cooperate with the first lateral shift module or the second lifting component to transport the flower basket in the second direction. In this way, during some transport processes, the lateral shift module and the first lateral shift module can transport the flower basket simultaneously, thereby improving the transport efficiency of the flower basket. Attached Figure Description

[0040] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 This is a schematic diagram of the structure of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0042] Figure 2 This is a schematic diagram of the structure of the first lifting component of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0043] Figure 3 This is a schematic diagram of the structure of the second lifting component of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0044] Figure 4 This is a schematic diagram of the side-moving module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0045] Figure 5This is a schematic diagram of the first conveying component of the side-moving module of the self-circulating flower basket feeding and receiving device provided in this embodiment when it is in the extended state.

[0046] Figure 6 This is a schematic diagram of the structure of the first transverse module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0047] Figure 7 This is a schematic diagram of the structure of the second transverse module of the self-circulating flower basket feeding and receiving device provided in this embodiment;

[0048] Figure 8 This is a schematic diagram of the structure of the self-circulating flower basket feeding and receiving device provided in this embodiment when the second transverse module and the second conveyor line are removed and the first conveyor module of the lateral module is in the retracted state and in cooperation with the transverse module.

[0049] Figure 9 This is a schematic diagram of the structure of the self-circulating flower basket feeding and receiving device provided in this embodiment when the second transverse module and the second conveyor line are removed and the first conveyor module of the lateral module is in the extended state and in cooperation with the second lifting component.

[0050] Icons: 100 - Self-circulating flower basket feeding and receiving device; 110 - First lifting assembly; 111 - First guide column; 112 - First flower basket fixing component; 113 - First driving component; 114 - First mounting plate; 115 - First base plate; 116 - First top plate; 117 - First conveyor belt; 118 - First clamping component; 130 - Second lifting assembly; 131 - Second guide column; 132 - Second flower basket fixing component; 133 - Second driving component; 134 - Second mounting plate; 135 - Second base plate; 136 - Second top plate; 137 - Second conveyor belt; 138 - Second clamping component; 140 - Side shifting module; 141 - First Fixed plate; 142 - First transmission assembly; 143 - First drive assembly; 144 - Slide rail; 145 - Slider; 146 - Drive motor; 147 - Support; 148 - Belt module; 150 - First transverse module; 151 - Second fixed plate; 152 - Second transmission assembly; 153 - Second drive assembly; 170 - First conveyor line; 171 - First transmission belt; 172 - Second transmission belt; 180 - Second conveyor line; 181 - Third transmission belt; 182 - Fourth transmission belt; 190 - Second transverse module; 191 - Third fixed plate; 192 - Third transmission assembly; 193 - Third drive assembly. DETAILED DESCRIPTION

[0051] The existing flower basket transfer device uses a transverse module to transfer flower baskets between loading and unloading. The loading, unloading and transfer processes need to be carried out sequentially, which leads to some steps not being able to be carried out synchronously during the transfer process, resulting in low transfer efficiency.

[0052] To address the aforementioned problems, this utility model provides a self-circulating material supply and collection device for flower baskets, which can improve the transfer efficiency of flower baskets.

[0053] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0054] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0055] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0056] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0057] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0058] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0059] Please refer to Figures 1 to 9In this embodiment, the basket self-circulating feeding and receiving device 100 includes a first lifting assembly 110, a second lifting assembly 130, a side-moving module 140, and a first transverse moving module 150. The first lifting assembly 110 is configured to fix the basket and move it up and down in the height direction to cooperate with the processing equipment in conveying unprocessed silicon wafers from the basket to the processing equipment. The second lifting assembly 130 is spaced apart from the first lifting assembly 110 in a first direction. The second lifting assembly 130 is configured to fix the basket and move it up and down in the height direction to cooperate with the processing equipment in sequentially stacking processed silicon wafers into empty baskets. The first transverse moving module 150 is located on one side of the first lifting assembly 110 and the second lifting assembly 130 in a second direction, and can move the basket along both the first and second directions. The first and second directions are perpendicular. The lateral shift module 140 is aligned with the second lifting component 130 in the first direction and is located on the side of the first lateral shift module 150 away from the second lifting component 130 in the second direction. The lateral shift module 140 can cooperate with the first lateral shift module 150 or the second lifting component 130 to transfer the flower basket in the second direction.

