Glow discharge cleaning device

Abstract

The utility model provides a glow discharge cleaning device, which is positioned in a vacuum sealing cavity of a container and comprises a discharge assembly with an electrode tip and an electrode stem, a cooling assembly with an annular cavity surrounding the electrode stem, and a heat conduction assembly with a first insulating heat conductor and a second insulating heat conductor, the electrode tip is sleeved and fixed at one end of the electrode stem, and the other end of the electrode stem extends and penetrates through the container wall to be electrically connected with a power supply; the inner side wall and the outer side wall of the first insulating heat conductor are attached to the outer side wall of the electrode rod and the inner side wall of the annular cavity respectively, and the two ends of the first insulating heat conductor are supported on the inner side end face of the electrode tip and the container wall respectively. And the second insulating heat conductor is sleeved at the end part of the first insulating heat conductor, is clamped between the electrode tip and the opposite end surface of the annular cavity, and covers the corresponding end surface of the annular cavity. Heat generated by discharging of the discharging assembly is transferred to the cooling assembly through the heat conduction assembly to achieve heat dissipation, and the problem that electrode oxidation or structural deformation is prone to being caused by high temperature during long-term operation is solved.

Description

Technical Field

[0001] This utility model belongs to the field of discharge cleaning technology for fusion devices, and specifically relates to a glow discharge cleaning device. Background Technology

[0002] As a key device in nuclear fusion research, the impurity gases on the walls of the stellarator's vacuum chamber can severely affect the plasma confinement performance and operational lifespan. Conventional treatment techniques include baking, boronizing, and glow discharge treatment. Glow discharge cleaning is currently the mainstream wall treatment technology. Its principle is to bombard the wall surface with high-energy ions generated by low-pressure gas discharge, causing the impurity gases to desorb and be discharged by the vacuum pump.

[0003] Existing glow discharge devices suffer from insufficient heat dissipation of electrodes and systems. Long-term operation can easily lead to electrode oxidation or structural deformation due to high temperatures (causing cooling contact detachment), thus shortening their service life. Utility Model Content

[0004] The purpose of this invention is to solve the problem that existing glow discharge devices suffer from insufficient heat dissipation of electrodes and systems, and are prone to electrode oxidation or structural deformation due to high temperatures during long-term operation (causing cooling contact detachment), thus shortening their service life.

[0005] To address the aforementioned technical problems, this utility model discloses a glow discharge cleaning device, disposed within a vacuum-sealed cavity of a container. The glow discharge cleaning device includes a discharge assembly, a cooling assembly, and a heat-conducting assembly. The discharge assembly includes an electrode head and an electrode rod. The electrode head is sleeved and fixed to one end of the electrode rod, and the other end of the electrode rod extends through the container wall and is electrically connected to a power source outside the container. The outer wall of the electrode rod is sealed and insulated from the container wall. The cooling assembly has an annular cavity surrounding the electrode rod, within which coolant flows. A heat-conducting assembly is located between the electrode rod and the cooling assembly, and includes a first insulating heat conductor and a second insulating heat conductor. The first insulating heat conductor is a cylindrical structure extending axially along the electrode rod, with its inner wall fitting against the outer wall of the electrode rod and its outer wall fitting against the inner wall of the annular cavity. One axial end of the first insulating heat conductor abuts against the inner end face of the electrode head, and the other end is supported on the container wall. The second insulating heat conductor is sleeved on the end of the first insulating heat conductor near the electrode head, extends radially outward along the first insulating heat conductor, and is sandwiched between the opposing end faces of the electrode head and the annular cavity in the axial direction. Furthermore, the second insulating heat conductor radially covers the corresponding end face of the annular cavity.

[0006] Using the above technical solution, the glow discharge cleaning device is installed inside the vacuum-sealed cavity of the container. Its heat-conducting components, including a first insulating heat conductor and a second insulating heat conductor, are fully fitted axially and radially between the discharge component and the cooling component, which includes the electrode head and electrode rod. Helium or other dischargeable gases are introduced into the vacuum-sealed cavity of the container, and an external power source powers the electrode rod. A glow discharge is generated between the electrode head and the inner wall (cathode) of the container, removing impurities adsorbed on the inner wall. The heat-conducting components not only achieve electrical isolation between the discharge component and the cooling component but also transfer the heat generated by the discharge to the cooling component. Cooling is then achieved through the coolant circulating inside the annular cavity of the cooling component, thus preventing electrode oxidation or structural deformation due to high temperatures during long-term operation.

[0007] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment has an electrode head in the shape of a disc, which covers the ends of a first insulating heat conductor, a second insulating heat conductor, and an annular cavity; and the outer peripheral edge of the electrode head has a peripheral flange extending along the axial direction of the electrode rod, the flange covering the outer periphery of the second insulating heat conductor; the central part of the electrode head, on the side near the first insulating heat conductor, has a central protrusion protruding along the axial direction of the electrode rod, and the side of the first insulating heat conductor near the electrode head is provided with a central groove adapted to the central protrusion; the central part of the electrode head, on the side away from the first insulating heat conductor, is provided with a top groove, and one end of the electrode rod passes through the electrode head, is located in the top groove, and is covered with an electrode cap.

