Insulation sealing structure of vacuum cavity discharge conductor

Abstract

The utility model provides an insulation sealing structure of a vacuum cavity discharge conductor. An insulation sealing structure of a vacuum cavity discharge conductor comprises an insulation sleeve, a sleeve, a clamping sleeve, a plastic plug and a conductor, the insulation sleeve is located in the sleeve and penetrates through the cavity wall of the bottom of a vacuum cavity, one end of the sleeve is provided with a flange, and the other end of the sleeve is welded to the cavity wall of the bottom of the vacuum cavity in a sealed mode; a plastic plug is in interference fit in the clamping sleeve with the flange, and a hole is formed in the middle of the plastic plug; the upper section of the conductor is nested in the insulating sleeve, the lower section of the conductor is in interference fit with the hole of the plastic plug, the conductor penetrates through the clamping sleeve, and the sleeve with the flange is connected with the clamping sleeve through a buckle. According to the utility model, through the mutual connection relation among the insulation sleeve, the sleeve, the clamping sleeve and the plastic plug, the problems of conductor conduction, vacuum in the cavity and insulation sealing can be well solved, and each part is not influenced by other adverse factors.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment manufacturing, and in particular to an insulating and sealing structure for a vacuum cavity discharge conductor. Background Technology

[0002] In a vacuum chamber, high current is used to ionize certain gases into ions, which then bombard the workpiece surface as particles. This is the operating principle of most plasma devices. Although the walls of the vacuum chamber are made of metal and cannot be charged, a conductor must pass through the entire chamber from the outside in to perform the discharge operation inside. Therefore, the conductor passing through the chamber wall must simultaneously meet both insulation and sealing conditions. The entire structure involved in the discharge and the chamber itself are relatively stationary. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide an insulating and sealing structure for a vacuum cavity discharge conductor.

[0004] The technical solution adopted by this utility model to solve the technical problem is: an insulating and sealing structure for a vacuum cavity discharge conductor, including an insulating sleeve, a sleeve, a ferrule, a plastic plug, and a conductor. The insulating sleeve is located in the sleeve and passes through the cavity wall at the bottom of the vacuum cavity. One end of the sleeve has a flange, and the other end is sealed and welded to the cavity wall at the bottom of the vacuum cavity. The flanged ferrule contains an interference fit with a plastic plug, and the plastic plug has a hole in the middle. The upper section of the conductor is nested in the insulating sleeve, and the lower section of the conductor is interference fit with the hole of the plastic plug. The conductor passes through the ferrule, and the flanged sleeve and the ferrule are connected by a snap fastener.

[0005] Furthermore, the insulating sleeve has a hollow cylindrical structure, and a hole is opened in the cavity wall at the bottom of the vacuum cavity. The insulating sleeve passes through the hole and there is a gap between the insulating sleeve and the hole.

[0006] Furthermore, the sleeve has a hollow cylindrical structure.

[0007] Furthermore, the gap caused by the length difference between the sleeve and the plastic plug is filled with sealant.

[0008] Furthermore, the conductor has an axial structure.

[0009] Furthermore, the top of the conductor is provided with an installation position that connects to the interior of the cavity.

[0010] Furthermore, the boss on the upper section of the conductor fixes the upper and lower positions of the insulating sleeve.

[0011] Furthermore, the conductor passes through the sleeve and is fixed in its vertical position by a protrusion on the lower section of the conductor.

[0012] Furthermore, the sleeve with flange end and the ferrule with flange end are provided with snap-fit ​​installation positions.

[0013] Furthermore, the buckle is a vacuum KF buckle.

[0014] The beneficial effects of this utility model are: through the interconnection between the insulating sleeve, the sleeve, the ferrule and the plastic plug, the problems of conductor conductivity, vacuum inside the cavity and insulation sealing can be solved well, and each part is not affected by other adverse factors. Attached Figure Description

[0015] Figure 1 This is a cross-sectional view of the insulating and sealing structure of the vacuum cavity discharge conductor of this utility model. Detailed Implementation

