Acid-base pretreatment device for CVD (Chemical Vapor Deposition) cutter

Abstract

The utility model relates to a CVD (chemical vapor deposition) cutter acid-base pretreatment device which comprises a mounting frame internally provided with a plurality of treatment stations, a transmission mechanism is arranged above the mounting frame, the treatment stations at least comprise a first station, a second station and at least one cleaning station, and a plurality of sliding parts are arranged on the transmission mechanism. Each sliding part is provided with a CVD cutter box connected through a lifting mechanism and can sequentially pass through different processing stations under the action of the transmission mechanism, and when the sliding parts move to the positions above the processing stations, the lifting mechanisms drive the CVD cutter boxes to move downwards into the processing stations for preprocessing and drive the CVD cutter boxes to move upwards to reset after preprocessing is finished. The plurality of processing stations are arranged in the mounting frame, the plurality of sliding parts are arranged on the transmission mechanism on the mounting frame, the CVD cutter box is connected with the sliding parts through the lifting mechanism, the cutters can be processed in batches, only one group of acid-base solution needs to be arranged, and waste is avoided.

Description

Technical Field

[0001] This utility model relates to the technical field of chemical vapor deposition pretreatment equipment, specifically to an acid-base pretreatment device for CVD cutting tools. Background Technology

[0002] Because carbide tools contain cobalt, which hinders the growth of diamond coatings, the substrate of carbide tools must undergo acid-base pretreatment before diamond film chemical deposition to achieve cobalt removal, decarburization, and roughening of the substrate. Currently, acid-base pretreatment of CVD tools is mainly performed manually. However, manual processing is inefficient, and the timing of acid-base treatment is subject to significant errors, resulting in different pretreatment times for different tools within the same batch, thus affecting the processing effect.

[0003] To address the aforementioned technical problems, a Chinese invention patent with patent number ZL201810889112.5 (publication number CN109136878B), entitled "An Automated Acid-Alkali Pretreatment Device for Diamond Coated Tools," discloses a pretreatment device. This device includes a circular mounting bracket with two sets of treatment pools arranged circumferentially on the top surface of the bracket. Each set of pools includes a clear water pool, an alkali treatment pool, and an acid treatment pool. The mounting bracket is equipped with a vertical slide assembly and a horizontal slide assembly. The tools are mounted on the vertical slide assembly via quick-connect couplings. Driven by a motor, the vertical and horizontal slide assemblies rotate around a central axis, moving the tools to different treatment pools for processing. While this device can perform batch pretreatment of tools, only two vertical slide assemblies can be installed, limiting the number of tools that can be processed at one time. Furthermore, the two sets of treatment pools on the mounting bracket result in a large volume of acid and alkali solutions, thus increasing the pretreatment cost.

[0004] Therefore, further improvements are needed to the internal structure of the CVD tool pretreatment device. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a CVD tool acid-base pretreatment device that can process tools in batches and uses a small amount of acid and base solution, in view of the above-mentioned existing technology.

[0006] The technical solution adopted by this utility model to solve the above-mentioned technical problems is as follows: the CVD tool acid-base pretreatment device includes a mounting frame with multiple processing stations inside, and a transmission mechanism is provided above the mounting frame. The characteristic is that the processing stations include at least a first station for alkali treatment, a second station for acid treatment, and at least one cleaning station. The transmission mechanism is provided with multiple sliding parts, and each sliding part is provided with a CVD tool holder connected by a lifting mechanism. Each sliding part can pass through different processing stations in sequence under the action of the transmission mechanism. When a certain sliding part moves to the corresponding position above a certain processing station, the CVD tool holder can move downward into the processing station for corresponding pretreatment under the action of the lifting mechanism. After the corresponding pretreatment is completed, it can also move upward to reset under the action of the lifting mechanism.

[0007] To facilitate the installation of the transmission mechanism, preferably, the mounting frame is provided with multiple support parts extending upwards from the top surface, and the support parts are provided with mounting plates for mounting the transmission mechanism. The transmission mechanism's function is to sequentially transport the tools in the CVD tool holder to the top of each different workstation. Each workstation is located within the mounting frame, and the mounting frame, through the cooperation of the support parts and mounting plates, positions the transmission mechanism above each workstation. The tools, connected to the transmission mechanism, can switch between different workstations.

