Material rack limiting system, coating chamber and continuous coating equipment

Abstract

The utility model provides a material rack limiting system, a coating chamber and continuous coating equipment, relates to the technical field of coating equipment, and aims to solve the problems that equipment operation stability is influenced by jumping of a material rack during rotation in the coating process and the coating effect is influenced by workpiece shaking to a certain extent. The utility model provides a material rack limiting system which comprises a material rack mechanism and a pressing mechanism. The material frame mechanism comprises a frame body and a hanging rod, a supporting component is formed on the frame body, and the hanging rod penetrates through the supporting component and is rotationally connected with the supporting component; the pressing mechanism is arranged corresponding to the supporting component, and the pressing mechanism comprises a driving assembly and a pressing component; the telescopic end of the driving assembly is connected with the pressing component. A positioning concave part is formed in the side, away from the telescopic end, of the pressing component, and a limiting space is formed by the positioning concave part and the supporting component and used for limiting the movement amount of the hanging rod in the vertical direction.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a material rack limiting system, a coating chamber, and a continuous coating equipment. Background Technology

[0002] Continuous coating production lines can transform the original large-volume, long-duration coating operation of multiple rods into small-volume, short-duration coating operations of a single rod. Compared with multi-rod coating, this not only improves the coating effect but also increases work efficiency to a certain extent.

[0003] In current coating production lines, the material rack also needs to carry the workpieces into the coating chamber for etching and coating operations. During the coating operation, the material rack rotates, which in turn drives the workpieces to rotate continuously in the coating chamber, making the formed film layer more uniform.

[0004] However, the rotation of the material rack may cause displacement in the vertical direction, i.e., jumping. The jumping of the material rack will affect the stability of the overall structure and the coating quality of the workpiece.

[0005] Therefore, there is an urgent need to provide a material rack limiting system, a coating chamber, and a continuous coating equipment to solve the problems existing in the prior art to a certain extent. Utility Model Content

[0006] The purpose of this invention is to provide a material rack limiting system, a coating chamber, and a continuous coating equipment, so as to solve to a certain extent the problems of material rack jumping during the coating process, which affects the stability of equipment operation and workpiece shaking, which affects the coating effect.

[0007] This utility model provides a material rack limiting system, including a material rack mechanism and a clamping mechanism; the material rack mechanism includes a frame and a hanging rod, the frame has a supporting member, the hanging rod passes through the supporting member and is rotatably connected to the supporting member; the clamping mechanism is provided corresponding to the supporting member, and the clamping mechanism includes a driving component and a clamping member; the telescopic end of the driving component is connected to the clamping member; a positioning recess is formed on the side of the clamping member away from the telescopic end, the positioning recess and the supporting member form a limiting space, used to limit the amount of movement of the hanging rod in the vertical direction.

[0008] The driving assembly includes a driving member and a connecting member. The connecting member is connected to the telescopic end of the driving member, and the side of the pressing member opposite to the positioning recess is connected to the connecting member.

[0009] Specifically, the clamping mechanism further includes a limiting wheel assembly, which is rotatably connected to the clamping member, and a portion of the limiting wheel assembly is located within the limiting space and can contact the hanging rod.

[0010] Furthermore, the limiting wheel assembly includes a positioning element, a bearing, and a wheel body; the clamping member forms a receiving space, the positioning element is disposed through the receiving space of the clamping member, the bearing is sleeved on the positioning element, the wheel body is sleeved on the bearing, and a portion of the wheel body protrudes out of the receiving space and enters the limiting space.

[0011] The driving component is a cylinder, and the telescopic end of the cylinder is connected to the clamping component.

[0012] Specifically, the material rack clamping device provided by this utility model further includes a sealing mechanism, which covers the drive component and is sealed to the drive component.

[0013] The supporting components include a first supporting component and a second supporting component, which are disposed opposite to each other at both ends of the frame. One end of the hanging rod is disposed corresponding to the first supporting component, and the other end is disposed corresponding to the second supporting component. The clamping mechanism is disposed corresponding to at least the first supporting component or the second supporting component.

[0014] Specifically, the first support component includes a first support column and a positioning wheel. One end of the first support column is connected to the frame, and the positioning wheel is disposed at the other end of the first support column and is rotatably connected to the first support column. One end of the hanging rod passes through the positioning wheel and is fixedly connected to the positioning wheel.