[0008] Using the above technical solution, the electrode head is disc-shaped and covers the ends of the first insulating heat conductor, the second insulating heat conductor, and the annular cavity. The flange of the outer peripheral edge of the electrode head covers the outer periphery of the second insulating heat conductor, ensuring that the upper surface of the electrode head has a sufficient effective discharge area. The center of the electrode head, near the first insulating heat conductor, has a central protrusion protruding along the axial direction of the electrode rod. The first insulating heat conductor, near the electrode head, has a central groove that matches the central protrusion. The central protrusion and central groove facilitate reliable and convenient installation of the electrode head and the first insulating heat conductor. One end of the electrode rod is located within the top groove and covered with an electrode cap, preventing plasma bombardment and chemical corrosion, and ensuring uniform glow discharge.

[0009] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in the embodiment of the present invention further includes a first heat-conducting layer and a second heat-conducting layer in the heat-conducting component; wherein, the first heat-conducting layer is sandwiched between the electrode head and the opposing surfaces of the first insulating heat-conducting body and the second insulating heat-conducting body; the second heat-conducting layer is sandwiched between the opposing surfaces of the second insulating heat-conducting body and the annular cavity.

[0010] Using the above technical solution, the first thermally conductive layer is sandwiched between the electrode head and the opposing surfaces of the first and second insulating thermally conductive bodies, and the second thermally conductive layer is sandwiched between the opposing surfaces of the second insulating thermally conductive body and the annular cavity. The thermal conductivity of the first and second thermally conductive layers improves the heat transfer efficiency.

[0011] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment further includes a coolant inlet pipe and a coolant outlet pipe in the cooling component, and an annular cavity with a coolant inlet and a coolant outlet. One end of the coolant inlet pipe is connected to the coolant inlet, and the other end extends through the container wall and connects to a coolant container outside the container, wherein coolant is stored in the coolant container. One end of the coolant outlet pipe is connected to the coolant outlet, and the other end extends through the container wall and connects to the coolant container. The outer walls of the coolant inlet pipe and the coolant outlet pipe are respectively sealed to the container wall.

[0012] By adopting the above technical solution, by setting up coolant inlet pipes and coolant outlet pipes that are respectively connected to the coolant inlet and coolant outlet of the annular cavity, coolant can be circulated to carry away the heat generated by glow discharge.

[0013] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment has a plurality of flow guiding fins arranged around the electrode rod at intervals inside the annular cavity. The plurality of flow guiding fins divide the annular cavity into a plurality of sub-cavities around the electrode rod. Each of the plurality of flow guiding fins has a notch on the side near the second insulating heat conductor. Two adjacent sub-cavities are fluidly connected to each other through the notch on the flow guiding fin between them. The coolant inlet and coolant outlet are located on the side of the annular cavity away from the second insulating heat conductor and are respectively connected to their respective sub-cavities.

[0014] By adopting the above technical solution, the annular cavity is divided into multiple sub-cavities surrounding the electrode rod by multiple guide fins. Two adjacent sub-cavities are fluidly connected to each other through a notch on the guide fin between them. The notch is located on the side of the guide fin closer to the second insulating heat conductor. The coolant inlet and coolant outlet are located on the side of the annular cavity away from the second insulating heat conductor. This enables the coolant to enter from the bottom up and overflow from the top notch, so that the coolant forms turbulence in the annular cavity and improves the heat exchange efficiency of the coolant in the annular cavity.

[0015] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment of the present invention has a coolant inlet pipe and a coolant outlet pipe that extend parallel to the electrode rod; and the glow discharge cleaning device further includes at least one positioning component, which is located between the side of the first insulating heat conductor away from the electrode head and the container wall, and is sequentially sleeved on the coolant inlet pipe, the coolant outlet pipe and the electrode rod.

[0016] By adopting the above technical solution, the positioning of the coolant inlet pipe, coolant outlet pipe and electrode rod is achieved by setting at least one positioning component, so as to ensure the positional stability of the three when the discharge assembly discharges.

[0017] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in the embodiment of the present invention further includes a support member. The support member is disposed on the side of the first insulating heat conductor away from the electrode head, sleeved and fixed on the outer periphery of the electrode rod, abutting against the end face of the first insulating heat conductor away from the electrode head, and extending radially outward along the electrode rod to abut against the end face of the annular cavity away from the electrode head.

[0018] By adopting the above technical solution and setting up support components, it is possible to support the side of the first insulating heat conductor and cooling component away from the electrode head, thus ensuring effective contact heat transfer between the heat conductor component and the discharge component and cooling component.

[0019] According to another specific embodiment of the present invention, in the glow discharge cleaning device disclosed in this embodiment of the present invention, an insulating layer is sleeved on the outer periphery of the portion of the electrode rod that extends out of the first insulating heat conductor.

[0020] Using the above technical solution, an insulating layer is fitted around the outer periphery of the part of the electrode rod that extends out of the first insulating heat conductor away from the electrode head, so as to form an insulating protection and ensure safety during the glow discharge process.