[0060] In this embodiment, the lateral shift module 140 is aligned with the second lifting component 130 in the first direction, and the lateral shift module 140 is positioned in the second direction on the side of the first transverse shift module 150 away from the second lifting component 130. The lateral shift module 140 can cooperate with the first transverse shift module 150 or the second lifting component 130 to transport the flower basket in the second direction. In this way, during some transport processes, the lateral shift module 140 and the first transverse shift module 150 can transport the flower basket simultaneously, thereby improving the transport efficiency of the flower basket.

[0061] Please refer to Figures 1 to 9It should be noted that the basket transfer process involves transferring the empty baskets containing unprocessed silicon wafers from the first lifting assembly 110 to the second lifting assembly 130 where processed silicon wafers are stacked. Because there are empty and full baskets during the transfer process, in existing technologies without a lateral movement module 140, the first lateral movement module 150 must first be used to remove the full baskets containing processed silicon wafers from the second lifting assembly 130 before the empty baskets can be transferred to the second lifting assembly 130. This process prevents the simultaneous transfer of empty and full baskets, resulting in low basket transfer efficiency. In this application, a side-shifting module 140 is provided. In one operating mode, when the first lateral shifting module 150 transfers an empty flower basket to a position aligned with the second lifting component 130 and the side-shifting module 140 in the first direction, the flower basket is transferred in the same direction across all three directions. This way, while the full flower basket on the second lifting component 130 is transferred to the first lateral shifting module 150, the empty flower basket on the first lateral shifting module 150 is transferred to the side-shifting module 140. After the first lateral shifting module 150 moves away, the side-shifting module 140 transfers the empty flower basket to the second lifting component 130, thereby improving the transfer efficiency. In another operating mode, while the first lateral movement module 150 and the first lifting assembly 110 are transferring empty baskets to the first lateral movement module 150 and transferring empty baskets to the second lifting assembly 130 from the first lateral movement module 150, the side movement module 140 can cooperate with the second lifting assembly 130 to transfer a full basket from the second lifting assembly to the side movement module 140. Then, after the first lateral movement module 150 transfers the basket to a position corresponding to the second lifting assembly 130 and the side movement module 140 in the first direction, all three operate simultaneously. Simultaneously, while the first lateral movement module 150 transfers an empty basket to the second lifting assembly 130, the side movement module 140 also transfers a basket filled with processed silicon wafers to the first lateral movement module 150. In this operating mode, there are more synchronous processes, and the basket operation efficiency is faster. Furthermore, adding the side movement module 140 also provides multiple operating modes for the basket self-circulating feeding and receiving equipment 100.

[0062] It should also be noted that the processing equipment can be laser cleaning equipment, coating equipment, etc. Generally, these processing equipment are arranged side-by-side with feeding conveyor lines, discharging conveyor lines, and processing modules. The silicon wafers to be processed are conveyed to the processing module by the feeding conveyor line, and the silicon wafers processed by the processing module are conveyed out by the discharging conveyor line. The basket self-circulating feeding and receiving device 100 is located at the ends of the feeding and discharging conveyor lines, with the feeding conveyor line corresponding to the first lifting assembly 110 and the discharging conveyor line corresponding to the second lifting assembly 130. Generally, both the feeding and discharging conveyor lines are equipped with telescopic belts at their ends. The telescopic belt of the feeding conveyor line can extend into the basket fixed in the first lifting assembly 110, transferring the silicon wafers to be processed carried in the basket to the feeding conveyor line until the basket is emptied. The empty basket then needs to be transferred to the second lifting assembly 130 by the basket self-circulating feeding and receiving device 100. The telescopic belt at the end of the discharge conveyor line works in conjunction with the second lifting component 130 to stack the processed silicon wafers in the empty basket, thereby realizing the automatic sequential operation of the baskets and the automatic removal of silicon wafers from the baskets and the automatic stacking of the processed silicon wafers back into the baskets.

