Graphite boat foot contact discharge electrode holder

Abstract

The utility model discloses a graphite boat foot contact discharge electrode holder, which comprises an electrode holder main body, supporting feet are positioned at four corners of the bottom of the electrode holder main body, heat dissipation air boxes are mounted on two sides of the electrode holder main body, a temperature control board is positioned at the rear end of the electrode holder main body, and the temperature control board is connected with the electrode holder main body. A cleaning box is mounted in the middle of the lower end of the electrode holder body, mounting grooves are formed in the four corners in the electrode holder body, cleaning holes are formed in the surface of the electrode holder body, and an insulating plate is positioned on the surface of the upper end of the electrode holder body. According to the graphite boat foot contact discharge electrode holder provided by the utility model, the uniformity and adhesive force of a film are improved by optimizing the design and material selection of the electrode holder; the structure of the electrode holder is improved, and abrasion and faults caused by long-time use are reduced; by improving the heating and cooling system of the electrode holder, the production cycle is shortened, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of electrode holder technology, and in particular to a graphite boat foot contact discharge electrode holder. Background Technology

[0002] The graphite boat foot contact discharge electrode holder is a support device for improving the contact discharge of graphite boat feet. In PECVD equipment, the radio frequency (RF) feed electrode system is a key component. This system provides energy to the electrodes via an RF power supply to excite plasma for thin film deposition. The design of the electrode system needs to consider the efficient delivery and uniform distribution of RF power to ensure the quality and consistency of the thin film.

[0003] Electrode structure design: The design of the electrode base directly affects the uniformity of thin film deposition and the maintenance cost of the equipment. For example, the design of a tubular PECVD electrode rod includes the electrode body and the elastically connected electrode head. The electrode head has multiple conical protrusions to achieve effective contact with the graphite boat, while reducing electrode loss and improving conduction efficiency under high current. This design avoids damage to the electrode head or graphite boat caused by hard contact, thereby improving the stability and service life of the equipment.

[0004] Material selection optimization: In the PECVD process, the choice of electrode material has a significant impact on film quality. Using high-purity, low-resistivity materials can reduce electrode contamination and improve film performance. At the same time, corrosion resistance and maintenance costs are also important factors to consider.

[0005] Maintenance strategy optimization: Regular equipment maintenance and troubleshooting are crucial for maintaining the optimal operating condition of PECVD equipment. Establishing a comprehensive maintenance strategy, including regular inspection, cleaning, and replacement of vulnerable parts, can significantly reduce unexpected downtime and extend equipment life. With continuous technological advancements, the manufacturing process requirements for graphite boat foot contact discharge electrode holders are also becoming increasingly stringent.

[0006] Existing graphite boat foot contact discharge electrode holders have certain drawbacks in use. Firstly, the PECVD electrode rod, including the electrode body and the elastically connected electrode head, has multiple conical protrusions on the electrode head to achieve effective contact with the graphite boat, while reducing electrode loss and improving conduction efficiency under high current. This design, by setting an electrode head that can move elastically relative to the electrode rod, avoids damage to the electrode head or graphite boat caused by hard contact. The electrode rod of the PECVD reaction chamber is characterized by a simple and reliable electrode rod design achieved through a combination of a wiring rod, connecting rod, inner insulating seat, outer insulating seat, and locking cylinder. This design also includes an innovative structure of a limiting plate and a square shoulder, effectively preventing radial rotation and loosening of the electrode rod during use. Currently, the mainstream RF discharge contact method is tail electrode hole and electrode rod insertion contact discharge; however, with the increasing demand for single-tube output in the industry, the length of the graphite boat is lengthened to increase the number of wafers carried per boat. This method results in a difference in electric field uniformity between the tail electrode contact point and the head of the graphite boat, leading to poor uniformity across the entire boat. To mitigate this drawback of poor uniformity in long boats, the industry currently employs a dual-boat approach to improve the electric field uniformity within the graphite boat. Two methods for RF discharge in dual-boat systems include foot-contact discharge in both boats, with the front boat using foot contact and the rear boat using a tail electrode hole and electrode rod insertion contact. Both methods involve foot-contact discharge. While this method involves the graphite boat feet contacting the electrode base, with increasing furnace cycles, silicon nitride powder and fragments fall onto the electrode base, affecting the contact between the graphite boat feet and the electrode base. This abnormal contact can lead to abnormal RF voltage and current, and arcing at abnormal discharge locations. Therefore, we propose a graphite boat foot-contact discharge electrode base. Utility Model Content

