Photoresist sampling device

Abstract

The utility model discloses a photoresist sampling device, which belongs to the technical field of photoresist sampling, is used for solving the problem that the existing photoresist solution sampling accuracy and convenience are poorer, and comprises a cylinder body, a piston assembly, a fixed plate, a branch pipe assembly and a sampling head. A piston cavity is formed in the cylinder, the piston assembly comprises a piston and an operating rod, the fixing plate is connected with the cylinder, at least two channels are formed in the fixing plate, one end of each channel is communicated with the bottom of the piston cavity, the other end of each channel is communicated with the outside of the fixing plate, and a connector is formed in the fixing plate and used for being connected with the branch pipe assembly. The branch pipe assembly comprises branch pipes, the number of the branch pipes is the same as that of the channels, the branch pipes are detachably connected with the connectors respectively, the bottom ends of the branch pipes are detachably connected with sampling heads respectively, and the heights of the sampling heads are different. The photoresist sampling device disclosed by the utility model can be used for sampling photoresist solutions with different heights, reducing the mixing of the solutions and improving the sampling accuracy and the operation convenience.

Description

Technical Field

[0001] This utility model relates to the field of photoresist sampling technology, and specifically to a photoresist sampling device. Background Technology

[0002] The thickness of the photoresist is a key factor affecting its resolution. If the film is too thin, the photoresist's resistance to etching may be weakened, making it prone to pinholes and negatively impacting the accurate transfer of patterns. Conversely, if the film is too thick, it will not only significantly reduce resolution but may also compromise the final pattern quality due to incomplete development. Therefore, ensuring that the photoresist has an appropriate thickness is crucial for guaranteeing its overall performance.

[0003] The thickness of a photoresist film is closely related to the viscosity of its solution. Specifically, the higher the viscosity of the solution, the thicker the photoresist film formed by spin coating. For bottled photoresist solutions, the viscosity may vary at different heights due to the gravitational gradient within the solution, and this difference is particularly significant in high-viscosity photoresist solutions. Therefore, to accurately evaluate the performance of photoresist solutions, a device capable of sampling at different solution heights is needed.

[0004] Currently, the commonly used sampling method is through a needle syringe. However, since needle syringes cannot simultaneously sample and test the same solution at different heights, if a single needle syringe is used to sample the solution at each height sequentially, the solutions at different heights are easily mixed, leading to inaccurate sampling results. If multiple needle syringes are used to sample separately, the operation is cumbersome, which limits its flexibility and accuracy in practical applications.

[0005] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0006] (a) Technical problems to be solved

[0007] This invention provides a photoresist sampling device, which solves at least the technical problem of how to sample photoresist solutions of different heights, reduce solution mixing, and improve the ease of operation.

[0008] (II) Technical Solution

[0009] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0010] A photoresist sampling device includes: a cylinder, a piston assembly, a fixing plate, a branch tube assembly, and a sampling head;

[0011] The cylinder is provided with a piston chamber;

[0012] The piston assembly includes a piston and an operating rod. The piston is movably disposed within the piston chamber, and one end of the operating rod is connected to the piston, while the other end protrudes from the top of the piston chamber.

[0013] The fixing plate is connected to the cylinder and has at least two channels inside. One end of each channel is connected to the bottom of the piston chamber and the other end is connected to the outside of the fixing plate, forming a connection port at the connection point.

[0014] The branch pipe assembly includes a plurality of branch pipes, the number of which is the same as the number of channels. Each branch pipe is detachably connected to each of the connection ports, and the bottom end of each branch pipe is detachably connected to a sampling head. The sampling heads have different heights.

[0015] In some embodiments, the sampling head is provided with a flexible colloid with a closed opening inside. Each branch tube has a metal probe at its bottom end, which is sealed and inserted into the inside of the closed opening to be detachably connected to the sampling head.

[0016] In some embodiments, the connection port is located at the bottom end of the fixing plate, and the bottom ends of each branch pipe are at different heights so that the heights of each sampling head are different.