[0063] Please refer to Figures 1 to 9 In this embodiment, the first lifting component 110 and the second lifting component 130 are arranged opposite to each other. This arrangement of the first lifting component 110 and the second lifting component 130 opposite to each other better saves space in the first direction.

[0064] The first lifting assembly 110 includes a first guide post 111, a first flower basket fixing member 112, and a first driving member 113. The first flower basket fixing member 112 is movably mounted on the first guide post 111 and is located on the side of the first guide post 111 away from the second guide post 131. The first driving member 113 is located on the first guide post 111 and is configured to drive the first flower basket fixing member 112 to lift. The first flower basket fixing member 112 is configured to fix the flower basket. The second lifting assembly 130 includes a second guide post 131, a second flower basket fixing member 132, and a second driving member 133. The second flower basket fixing member 132 is movably mounted on the second guide post 131 and is located on the side of the second guide post 131 opposite to the first guide post 111. The second driving member 133 is located on the second guide post 131 and is configured to drive the second flower basket fixing member 132 to lift. The second flower basket fixing component 132 is configured to fix the flower basket.

[0065] Normally, the first basket fixing member 112 is correspondingly arranged with the feeding conveyor line in the first direction, so that the telescopic belt at the end of the feeding conveyor line extends into the basket fixed by the first basket fixing member 112 to transfer the silicon wafers outward. The second basket fixing member 132 is correspondingly arranged with the discharging conveyor line in the first direction, so that the telescopic belt at the end of the discharging conveyor line extends into the basket fixed by the second basket fixing member 132 to stack the processed silicon wafers sequentially on the basket. If the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other, due to the first guide post 111 and the second guide post 131, the overall size of the basket self-circulating feeding and receiving device 100 in the first direction will be larger than the size of the basket self-circulating feeding and receiving device 100 in the first direction when the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other.

[0066] Please refer to Figures 1 to 9 Specifically, the first flower basket fixing component 112 includes a first mounting plate 114, a first base plate 115, a first top plate 116, a first conveyor belt 117, and a first clamping member 118. The first mounting plate 114 is movably mounted on the side of the first guide post 111 away from the second guide post 131. The first base plate 115 is disposed at the bottom of the first mounting plate 114. The first top plate 116 is disposed at the top of the first mounting plate 114. The first conveyor belt 117 is disposed at the top of the first base plate 115. The first clamping member 118 is disposed on the first top plate 116. The first conveyor belt 117 can transport the flower basket in a second direction. The first clamping member 118 can apply pressure to the flower basket from the top to fix the flower basket.

[0067] The second flower basket fixing component 132 includes a second mounting plate 134, a second base plate 135, a second top plate 136, a second conveyor belt 137, and a second clamping member 138. The second mounting plate 134 is movably mounted on the side of the second guide post 131 away from the first guide post 111. The second base plate 135 is located at the bottom of the second mounting plate 134. The second top plate 136 is located at the top of the second mounting plate 134. The second conveyor belt 137 is located at the top of the second base plate 135. The second clamping member 138 is located on the second top plate 136. The second conveyor belt 137 can transport the flower basket in a second direction. The second clamping member 138 can apply pressure from the top of the flower basket to secure it.

[0068] Generally, both the first clamping member 118 and the second clamping member 138 are clamping cylinders. For example, after the flower basket is transported to the preset position by the first conveyor belt 117, the clamping cylinder extends and abuts against the top of the flower basket, thereby preventing the flower basket from swaying or tipping over during the lifting and lowering process. Both the first driving member 113 and the second driving member 133 can be screw motors, which are threadedly connected to the first mounting plate 114 and the second mounting plate 134, respectively.

