Grid type high-quality combined coating preparation equipment

Abstract

The grid type high-quality combined coating preparation equipment comprises an octagonal furnace, an ion source is arranged in the center of the top in the octagonal furnace, and the ion source is used as an upper electrode; a left side lower electrode, a lower side central electrode and a right side lower electrode are arranged at the bottom in the octagonal furnace, the left side lower electrode and the right side lower electrode are symmetrically distributed, the center of the left side lower electrode, the center of the right side lower electrode and the center of the ion source form an included angle of 40-65 degrees, and the lower side central electrode and the ion source are matched to form a vertical up-down ion bombardment structure; the left side lower electrode and the ion source are matched to form a first side edge dip angle ion bombardment structure, the right side lower electrode and the ion source are matched to form a second side edge dip angle ion bombardment structure, and the multi-angle cooperative surface treatment structure is formed through combination.

Description

Technical Field

[0001] This utility model relates to surface coating technology and equipment, specifically, it demonstrates a coating preparation equipment for high-quality mesh-type bonding. Background Technology

[0002] Diamond-like carbon (DLC) coatings combine the excellent properties of graphite and diamond, such as high hardness, high corrosion resistance, and excellent tribological properties and biocompatibility, and have broad application prospects in aerospace, precision electromechanical and biomedical fields.

[0003] Current diamond-like carbon coating preparations have poor adhesion to the workpiece.

[0004] Therefore, it is necessary to provide a coating preparation equipment for high-quality mesh-type bonding to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a coating preparation equipment for high-quality mesh-type bonding.

[0006] This utility model achieves the above objectives through the following technical solution:

[0007] A high-quality mesh-structured coating preparation equipment includes an octagonal furnace. An ion source is located at the top center of the octagonal furnace and serves as the upper electrode. At the bottom of the octagonal furnace, a left lower electrode, a lower center electrode, and a right lower electrode are arranged, with the left and right lower electrodes symmetrically distributed. The centers of the left and right lower electrodes and the ion source form an angle of 40-65°. The lower center electrode and the ion source cooperate to form a vertical up-and-down ion bombardment structure. The left lower electrode and the ion source cooperate to form a first side-tilt angle ion bombardment structure, and the right lower electrode and the ion source cooperate to form a second side-tilt angle ion bombardment structure, thus forming a multi-angle synergistic surface treatment structure.

[0008] Furthermore, the ion source is composed of a tungsten filament ion source.

[0009] Furthermore, the lower electrodes on the left and right sides are arranged in a fan-shaped ring, with the center of the bottom of the octagonal furnace as a reference.

[0010] Furthermore, the fan-shaped angle of the lower left electrode is 30-50°.

[0011] Furthermore, the sector angle of the lower electrode on the right side is 60-70°.

[0012] Furthermore, the lower center electrode is a ring or a cylinder.

[0013] Furthermore, when the lower center electrode is a ring, the diameter of the ring is 5-8% of the diameter of the octagonal furnace cavity.

[0014] Furthermore, when the lower center electrode is a cylinder, the diameter of the cylinder is 3-6% of the diameter of the inner cavity of the banana leaf furnace.

[0015] Furthermore, several vacuum ports are provided on the side of the octagonal furnace.

[0016] Furthermore, there should be at least three vacuum ports.

[0017] Compared with the prior art, this utility model obtains a serrated concave bonding mesh through a surface tilting and intersecting treatment method, which effectively ensures the adhesion of the diamond-like carbon coating. At the same time, in the final stage of coating preparation, the first side tilting ion bombardment structure, the vertical up and down ion bombardment structure, and the second side tilting ion bombardment structure are simultaneously activated to perform left-hand, vertical, and right-hand tilting ion bombardment treatment on the workpiece surface, thereby obtaining a diamond-like carbon coating with small or no tip. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the octagonal furnace.

[0019] Figure 2 This is a schematic diagram of the electrode distribution inside the octagonal furnace.