[0021] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment has a black coating on the outer surface of the annular cavity.

[0022] By employing the above technical solution, a black coating is applied to the outer surface of the annular cavity to increase its absorption capacity for external radiation.

[0023] According to another specific embodiment of the present invention, the glow discharge cleaning device disclosed in this embodiment of the present invention further includes a temperature sensor, with a temperature sensor respectively installed on the coolant inlet pipe and the coolant outlet pipe.

[0024] By adopting the above technical solution, a temperature sensor is set up to monitor the inlet and outlet temperature of the coolant in the cooling component in real time. The temperature regulation of the cooling component can be maintained by adjusting the flow rate of the coolant, thus avoiding structural deformation or insulation failure caused by high temperature.

[0025] The beneficial effects of this utility model are as follows: This utility model provides a glow discharge cleaning device, which is set in the vacuum-sealed cavity of a container, including a discharge component, a cooling component, and a heat-conducting component; wherein, the heat-conducting component, including a first insulating heat conductor and a second insulating heat conductor, is fully fitted axially and radially between the discharge component and the cooling component, which includes an electrode head and an electrode rod. Helium or other dischargeable gases are introduced into the vacuum-sealed cavity of the container, and an external power source is supplied to the electrode rod. A glow discharge is generated between the electrode head (anode) and the inner wall (cathode) of the container, removing impurity gases adsorbed on the inner wall of the container. The heat-conducting component not only achieves electrical isolation between the discharge component and the cooling component but also forms a stable heat transfer path, transferring the heat generated by the discharge to the cooling component in a timely and rapid manner. Heat is then dissipated through the coolant flowing inside the annular cavity of the cooling component, thus avoiding the problem of electrode oxidation or structural deformation due to high temperatures during long-term operation. Attached Figure Description

[0026] Figure 1 A schematic diagram of the glow discharge principle of the glow discharge cleaning device provided by this utility model;

[0027] Figure 2 A half-sectional structural diagram of the glow discharge cleaning device provided by this utility model;

[0028] Figure 3 A cross-sectional view of the electrode head of the glow discharge cleaning device provided by this utility model;

[0029] Figure 4 for Figure 1 A magnified view of position A in the diagram;

[0030] Figure 5 A schematic diagram of the cooling component of the glow discharge cleaning device provided by this utility model.

[0031] Explanation of reference numerals in the attached figures:

[0032] 10. Glow discharge cleaning device; 100. Discharge assembly; 110. Electrode head; 111. Flange; 112. Central protrusion; 113. Top groove; 120. Electrode rod; 130. Electrode cap; 140. First nut; 150. Anti-loosening washer; 160. Insulating layer; 200. Cooling assembly; 210. Annular cavity; 220. Coolant inlet pipe; 230. Coolant outlet pipe; 240. Coolant inlet; 250. Coolant outlet; 260. Flow guide. 270, notch; 300, heat-conducting component; 310, first insulating heat conductor; 320, second insulating heat conductor; 330, first heat-conducting layer; 340, second heat-conducting layer; 400, vacuum feedthrough insulator; 500, positioning component; 600, support component; 610, gasket; 620, second nut; 700, temperature sensor; 20, container; 21, container wall; 30, vacuum pump; 40, air intake system; 50, power supply; 60, cooling system. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0034] The glow discharge cleaning device provided by this utility model is installed in the vacuum-sealed cavity of a container and uses the principle of discharge to remove impurity gases adsorbed on the inner wall of the container.

[0035] It should be noted that, in this embodiment, the container may consist of a sealed Dewar can with an opening and sealing components such as a flange or sealing plug.

[0036] like Figure 1 As shown, the glow discharge cleaning device 10 provided by this utility model operates on the following principle: The glow discharge cleaning device 10 is placed inside the cavity of the container 20. A vacuum pump 30 is used to evacuate the cavity of the container 20 to form a vacuum-sealed cavity. Helium or other dischargeable gases are introduced into the vacuum-sealed cavity of the container 20 through the air intake system 40. An external power supply 50 powers the glow discharge cleaning device 10, generating a glow discharge between the glow discharge cleaning device 10 (anode) and the inner wall (cathode) of the container 20, thereby removing impurity gases adsorbed on the inner wall of the container 20. Furthermore, the glow discharge cleaning device 10 generates heat during the glow discharge process. A cooling system 60 provides coolant to the glow discharge cleaning device 10 to dissipate heat. The cooling system 60 includes a coolant container and a pump.

[0037] The following is combined Figures 2-5 The specific structure of the glow discharge cleaning device provided by this utility model will be described.

[0038] The glow discharge cleaning device provided by this utility model, such as Figure 2 As shown, it includes: a discharge assembly 100, a cooling assembly 200, and a heat-conducting assembly 300. The discharge assembly 100 includes an electrode head 110 and an electrode rod 120. The electrode head 110 is sleeved and fixed to one end of the electrode rod 120. The other end of the electrode rod 120 extends through the container wall 21 and is electrically connected to a power source outside the container. The outer wall of the electrode rod 120 is sealed and insulated from the container wall 21.