[0017] In some embodiments, the piston assembly further includes a spring, one end of which is connected to the cylinder and the other end to the piston, and is configured to drive the piston to return to its original position by elastic deformation after the piston has moved downward.

[0018] In some embodiments, the spring is a compression spring and is disposed between the bottom end of the piston and the bottom of the piston chamber.

[0019] In some embodiments, the cylinder includes a main cylinder and a secondary cylinder connected together, the piston is disposed inside the main cylinder, and the secondary cylinder is connected to the fixed plate and communicates with each of the channels.

[0020] In some embodiments, each of the channels and branches is arranged circumferentially with the bottom of the piston cavity as the center, and is spaced at equal angles.

[0021] In some embodiments, the branch pipe is connected to the connection port by a thread.

[0022] (III) Beneficial Effects

[0023] Compared with the prior art, the photoresist sampling device provided by this utility model has the following advantages:

[0024] In operation, this photoresist sampling device first inserts the branch tube assembly into the photoresist solution, allowing the sampling heads at the bottom of each branch tube to be precisely positioned at different depths within the solution. Then, by driving the piston outward with an operating lever, a vacuum is created in the piston chamber, each channel, and the branch tubes. Under this negative pressure, solutions at different depths are simultaneously drawn into their respective sampling heads, achieving simultaneous sampling of multiple layers of the photoresist solution. The beneficial effects of this photoresist sampling device include:

[0025] Improved sampling accuracy: Compared to traditional methods that require the use of a single-needle syringe to sample solutions at different heights sequentially, this device avoids the problem of mixing solutions at different heights, thereby significantly improving the accuracy of sampling results.

[0026] Simplified operation process: Multiple solutions at different heights can be sampled simultaneously in a single operation, eliminating the need to repeatedly change or adjust the syringe, making the sampling process more convenient and efficient.

[0027] Easy to clean and maintain: The detachable design between the branch pipe and the fixed plate, as well as between the sampling head and the branch pipe, not only makes it easy for users to thoroughly clean the branch pipe and the sampling head, but also allows for easy replacement of parts when needed. This indirectly contributes to the long-term maintenance of the device's sampling accuracy. Attached Figure Description

[0028] Figure 1 This is a perspective view of the photoresist sampling device in the embodiment.

[0029] Figure 2 This is a bottom view of the photoresist sampling device in the embodiment.

[0030] Figure 3 for Figure 2 Sectional view of section A.

[0031] Figure 4 for Figure 3 A schematic diagram of region B in the middle.

[0032] Figure label:

[0033] Cylinder 1, piston chamber 10, main cylinder 11, auxiliary cylinder 12;

[0034] Piston assembly 2, piston 21, operating rod 22, spring 23;

[0035] Fixing plate 3, channel 31, connecting port 32;

[0036] Branch assembly 4, branch 41, metal probe 42;

[0037] Sampling head 5, flexible colloid 50. Detailed Implementation

[0038] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0039] In the existing technology, when sampling photoresist solutions of different heights, there are problems such as solution mixing or the need for multiple samplings.

[0040] To address the aforementioned technical problems, this embodiment provides a photoresist sampling device. Please refer to [link to relevant documentation]. Figures 1 to 4 As shown, Figure 1 This is a perspective view of the photoresist sampling device in the embodiment. Figure 2 This is a top view of the photoresist sampling device in the embodiment. Figure 3 for Figure 2 Sectional view of section A. Figure 4 for Figure 3 A schematic diagram of region B in the middle.

[0041] This embodiment of a photoresist sampling device includes: a cylinder 1, a piston assembly 2, a fixing plate 3, a branch tube assembly 4, and a sampling head 5.

[0042] The cylinder 1 has a piston chamber 10 inside, and the piston chamber 10 has an opening at its upper end.