[0069] In this embodiment, the lateral shift module 140 includes a first fixed plate 141, a first transmission component 142, and a first drive component 143. The first fixed plate 141 is disposed in the second direction on the side of the first lateral shift module 150 away from the second lifting component 130. The first transmission component 142 is disposed on the first fixed plate 141 and aligned with the second transmission belt 137 in the first direction, and the first transmission component 142 can drive the flower basket to move in the second direction. The first drive component 143 is disposed on the first fixed plate 141 and is drively connected to the first transmission component 142. The first drive component 143 can drive the first transmission component 142 to move in the second direction toward the second lifting component 130, so that the first transmission component 142 passes over the first lateral shift module 150 and cooperates with the second transmission belt 137 of the second lifting component 130 to transfer the flower basket. The first drive component 143 can also drive the first transmission component 142 to move in the second direction away from the second lifting component 130, so that the first transmission component 142 cooperates with the first lateral shift module 150 to transfer the flower basket.

[0070] Please refer to Figures 1 to 9 Since the lateral shift module 140 needs to cooperate with both the second lifting assembly 130 and the first transverse shift module 150 to transfer the flower basket, this embodiment movably mounts the first transmission assembly 142 onto the first fixed plate 141, allowing the first transmission assembly 142 to extend and retract relative to the first fixed plate 141. When the lateral shift module 140 needs to cooperate with the second lifting assembly 130 to transfer the flower basket, the first transmission assembly 142 extends beyond the first transverse shift module 150 to cooperate with the second lifting assembly 130. Conversely, when the lateral shift module 140 needs to cooperate with the first transverse shift module 150 to transfer the flower basket, the first transmission assembly retracts relative to the first fixed plate 141 to cooperate with the first transverse shift module 150 to transfer the flower basket.

[0071] In this embodiment, the first lateral movement module 150 includes a second fixed plate 151, a second transmission component 152, and a second drive component 153. The second fixed plate 151 is disposed between the second lifting component 130 and the first fixed plate 141 in a second direction, and extends from the first lifting component 110 to the second lifting component 130 in the first direction. The second transmission component 152 is disposed on the second fixed plate 151, and the first drive component 143 is disposed on the second fixed plate 151 and is drively connected to the second transmission component 152. The first drive component 143 can drive the second transmission component 152 to reciprocate in the first direction, and the second transmission component 152 can move the flower basket in the second direction. The bearing surface of the second transmission component 152 is on the same plane as the bearing surface of the first transmission component 142. When the first transmission component 142 moves toward the second lifting component 130, it can pass over the second fixed plate 151. After the first transmission component 142 moves away from the second lifting component 130, the first transmission component 142 is located on the side of the second transmission component 152 away from the second lifting component 130. When the second transmission component 152 moves in the first direction to align with the first transmission component 142, the second transmission component 152 and the first transmission component 142 can cooperate to transmit the flower basket.

[0072] This implementation achieves better transfer of the flower basket by setting the first transverse component to the structure described above.

[0073] Please refer to Figures 1 to 9 In this embodiment, the second transmission component 152 can move between a first position and a second position in a first direction. The first position is when the second transmission component 152 is aligned with the first lifting component 110 in the first direction. The second position is when the second transmission component 152 is aligned with the second lifting component 130 and the first transmission component 142 in the first direction. The first transmission component 142 can move between a third position and a fourth position in the second direction. The third position is when the first transmission component 142 extends relative to the first fixing plate 141 and engages with the second lifting component 130. The fourth position is when the first transmission component 142 retracts relative to the first fixing plate 141. When the first transmission component 142 is in the fourth position, a gap is reserved between the first transmission component 142 and the second lifting component 130, which can accommodate the second transmission component 152. When the second transmission component 152 moves to the second position, the three components are aligned in the first direction and can be assembled to form a transmission line. When the first transmission component 142 extends, the second transmission component 152 is not in the second position, thereby achieving mutual avoidance and cooperation between the two.