[0039] It should be noted that the electrode head 110 is made of a material that can be used as an anode discharge, such as a graphite anode. The container wall 21 can be the wall of a Dewar flask, or a container wall formed by a flange or a sealing plug. In one specific embodiment, the outer wall of the electrode rod 120 is sealed and insulated from the container wall 21 by a vacuum feed insulator 400 to ensure a vacuum seal inside the container.

[0040] like Figure 2 As shown, the cooling assembly 200 has an annular cavity 210 surrounding the electrode rod 120, and coolant flows through the annular cavity 210. It should be noted that in this embodiment, the coolant includes, but is not limited to, liquids with cooling effects such as water and liquid nitrogen. Figure 2 As shown, the heat-conducting component 300 is located between the electrode rod 120 and the cooling component 200, and includes a first insulating heat conductor 310 and a second insulating heat conductor 320. The first insulating heat conductor 310 is oriented along the axial direction of the electrode rod 120. Figure 2 The cylindrical structure extending in the Y direction has its inner wall attached to the outer wall of the electrode rod 120, and its outer wall attached to the inner wall of the annular cavity 210. Furthermore, one end of the first insulating heat conductor 310 in the axial direction (…) Figure 2 The upper end of the electrode 110 is attached to the inner end face of the electrode head 110, and the other end ( Figure 2 The lower end of the first insulating heat conductor 310 is supported on the container wall 21; the second insulating heat conductor 320 is sleeved on the side of the first insulating heat conductor 310 near the electrode head 110 (i.e., Figure 2 The upper end of the first insulating heat conductor 310 (with the radial direction of the first insulating heat conductor 310) Figure 2 Extending outward in the direction perpendicular to the Y direction, and sandwiched between the electrode head 110 (outer end face) and the annular cavity 210 in the axial direction ( Figure 2 Between the opposite end faces in the Y direction (in the middle) Figure 2 It is sandwiched between the lower outer end face of the electrode head 110 and the upper end face of the annular cavity 210. Furthermore, the second insulating heat conductor 320 radially covers the corresponding end face of the annular cavity 210. Figure 2 (the upper end face of the annular cavity 210) to increase the contact area between the corresponding end face of the annular cavity 210 and the second insulating heat conductor 320.

[0041] In one specific embodiment, the annular cavity 210 abuts against the second insulating heat conductor 320 at one end in the axial direction, and is supported on the container wall 21 at the other end. It should be noted that in this embodiment, the support on the container wall 21 can be either directly on the container wall 21 or, as in... Figure 2 The support shown is on a separately provided support member that is fixedly connected to the container wall 21, thereby achieving indirect support on the container wall 21.

[0042] It should be noted that in this embodiment, the first insulating heat conductor 310 and the second insulating heat conductor 320 can be integrally formed or fixedly connected using other commonly used methods, and both are made of ceramic or resin materials with insulating and thermally conductive properties. Because existing ceramic or resin materials are prone to insulation degradation or cracking under the high temperature and high-energy particle bombardment generated by discharge, to solve this problem, in one specific embodiment, both the first insulating heat conductor 310 and the second insulating heat conductor 320 are made of machinable aluminum nitride ceramic (i.e., SHAPAL) material. Since SHAPAL material combines high thermal conductivity and high insulation properties, it can achieve dual functions of insulation and heat conduction, avoiding insulation degradation or cracking.

[0043] Specifically, when using the glow discharge cleaning device provided by this utility model, helium or other dischargeable gases are introduced into the vacuum-sealed cavity of the container. The discharge assembly 100 includes an electrode head 110 and an electrode rod 120. The electrode head 110 is sleeved and fixed to one end of the electrode rod 120. The other end of the electrode rod 120 extends through the container wall 21 and is electrically connected to a power source outside the container, so that the power source supplies power to the electrode rod 120. A glow discharge can be generated between the electrode head 110 (anode) and the inner wall (cathode) of the container. While removing the impurity gases adsorbed on the inner wall of the container, a large amount of heat is also generated. By disposing a heat-conducting assembly 300, including a first insulating heat conductor 310 and a second insulating heat conductor 320, between the electrode rod 120 and the cooling assembly 200, with the inner wall of the first insulating heat conductor 310 fitting against the outer wall of the electrode rod 120 and the outer wall of the first insulating heat conductor 310 fitting against the inner wall of the annular cavity 210 of the cooling assembly 200, the first insulating heat conductor 310 abuts against the inner end face of the electrode head 110 in the axial direction; the second insulating heat conductor 320 is sleeved and fitted onto the end of the first insulating heat conductor 310 near the electrode head 110, sandwiched between the axially opposite end faces of the electrode head 110 and the annular cavity 210, and radially covering the annular cavity 210. The corresponding end face of the cavity 210 allows the heat-conducting component 300 to fully fit between the discharge component 100 and the cooling component 200, both axially and radially. The heat-conducting component 300 not only achieves electrical isolation between the discharge component 100 and the cooling component 200, but also forms a stable heat transfer path, which can transfer the heat generated by the discharge to the cooling component 200 in a timely manner. Then, the heat is dissipated through the coolant flowing inside the annular cavity 210 of the cooling component 200, so as to avoid the problem of electrode oxidation or structural deformation caused by high temperature during long-term operation, thus ensuring the life of the device. Furthermore, the operation of removing impurity gases using this device is simple and has high removal efficiency.