[0007] Technical problem to be solved: In view of the shortcomings of the prior art, this utility model provides a graphite boat foot contact discharge electrode holder. By optimizing the design and material selection of the electrode holder, the uniformity and adhesion of the film are improved; the structure of the electrode holder is improved to reduce wear and failure caused by long-term use; and the heating and cooling system of the electrode holder is improved to shorten the production cycle and improve production efficiency, which can effectively solve the problems in the background art.

[0008] Technical Solution: To achieve the above objectives, the technical solution adopted by this utility model is as follows: a graphite boat foot contact discharge electrode holder, comprising an electrode holder body, with support feet positioned at the four corners of the bottom of the electrode holder body, heat dissipation boxes installed on both sides of the electrode holder body, a temperature control plate positioned at the rear end of the electrode holder body, a cleaning box installed in the middle of the lower end of the electrode holder body, mounting grooves opened at the four corners of the interior of the electrode holder body, cleaning holes opened on the surface of the electrode holder body, and an insulating plate positioned on the upper surface of the electrode holder body.

[0009] Preferably, a connecting frame is positioned between the electrode holder body and the heat dissipation box, fan blades are movably arranged inside the heat dissipation box, and a power supply box is fixed at the position where the electrode holder body and the connecting frame are installed, and the power supply box provides power to the heat dissipation box.

[0010] Preferably, the electrode holder body is fixed to the temperature control plate, a temperature controller is positioned at the front end of the temperature control plate, and a temperature control box is positioned on the outer side of the temperature control plate.

[0011] Preferably, a strong adhesive is used to position the electrode holder body and the insulating plate, and the electrode holder body and the insulating plate are sealed and positioned by the strong adhesive.

[0012] Preferably, the cleaning box is engaged and fixed with the electrode base body, a positioning plate is positioned in the middle of the cleaning box, an exhaust cleaning fan is positioned on the positioning plate, an exhaust groove is positioned at the upper end of the exhaust cleaning fan, the exhaust groove is connected to the cleaning hole, and a dust collection box is provided in the cleaning box below the positioning plate.

[0013] Preferably, the bottom of the electrode holder body is supported by a support foot, and the electrode holder body is positioned by directly inserting a graphite boat foot into the mounting groove, and is insulated and sealed by an insulating plate.

[0014] Beneficial effects: Compared with the prior art, the present invention provides a graphite boat foot contact discharge electrode holder, which has the following beneficial effects: The graphite boat foot contact discharge electrode holder improves the quality of the film: By optimizing the design of the electrode holder and the selection of materials, the uniformity and adhesion of the film are improved.

[0015] Enhance equipment stability: Improve the structure of the electrode holder to reduce wear and malfunctions caused by prolonged use;

[0016] Improve production efficiency: By improving the heating and cooling system of the electrode holder, the production cycle is shortened and production efficiency is increased;

[0017] Safety precautions:

[0018] During the renovation process, safety operating procedures should be strictly followed and necessary protective equipment should be worn.

[0019] For high-voltage sections, clear warning signs should be set up and isolation measures should be taken to prevent electric shock.

[0020] Gas Management:

[0021] The gases used in the PECVD process may be flammable, explosive, or toxic. Therefore, the airtightness and safety of the gas supply system must be ensured.

[0022] During the renovation process, the gas pipelines should be carefully inspected and tested to ensure there are no leaks.

[0023] Electrical protection:

[0024] The electrical components of the electrode base should be equipped with overcurrent, overvoltage, and short-circuit protection devices.

[0025] Regularly inspect electrical components and wiring to ensure they are in good condition.

[0026] Environmental control:

[0027] PECVD equipment should be placed in a dry, dust-free environment to minimize the impact on equipment performance.

[0028] During the renovation process, care should be taken to keep the site clean and prevent dust and impurities from entering the equipment.

[0029] Training and maintenance:

[0030] Provide professional training to operators to ensure they understand the principles, operating methods, and safety precautions of the equipment.