[0008] To achieve transmission between components, preferably, the transmission mechanism includes a transmission member disposed on the bottom surface of the sliding part, and a drive source for driving the transmission member is disposed on the top surface of the sliding part. The transmission mechanism also includes a transmission track and a limiting member distributed along the length direction of the mounting plate, and a channel is formed between the transmission track and the limiting member for the transmission member to be distributed along the length direction of the mounting plate. The drive source provides power to the transmission member, which is driven within the channel between the transmission track and the limiting member. The transmission track matches the outer contour of the transmission member, while the limiting member restricts the transmission position of the transmission member, ensuring that the transmission member is always located within the channel. During transmission, the transmission member can drive the sliding part above it to move along the length direction of the mounting plate, thereby achieving tool position switching.

[0009] To facilitate the movement of the sliding part, preferably, the transmission mechanism further includes two spaced-apart support rails that provide sliding support for the sliding part. The support rails are arranged along the length of the mounting plate, and are respectively located outside the transmission rail and the limiting member. The sliding part is distributed along the width of the mounting plate, with its bottom contacting the transmission member and both ends contacting the two support rails. The bottom of the entire sliding part experiences uniform force, allowing for smooth movement along the rails.

[0010] To improve the pretreatment effect, preferably, the processing station includes a first station, a second station, and a third station for crystal implantation, arranged sequentially. The cleaning station includes a first cleaning station in front of the first station and a second cleaning station behind the first station, as well as a third cleaning station and a fourth cleaning station behind the second station. The first cleaning station cleans the cutting tool to remove impurities from its surface. The second and third cleaning stations clean the tool after alkaline and acid treatments, respectively, to remove residual alkaline and acid solutions from the tool surface, facilitating further processing. Since impurities remain on the tool surface after crystal implantation, the fourth cleaning station cleans the tool to remove these impurities.

[0011] To improve the utilization rate of acid and alkali solutions, preferably, the first workstation is equipped with a first treatment tank for holding alkali solutions, and the second workstation is equipped with a second treatment tank for holding acid solutions. A first recovery tank is located below the first treatment tank, and a second recovery tank is located below the second treatment tank. The first treatment tank is connected to the first recovery tank via a first connecting pipe, and the second treatment tank is connected to the second recovery tank via a second connecting pipe. After pre-treating a fixed quantity of the cutting tools, the solutions used in the acid and alkali treatments need to be replaced periodically. The first treatment tank introduces the alkali solution into the first recovery tank via the first connecting pipe, and the second treatment tank introduces the acid solution into the second recovery tank via the second connecting pipe. The first and second recovery tanks then recover the acid and alkali solutions respectively, allowing the solutions to be recycled after treatment.

[0012] To improve cleaning efficiency, preferably, the first, second, third, and fourth cleaning stations are all equipped with cleaning tanks containing clean water, and ultrasonic transducers are connected to the outer wall of the bottom wall of each cleaning tank. The vibration of the ultrasonic transducers can improve the cleaning efficiency of the tools within the cleaning tank.

[0013] To facilitate tool installation and removal, preferably, a preparation station for tool installation is provided at the front of the first cleaning station, and a waiting station for disassembling pre-treated tools is provided at the rear of the fourth cleaning station. Before pre-treatment begins, the operator needs to install the tool in the CVD tool holder at the preparation station. Subsequently, the CVD tool holder and the tool as a whole are driven from front to back for pre-treatment. After pre-treatment, the tool is driven to the waiting station, where the operator disassembles the tool and waits for the next batch of tools.

[0014] To improve pretreatment efficiency, preferably, a control cabinet is installed at the front end of the mounting frame. This control cabinet can control the pretreatment time at each processing station. Different stations have different processing times, and the control cabinet allows for setting the times for acid treatment, alkali treatment, cleaning, and crystal implantation stations, thereby increasing pretreatment efficiency.

[0015] Compared with the prior art, the advantages of this utility model are as follows: the mounting frame is equipped with multiple processing stations, the mounting frame is equipped with a transmission mechanism, the transmission mechanism is equipped with multiple sliding parts, the CVD tool box is connected to the sliding parts through a lifting mechanism, the sliding parts can drive the CVD tool box to move above each processing station under the action of the transmission mechanism, the lifting mechanism drives the CVD tool box to move downward for pretreatment, the tool can be processed in batches, and only one set of acid and alkali solutions is required, which can avoid waste. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0017] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0018] Figure 3 This is a top view of an embodiment of the present utility model;

[0019] Figure 4 This is a front view of an embodiment of the present utility model;

[0020] Figure 5 This is a partial schematic diagram of another embodiment of the present utility model;

[0021] Figure 6 This is a schematic diagram of the transverse cross-section of the cleaning tank in an embodiment of this utility model.