[0015] Compared with existing technologies, the material rack limiting system provided by this utility model has the following advantages:

[0016] The material rack limiting system provided by this utility model includes a material rack mechanism and a clamping mechanism. The material rack mechanism includes a frame and a hanging rod. The frame has a supporting member, and the hanging rod passes through the supporting member and is rotatably connected to the supporting member. The clamping mechanism is provided corresponding to the supporting member and includes a driving component and a clamping component. The telescopic end of the driving component is connected to the clamping component. A positioning recess is formed on the side of the clamping component away from the telescopic end. The positioning recess and the supporting member form a limiting space to limit the amount of movement of the hanging rod in the vertical direction.

[0017] This analysis shows that the support members formed by the frame can provide stable support for the hanging rod, ensuring that the hanging rod can extend in the horizontal direction. Since the hanging rod in this application is rotatably connected to the support members, it is possible to rotate relative to the support members during the coating stage.

[0018] By setting a clamping mechanism at the position of the corresponding support member, and the clamping mechanism including a drive component and a clamping member, the drive component can drive the clamping member to move towards or away from the support member. When it is necessary to clamp and limit the hanging rod, the drive component extends, causing the clamping member to move towards the hanging rod. Since a positioning recess is formed at the end of the clamping member away from the drive component in this application, a limiting space can be formed by the positioning recess cooperating with the support member. Thus, the hanging rod can be limited by the limiting space, which to a certain extent avoids the hanging rod jumping in the vertical direction, affecting the overall structural stability and coating effect.

[0019] It is understandable that the limiting space formed by the positioning recess and the supporting member in this application does not completely lock the hanging rod. There is still a certain gap between the limiting space and the hanging rod, but the gap is small. This ensures the limiting of the hanging rod while avoiding the clamping member from affecting the rotation of the hanging rod.

[0020] In addition, this utility model also provides a coating chamber, including a cavity, a transmission device and the above-mentioned material rack limiting system, wherein the clamping mechanism is sealed to the cavity and the clamping member is located inside the cavity; the transmission device is arranged along the length direction of the cavity and is used to transport the material rack mechanism.

[0021] In the material rack limiting system of this application, the clamping mechanism is connected to the cavity and does not move with the material rack mechanism. Therefore, when the material rack mechanism enters the cavity and moves into position under the action of the transmission device, the clamping mechanism and the support component are positioned relative to each other, and the clamping component of the clamping mechanism moves downward to cooperate with the support component to form a limiting space, thereby limiting the hanging rod. After being limited, the hanging rod rotates to begin etching or coating operations.

[0022] Therefore, in actual operation, the cavity in this application is also equipped with a positioning detection component, which can accurately stop when the material rack mechanism moves into position, thereby ensuring accurate alignment between the clamping mechanism and the support component.

[0023] This utility model also provides a continuous coating equipment, including multiple coating chambers, which are arranged sequentially.

[0024] Since the clamping mechanism in the material rack limiting system provided in this application is installed for each coating chamber, the material rack mechanism can be limited by the clamping mechanism during the sequential movement of multiple coating chambers, thereby ensuring the stable operation of the overall continuous coating equipment and improving the coating effect of the workpiece. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the clamping mechanism in the material rack limiting system provided in this embodiment of the utility model;

[0027] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0028] Figure 3 This is a schematic diagram of the coating chamber provided in an embodiment of the present invention;

[0029] Figure 4 for Figure 3 A magnified view of a section at point C;

[0030] Figure 5 for Figure 3 A magnified view of a section at point B in the middle.

[0031] In the diagram: 1-Frame; 101-First support component; 1011-First support column; 1012-Matching wheel; 102-Second support component; 2-Hanging rod; 201-Positioning wheel; 3-Drive assembly; 301-Drive component; 302-Connecting component; 3021-Connector; 3022-First insulating component; 3023-Second insulating component; 3024-Protective cover; 4-Pressure component; 401-Positioning recess; 402-Positioning component; 403-Bearing; 404-Wheel body; 5-Sealing mechanism; 6-Coating chamber; 7-Transmission device. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0033] In the description of the embodiments of this application, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0034] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the description of the embodiments of this application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0037] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” may be used herein to describe the relationship between one element and another as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also the different orientations of the device during use or operation.