[0031] Develop a regular maintenance plan, conduct comprehensive inspections and maintenance on the equipment to extend its service life and maintain good performance. The entire graphite boat foot contact discharge electrode holder has a simple structure, is easy to operate, and has better performance than traditional methods. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the overall structure of a graphite boat foot contact discharge electrode holder according to the present invention.

[0033] Figure 2 This is a schematic diagram of the heat dissipation fan box in a graphite boat foot contact discharge electrode holder according to the present invention.

[0034] Figure 3 This is a schematic diagram of the main body of the electrode holder in a graphite boat foot contact discharge electrode holder according to the present invention.

[0035] Figure 4 This is a schematic diagram of the cleaning box in a graphite boat foot contact discharge electrode holder according to the present invention.

[0036] In the diagram: 1. Electrode holder body; 2. Support leg; 3. Insulating plate; 4. Cleaning box; 5. Cleaning hole; 6. Mounting slot; 7. Power supply box; 8. Connecting frame; 9. Fan blade; 10. Heat dissipation box; 11. Temperature controller; 12. Temperature control box; 13. Temperature control board; 14. Strong adhesive; 15. Air extraction slot; 16. Air extraction cleaning fan; 17. Positioning plate; 18. Dust collection box. Detailed Implementation

[0037] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. However, those skilled in the art will understand that the embodiments described below are only some embodiments of this utility model, not all embodiments, and are only used to illustrate this utility model, and should not be regarded as limiting the scope of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall be followed. Where the manufacturers of reagents or instruments are not specified, they are all conventional products that can be purchased commercially.

[0038] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0039] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0040] like Figure 1-4As shown, a graphite boat foot contact discharge electrode holder includes an electrode holder body 1, with support feet 2 positioned at the four corners of the bottom of the electrode holder body 1, heat dissipation boxes 10 installed on both sides of the electrode holder body 1, a temperature control plate 13 positioned at the rear end of the electrode holder body 1, a cleaning box 4 installed in the middle of the lower end of the electrode holder body 1, mounting grooves 6 opened at the four corners inside the electrode holder body 1, cleaning holes 5 opened on the surface of the electrode holder body 1, and an insulating plate 3 positioned on the upper surface of the electrode holder body 1.

[0041] Furthermore, a connecting frame 8 is positioned between the electrode holder body 1 and the heat dissipation box 10, and a fan blade 9 is movably arranged inside the heat dissipation box 10. A power supply box 7 is fixed at the position where the electrode holder body 1 and the connecting frame 8 are installed, and the power supply box 7 provides power to the heat dissipation box 10.

[0042] Furthermore, the electrode holder body 1 is fixed to the temperature control plate 13, the temperature controller 11 is positioned at the front end of the temperature control plate 13, and the temperature control box 12 is positioned on the outside of the temperature control plate 13.

[0043] Furthermore, a strong adhesive 14 is used to position the electrode holder body 1 and the insulating plate 3, and the electrode holder body 1 and the insulating plate 3 are sealed and positioned by the strong adhesive 14.

[0044] Furthermore, the cleaning box 4 is engaged and fixed with the electrode base body 1. A positioning plate 17 is positioned in the middle of the cleaning box 4. An exhaust cleaning fan 16 is positioned on the positioning plate 17. An exhaust groove 15 is positioned at the upper end of the exhaust cleaning fan 16. The exhaust groove 15 is connected to the cleaning hole 5. A dust collection box 18 is provided in the cleaning box 4 below the positioning plate 17.

[0045] Furthermore, the bottom of the electrode holder body 1 is supported by the support legs 2, and the graphite boat feet are directly inserted into the electrode holder body 1 through the mounting groove 6 for positioning, and are insulated and sealed by the insulating plate 3.

[0046] Improving deposition quality: By optimizing the design of the electrode base, the distribution and stability of plasma within the reaction chamber can be improved, thereby enhancing the uniformity and adhesion of the thin film. This is particularly important for applications requiring high-quality thin films.

[0047] Enhanced equipment performance: The modified electrode base can better adapt to different process requirements, such as changing the composition of the process gas for chemical reaction cleaning of multilayer material films without interrupting the vacuum level. This helps improve the flexibility and adaptability of the equipment.

[0048] Reducing production costs: By optimizing the electrode base design, unnecessary energy consumption and material waste can be reduced, thereby lowering production costs. At the same time, improving production efficiency is also an important way to reduce costs.

