Material frame clamping jaw for feeding and discharging workbench of silicon wafer processing groove type RCA cleaning equipment

Abstract

The utility model provides a material frame clamping jaw for a feeding and discharging workbench of silicon wafer processing groove type RCA cleaning equipment, which comprises a base installed at the lower end of a mechanical arm, and two symmetrically arranged and hinged supporting blocks are installed at the lower end of the base; the opening and closing ends of the supporting blocks are opposite, the supporting blocks are in clearance fit when located at the collinear position, and the clearance is configured to prevent collision when the supporting blocks are opened; a limiting assembly is installed on the base, and when the supporting blocks are collinear, the supporting blocks can only be opened upwards or downwards. An air cylinder is further arranged on the base and drives the supporting blocks to rotate by 180 degrees clockwise or anticlockwise under the action of the transmission assembly, so that when the supporting blocks are collinear, the supporting blocks can be opened upwards or downwards. The material frame can be grabbed or separated through the lifting operation of the clamping jaw, the structure is simple, the size of the RCA cleaning equipment is reduced, and therefore cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of tank-type RCA cleaning equipment, specifically a material frame gripper for the loading and unloading workbench of a silicon wafer processing tank-type RCA cleaning equipment. Background Technology

[0002] In the semiconductor manufacturing industry, the cleaning of silicon wafers directly affects the quality of subsequent processes and the performance of the final product. Therefore, tank-type RCA cleaning equipment is usually chosen for cleaning.

[0003] During silicon wafer cleaning, the silicon wafers are first placed in a wet basket, and then the wet basket is placed in a material frame; a robotic arm picks up the material frame and transfers it.

[0004] Robotic arms typically employ one of two structures for gripping material frames: one uses hooks driven by horizontal and lifting mechanisms to grip or release the frame; the other uses cylinder-driven, hinged claws that open and close to grip the frame. Both structures require the cleaning tank of the cleaning equipment to provide space for the hooks to move horizontally and for the claws to open, resulting in a relatively large cleaning tank volume. This leads to a larger overall size of the RCA cleaning equipment, increasing costs. Utility Model Content

[0005] To address the technical problems in the background art, this utility model discloses a material frame gripper for the loading and unloading workbench of a silicon wafer processing tank-type RCA cleaning equipment.

[0006] This utility model provides a material frame gripper for the loading and unloading workbench of a silicon wafer processing tank-type RCA cleaning equipment, including a base installed at the lower end of the robot arm, and two symmetrically arranged, hinged support blocks installed at the lower end of the base;

[0007] When the opening and closing ends of the support blocks are opposite each other and the support blocks are in a collinear position, the gap is configured so that no collision will occur when the support blocks are opened;

[0008] A limit component is installed on the base, so that when the blocks are collinear, the blocks can only open to the upward or downward side;

[0009] The base is also equipped with a cylinder, which drives the support block to rotate 180° clockwise or counterclockwise under the action of the transmission component, so that when the support blocks are collinear, they can be opened up or down.

[0010] Initially, the support block is horizontally arranged and can only rotate upwards. When it needs to grab the material frame, the gripper descends, and the support block rotates upwards due to the obstruction of the material frame. When the support block detaches from the material frame, it resets under gravity. Subsequently, the gripper rises and supports the material frame, causing the material frame to rise synchronously. When the gripper needs to detach from the material frame, it first drives the material frame to descend to the target position, then the support block continues to descend and move away. Subsequently, the cylinder drives the support block to rotate 180°, and the gripper automatically opens under gravity. At this point, the gripper does not support the material frame when it rises, allowing for stable detachment from the material frame. This invention achieves grabbing or detaching from the material frame through only the lifting and lowering operation of the gripper, which not only simplifies the structure but also reduces the size of the RCA cleaning equipment, thus lowering costs.

[0011] The specific structure of the support block that allows it to rotate is as follows: two symmetrically arranged support plates are installed at the lower end of the base; horizontally arranged bushings are provided on the support plates; the bearing seat is inserted into the bushing and rotated through the bearing; the cylinder drives the bearing seat to rotate; the support block is mounted on the bearing seat by a hinge.

[0012] The specific structure of the bearing seat is as follows: it includes an L-shaped connecting plate; the connecting plate is composed of a vertically arranged vertical plate and a horizontally arranged transverse plate; the limiting component is set as the transverse plate; the support block is installed on the transverse plate and hinged to the transverse plate; the back side of the vertical plate is connected to a rotating shaft inserted into the bushing.

[0013] The specific structure of the cylinder-driven support block rotation is as follows: a spring is installed inside the bushing; the outer end of the spring is fixedly connected to the inner wall of the bushing, and the inner end is fixedly connected to the rotating shaft; the transmission component is a wire rope; one end of the wire rope is fixedly connected to the driving end of the cylinder, and the other end is wound on the rotating shaft; the spring is used to drive the wire rope to wind up; the cylinder is used to drive the wire rope to unwind.