[0044] In one embodiment of this utility model, such as Figure 2 and Figure 3 As shown, the electrode head 110 is disc-shaped and covers the ends of the first insulating heat conductor 310, the second insulating heat conductor 320, and the annular cavity 210; furthermore, the outer peripheral edge of the electrode head 110 has an axial dimension along the electrode rod 120 ( Figure 2 and Figure 3 A peripheral flange 111 extending in the Y direction (as shown in the image) covers the outer periphery of the second insulating heat conductor 320, ensuring that the upper surface of the electrode head 110 has a sufficient effective discharge area and improving cleaning efficiency. To further increase the discharge area of ​​the electrode head 110, in one specific embodiment, the surface of the electrode head 110 on the side away from the first insulating heat conductor 310 (…) Figure 3 The upper surface of the middle part is arc-shaped.

[0045] Furthermore, such as Figure 2 and Figure 3 As shown, the electrode head 110 has a central protrusion 112 protruding along the axial direction of the electrode rod 120 on the side near the first insulating heat conductor 310. The first insulating heat conductor 310 has a central groove on the side near the electrode head 110 that matches the central protrusion 112. The central protrusion 112 and the central groove facilitate reliable and convenient installation of the electrode head 110 and the first insulating heat conductor 310. Figure 3 and Figure 4 As shown, a top groove 113 is provided at the center of the electrode head 110, on the side away from the first insulating heat conductor 310. One end of the electrode rod 120 passes through the electrode head 110, is located in the top groove 113, and is covered with an electrode cap 130, which can prevent plasma bombardment and chemical corrosion and ensure the uniformity of glow discharge.

[0046] In one specific implementation, such as Figure 4 As shown, the electrode rod 120 is fixedly connected to the electrode head 110 via a first nut 140 and an anti-loosening washer 150. During assembly, after the electrode rod 120 is fixedly connected to the electrode head 110 via the first nut 140 and the anti-loosening washer 150, the electrode cap 130 is then placed on the end of the electrode rod 120. Furthermore, to prevent thermal stress caused by the high temperature during operation of the glow discharge cleaning device from damaging the stability of the connection between the electrode head 110 and the electrode rod 120, both the first nut 140 and the anti-loosening washer 150 are made of titanium-zirconium-molybdenum high-temperature alloy. This material has the characteristics of high temperature resistance (operating temperature can reach over 1000℃) and low coefficient of thermal expansion, which can reduce the loosening of the connection caused by thermal stress, ensure the uniformity of discharge, and further ensure the removal efficiency and effect of impurity gases.

[0047] Furthermore, in order to improve heat transfer efficiency, such as Figure 4 As shown, the heat-conducting component 300 further includes a first heat-conducting layer 330 and a second heat-conducting layer 340; wherein, the first heat-conducting layer 330 is sandwiched between the lower surface of the electrode head 110 and the upper surfaces of the first insulating heat conductor 310 and the second insulating heat conductor 320; the second heat-conducting layer 340 is sandwiched between the lower surface of the second insulating heat conductor 320 and the upper surface of the annular cavity 210; and both the first heat-conducting layer 330 and the second heat-conducting layer 340 are made of graphite material. Since graphite has good thermal conductivity, by setting the first heat-conducting layer 330 and the second heat-conducting layer 340 made of graphite material, the heat transfer efficiency of the heat-conducting component 300 is improved.

[0048] In one embodiment of this utility model, such as Figure 2 and Figure 5As shown, the cooling assembly 200 also has a coolant inlet pipe 220 and a coolant outlet pipe 230, and the annular cavity 210 has a coolant inlet 240 and a coolant outlet 250. One end of the coolant inlet pipe 220 is connected to the coolant inlet 240, and the other end extends through the container wall 21 and connects to a coolant container outside the container, where coolant is stored. One end of the coolant outlet pipe 230 is connected to the coolant outlet 250, and the other end extends through the container wall 21 and connects to the coolant container. The outer walls of the coolant inlet pipe 220 and the coolant outlet pipe 230 are respectively sealed to the container wall 21. In this embodiment, by providing the coolant inlet pipe 220 and the coolant outlet pipe 230 connected to the coolant inlet 240 and the coolant outlet 250 of the annular cavity 210 respectively, the flow of coolant can be achieved, carrying away the heat generated by the glow discharge.

[0049] It should be noted that, in this embodiment, the coolant inlet 240 and coolant outlet 250 are connected to the coolant inlet pipe 220 and coolant outlet pipe 230 respectively via vacuum-connected radial sealing joints (i.e., VCR joints). The outer walls of the coolant inlet pipe 220 and the coolant outlet pipe 230 are respectively sealed to the container wall 21 via sealing components such as sealing rings.