[0022] In the diagram: 1. Mounting frame; 2. Transmission mechanism; 21. Sliding part; 22. Support slide rail; 23. Transmission component; 24. Transmission track; 25. Limiting component; 26. Channel; 31. First station; 32. Second station; 33. Third station; 341. First cleaning station; 342. Second cleaning station; 343. Third cleaning station; 344. Fourth cleaning station; 35. Preparation station; 36. Waiting station; 4. Lifting mechanism; 5. CVD cutter box; 6. Support part; 7. Mounting plate; 8. Drive source; 91. First treatment tank; 92. Second treatment tank; 101. First recovery tank; 102. Second recovery tank; 111. First connecting pipe; 112. Second connecting pipe; 12. Cleaning tank; 13. Control cabinet; 14. Ultrasonic transducer. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0024] like Figures 1 to 6 The diagram shows the preferred embodiment of this utility model. This CVD tool acid-base pretreatment device includes a mounting frame 1 with multiple processing stations inside. A transmission mechanism 2 is located above the mounting frame 1. The processing stations include a first station 31 for alkali treatment, a second station 32 for acid treatment, a third station 33 for crystal implantation, and four cleaning stations. The transmission mechanism 2 has multiple sliding parts 21, each of which is equipped with a CVD tool holder 5 connected via a lifting mechanism 4. Each sliding part 21 can sequentially pass through different processing stations under the action of the transmission mechanism 2. When a sliding part 21 moves to the corresponding position above a processing station, the CVD tool holder 5 can move downwards into the processing station under the action of the lifting mechanism 4 for corresponding pretreatment. After the corresponding pretreatment is completed, it can also move upwards to reset under the action of the lifting mechanism 4.

[0025] refer to Figure 1 and Figure 3 The mounting frame 1 has multiple support parts 6 extending upwards from the top surface, and mounting plates 7 for mounting the transmission mechanism 2 are provided on the support parts 6. The function of the transmission mechanism 2 is to sequentially transfer the tools in the CVD tool holder 5 to the top of each different processing station. Each processing station is located in the mounting frame 1. The mounting frame 1, through the cooperation of the support parts 6 and the mounting plates 7, allows the transmission mechanism 2 to be positioned above each processing station. The CVD tools can switch between different processing stations by connecting to the transmission mechanism 2.

[0026] refer to Figure 2 and Figure 3The aforementioned transmission mechanism 2 includes a transmission component 23 disposed on the bottom surface of the sliding part 21. The transmission method of the transmission component 23 can take various forms, such as chain transmission or belt transmission. In this embodiment, the preferred transmission component 23 is a gear with high transmission efficiency and long service life. The top surface of the sliding part 21 is provided with a drive source 8 for driving the transmission component 23. The drive source 8 can provide power to the transmission component 23. The transmission mechanism 2 also includes a transmission track 24 and a limiting component 25 distributed along the length direction of the mounting plate 7. The transmission track 24 is provided with teeth for gear meshing. A channel 26 is formed between the transmission track 24 and the limiting component 25 for the transmission component 23 to be distributed along the length direction of the mounting plate 7. The limiting component 25 can restrict the transmission position of the transmission component 23 to ensure that the transmission component 23 is always located in the channel 26. During the transmission process, the transmission component 23 can drive the sliding part 21 above it to move along the length direction of the mounting plate 7 to realize the switching of the tool station. The transmission mechanism 2 also includes two spaced-apart support rails 22 that provide sliding support for the sliding part 21. The support rails 22 are arranged along the length of the mounting plate 7, and the two support rails 22 are respectively located outside the transmission rail 24 and the limiting member 25. The sliding part 21 is distributed along the width of the mounting plate 7. The bottom of the sliding part 21 contacts the transmission member 23, and both ends of the sliding part 21 contact the two support rails 22 respectively. The bottom of the entire sliding part 21 is subjected to uniform force, thereby allowing it to move smoothly along the rails.