[0049] Improved equipment reliability: The modified electrode base can work more stably, reduce downtime caused by failures, and improve the overall reliability of the equipment.

[0050] Material selection:

[0051] The electrode base material should have good electrical conductivity, thermal conductivity, and corrosion resistance. Commonly used materials include stainless steel, aluminum, or aluminum alloys.

[0052] When selecting materials, their compatibility with the reactant gases must also be considered to avoid chemical reactions or pollution.

[0053] Structural design:

[0054] The structure of the electrode base should ensure a uniform electric field distribution to improve the uniformity and efficiency of the deposition process.

[0055] The design should take into account ease of cleaning and maintenance so that the equipment can maintain its performance after long-term use.

[0056] Temperature control:

[0057] Temperature control of the electrode substrate is crucial during PECVD. Both excessively high and low temperatures can affect the quality of the deposited layer.

[0058] It should be equipped with a precise temperature control system and calibrated regularly to ensure its accuracy.

[0059] Cooling system:

[0060] Because the PECVD process can generate high heat, the electrode base should be equipped with an effective cooling system.

[0061] The cooling system can be water-cooled or air-cooled, depending on the power of the equipment and its heat dissipation requirements.

[0062] Insulation treatment:

[0063] Insulation between the electrode base and the reaction chamber is crucial to prevent leakage and short circuits.

[0064] High-quality insulation materials should be used, and the installation should be secure and seamless.

[0065] Modifying the PECVD electrode base requires attention to key aspects such as material selection, structural design, temperature control, cooling system, and insulation treatment. It also necessitates the implementation of protective measures including safety safeguards, gas management, electrical protection, environmental control, and training and maintenance. These measures will help improve equipment performance and reliability, ensuring the safe and smooth operation of the production process.

[0066] It should be noted that, in this document, relational terms such as first and second (number one, number two), etc., are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0067] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A graphite boat foot contact discharge electrode holder, comprising an electrode holder body (1), characterized in that: The electrode holder body (1) has four support feet (2) positioned at the bottom corners. The electrode holder body (1) has heat dissipation boxes (10) installed on both sides. The electrode holder body (1) has a temperature control plate (13) positioned at the rear end. The electrode holder body (1) has a cleaning box (4) installed in the middle of the lower end. The electrode holder body (1) has four internal corners with mounting grooves (6). The electrode holder body (1) has cleaning holes (5) on its surface. The electrode holder body (1) has an insulating plate (3) positioned on its upper surface.

2. The graphite boat foot contact discharge electrode holder according to claim 1, characterized in that: A connecting frame (8) is positioned between the electrode holder body (1) and the heat dissipation box (10). A fan blade (9) is movably arranged inside the heat dissipation box (10). A power supply box (7) is fixed at the position where the electrode holder body (1) and the connecting frame (8) are installed. The power supply box (7) provides power to the heat dissipation box (10).

3. The graphite boat foot contact discharge electrode holder according to claim 1, characterized in that: The electrode holder body (1) is fixed to the temperature control plate (13). A temperature controller (11) is positioned at the front end of the temperature control plate (13), and a temperature control box (12) is positioned on the outside of the temperature control plate (13).

4. The graphite boat foot contact discharge electrode holder according to claim 1, characterized in that: A strong adhesive (14) is positioned between the electrode holder body (1) and the insulating plate (3), and the electrode holder body (1) and the insulating plate (3) are sealed and positioned by the strong adhesive (14).

5. The graphite boat foot contact discharge electrode holder according to claim 1, characterized in that: The cleaning box (4) is engaged and fixed with the electrode base body (1). A positioning plate (17) is positioned in the middle of the cleaning box (4). An exhaust cleaning fan (16) is positioned on the positioning plate (17). An exhaust groove (15) is positioned at the upper end of the exhaust cleaning fan (16). The exhaust groove (15) is connected to the cleaning hole (5). A dust collection box (18) is provided in the cleaning box (4) below the positioning plate (17).

6. The graphite boat foot contact discharge electrode holder according to claim 1, characterized in that: The bottom of the electrode base body (1) is supported by the support leg (2). The electrode base body (1) is positioned by directly inserting the graphite boat foot into the mounting groove (6) and is insulated and sealed by the insulating plate (3).

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