[0014] Since the relative position of the material frame and the support block is difficult to stabilize and is prone to slippage, the following improvements are made: the opposite ends of the support block are provided with arc grooves; when the support blocks are collinear, the arc grooves form a semi-circular arc groove, which is used to engage the top rod of the material frame; the position of the arc grooves is configured so that when the material frame is lifted, the arc grooves are located at the upper end.

[0015] To ensure that the cylinder can stably drive the wire rope unwinding, a further design feature is provided: a through hole is provided at the upper end of the bushing; the wire rope passes through the through hole; the through hole is coaxial with the cylinder piston rod.

[0016] The beneficial effects of this utility model are: this utility model can grasp or release the material frame by simply lifting the gripper, which not only has a simple structure, but also reduces the size of the RCA cleaning equipment, thus reducing costs. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0020] Figure 3 This is the front view of this utility model;

[0021] In the diagram: 1. Base; 2. Support block; 3. Cylinder; 4. Support plate; 5. Bushing; 6. Shaft seat; 7. Clock spring; 8. Wire rope; 21. Arc groove; 51. Perforation; 61. Vertical plate; 62. Horizontal plate; 63. Rotating shaft. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0023] This utility model discloses a material frame gripper for the loading and unloading workbench of a silicon wafer processing tank-type RCA cleaning equipment. It includes a horizontally arranged base 1, installed at the lower end of a robotic arm. Two symmetrically arranged, hinged support blocks 2 are installed at the lower end of the base 1. Specifically, two symmetrically arranged, vertically arranged support plates 4 are installed at the lower end of the base 1. A fixing plate extends vertically from the upper end of each support plate 4, and the fixing plate and base 1 are fixed together by bolts. A horizontally arranged bushing 5 is fixedly installed at the lower end of each support plate 4 by welding. The inner end of the bushing 5 extends 45mm beyond the support plate, thus providing two connection points between the bushing 5 and the support plate 4. Both points can be corner welded to improve the connection strength between the bushing 5 and the support plate 4. A clamping platform is provided at both ends of the inner hole of the bushing 5, and bearings are clamped onto the clamping platform.

[0024] The support block 2 is cylindrical and mounted on the bearing seat 6. Its specific structure is as follows: the bearing seat 6 includes an L-shaped connecting plate; the connecting plate consists of a vertically arranged vertical plate 61 and a horizontally arranged transverse plate 62. A hinge seat is provided at the root of the transverse plate 62, and the hinge seat consists of two symmetrically arranged and vertically positioned hinge plates. One end of the support block 2 is cut into a symmetrically arranged plate shape, inserted into the hinge plate, and hinged via a hinge shaft. When the side of the support block 2 is in contact with the transverse plate 62, the two support blocks 2 are collinear, their opening and closing ends face each other, and there is a clearance fit between the support blocks 2. When the support blocks 2 rotate, there is no collision between them.

[0025] The support block 2 has an arc groove 21 at its opposite ends; when the support blocks 2 are collinear, the arc groove 21 forms a semi-circular arc groove 21, which is used to engage the top rod of the material frame; the position of the arc groove 21 is configured such that when the material frame is supported, the arc groove 21 is located at the upper end. In this way, when the support block 2 supports the material frame, it limits the movement and prevents the material frame from shifting relative to the support block 2.

[0026] A spring-loaded spring 7 is installed inside the bushing 5; the outer end of the spring-loaded spring 7 is fixedly connected to the inner wall of the bushing 5, and the inner end is fixedly connected to the rotating shaft 63. A cylinder 3 is installed on the upper end of the base 1, with its piston rod facing downward. A through hole 51 is opened at the upper end of the bushing 5; a steel wire rope 8 passes through the through hole 51; one end of the steel wire rope 8 is fixedly connected to the driving end of the cylinder 3, and the other end is wound around the rotating shaft 63; the spring-loaded spring 7 is used to drive the steel wire rope 8 to wind up; the cylinder 3 is used to drive the steel wire rope 8 to unwind. In the initial state, the cylinder 3 is in the tensioned state, the support block 2 is located at the upper end of the transverse plate 62, and the arc-shaped groove is located at the upper end. When the piston rod of cylinder 3 retracts, the wire rope 8 unwinds, causing the bearing seat 6 to rotate 180°, and the support block 2 also rotates 180° and is located at the lower end of the transverse plate 62, with the arc groove facing downwards. At this time, the spring spring 7 is in a stretched state. When the piston rod of cylinder 3 extends, the wire rope 8 is wound up under the elastic force of the spring spring 7, and causes the support block 2 to rotate and reset.