[0027] refer to Figure 3 and Figure 4 The processing stations include a first station 31, a second station 32, and a third station 33 for crystal implantation, arranged sequentially. The cleaning stations include a first cleaning station 341 located in front of the first station 31 and a second cleaning station 342 located behind the first station 31. The stations also include a third cleaning station 343 located behind the second station 32 and a fourth cleaning station 344 located behind the third station 33. The first cleaning station 341 cleans the cutting tool to remove impurities from its surface. The second and third cleaning stations 342 and 343 clean the cutting tool after alkaline and acid treatments, respectively, to remove residual alkaline and acid solutions from the tool surface, facilitating further processing. Since impurities remain on the tool surface after crystal implantation, the fourth cleaning station 344 cleans the tool to remove these impurities. Each of the first cleaning station 341, the second cleaning station 342, the third cleaning station 343, and the fourth cleaning station 344 is equipped with a cleaning tank 12 containing clean water. Ultrasonic transducers 14 are connected to the outer wall of the bottom of the cleaning tank 12, and the ultrasonic transducers 14 are evenly arranged (see reference). Figure 6 The ultrasonic transducer 14 can make the blades in the cleaning tank 12 cleaner more quickly.

[0028] refer to Figure 5 The first station 31 is equipped with a first treatment tank 91 for holding alkaline solutions, and the second station 32 is equipped with a second treatment tank 92 for holding acid solutions. A first recovery tank 101 is located below the first treatment tank 91, and a second recovery tank 102 is located below the second treatment tank 92. The first treatment tank 91 is connected to the first recovery tank 101 via a first connecting pipe 111, and the second treatment tank 92 is connected to the second recovery tank 102 via a second connecting pipe 112. After pre-treating a fixed quantity of the cutting tools, the solutions used in the acid and alkaline treatments need to be replaced periodically. The first treatment tank 91 introduces the alkaline solution into the first recovery tank 101 via the first connecting pipe 111, and the second treatment tank 92 introduces the acid solution into the second recovery tank 102 via the second connecting pipe 112. The first and second recovery tanks 101 and 102 then recover the acid and alkaline solutions respectively, allowing the solutions to be recycled.

[0029] refer to Figure 3 and Figure 4 The first cleaning station 341 has a preparation station 35 for installing tools, and the fourth cleaning station 344 has a waiting station 36 for disassembling pre-treated tools. Before pre-treatment begins, the operator needs to install the tools in the CVD tool holder 5 at the preparation station 35. Then, the CVD tool holder 5 and the tools are transported from front to back for pre-treatment. After pre-treatment, the tools are transported to the waiting station 36, where the operator disassembles the tools and waits for the next batch of tools.

[0030] In addition, due to the different processing times at different workstations, please refer to... Figure 1 and Figure 3 A control cabinet 13 is located at the front end of the mounting frame 1. The control cabinet 13 can control the pre-processing time at each processing station. In this embodiment, the control cabinet 13 is controlled and connected to the top drive source 8 of each sliding part 21, and the control cabinet 13 is also controlled and connected to the lifting mechanism 4 on each sliding part 21. Since the processing time is different at different stations, the control cabinet 13 can control the different drive sources 8 and lifting mechanisms 4 respectively, thereby adjusting the pre-processing time of different CVD tool holders 5 at each processing station, thus making the pre-processing efficiency of CVD tools higher.

[0031] The specific working process of this application is as follows: Multiple sliding parts 21 are provided on the transmission mechanism 2, and a lifting mechanism 4 is provided on each sliding part 21. A CVD cutter box 5 is connected to the lifting mechanism 4. All CVD cutter boxes 5 pass through each processing station sequentially from front to back. The pretreatment process is described below using the first group of CVD cutter boxes 5 as an example:

[0032] Step 1: CVD tool holder 5 is first installed by the operator at preparation station 35;

[0033] Step 2: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the first cleaning station 341. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward into the cleaning tank 12. After the impurities on the tool surface are cleaned, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0034] Step 3: Control cabinet 13 controls drive source 8 to drive CVD cutter box 5 to move backward to the first station 31. Then, control cabinet 13 controls lifting mechanism 4 to move CVD cutter box 5 downward to the inside of the first treatment tank 91. After the cutter is treated with alkali, control cabinet 13 controls lifting mechanism 4 to move CVD cutter box 5 upward to reset.