[0043] The piston assembly 2 includes a piston 21 and an operating rod 22. The piston 21 is movably disposed in the piston chamber 10 and is used to extract air from the piston chamber 10. One end of the operating rod 22 is connected to the piston 21, and the other end is exposed in the opening at the top of the piston chamber 10 for controlling the movement of the piston 21.

[0044] The fixed plate 3 is connected to the cylinder 1 and has at least two channels 31 inside. One end of each channel 31 is connected to the bottom of the piston chamber 10 and the other end is connected to the outside of the fixed plate 3. A connection port 32 is formed on the fixed plate 3, and the interface is used to connect the branch pipe assembly 4.

[0045] The branch pipe assembly 4 includes several branch pipes 41, the number of which is the same as the number of channels 31. Each branch pipe 41 is detachably connected to each connection port 32, and the bottom end of each branch pipe 41 is detachably connected to a sampling head 5. The height of each sampling head 5 is different.

[0046] When the photoresist sampling device of the above technical solution is working, the branch tube assembly 4 is first inserted into the photoresist solution, so that the sampling head 5 at the bottom of each branch tube 41 is at different heights in the solution. Then, the piston 21 is moved outward by the operating rod 22, and a vacuum is drawn into the piston chamber 10, each channel 31 and branch tube 41. Each channel 31, branch tube 41 and sampling head 5 are in a negative pressure state, so that the solution at different heights enters the respective sampling head 5 under the action of negative pressure, realizing simultaneous and equal-mass sampling of solutions at different heights. Since it is not necessary to sample solutions at different heights sequentially through a single needle syringe, the mixing of solutions at different heights is reduced, and the accuracy of the sampling results is improved. At the same time, since sampling solutions at different heights can be achieved in one operation, it is not necessary to use multiple needle syringes for separate sampling, making the operation more convenient. Last but not least, the branch tube 41 and the fixed plate 3, as well as the sampling head 5 and the branch tube 41, are detachable, which facilitates the cleaning and replacement of the branch tube 41 and the sampling head 5, further improving the accuracy of sampling. It can be seen that the photoresist sampling device of this invention can sample photoresist solutions of different heights, reduce solution mixing, improve sampling accuracy and ease of operation, and provide a basis for accurately detecting the viscosity and film thickness of photoresist solutions.

[0047] In one embodiment where the sampling head 5 is detachably connected to the branch tube 41, the sampling head 5 is provided with a flexible colloid 50, the flexible colloid 50 having a sealed opening inside. Each branch tube 41 has a metal probe 42 at its bottom end, which is sealed and inserted into the inner side of the sealed opening for detachable connection with the sampling head 5. This ensures good sealing performance between the branch tube 41 and the sampling head 5, reduces negative pressure loss, and allows the device to accurately extract the required mass of photoresist solution. It is understood that the sealed opening communicates with the internal space of the sampling head 5, and the metal probe 42 communicates with the inner cavity of the branch tube 41.

[0048] For example, the flexible colloid 50 is fixed to the top of the sampling head 5 by adhesive bonding, and the metal probe 42 is connected to the bottom of the branch tube 41 by plugging or sleeve bonding.

[0049] In other embodiments where the sampling head 5 and the branch pipe 41 are detachably connected, the branch pipe 41 and the sampling head 5 are connected by means of threaded connection, sleeve connection, etc., and sealing elements such as sealing rings are provided at the connection to ensure sealing performance.

[0050] The different heights of the sampling heads 5 mentioned above can be achieved by the following method: the connection port 32 is located at the bottom of the fixed plate 3, and the bottom heights of the branch pipes 41 are different, so that the heights of the sampling heads 5 are different.

[0051] It is understandable that the different heights of the above sampling heads 5 can be achieved by having different heights at their bottom ends.

[0052] To improve the ease and stability of controlling the movement of piston 21 with the operating lever 22, piston assembly 2 also includes a spring 23. One end of spring 23 is connected to cylinder 1, and the other end is connected to piston 21. Spring 23 is configured to drive piston 21 back to its original position through elastic deformation after piston 21 moves downward. During sampling, the operator presses piston 21 down to the bottom of piston chamber 10 using operating lever 22 and then releases it. Piston 21 gradually returns to its original position under the action of spring 23, thus more stably extracting solution samples.