[0050] In one embodiment of this utility model, such as Figure 2 and Figure 5 As shown, the annular cavity 210 has a plurality of flow-guiding fins 260 arranged at intervals around the electrode rod 120, which divide the annular cavity 210 into a plurality of sub-cavities around the electrode rod 120; each of the plurality of flow-guiding fins 260 is close to the second insulating heat conductor 320. Figure 2 One side (shown in the image) Figure 5 The upper side of the annular cavity 210 has a notch 270, and two adjacent sub-cavities are fluidly connected to each other through the notch 270 on the guide fins 260 between them; the coolant inlet 240 and the coolant outlet 250 are located on the side of the annular cavity 210 away from the second insulating heat conductor 320. Figure 5 (The lower side of the cavity) is connected to its respective sub-cavity.

[0051] Specifically, the notch 270 is located on the upper side of each guide fin 260, i.e., on the upper side of the annular cavity 210. The coolant inlet 240 and coolant outlet 250 are located on the lower side of the annular cavity 210, enabling the coolant to enter from bottom to top and overflow through the top notch 270, thus creating turbulence within the annular cavity 210 and improving the heat exchange efficiency of the coolant within the annular cavity 210. In one specific embodiment, to improve heat exchange uniformity, multiple guide fins 260 are evenly arranged inside the annular cavity 210 so that multiple sub-cavities also evenly surround the electrode rod 120. The fixed connection methods between the guide fins 260 and the annular cavity 210 include, but are not limited to, welding and riveting. It should be noted that in this embodiment, the specific number of guide fins 260 is not limited and can be set to two, three, or even more depending on the actual situation.

[0052] In one specific embodiment, the annular cavity 210 is formed by a sealed connection of an upper sealing plate, an outer side wall, a lower sealing plate, and an inner side wall. It should be noted that the installation steps of the cooling assembly 200 include: first, sealing (e.g., welding) multiple guide fins 260 on the outer periphery of the inner side wall. Then, sealingly connecting the multiple guide fins 260 to the upper sealing plate, the outer side wall, and the lower sealing plate to form an annular cavity 210 with multiple sub-cavities, wherein a coolant inlet 240 and a coolant outlet 250 are pre-formed on the lower sealing plate. Then, connecting the coolant inlet 240 to the coolant inlet pipe 220 and the coolant outlet 250 to the coolant outlet pipe 230 (specifically, this connection can be achieved through corresponding pipe fittings), thus completing the installation.

[0053] In one embodiment of this utility model, such as Figure 2 As shown, the coolant inlet pipe 220 and the coolant outlet pipe 230 both extend parallel to the electrode rod 120; and the glow discharge cleaning device also includes at least one positioning component 500, which is located between the side of the first insulating heat conductor 310 away from the electrode head 110 and the container wall 21, and is sequentially sleeved on the coolant inlet pipe 220, the coolant outlet pipe 230 and the electrode rod 120.

[0054] By setting at least one positioning component 500, the positioning of the coolant inlet pipe 220, coolant outlet pipe 230 and electrode rod 120 is achieved, so as to ensure the positional stability of the three when the discharge assembly 100 discharges and avoid affecting the cleaning effect.

[0055] It should be noted that in this embodiment, the positioning member 500 is made of insulating material. In one specific embodiment, the positioning member 500 is a positioning strip with a certain thickness made of a composite material (i.e., G10 material) of glass fiber and epoxy resin. Furthermore, the number of positioning members 500 can be one, or it can be as follows: Figure 2 The two shown can be set to more depending on the actual positioning effect.

[0056] In one embodiment of this utility model, such as Figure 2 As shown, the glow discharge cleaning device also includes a support member 600. The support member 600 is disposed on the side of the first insulating heat conductor 310 away from the electrode head 110, sleeved and fixed to the outer periphery of the electrode rod 120, and is located at the end face of the first insulating heat conductor 310 away from the electrode head 110 (i.e., the end face of the first insulating heat conductor 310 away from the electrode head 110). Figure 2 The lower end of the first insulating heat conductor 310 abuts against and along the radial direction of the electrode rod 120 (with... Figure 2 The direction perpendicular to the Y direction extends outward to the end face of the annular cavity 210 away from the electrode head 110 (i.e., Figure 2 The lower end face of the annular cavity 210 abuts against it.

[0057] By setting the support member 600, the side of the first insulating heat conductor 310 and the cooling component 200 away from the electrode head 110 can be supported, ensuring effective contact heat transfer between the heat conductor 300 and the discharge component 100 and the cooling component 200.

[0058] Specifically, the support member 600 is fixedly connected to the electrode rod 120, and the electrode rod 120 is fixedly connected to the container wall 21. The first insulating heat conductor 310, located away from the electrode head 110, abuts against the support member 600, thus indirectly supporting the container wall 21 on the side of the first insulating heat conductor 310 away from the electrode head 110. The specific position to which the support member 600 extends radially outward along the electrode rod 120 is not specifically limited in this embodiment; it can be configured to extend to cover the entire lower end face of the annular cavity 210, or as shown below. Figure 2 The configuration shown extends to cover the lower end face of the annular cavity 210. As long as it can abut against the lower end face of the annular cavity 210, it can support the lower end face of the annular cavity 210 and provide support force to ensure that the upper end face of the annular cavity 210 and the lower end face (outer side) of the electrode head 110 are in close contact.

