Nitrogen purging connecting device

Abstract

The utility model discloses a nitrogen purging connecting device which is large in purging amount, not prone to being blocked after working for a long time and capable of meeting the working requirement of tail gas equipment. The device comprises a connecting tee joint, the connecting tee joint is provided with a left end communicating port, a right end communicating port and an upper end communicating port, a negative pressure pipeline connector is arranged above the connecting tee joint, and the lower end of the negative pressure pipeline connector is in threaded connection with the upper end communicating port of the connecting tee joint. One end of the nitrogen inner guide pipe is inserted into the connecting tee joint, the end portion of the inserted end reaches the center point in the connecting tee joint, the other end of the nitrogen inner guide pipe is inserted into a nitrogen pipe connector, and positioning arc blocks are installed at a communicating opening in the right end of the connecting tee joint and arranged in a triangular mode. And the positioning arc block fixes the nitrogen inner guide pipe through a bolt.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, specifically to a nitrogen purging connection device. Background Technology

[0002] In the semiconductor industry, various special gases, large quantities of acids, alkalis, and other chemicals, as well as organic solvents and volatile liquids are used. These industrial raw materials generate waste gases during semiconductor manufacturing processes. These waste gases enter the reaction chamber for treatment through the inlet pipe of the exhaust gas equipment. To ensure safety, the waste gas pressure in the inlet pipe of the exhaust gas equipment is usually monitored. To prevent the inlet pipe pressure monitoring port from being blocked by dust in the waste gas, nitrogen purging is required at the same time as monitoring the inlet pipe pressure. Traditional inlet pipe negative pressure monitoring nitrogen purging devices have limited structure, small purging volume, and are prone to blockage after long-term operation, which cannot meet the working requirements of the exhaust gas equipment. Utility Model Content

[0003] In view of the shortcomings of existing nitrogen purging devices for negative pressure monitoring of intake pipes, such as small purging volume and easy blockage after long-term operation, which cannot meet the working requirements of exhaust gas equipment, this utility model provides a nitrogen purging connection device with a large purging volume and is not easy to blockage after long-term operation, thus meeting the working requirements of exhaust gas equipment.

[0004] This utility model provides the following technical solution:

[0005] It includes a connecting tee with three connecting ports: a left end, a right end, and an upper end. A negative pressure pipe connector is provided above the connecting tee, and the lower end of the negative pressure pipe connector is threadedly connected to the upper connecting port of the connecting tee. The feature is that a nitrogen inner conduit is provided on the right side of the connecting tee, with one end inserted into the connecting tee and reaching the center point inside the connecting tee, and the other end inserted into the nitrogen pipe connector. A positioning arc block is installed at the right connecting port of the connecting tee, the positioning arc block being arranged in a triangle, and the positioning arc block fixing the nitrogen inner conduit with bolts.

[0006] Its further features are:

[0007] A nitrogen purging connector is installed on the outside of the nitrogen pipe connector, and the nitrogen purging connector is used to connect to the nitrogen purging pipeline.

[0008] The upper end of the negative pressure pipeline connector is used to connect a negative pressure monitoring instrument.

[0009] The left end of the connecting tee is used to connect to the air intake pipe.

[0010] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0011] When the nitrogen guide tube is inserted into the connecting tee and reaches the center point inside the connecting tee, a Venturi tube effect is formed, which can increase the nitrogen flow rate. Increasing the nitrogen flow rate can improve the airflow of the negative pressure monitoring and can also more effectively purge the negative pressure monitoring port with nitrogen to avoid dust blockage of the monitoring port.

[0012] The negative pressure pipeline connector facilitates the connection of negative pressure monitoring instruments, enabling staff to conduct external monitoring and observation. Attached Figure Description

[0013] Figure 1 This is a front view of the overall structure of this utility model;

[0014] Figure 2 This is an exploded view of the overall structure of this utility model;

[0015] Figure 3 This is a cross-sectional view of the overall structure of this utility model;

[0016] Figure 4 This is a schematic diagram of the connecting tee structure of this utility model.

[0017] Explanation of reference numerals in the attached figures:

[0018] 1. Connecting tee; 2. Negative pressure pipeline connector; 3. Nitrogen inner conduit; 4. Nitrogen pipe connector; 5. Positioning arc block; 6. Nitrogen purging connector. Detailed Implementation

[0019] This utility model provides, for example Figure 1 A nitrogen purging connection device is shown, comprising a connecting tee 1 with three connecting ports: a left end, a right end, and an upper end. A negative pressure pipe connector 2 is disposed above the connecting tee 1, with its lower end threadedly connected to the upper connecting port of the connecting tee 1. A nitrogen inner conduit 3 is disposed on the right side of the connecting tee 1, with one end of the nitrogen inner conduit 3 inserted into the connecting tee 1, reaching the center point inside the connecting tee 1, and the other end inserted into the nitrogen pipe connector 4. Figure 4 A positioning arc block 5 is installed at the right end of the connecting tee 1. The positioning arc block 5 is arranged in a triangle. The positioning arc block 5 fixes the nitrogen inner tube 3 with bolts.

[0020] A nitrogen purging connector 6 is installed on the outside of the nitrogen pipe connector 4. The nitrogen purging connector 6 is used to connect the nitrogen purging pipeline.

[0021] The upper end of negative pressure pipeline connector 2 is used to connect a negative pressure monitoring instrument;

[0022] The left end of the tee 1 is used for the air intake pipe.

Claims

1. A nitrogen purging connection device, comprising a connecting tee, the connecting tee having three connecting ports at a left end, a right end, and an upper end, a negative pressure pipeline connector being disposed above the connecting tee, the lower end of the negative pressure pipeline connector being threadedly connected to the upper connecting port of the connecting tee, characterized in that: A nitrogen inner conduit is provided on the right side of the connecting tee. One end of the nitrogen inner conduit is inserted into the connecting tee, and the inserted end reaches the center point inside the connecting tee. The other end is inserted into the nitrogen pipe connector. A positioning arc block is installed at the right end of the connecting tee. The positioning arc block is arranged in a triangle. The positioning arc block fixes the nitrogen inner conduit with bolts.

2. The nitrogen purging connection device according to claim 1, characterized in that: A nitrogen purging connector is installed on the outside of the nitrogen pipe connector, and the nitrogen purging connector is used to connect to the nitrogen purging pipeline.

3. A nitrogen purging connection device according to claim 1 or 2, characterized in that: The upper end of the negative pressure pipeline connector is used to connect a negative pressure monitoring instrument.

4. A nitrogen purging connection device according to claim 3, characterized in that: The left end of the connecting tee is used to connect to the air intake pipe.

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