Low-temperature silane efficient vaporization system

Abstract

The low-temperature silane efficient vaporization system comprises a silane low-temperature storage tank, an ethylene glycol cyclic heating device, a silane vaporization device and a silane vaporization device, wherein the silane low-temperature storage tank is sequentially connected with the silane vaporization device, the ethylene glycol cyclic heating device and the silane vaporization device, and the silane vaporization device is connected with the silane filling system. According to the utility model, the temperature of liquid-phase silane is raised in two steps, and the temperature change in the reaction process can be more accurately controlled by gradually raising the temperature in the method, so that the temperature and the pressure are effectively prevented from rising too fast in the silane vaporization process, and safety accidents caused by too high system pressure are prevented.

Description

Technical Field

[0001] This utility model belongs to the field of vaporization devices, and specifically relates to a low-temperature silane high-efficiency vaporization system. Background Technology

[0002] Silane (SiH4) is a colorless, highly reactive, and compressible gas at room temperature and pressure. It can be used to manufacture a range of silicon-containing materials, including high-purity polycrystalline silicon, monocrystalline silicon, amorphous silicon, metal silicides, silicon nitride, silicon carbide, and silicon oxide. Due to its high purity and ability to be precisely controlled, it has become an important specialty gas that cannot be replaced by many other silicon sources. It is widely used in the microelectronics industry and is gradually expanding into various fields such as steel, machinery, chemicals, and optics. With the continuous development of the chemical industry, high-tech applications of silane continue to emerge, including its use in the manufacture of advanced ceramics, composite materials, functional materials, biomaterials, and high-energy materials, becoming the foundation for many new technologies, materials, and devices.

[0003] However, silanes are extremely sensitive to oxygen and are highly flammable, posing a risk of combustion and explosion when mixed with air. As a strong reducing agent, they exhibit strong reactivity when in contact with oxidizing agents, alkalis, or heavy metal salt solutions. Therefore, strict control of environmental conditions is necessary during operation to prevent potential hazards.

[0004] High-purity silane is stored in a silane tank area after entering the silane production unit. The tank area stores liquid silane, which is then vaporized by a vaporization unit and sent to the filling system when needed. The compressor inlet of the filling system has temperature resistance requirements; the temperature cannot be too low. The silane vaporization unit needs to carefully control the temperature of the silane entering the compressor. Most existing silane vaporization units use electric heating or steam heating to heat the silane, which has disadvantages such as high energy consumption and difficulty in temperature control. To improve the efficiency and safety of the cryogenic liquid storage and vaporization system, technological transformation and optimization are necessary. Therefore, an energy-saving device is needed that can provide long-term safe and reliable silane usage conditions while ensuring efficient silane vaporization. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to provide a low-temperature silane high-efficiency vaporization system that heats the liquid silane in two steps. This method, by gradually increasing the temperature, can more accurately control the temperature change during the reaction process, effectively avoiding the temperature and pressure rising too quickly during the silane vaporization process, thereby preventing safety accidents caused by excessive system pressure.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0007] A low-temperature silane high-efficiency vaporization system includes a silane low-temperature storage tank, an ethylene glycol circulating heating device, a silane vaporization device, and a silane vaporization unit; wherein the silane low-temperature storage tank is connected in sequence to the silane vaporization device, the ethylene glycol circulating heating device, and the silane vaporization unit, and the silane vaporization unit is connected to a silane filling system.

[0008] Preferably, the ethylene glycol circulating heating device includes an ethylene glycol storage tank, a first pump, a second pump, a first heat exchanger, and a second heat exchanger; the silane vaporization device is connected in sequence to the first heat exchanger, the first pump, the ethylene glycol storage tank, the second pump, and the second heat exchanger.

[0009] Preferably, the silane vaporization device is a third heat exchanger.

[0010] Preferably, the silane vaporization device is a fourth heat exchanger, which is connected to the third heat exchanger.

[0011] The present invention can achieve the following beneficial effects:

[0012] 1. Heating the liquid silane in two steps allows for more precise control of temperature changes during the reaction process, effectively preventing excessively rapid temperature and pressure increases during silane vaporization and thus avoiding safety accidents caused by excessive system pressure.