[0059] It should be noted that in this embodiment, the support member 600 is made of a material with high temperature resistance and high elasticity to enhance structural stability. In one specific embodiment, the support member 600 is a support block made of polytetrafluoroethylene (also known as Teflon), which combines excellent high temperature resistance and high elasticity (temperature resistance up to 260°C, elastic modulus up to 1.5 GPa) to enhance structural stability. The pre-tightening force ensures close contact between the heat-conducting component 300 and the discharge component 100 and cooling component 200, maintaining a good heat transfer path even in vacuum thermal cycling and avoiding local overheating caused by poor contact.

[0060] In one specific implementation, such as Figure 2 As shown, the support member 600 is fixedly connected to the electrode rod 120 via a washer 610 and a second nut 620. The second nut 620 and the washer 610 are both made of titanium-zirconium-molybdenum high-temperature alloy material, which can reduce the possibility of loosening of the connection due to thermal stress.

[0061] In one embodiment of this utility model, such as Figure 2 As shown, an insulating layer 160 is fitted around the outer periphery of the portion of the electrode rod 120 that extends beyond the electrode head 110 from the first insulating heat conductor 310, forming an insulating protection to ensure safety during the glow discharge process. In one specific embodiment, the insulating layer 160 is a sleeve made of Teflon material to ensure good insulation.

[0062] In one embodiment of this utility model, the outer surface of the annular cavity 210 is coated with a black coating. By blackening the outer surface of the annular cavity 210, the absorption capacity of external radiation can be increased.

[0063] Specifically, the outer surface of the annular cavity 210 refers to the surface that can directly contact the helium or other dischargeable gases filled into the vacuum-sealed cavity of the container, including the outer surface of the outer wall of the annular cavity 210 and the outer surface of the portion of the lower sealing plate that does not contact the support member 600.

[0064] In one embodiment of this utility model, such as Figure 2 As shown, the glow discharge cleaning device also includes a temperature sensor 700, and temperature sensors 700 are respectively installed on the coolant inlet pipe 220 and the coolant outlet pipe 230.

[0065] Specifically, a temperature sensor 700 is set up to monitor the inlet and outlet temperatures of the coolant in the cooling component 200 in real time. The temperature regulation of the cooling component 200 can be maintained by adjusting the flow rate of the coolant, so as to avoid structural deformation or insulation failure caused by high temperature.

[0066] The cleaning method of the glow discharge cleaning device provided by this utility model includes the following steps:

[0067] S1: Device Installation: Place the glow discharge cleaning device into the container through the opening. Seal the container using flanges or sealing plugs. After the electrode rod passes through the container wall, it is electrically connected to the power source outside the container. It is essential to ensure that the electrode rod is sealed and insulated from the container wall (e.g., using a vacuum feed insulator). The annular cavity of the cooling assembly is connected to the external cooling system to provide coolant. During installation, ensure all components are securely fixed and that the vacuum feed insulator is leak-free.

[0068] S2: Vacuum Establishment: Start the vacuum pump and evacuate the cavity inside the container until the vacuum level is less than or equal to 1×10⁻⁶. -3 Pa forms a vacuum chamber (i.e., a vacuum-sealed cavity).

[0069] S3: Gas introduction: Introduce helium or other dischargeable gases into the vacuum chamber, and control the gas flow rate to keep the gas pressure in the vacuum chamber stable within the range of 10Pa to 100Pa (which can be adjusted according to the size of the container cavity).

[0070] S4: Glow discharge start-up: A voltage in the range of 500V to 1000V and a current in the range of 1A to 3A are applied to the electrode rod through the power supply outside the container. A glow discharge is generated between the electrode head (as the anode) and the inner wall of the container (as the cathode) and lasts for several hours, thereby removing the impurity gas adsorbed on the inner wall of the container. At the same time, the heat generated is transferred to the cooling component through the heat conduction component.

[0071] S5: Heat dissipation control: The cooling system is activated simultaneously with the discharge, allowing the coolant to circulate in the annular cavity of the cooling component to absorb heat, thus avoiding the problem of electrode oxidation or structural deformation caused by high temperature during long-term operation.

[0072] S6: Cleaning Termination: First, turn off the power to stop the discharge, then stop the gas supply. After the vacuum chamber naturally returns to atmospheric pressure, disassemble the glow discharge cleaning device to complete the cleaning process.

[0073] It should be noted that, in addition to the specific embodiments described above, those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Although the description of this utility model will be presented in conjunction with preferred embodiments, this does not mean that the features of this utility model are limited to that embodiment. On the contrary, the purpose of describing the utility model in conjunction with the embodiments is to cover other options or modifications that may be derived from the claims of this utility model. To provide a deep understanding of this utility model, many specific details will be included in the following description. This utility model may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this utility model, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0074] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0075] In the description of this embodiment, it should be noted that the terms "upper", "lower", "inner", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0076] The terms “first”, “second”, etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0077] In the description of this embodiment, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment based on the specific circumstances.