[0027] The perforation 51 is coaxial with the piston rod of the cylinder 3, so that the cylinder 3 can stably drive the wire rope 8 to unwind.

[0028] Two opposing support blocks 2 are set as a group. This utility model is set as four groups arranged symmetrically. The positions of these four groups of support blocks 2 form a rectangle, thereby gripping the four symmetrical positions of the material frame to improve the movement stability of the material frame.

[0029] Initially, the support block 2 is horizontally arranged and can only rotate upwards. When it is necessary to grab the material frame, the gripper descends, and the support block 2 rotates upwards due to the obstruction of the material frame. When the support block 2 detaches from the material frame, it resets under gravity. Subsequently, the gripper rises and supports the material frame, causing the material frame to rise synchronously. When the gripper needs to detach from the material frame, it first drives the material frame to descend to the target position, then the support block 2 continues to descend and move away. Subsequently, the cylinder 3 drives the support block 2 to rotate 180°, and the gripper automatically opens under gravity. At this time, the gripper does not support the material frame when it rises, allowing it to stably detach from the material frame. In other embodiments, a torsion spring is also sleeved on the rotating shaft 63. When the support block 2 detaches from the material frame, it can reset under the action of the torsion spring, returning to a collinear position. This utility model can achieve grabbing or detaching from the material frame by only raising and lowering the gripper, which not only simplifies the structure but also reduces the size of the RCA cleaning equipment, thus reducing costs.

[0030] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A material frame gripper for a loading and unloading workbench of a silicon wafer processing tank-type RCA cleaning equipment, comprising a base (1) installed at the lower end of a robotic arm, characterized in that: The lower end of the base (1) is equipped with two symmetrically arranged, hinged support blocks (2); When the opening and closing ends of the support blocks (2) are opposite each other and the support blocks (2) are in a collinear position, the gap is configured so that the support blocks (2) will not collide when they are opened. A limit component is installed on the base (1). When the support blocks (2) are collinear, the support blocks (2) can only be opened to the upward or downward side. The base (1) is also equipped with a cylinder (3), which drives the support block (2) to rotate 180° clockwise or counterclockwise under the action of the transmission component, so that when the support block (2) is collinear, it can be opened upward or downward.

2. The material frame gripper of the loading and unloading workbench of the silicon wafer processing tank-type RCA cleaning equipment according to claim 1, characterized in that: Two symmetrically arranged support plates (4) are installed at the lower end of the base (1); A horizontally arranged bushing (5) is provided on the support plate (4); The bearing seat (6) is inserted into the bushing (5) and rotated through the bearing; The cylinder (3) drives the shaft seat (6) to rotate; The support block (2) is mounted on the bearing seat (6) by means of hinge.

3. The material frame gripper of the loading and unloading workbench of the silicon wafer processing tank-type RCA cleaning equipment according to claim 2, characterized in that: The bearing seat (6) includes an L-shaped connecting plate; The connecting plate is composed of a vertically arranged vertical plate (61) and a horizontally arranged transverse plate (62); The limiting component is configured as a horizontal plate (62); The support block (2) is mounted on the horizontal plate (62) and hinged to the horizontal plate (62); The back side of the vertical plate (61) is connected to a rotating shaft (63) that is inserted into the bushing (5).

4. The material frame gripper of the loading and unloading workbench of the silicon wafer processing tank-type RCA cleaning equipment according to claim 3, characterized in that: A spring-loaded spring (7) is provided inside the bushing (5); The outer end of the spring (7) is fixedly connected to the inner wall of the bushing (5), and the inner end is fixedly connected to the rotating shaft (63); The transmission component is a steel wire rope (8); One end of the wire rope (8) is fixedly connected to the drive end of the cylinder (3), and the other end is wound around the rotating shaft (63); The spring (7) is used to drive the wire rope (8) to wind up; The cylinder (3) is used to drive the wire rope (8) to unwind.

5. The material frame gripper of the loading and unloading workbench of the silicon wafer processing tank-type RCA cleaning equipment according to claim 4, characterized in that: The opposite ends of the support block (2) are provided with arc grooves (21); When the support blocks (2) are collinear, the arc groove (21) forms a semi-circular arc groove, which is used to hold the top rod of the material receiving frame; When the arc groove (21) is positioned to support the material frame, the arc groove (21) is located at the upper end.

6. The material frame gripper of the loading and unloading workbench of the silicon wafer processing tank-type RCA cleaning equipment according to claim 4, characterized in that: The upper end of the bushing (5) is provided with a through hole (51); The steel wire rope (8) passes through the hole (51); The perforation (51) is coaxial with the piston rod of the cylinder (3).

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