[0038] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0039] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0040] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have various constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis that they can be implemented by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0041] like Figures 1-3 As shown, this utility model provides a material rack limiting system, including a material rack mechanism and a clamping mechanism; the material rack mechanism includes a frame 1 and a hanging rod 2, the frame 1 has a supporting member, the hanging rod 2 passes through the supporting member and is rotatably connected to the supporting member; the clamping mechanism is provided corresponding to the supporting member, and the clamping mechanism includes a driving component 3 and a clamping component 4; the telescopic end of the driving component 3 is connected to the clamping component 4; a positioning recess 401 is formed on the side of the clamping component 4 away from the telescopic end, the positioning recess 401 and the supporting member form a limiting space, which is used to limit the amount of movement of the hanging rod 2 in the vertical direction.

[0042] Compared with existing technologies, the material rack limiting system provided by this utility model has the following advantages:

[0043] The material rack limiting system provided by this utility model can provide stable support for the hanging rod 2 through the support member formed by the frame 1, ensuring that the hanging rod 2 can extend in the horizontal direction. Since the hanging rod 2 in this application is rotatably connected to the support member, it can rotate relative to the support member during the coating stage.

[0044] By setting a clamping mechanism at the position of the corresponding support member, and the clamping mechanism including a drive component 3 and a clamping member 4, the drive component 3 can drive the clamping member 4 to move towards or away from the support member. When it is necessary to clamp and limit the hanging rod 2, the drive component 301 extends, causing the clamping member 4 to move towards the hanging rod 2. Since the end of the clamping member 4 away from the drive component 3 in this application has a positioning recess 401, the positioning recess 401 can cooperate with the support member to form a limiting space. Thus, the limiting space can limit the hanging rod 2, and to a certain extent avoid the hanging rod 2 from jumping in the vertical direction, which would affect the overall structural stability and coating effect.

[0045] It is understandable that the limiting space formed by the positioning recess 401 and the supporting member in this application does not completely lock the hanging rod 2. There is still a certain gap between the limiting space and the hanging rod 2 in space, but the gap is small. This ensures that the hanging rod 2 is limited while avoiding the clamping member 4 from affecting the rotation of the hanging rod 2.

[0046] Optionally, such as Figure 1 Combination Figure 2 As shown, the drive assembly in this application includes a drive member 301 and a connecting member 302. The connecting member 302 is connected to the telescopic end of the drive member 301, and the side of the pressing member 4 away from the positioning recess 401 is connected to the connecting member 302.

[0047] The connecting member 302 in this application includes a connector 3021, a first insulating member 3022, a second insulating member 3023, and a protective cover 3024. One end of the connector 3021 is connected to the telescopic end of the driving member 301, and the other end is connected to the first insulating member 3022. The first insulating member 3022 and the second insulating member 3023 are connected by fastening structures such as bolts. The clamping member 4 is connected to the second insulating member 3023. Since the hanging rod 2 will come into contact with the clamping member 4 when it jumps in the vertical direction, and the positioning end of the driving member 301 in this application is located outside the coating chamber 6, in order to prevent the hanging rod 2 from being electrified and then being transmitted by the clamping member 4, causing the driving member 301 to become electrified, this application can separate the clamping member 4 from the connector 3021 by setting the first insulating member 3022 and the second insulating member 3023, thereby ensuring the safety of the overall system.

[0048] Since the clamping component 4, the connecting component 3021, the first insulating component 3022, and the second insulating component 3023 mentioned above are all located inside the coating chamber 6, the protective cover can protect the first insulating component 3022, the second insulating component 3023, and the connecting component 3021 to a certain extent, avoiding the problem of a large amount of coating layer adhering to them in the coating environment for a long time, which would affect their service life.

[0049] Optionally, such as Figures 1-5 As shown, the clamping mechanism in this application also includes a limiting wheel assembly, which is rotatably connected to the clamping member 4, and part of the limiting wheel assembly is located within the limiting space and can contact the hanging rod 2.