[0074] Please refer to Figures 1 to 9In this embodiment, the first driving assembly 143 includes a slide rail 144, a slider 145, and a drive motor 146. The slide rail 144 is fixedly mounted on the first fixed plate 141, and the slider 145 is movably mounted on the slide rail 144. The drive motor 146 is mounted on the slide rail 144 and is connected to the slider 145 in a transmission manner, and the drive motor 146 can drive the slider 145 to reciprocate in a second direction. The first transmission assembly 142 is mounted on the slider 145.

[0075] In this embodiment, the first drive component 143 is configured as described above, which facilitates stable driving of the first transmission component 142, thereby improving the problem of excessive swaying of the flower basket. Generally, the drive motor 146 can drive the slider 145 to move via belt drive or lead screw drive.

[0076] In this embodiment, the first transmission component 142 includes a support member 147 and a belt module 148. The support member 147 is connected to the slider 145, and the belt module 148 is disposed above the support member 147. A clearance space is formed on the side of the support member 147 near the first transverse module 150. The bearing surface of the belt module 148 is on the same plane as the bearing surface of the second transmission component.

[0077] In this embodiment, a support member 147 is provided at the bottom of the belt module 148. This allows the support member 147 to create clearance space at the front of the belt module 148, even if the bottom surface of the front end of the belt module 148 is higher than the second fixing plate 151, thus facilitating its extension over the first lateral movement module 150. The belt module 148 is used to carry the flower basket and can also move the flower basket; the entire belt module 148 is also movable.

[0078] Please refer to Figures 1 to 9 In this embodiment, the flower basket self-circulating feeding and receiving device 100 further includes a first conveyor line 170 and a second conveyor line 180. The second conveyor line 180 is spaced above the first conveyor line 170. One of the first conveyor line 170 and the second conveyor line 180 is at the same height as the first transverse module 150, and the other is correspondingly arranged with the first lifting component 110 to convey the flower basket to the first lifting component 110.

[0079] In this embodiment, the first conveyor line 170 and the second conveyor line 180 are staggered in the height direction. This can avoid mutual interference between feeding and discharging, and with the help of double-layer AGV trolleys, efficient transfer can be achieved.

[0080] In this embodiment, the second transmission component 152 is a belt module. Each of the belt module, belt assembly 148, first transmission belt 117, and second transmission belt 137 can accommodate a flower basket, and all can be driven by the belt to move the flower basket in the second direction, thereby realizing the transfer of the flower basket.

[0081] In this embodiment, the lateral shift module 140 is disposed on one side of the first conveyor line 170. The bearing surface of the belt module 148 and the bearing surface of the belt assembly are on the same plane as the bearing surface of the first conveyor line 170. The second transmission assembly 152 can also transmit a basket loaded with processed silicon wafers to the first conveyor line 170, and the second conveyor line 180 is used to transmit a basket loaded with unprocessed silicon wafers to the first lifting assembly 110. This arrangement makes it easier to transmit a full basket to the first conveyor line.

[0082] Of course, in some other embodiments of this application, the transverse and lateral modules 140 and the second conveyor line 180 may also be arranged on the same plane.

[0083] In this embodiment, the first conveyor line 170 includes a first conveyor belt 171 and a second conveyor belt 172 arranged in a first direction. The second conveyor assembly 152 (belt module) can move in the first direction to be optionally aligned with the first conveyor belt 171 or the second conveyor belt 172, thereby transferring the basket filled with processed silicon wafers to the first conveyor belt 171 or the second conveyor belt 172.

[0084] Please refer to Figures 1 to 9 In this embodiment, the second conveyor line 180 includes a third conveyor belt 181 and a fourth conveyor belt 182 arranged side by side along the first direction. The flower basket self-circulating feeding and receiving device 100 also includes a second transverse module 190, which is disposed between the second conveyor line 180 and the first lifting assembly 110 and at the same height as the second conveyor line 180. The second transverse module 190 can transfer the flower baskets on the third conveyor belt 181 and the fourth conveyor belt 182 to the first lifting assembly 110.

[0085] This embodiment is equipped with a second transverse module 190, which can be used to transfer the flower baskets on the third or fourth conveyor belt to the first lifting assembly 110.