[0013] 2. First, vaporize the silane with room temperature ethylene glycol. Ethylene glycol has a low freezing point and will not freeze during the heat exchange process, thus preventing pipe blockage.

[0014] 3. Ethylene glycol is pumped from the storage tank to the first heat exchanger for preheating. The first heat exchanger uses circulating water for heating, bringing the ethylene glycol to a temperature that allows the liquid-phase silane to vaporize. After sufficient heat exchange with the liquid-phase silane, it returns to the ethylene glycol storage tank. Ethylene glycol is then pumped from the storage tank to the second heat exchanger for heating the vapor condensate. After further heat exchange with the gaseous silane, it returns to the ethylene glycol storage tank. Both heating processes recover heat sources, eliminating the need for external heat introduction, thus saving energy and reducing consumption. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0016] Figure 1 This is a system structure diagram of the present invention.

[0017] In the diagram: 1. Silane cryogenic storage tank; 2. Third heat exchanger; 3. First heat exchanger; 4. First pump; 5. Ethylene glycol storage tank; 6. Second pump; 7. Fourth heat exchanger; 8. Second heat exchanger; 9. Silane filling system. Detailed Implementation

[0018] Preferred solutions include Figure 1As shown, a low-temperature silane high-efficiency vaporization system includes a silane low-temperature storage tank 1, an ethylene glycol circulating heating device, a silane vaporization device, and a silane vaporization unit; wherein, the silane low-temperature storage tank 1 is sequentially connected to the silane vaporization device, the ethylene glycol circulating heating device, and the silane vaporization unit, and the silane vaporization unit is connected to the silane filling system 9.

[0019] Specifically, the ethylene glycol circulating heating device includes an ethylene glycol storage tank 5, a first pump 4, a second pump 6, a first heat exchanger 3, and a second heat exchanger 8; the silane vaporization device is sequentially connected to the first heat exchanger 3, the first pump 4, the ethylene glycol storage tank 5, the second pump 6, and the second heat exchanger 8. The silane vaporization device is a third heat exchanger 2. The silane vaporization device is also a fourth heat exchanger 7, which is connected to the third heat exchanger 2.

[0020] The third heat exchanger 2 uses ethylene glycol to heat the liquid-phase silane in a single heating cycle to vaporize it. The fourth heat exchanger 7 uses ethylene glycol in a second heating cycle to heat the gaseous-phase silane. The first heat exchanger 3 uses circulating water to heat the ethylene glycol solution, and the second heat exchanger 8 uses steam condensate to heat the ethylene glycol solution. The silane cryogenic storage tank 1 is used to store cryogenic liquid-phase silane, and the ethylene glycol storage tank 5 is used to store the ethylene glycol solution. The first pump 4 is used to transport the ethylene glycol solution to the third heat exchanger 2, and the second pump 6 is used to transport the ethylene glycol solution to the second heat exchanger 8. The above components are assembled into one unit through connecting pipelines and valves to jointly complete the vaporization process of silane.

[0021] The ethylene glycol heating system mainly consists of two steps:

[0022] 1. Ethylene glycol is pumped from the storage tank to the first heat exchanger 3 by the first pump 4 to raise its temperature. The first heat exchanger 3 heats the circulating water to bring the ethylene glycol to the temperature at which the liquid silane vaporizes. After sufficient heat exchange with the liquid silane, it returns to the ethylene glycol storage tank 5.

[0023] 2. Ethylene glycol is pumped from the storage tank by the second pump 6 to the second heat exchanger 8 of the vapor condensate for heating, and then returns to the ethylene glycol storage tank after further heat exchange with the gaseous silane.

[0024] In the silane vaporization unit, liquid silane is first heated by ethylene glycol in circulating water, and the vaporization temperature is maintained at -15℃ to -20℃ by a temperature regulating valve. Then, the gaseous silane is heated by ethylene glycol preheated by steam condensate, and the temperature of the gaseous silane is controlled at 5℃ to 10℃ by a temperature regulating valve to ensure that the silane meets the temperature requirements when it is delivered to the filling system.