[0050] It is understandable that, due to the small gap between the hanging rod 2 and the pressing member 4, the hanging rod 2 will frequently come into contact with the pressing member 4 when it bounces vertically. This application solves this problem by setting a limiting wheel assembly on the pressing member 4 and rotatably connecting the limiting wheel assembly to the pressing member 4, with part of the limiting wheel assembly located within the limiting space. Thus, when the hanging rod 2 bounces, it will come into contact with the limiting wheel assembly, thereby changing the sliding friction into rolling friction through the limiting wheel assembly, reducing the friction force and avoiding the problem of contact affecting the rotation of the hanging rod 2.

[0051] Preferably, such as Figure 5 As shown, the limiting wheel assembly in this application includes a positioning member 402, a bearing 403, and a wheel body 404; the clamping member 4 forms a receiving space, the positioning member 402 is disposed through the receiving space of the clamping member 4, the bearing 403 is sleeved on the positioning member 402, the wheel body 404 is sleeved on the bearing 403, and a portion of the wheel body 404 protrudes out of the receiving space and enters the limiting space.

[0052] In this application, the positioning component 402 is a positioning shaft, the inner ring of the bearing 403 is fixedly connected to the positioning shaft, the positioning shaft is fixedly connected to the clamping component 4, and the outer ring of the bearing 403 is fixedly connected to the wheel body 404. Thus, when the hanging rod 2 contacts the wheel body 404, it can drive the wheel body 404 to rotate relative to the positioning shaft, thereby achieving the purpose of converting sliding friction into rolling friction.

[0053] Preferably, the driving component 301 in this application is a cylinder, and the telescopic end of the cylinder is connected to the clamping component 4.

[0054] Optionally, such as Figure 1 Combination Figure 3 As shown, the material rack clamping device provided by this utility model also includes a sealing mechanism 5, which covers the drive component 301 and is sealed to the drive component 301.

[0055] Since part of the drive component 301 in this application is located inside the coating chamber 6, and the coating chamber 6 needs to maintain a vacuum level during the coating process, in order to avoid leakage at the connection position of the drive component 301 affecting the vacuum level of the coating chamber 6, this application can achieve a sealed connection between the drive component 301 and the coating chamber 6 by adding a sealing mechanism 5, thereby ensuring the vacuum level of the coating chamber 6.

[0056] Optionally, such as Figure 3As shown, the support components in this application include a first support component 101 and a second support component 102. The first support component 101 and the second support component 102 are disposed opposite to each other at both ends of the frame 1. One end of the hanging rod 2 is disposed corresponding to the first support component 101, and the other end is disposed corresponding to the second support component 102. The clamping mechanism is disposed corresponding to at least the first support component 101 or the second support component 102.

[0057] The first support member 101 and the second support member 102, which are relatively arranged at both ends of the frame 1, can provide stable load-bearing for the hanging rod 2, ensuring that the hanging rod 2 can extend in the horizontal direction. The clamping mechanism in this application can be set corresponding to either the first support member 101 or the second support member 102, but preferably, such as Figure 3 As shown, there are two clamping mechanisms in this application, corresponding to the first support member 101 and the second support member 102 respectively, so as to ensure the stability of the hanging rod 2 during operation.

[0058] Optionally, such as Figure 4 As shown, the first support member 101 in this application includes a first support column 1011 and a positioning wheel 201. One end of the first support column 1011 is connected to the frame 1, and the positioning wheel 201 is disposed at the other end of the first support column 1011. The positioning wheel 201 is rotatably connected to the first support column 1011. One end of the hanging rod 2 passes through the positioning wheel 201 and is fixedly connected to the positioning wheel 201.

[0059] In this application, a mating wheel 1012 is connected to the first support column 1011, and the positioning wheel 201 in this application is an integrally formed component with the aforementioned hanging rod 2. The positioning wheel 201 is rotatably connected to the first support column 1011, and as... Figure 4 As shown, the positioning wheel 201 can contact the mating wheel 1012 connected to the first support column 1011. Thus, when the positioning wheel 201 rotates, it can drive the mating wheel 1012 to rotate. The mating wheel 1012 can support the positioning wheel 201 and also change the sliding friction into rolling friction, reducing the friction force of the positioning wheel 201 during operation and improving the smoothness of the overall structure operation.

[0060] Accordingly, since the first support column 1011 in this application has two opposing uprights, the positioning wheel 201 can be positioned between the two uprights to limit the horizontal movement of the hanging rod 2, thereby ensuring the stability of the hanging rod 2 during operation.