[0086] Of course, in some other embodiments of this application, the second conveyor line 180 is provided with only a conveyor belt and without the second transverse module 190.

[0087] In this embodiment, the second lateral movement module 190 and the first lateral movement module 150 have essentially the same structure. The second lateral movement module 190 includes a third fixed plate 191, a third transmission component 192, and a third drive component 193. The third fixed plate 191 is disposed on one side of the first lifting component 110 and the second lifting component 130 in the second direction, and is located above the first lateral movement module 150. The third fixed plate 191 extends from the first lifting component 110 to the second lifting component 130. The third transmission component 192 is disposed on the third fixed plate 191, and the third drive component 193 is disposed on the third fixed plate 191. The third drive component 193 is drively connected to the third transmission component 192, and the third drive component 193 can drive the third transmission component 192 to reciprocate in the first direction. The bearing surface of the third transmission component 192 is on the same plane as the bearing surfaces of the third and fourth transmission belts, and the third transmission component 192 can drive the flower basket to move in the second direction.

[0088] In this embodiment, the third transmission component 192 is also a belt module, which can also transmit the flower basket in the second direction.

[0089] In summary, the flower basket self-circulating feeding and receiving device 100 provided in this embodiment aligns the lateral shift module 140 with the second lifting component 130 in the first direction, and positions the lateral shift module 140 in the second direction on the side of the first transverse shift module 150 away from the second lifting component 130. The lateral shift module 140 can cooperate with the first transverse shift module 150 or the second lifting component 130 to transfer the flower basket in the second direction. In this way, during some transfer processes, the lateral shift module 140 and the first transverse shift module 150 can transfer the flower basket simultaneously, thereby improving the transfer efficiency of the flower basket.

[0090] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A self-circulating flower basket feeding and receiving device, characterized in that, include: The first lifting assembly (110) is configured to fix the basket and drive the basket to lift in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment; The second lifting assembly (130) is spaced apart from the first lifting assembly (110) in the first direction and is configured to fix the flower basket and drive the flower basket to lift in the height direction in order to cooperate with the processing equipment to place the processed silicon wafers into the empty flower basket in sequence. A first lateral movement module (150) is disposed on one side of the first lifting component (110) and the second lifting component (130) located in the second direction, and can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular; A lateral shift module (140) is aligned with the second lifting assembly (130) in a first direction and disposed in a second direction on the side of the first lateral shift module (150) away from the second lifting assembly (130). The lateral shift module (140) can cooperate with the first lateral shift module (150) or the second lifting assembly (130) to transport the flower basket in the second direction.

2. The flower basket self-circulating feeding and receiving device according to claim 1, characterized in that, The side-shifting module (140) includes a first fixing plate (141), a first transmission component (142), and a first driving component (143); The first fixing plate (141) is disposed in the second direction on the side of the first transverse module (150) away from the second lifting assembly (130); The first transmission component (142) is disposed on the first fixed plate (141) and is disposed corresponding to the second lifting component (130) in the first direction. The first transmission component (142) can drive the flower basket to move in the second direction. The first drive component (143) is disposed on the first fixed plate (141) and is connected to the first transmission component (142) in a transmission manner; The first drive component (143) can drive the first transmission component (142) to move in the second direction toward the second lifting component (130), so that the first transmission component (142) passes over the first lateral module (150) and cooperates with the second lifting component (130) to transfer the flower basket; The first drive component (143) can also drive the first transmission component (142) to move away from the second lifting component (130) in the second direction, so that the first transmission component (142) cooperates with the first lateral module (150) to transfer the flower basket.