[0020] Figure 3 This is a schematic diagram of the distribution of the lower electrode 3 on the left side. Detailed Implementation Example 1:

[0021] See Figure 1-3 This embodiment demonstrates a mesh-type high-quality coating preparation equipment, including an octagonal furnace 1. An ion source 2 is disposed at the top center of the octagonal furnace 1, and the ion source 2 is used as the upper electrode. At the bottom of the octagonal furnace 1, a left lower electrode 3, a lower center electrode 4, and a right lower electrode 5 are disposed, and the left lower electrode 3 and the right lower electrode 4 are symmetrically distributed. The center of the left lower electrode 3, the right lower electrode 4, and the ion source 2 forms an angle of 40-65°. The lower center electrode 4 and the ion source 2 cooperate to form a vertical up-and-down ion bombardment structure. The left lower electrode 3 and the ion source 2 cooperate to form a first side tilt angle ion bombardment structure. The right lower electrode 5 and the ion source 2 cooperate to form a second side tilt angle ion bombardment structure, which together form a multi-angle synergistic surface treatment structure.

[0022] Ion source 2 is composed of a tungsten wire ion source.

[0023] The lower electrode 3 on the left and the lower electrode 5 on the right are arranged in a fan-shaped ring, with the center of the bottom of the octagonal furnace 1 as a reference.

[0024] The fan-shaped angle of the lower left electrode 3 is 30-50°.

[0025] The sector angle of the lower electrode 5 on the right side is 60-70°.

[0026] The lower center electrode 4 is a ring or cylinder.

[0027] When the lower center electrode 3 is a ring, the diameter of the ring is 5-8% of the inner diameter of the octagonal furnace 1.

[0028] When the lower center electrode 3 is a cylinder, the diameter of the cylinder is 3-6% of the inner diameter of the banana leaf furnace 1.

[0029] Several vacuum ports 6 are provided on the side of the octagonal furnace 1.

[0030] There are 6 vacuum ports, and the number must be at least three.

[0031] Compared with the prior art, this utility model obtains a serrated concave bonding mesh through a surface tilting and intersecting treatment method, which effectively ensures the adhesion of the diamond-like coating.

[0032] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A coating preparation equipment for high-quality mesh-type bonding, characterized in that: The system includes an octagonal furnace, with an ion source located at the top center, which serves as the upper electrode. At the bottom of the furnace, there are a left lower electrode, a lower center electrode, and a right lower electrode, with the left and right lower electrodes symmetrically distributed. The center of the left and right lower electrodes and the ion source form an angle of 40-65°. The lower center electrode and the ion source work together to form a vertical up-and-down ion bombardment structure. The left lower electrode and the ion source work together to form a first side-tilt angle ion bombardment structure, and the right lower electrode and the ion source work together to form a second side-tilt angle ion bombardment structure, thus forming a multi-angle synergistic surface treatment structure.

2. The equipment for preparing a high-quality mesh-type bonded coating according to claim 1, characterized in that: The ion source is composed of a tungsten wire ion source.

3. The equipment for preparing a high-quality mesh-type bonded coating according to claim 2, characterized in that: The lower electrodes on the left and right sides are arranged in a fan-shaped ring, with the center of the bottom of the octagonal furnace as a reference.

4. The equipment for preparing a high-quality mesh-type bonded coating according to claim 3, characterized in that: The fan-shaped angle of the lower left electrode is 30-50°.

5. The equipment for preparing a high-quality mesh-type bonded coating according to claim 4, characterized in that: The sector angle of the lower electrode on the right side is 60-70°.

6. The equipment for preparing a high-quality mesh-type bonded coating according to claim 5, characterized in that: The lower center electrode is either a ring or a cylinder.

7. The equipment for preparing a high-quality mesh-type bonded coating according to claim 6, characterized in that: When the lower center electrode is a ring, the diameter of the ring is 5-8% of the diameter of the octagonal furnace cavity.

8. The equipment for preparing a high-quality mesh-type bonded coating according to claim 7, characterized in that: When the lower center electrode is a cylinder, the diameter of the cylinder is 3-6% of the diameter of the inner cavity of the banana leaf furnace.

9. The equipment for preparing a high-quality mesh-type bonded coating according to claim 8, characterized in that: Several vacuum ports are provided on the side of the octagonal furnace.

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