[0025] In the silane vaporization device, liquid silane is first heated by ethylene glycol heated by circulating water, causing it to change from a liquid to a gaseous state. Then, the gaseous silane is heated by ethylene glycol heated by steam condensate.

[0026] In this process, the heat source is the plant's circulating water and steam condensate. By recovering and reusing the waste heat generated during production, not only can energy consumption and production costs be reduced, but environmental pollution can also be effectively reduced, achieving sustainable development. Ethylene glycol is used as the heat transfer medium to monitor and regulate the temperature at the heat exchanger outlet. Its low freezing point prevents pipe blockage caused by icing during heat exchange and ensures the safe vaporization of silane at low temperatures.

[0027] Furthermore, the two-step heating strategy enables more precise control over temperature changes during the reaction. This method effectively mitigates the rapid rise in temperature and pressure during silane vaporization, significantly reducing the risk of safety accidents that could arise from a rapid increase in system pressure. In particular, by meticulously controlling the heating steps, we can effectively prevent excessively rapid increases in temperature and pressure during silane vaporization, avoiding abnormal pressure rises within the system. This is crucial for maintaining a safe and stable production environment and effectively improves the stability and safety of the silane vaporization unit.

[0028] The working principle of this system is:

[0029] Silane produced from the silane production unit is stored in a cryogenic silane storage tank 1. The cryogenic liquid silane, at -33°C, passes through a third heat exchanger 2, where its temperature is lowered to -15°C to -20°C, vaporizing it and initially raising its temperature. The heat exchange medium in the third heat exchanger 2 is ethylene glycol. The ethylene glycol in the third heat exchanger 2 is then heated by a first heat exchanger 3 using circulating water at a temperature between 0-30°C. The gaseous silane exiting the silane vaporizer enters a fourth heat exchanger 7, where its temperature is raised to 5-10°C before being sent to the silane filling system 9. The heat exchange medium in the fourth heat exchanger 7 is ethylene glycol. The ethylene glycol in the fourth heat exchanger 7 is then heated by a second heat exchanger 8 using steam condensate at a temperature between 50-70°C. Ethylene glycol storage tank 5 uses a first pump 4 and a second pump 6 to pump ethylene glycol into a first heat exchanger 3 and a second heat exchanger 8 for heating, then into a third heat exchanger 2 and a fourth heat exchanger 7 for heat exchange, and finally back into the ethylene glycol storage tank 5. The flow rates of the first pump 4 and the second pump 6 are controlled by the outlet temperatures of the third heat exchanger 2 and the fourth heat exchanger 7, thereby achieving precise control of the silane temperature.

[0030] The above embodiments are merely preferred technical solutions of this utility model and should not be considered as limitations on this utility model. The protection scope of this utility model should be the technical solution described in the claims, including equivalent substitutions of the technical features described in the claims. That is, equivalent substitutions and improvements within this scope are also within the protection scope of this utility model.

Claims

1. A low-temperature silane high-efficiency vaporization system, characterized in that: It includes a silane cryogenic storage tank (1), an ethylene glycol circulating heating device, a silane vaporization device, and a silane vaporization device; wherein, the silane cryogenic storage tank (1) is connected in sequence to the silane vaporization device, the ethylene glycol circulating heating device, and the silane vaporization device, and the silane vaporization device is connected to the silane filling system (9).

2. The low-temperature silane high-efficiency vaporization system according to claim 1, characterized in that: The ethylene glycol circulating heating device includes an ethylene glycol storage tank (5), a first pump (4), a second pump (6), a first heat exchanger (3), and a second heat exchanger (8); the silane vaporization device is connected in sequence to the first heat exchanger (3), the first pump (4), the ethylene glycol storage tank (5), the second pump (6), and the second heat exchanger (8).

3. The low-temperature silane high-efficiency vaporization system according to claim 2, characterized in that: The silane vaporization device is the third heat exchanger (2).

4. The low-temperature silane high-efficiency vaporization system according to claim 3, characterized in that: The silane vaporization device is the fourth heat exchanger (7), which is connected to the third heat exchanger (2).

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