3. The flower basket self-circulating feeding and receiving device according to claim 2, characterized in that, The first transverse module (150) includes a second fixed plate (151), a second transmission component (152), and a second drive component (153); The second fixing plate (151) is disposed between the second lifting assembly (130) and the first fixing plate (141) in the second direction, and the second fixing plate (151) extends from the first lifting assembly (110) to the second lifting assembly (130) in the first direction; The second transmission component (152) is disposed on the second fixed plate (151), and the second drive component (153) is disposed on the second fixed plate (151) and is connected to the second transmission component (152) in a transmission manner; The second drive component (153) can drive the second transmission component (152) to reciprocate in the first direction, and the second transmission component (152) can drive the flower basket to move in the second direction; The bearing surface of the second transmission component (152) is on the same plane as the bearing surface of the first transmission component (142); When the first transmission component (142) moves toward the second lifting component (130), it can pass over the second fixed plate (151); After the first transmission component (142) moves away from the second lifting component (130), the first transmission component (142) is located on the side of the second transmission component (152) away from the second lifting component (130). When the second transmission component (152) moves in the first direction to align with the first transmission component (142), the second transmission component (152) and the first transmission component (142) can cooperate to transmit the flower basket.

4. The self-circulating flower basket feeding and receiving device according to claim 3, characterized in that, The first drive assembly (143) includes a slide rail (144), a slider (145), and a drive motor (146); The slide rail (144) is fixedly installed on the first fixing plate (141), and the slider (145) is movably installed on the slide rail (144); The drive motor (146) is mounted on the slide rail (144) and is connected to the slider (145) in a transmission manner. The drive motor (146) can drive the slider (145) to reciprocate in the second direction. The first transmission component (142) is mounted on the slider (145).

5. The self-circulating flower basket feeding and receiving device according to claim 4, characterized in that, The first transmission component (142) includes a support member (147) and a belt module (148). The support member (147) is connected to the slider (145). The belt module (148) is disposed above the support member (147), and the support member (147) forms a clearance space on the side close to the first transverse module (150).

6. The flower basket self-circulating feeding and receiving device according to claim 3, characterized in that, The flower basket self-circulating feeding and receiving device also includes a first conveyor line (170) and a second conveyor line (180). The second conveyor line (180) is spaced above the first conveyor line (170). One of the first conveyor line (170) and the second conveyor line (180) is at the same height as the first transverse module (150), and the other is correspondingly arranged with the first lifting component (110) to convey the flower basket to the first lifting component (110).

7. The flower basket self-circulating feeding and receiving device according to claim 6, characterized in that, The bearing surface of the second transmission component (152) is on the same plane as the bearing surface of the first conveyor line (170). The second transmission component (152) can also transport the basket loaded with the processed silicon wafer to the first conveyor line (170). The second conveyor line (180) is used to transport the basket loaded with the unprocessed silicon wafer to the first lifting component (110).

8. The flower basket self-circulating feeding and receiving device according to any one of claims 1-7, characterized in that, The first lifting component (110) and the second lifting component (130) are arranged opposite to each other.

9. The self-circulating flower basket feeding and receiving device according to claim 6, characterized in that, The second conveyor line (180) includes a third transmission belt (181) and a fourth transmission belt (182) arranged side by side along the first direction; The flower basket self-circulating feeding and receiving device also includes a second transverse module (190), which is located between the second conveyor line (180) and the first lifting component (110) and is at the same height as the second conveyor line (180). The second transverse module (190) can transport the flower baskets on the third transmission belt (181) and the fourth transmission belt to the first lifting component (110).

10. The flower basket self-circulating feeding and receiving device according to claim 9, characterized in that, The second transverse module (190) includes a third fixing plate (191), a third transmission component (192), and a third drive component (193); The third fixing plate (191) is disposed on one side of the first lifting assembly (110) and the second lifting assembly (130) in the second direction, and is located above the first transverse module (150). The third fixing plate (191) extends from the first lifting assembly (110) to the second lifting assembly (130). The third transmission component (192) is disposed on the third fixed plate (191), the third drive component (193) is disposed on the third fixed plate (191), and the third drive component (193) is connected to the third transmission component (192) in a transmission manner. The third drive component (193) can drive the third transmission component (192) to reciprocate in the first direction. The bearing surface of the third transmission component (192) is on the same plane as the bearing surface of the second conveyor line (180), and the third transmission component (192) can drive the flower basket to move in the second direction.

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