[0053] For example, the spring 23 is a compression spring and is located between the bottom end of the piston 21 and the bottom of the piston chamber 10. After being pressed down by the piston 21, it generates an elastic force to drive the piston 21 to return to its original position.

[0054] For example, the spring 23 is a tension spring, with its bottom end fixed to the top of the piston 21 and its top end fixed inside the cylinder 1. The elastic force generated by the tension drives the piston 21 to reset.

[0055] In one embodiment of the above-mentioned cylinder 1, the cylinder 1 includes a main cylinder 11 and a secondary cylinder 12 connected to each other. The internal spaces of the main cylinder 11 and the secondary cylinder 12 are interconnected. The piston 21 is disposed in the main cylinder 11. The secondary cylinder 12 is connected to the fixed plate 3 and communicates with each channel 31.

[0056] For example, the main cylinder 11 and the auxiliary cylinder 12 are integrally formed, and the auxiliary cylinder 12 is welded or bolted to the fixing plate 3 to form an integral structure.

[0057] In order to improve the uniformity of air pressure in each channel 31 and the stability of the overall structure, each channel 31 and branch pipe 41 is arranged in a circle with the bottom of the piston chamber 10 as the center, and is set at equal angles.

[0058] In one embodiment where the branch pipe 41 and the connection port 32 are detachably connected, the connection port 32 is a spiral port, and the branch pipe 41 and the connection port 32 are connected by threads.

[0059] It is understandable that the aforementioned control lever 22 can be operated manually or driven by a drive mechanism to achieve automatic operation.

[0060] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A photoresist sampling device, characterized in that, include: Cylinder, piston assembly, fixing plate, branch pipe assembly, and sampling head; The cylinder has a piston chamber inside; The piston assembly includes a piston and an operating rod. The piston is movably disposed within the piston chamber, and one end of the operating rod is connected to the piston, while the other end protrudes from the top of the piston chamber. The fixing plate is connected to the cylinder and has at least two channels inside. One end of each channel is connected to the bottom of the piston chamber and the other end is connected to the outside of the fixing plate, forming a connection port at the connection point. The branch pipe assembly includes a plurality of branch pipes, the number of which is the same as the number of channels. Each branch pipe is detachably connected to each of the connection ports, and the bottom end of each branch pipe is detachably connected to a sampling head. The sampling heads have different heights.

2. The photoresist sampling device according to claim 1, characterized in that, The sampling head is equipped with a flexible colloid with a closed opening inside. Each branch tube has a metal probe at its bottom end, which is sealed and inserted into the inside of the closed opening to be detachably connected to the sampling head.

3. The photoresist sampling device according to claim 1, characterized in that, The connection port is located at the bottom end of the fixed plate, and the bottom ends of each branch pipe are at different heights so that the heights of each sampling head are different.

4. The photoresist sampling device according to claim 1, characterized in that, The piston assembly also includes a spring, one end of which is connected to the cylinder and the other end to the piston, and is configured to drive the piston to return to its original position through elastic deformation after the piston moves downward.

5. The photoresist sampling device according to claim 4, characterized in that, The spring is a compression spring and is located between the bottom end of the piston and the bottom of the piston chamber.

6. The photoresist sampling device according to claim 1, characterized in that, The cylinder body includes a main cylinder and a secondary cylinder connected together. The piston is disposed inside the main cylinder. The secondary cylinder is connected to the fixed plate and communicates with each of the channels.

7. The photoresist sampling device according to claim 1, characterized in that, Each of the aforementioned channels and branch pipes is arranged circumferentially with the bottom of the piston chamber as the center, and is set at equal angular intervals.

8. The photoresist sampling device according to claim 1, characterized in that, The branch pipe is connected to the connection port by a thread.

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