[0035] Step 4: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the second cleaning station 342. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward into the cleaning tank 12. After the alkaline solution adhering to the tool surface is cleaned, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0036] Step 5: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the second station 32. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward to the inside of the second treatment tank 92. After the tool is acid treated, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0037] Step 6: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the third cleaning station 343. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward into the cleaning tank 12. After the acid solution attached to the tool surface is cleaned, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0038] Step 7: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the third station 33. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward to the inside of the working area. After the tool is implanted, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0039] Step 8: Control cabinet 13 controls drive source 8 to drive CVD tool box 5 to move backward to the fourth cleaning station 344. Then, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 downward into the cleaning tank 12. After the impurities attached to the tool surface are cleaned, control cabinet 13 controls lifting mechanism 4 to move CVD tool box 5 upward to reset.

[0040] Step 9: Control cabinet 13 controls drive source 8 to drive CVD tool holder 5 to move backward to waiting station 36. The operator disassembles the CVD tool after pre-processing and waits for the next batch of tools to be delivered.

Claims

1. A CVD tool acid-base pretreatment device, comprising a mounting frame (1) with multiple processing stations inside, and a transmission mechanism (2) disposed above the mounting frame (1), characterized in that: The processing station includes at least a first station (31) for alkali treatment, a second station (32) for acid treatment, and at least one cleaning station. The transmission mechanism (2) is provided with multiple sliding parts (21), each of which is provided with a CVD cutter box (5) connected by a lifting mechanism (4). Each sliding part (21) can pass through different processing stations in sequence under the action of the transmission mechanism (2). When a certain sliding part (21) moves to the corresponding position above a certain processing station, the CVD cutter box (5) can move downward to the processing station for corresponding pretreatment under the action of the lifting mechanism (4). After the corresponding pretreatment is completed, it can also move upward to reset under the action of the lifting mechanism (4).

2. The CVD tool acid-base pretreatment device according to claim 1, characterized in that: The mounting bracket (1) is provided with a plurality of support portions (6) extending upward from the top surface, and the support portions (6) are provided with mounting plates (7) for mounting the transmission mechanism (2).

3. The CVD tool acid-base pretreatment device according to claim 2, characterized in that: The transmission mechanism (2) includes a transmission member (23) disposed on the bottom surface of the sliding part (21). The top surface of the sliding part (21) is provided with a drive source (8) for driving the transmission member (23). The transmission mechanism (2) also includes a transmission track (24) and a limiting member (25) distributed along the length direction of the mounting plate (7). A channel (26) is formed between the transmission track (24) and the limiting member (25) for the transmission member (23) to be distributed along the length direction of the mounting plate (7).

4. The CVD tool acid-base pretreatment device according to claim 3, characterized in that: The transmission mechanism (2) further includes two spaced support slide rails (22) that can provide sliding support for the sliding part (21). The support slide rails (22) are arranged along the length of the mounting plate (7), and the two support slide rails (22) are respectively arranged on the outside of the transmission track (24) and the limiting member (25).

5. The CVD tool acid-base pretreatment device according to claim 1, characterized in that: The processing station includes a first station (31), a second station (32), and a third station (33) for crystal implantation, arranged in a preprocessing sequence with intervals between them. The cleaning station includes a first cleaning station (341) located in front of the first station (31) and a second cleaning station (342) located behind it. It also includes a third cleaning station (343) located behind the second station (32) and a fourth cleaning station (344) located behind the third station (33).

6. The CVD tool acid-base pretreatment device according to claim 5, characterized in that: The first station (31) is provided with a first treatment tank (91) for holding alkaline solution, and the second station (32) is provided with a second treatment tank (92) for holding acid solution. A first recovery tank (101) is provided below the first treatment tank (91), and a second recovery tank (102) is provided below the second treatment tank (92). The first treatment tank (91) is connected to the first recovery tank (101) through a first connecting pipe (111), and the second treatment tank (92) is connected to the second recovery tank (102) through a second connecting pipe (112).

7. The CVD tool acid-base pretreatment device according to claim 5, characterized in that: Each of the first cleaning station (341), the second cleaning station (342), the third cleaning station (343) and the fourth cleaning station (344) is equipped with a cleaning tank (12) for holding clean water, and an ultrasonic transducer (14) is connected to the outer wall of the bottom wall of the cleaning tank (12).

8. The CVD tool acid-base pretreatment device according to claim 7, characterized in that: The first cleaning station (341) has a preparation station (35) for installing the cutting tool on its front side, and the fourth cleaning station (344) has a waiting station (36) for disassembling the pre-treated cutting tool on its rear side.

9. The CVD tool acid-base pretreatment device according to any one of claims 1 to 8, characterized in that: The front end of the mounting frame (1) is provided with a control cabinet (13), which can control the preprocessing time of each of the processing stations (3).

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