[0061] In addition, this utility model also provides a coating chamber 6, including a cavity, a transmission device 7 and the above-mentioned material rack limiting system, a pressing mechanism is sealed to the cavity, and the pressing component 4 is located inside the cavity; the transmission device 7 is arranged along the length direction of the cavity and is used to transport the material rack mechanism.

[0062] In the material rack limiting system of this application, the clamping mechanism is connected to the cavity and does not move with the material rack mechanism. Therefore, when the material rack mechanism enters the cavity and moves into position under the action of the transmission device 7, the clamping mechanism and the support member are positioned relative to each other, and the clamping member 4 of the clamping mechanism moves downward to cooperate with the support member to form a limiting space, thereby limiting the hanging rod 2. After being limited, the hanging rod 2 rotates to begin etching or coating operations.

[0063] Therefore, in actual operation, the cavity in this application is also equipped with a positioning detection component, which can accurately stop when the material rack mechanism moves into position, thereby ensuring accurate alignment between the clamping mechanism and the support component.

[0064] This utility model also provides a continuous coating equipment, including multiple coating chambers 6, which are arranged sequentially.

[0065] Since the clamping mechanism in the material rack limiting system provided in this application is installed for each coating chamber 6, the material rack mechanism can be limited by the clamping mechanism during the sequential movement of multiple coating chambers 6, thereby ensuring the stable operation of the overall continuous coating equipment and improving the coating effect of the workpiece.

[0066] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A material rack limiting system, characterized in that, Includes a material rack mechanism and a clamping mechanism; The material rack mechanism includes a frame and a hanging rod. The frame has a supporting member, and the hanging rod passes through the supporting member and is rotatably connected to the supporting member. The clamping mechanism is provided corresponding to the supporting member, and the clamping mechanism includes a driving component and a clamping member; the telescopic end of the driving component is connected to the clamping member; The clamping member has a positioning recess on the side opposite to the telescopic end. The positioning recess and the supporting member form a limiting space to limit the amount of movement of the hanging rod in the vertical direction.

2. The material rack limiting system according to claim 1, characterized in that, The drive assembly includes a drive member and a connecting member. The connecting member is connected to the telescopic end of the drive member, and the side of the clamping member opposite to the positioning recess is connected to the connecting member.

3. The material rack limiting system according to claim 1, characterized in that, The clamping mechanism further includes a limiting wheel assembly, which is rotatably connected to the clamping member, and a portion of the limiting wheel assembly is located within the limiting space and can contact the hanging rod.

4. The material rack limiting system according to claim 3, characterized in that, The limiting wheel assembly includes a positioning component, a bearing, and a wheel body; The clamping member has a receiving space, the positioning member is disposed through the receiving space of the clamping member, the bearing is sleeved on the positioning member, the wheel is sleeved on the bearing, and a portion of the wheel protrudes out of the receiving space and enters the limiting space.

5. The material rack limiting system according to claim 2, characterized in that, The driving component is a cylinder, and the telescopic end of the cylinder is connected to the clamping component.

6. The material rack limiting system according to claim 2, characterized in that, It also includes a sealing mechanism that covers the drive member and is sealed to the drive member.

7. The material rack limiting system according to claim 1, characterized in that, The support components include a first support component and a second support component, which are disposed opposite to each other at both ends of the frame. One end of the hanging rod is disposed corresponding to the first support component, and the other end is disposed corresponding to the second support component. The clamping mechanism is provided at least corresponding to the first support member or the second support member.

8. The material rack limiting system according to claim 7, characterized in that, The first support component includes a first support column and a positioning wheel. One end of the first support column is connected to the frame, and the positioning wheel is disposed at the other end of the first support column and is rotatably connected to the first support column. One end of the hanging rod passes through the positioning wheel and is fixedly connected to the positioning wheel.

9. A coating chamber, characterized in that, The device includes a cavity, a transmission device, and a material rack limiting system as described in any one of claims 1-8, wherein the clamping mechanism is sealed to the cavity, and the clamping member is located inside the cavity; The transmission device is arranged along the length of the cavity and is used to transport the material rack mechanism.

10. A continuous coating apparatus, characterized in that, It includes multiple coating chambers as described in claim 9, wherein the multiple coating chambers are arranged in sequence.

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