[0078] Although the present invention has been illustrated and described with reference to certain preferred embodiments, those skilled in the art should understand that the above description is a further detailed explanation of the present invention in conjunction with specific embodiments, and should not be construed as limiting the specific implementation of the present invention to these descriptions. Those skilled in the art can make various changes in form and detail, including some simple deductions or substitutions, without departing from the spirit and scope of the present invention.

Claims

1. A glow discharge cleaning device, characterized in that, The glow discharge cleaning device, which is disposed in the vacuum-sealed cavity of the container, includes: a discharge component, a cooling component, and a heat-conducting component; The discharge assembly includes an electrode head and an electrode rod. The electrode head is sleeved and fixed to one end of the electrode rod. The other end of the electrode rod extends through the container wall and is electrically connected to a power source outside the container. The outer wall of the electrode rod is sealed and insulated from the container wall. The cooling assembly has an annular cavity surrounding the electrode rod, and coolant flows through the annular cavity; The heat-conducting assembly is located between the electrode rod and the cooling assembly, and includes a first insulating heat conductor and a second insulating heat conductor. The first insulating heat conductor is a cylindrical structure extending axially along the electrode rod, with its inner wall fitting against the outer wall of the electrode rod and its outer wall fitting against the inner wall of the annular cavity. One end of the first insulating heat conductor in the axial direction abuts against the inner end face of the electrode head, and the other end is supported on the container wall. The second insulating heat conductor is sleeved on the end of the first insulating heat conductor near the electrode head, extends radially outward along the first insulating heat conductor, and is sandwiched between the electrode head and the opposite end faces of the annular cavity in the axial direction. Furthermore, the second insulating heat conductor covers the corresponding end face of the annular cavity in the radial direction.

2. The glow discharge cleaning apparatus as described in claim 1, characterized in that, The electrode head is disc-shaped and covers the ends of the first insulating heat conductor, the second insulating heat conductor, and the annular cavity; Furthermore, the outer peripheral edge of the electrode head has a peripheral flange extending axially along the electrode rod, and the flange covers the outer periphery of the second insulating heat conductor; The electrode head has a central protrusion protruding along the axial direction of the electrode rod on the side near the first insulating heat conductor, and the first insulating heat conductor has a central groove adapted to the central protrusion on the side near the electrode head. A top groove is provided at the center of the electrode head, on the side away from the first insulating heat conductor. One end of the electrode rod passes through the electrode head, is located in the top groove, and is covered with an electrode cap.

3. The glow discharge cleaning device as described in claim 2, characterized in that, The heat-conducting component further includes a first heat-conducting layer and a second heat-conducting layer; The first thermally conductive layer is sandwiched between the electrode head and the opposing surfaces of the first and second insulating thermally conductive bodies. The second thermally conductive layer is sandwiched between the opposing surfaces of the second insulating thermally conductive body and the annular cavity.

4. The glow discharge cleaning apparatus as described in claim 3, characterized in that, The cooling assembly also has a coolant inlet pipe and a coolant outlet pipe, and the annular cavity has a coolant inlet and a coolant outlet. One end of the coolant inlet pipe is connected to the coolant inlet, and the other end extends through the container wall and connects to the coolant container outside the container. The coolant container stores coolant. One end of the coolant outlet pipe is connected to the coolant outlet, and the other end extends through the container wall and is connected to the coolant container. The outer walls of the coolant inlet pipe and the coolant outlet pipe are respectively sealed to the container wall.

5. The glow discharge cleaning apparatus as described in claim 4, characterized in that, The annular cavity has multiple flow guide fins arranged at intervals around the electrode rod, which divide the annular cavity into multiple sub-cavities around the electrode rod. Each of the plurality of flow guide fins has a notch on the side near the second insulating heat conductor, and two adjacent sub-cavities are in fluid communication with each other through the notch on the flow guide fin between them; The coolant inlet and the coolant outlet are located on the side of the annular cavity away from the second insulating heat conductor and are respectively connected to their respective sub-cavities.

6. The glow discharge cleaning apparatus as described in claim 5, characterized in that, The coolant inlet pipe and the coolant outlet pipe both extend parallel to the electrode rod; Furthermore, the glow discharge cleaning device also includes at least one positioning component, which is located between the first insulating heat conductor on the side away from the electrode head and the container wall, and is sequentially sleeved on the coolant inlet pipe, the coolant outlet pipe and the electrode rod.

7. The glow discharge cleaning apparatus as described in claim 6, characterized in that, It also includes a support member, which is disposed on the side of the first insulating heat conductor away from the electrode head, sleeved and fixed to the outer periphery of the electrode rod, abutting against the end face of the first insulating heat conductor away from the electrode head, and extending radially outward along the electrode rod to abut against the end face of the annular cavity away from the electrode head.

8. The glow discharge cleaning apparatus as described in claim 7, characterized in that, An insulating layer is fitted around the outer periphery of the portion of the electrode rod that extends beyond the first insulating heat conductor.

9. The glow discharge cleaning apparatus as described in claim 8, characterized in that, The outer surface of the annular cavity is coated with a black coating.

10. The glow discharge cleaning apparatus as described in claim 9, characterized in that, It also includes temperature sensors, which are respectively installed on the coolant inlet pipe and the coolant outlet pipe.

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