[0016] like Figure 1 As shown, the insulating and sealing structure of the vacuum cavity discharge conductor of this utility model includes an insulating sleeve 1, a sleeve 2, a ferrule 3, a plastic plug 4, and a conductor 5. A hole is formed in the cavity wall 6 at the bottom of the vacuum cavity. The insulating sleeve 1 is a hollow cylindrical structure that passes through the hole, with a gap between the insulating sleeve 1 and the hole. The sleeve 2 is also a hollow cylindrical structure, with the insulating sleeve 1 located inside. One end of the sleeve 2 has a flange, and the other end is sealed and welded to the cavity wall 6 at the bottom of the vacuum cavity. A plastic plug 4 is interference-fitted into the flanged ferrule 3. The plastic plug 4 has a hole in the middle, and the gap created by the length difference between the ferrule 3 and the plastic plug 4 is sealed by a seal. Adhesive is used to fill gaps and seal assembly gaps to a greater extent. Conductor 5 has a shaft-like structure. The top of conductor 5 is provided with an installation position 7 that is fixedly and insulatedly connected to the inside of the cavity. The upper section of conductor 5 is nested in the insulating sleeve 1, and the upper and lower positions of the insulating sleeve 1 are fixed by the boss of the upper section of conductor 5. The lower section of conductor 5 is interference-fitted with the middle hole of the plastic plug 4, and conductor 5 passes through the ferrule 3 and is fixed by the boss of the lower section of conductor 5. Vacuum KF buckle installation positions 8 are provided at the flanged ends of sleeve 2 and ferrule 3. Vacuum KF buckle connects the flanged sleeve 2 and ferrule 3 together without leakage.

[0017] The aforementioned insulating sleeve 1 is made of insulating material, the ferrule 2 and sleeve 2 are made of metal, the plastic plug 3 is made of plastic, the conductor 5 is made of brass, and the cavity wall 6 of the vacuum chamber is made of metal. The vacuum KF snap-fit ​​is a connection device that clamps two flanges with rubber sealing rings using a snap-fit ​​method. It is a standard part. The KF snap-fit ​​connection is a flange connection used in ultra-high vacuum environments. It is a type of metal static seal, and the materials are typically Viton, PTFE, oxygen-free copper, etc. It can withstand high-temperature baking and is suitable for vacuum levels up to 10^-12 mbar. The flanges are typically made of 304 or 316 stainless steel.

[0018] During operation, the vacuum chamber is in a vacuum state. The upper end of conductor 5 is fixedly connected to the inside of the vacuum chamber, and the lower end is connected to the power source to transmit electricity, which acts on other components connected inside the chamber. During operation, the chamber wall 6 and sleeve 2 are welded and sealed, preventing air leakage. The plastic plug 4 and sleeve 3, as well as the plastic plug 4 and conductor 5, are interference-fitted. Vacuum adhesive is used to seal the gaps again. Vacuum KF clips are installed at position 8 to achieve a sealed state. The insulating sleeve 1 restricts the position of conductor 5 and insulates it from the chamber wall 6. The plastic plug 4 withstands the pressure difference between its inside and outside. The interference fit and sealing adhesive enable it to withstand the generated pressure without any air leakage.

Claims

1. An insulating and sealed structure for a vacuum cavity discharge conductor, characterized in that: The device includes an insulating sleeve (1), a sleeve (2), a ferrule (3), a plastic plug (4), and a conductor (5). The insulating sleeve (1) is located inside the sleeve (2) and passes through the cavity wall (6) at the bottom of the vacuum chamber. One end of the sleeve (2) has a flange, and the other end is sealed and welded to the cavity wall (6) at the bottom of the vacuum chamber. The flanged ferrule (3) contains an interference fit with a plastic plug (4), which has a hole in the middle. The upper section of the conductor (5) is nested in the insulating sleeve (1), and the lower section of the conductor (5) is interference fit with the hole of the plastic plug (4). The conductor (5) passes through the ferrule (3), and the flanged sleeve (2) and the ferrule (3) are connected by a snap fastener.

2. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The insulating sleeve (1) is a hollow cylindrical structure. A hole is opened on the cavity wall (6) at the bottom of the vacuum cavity, and the insulating sleeve (1) passes through the hole and there is a gap between the insulating sleeve (1) and the hole.

3. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The sleeve (2) is a hollow cylindrical structure.

4. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The gap caused by the length difference between the sleeve (3) and the plastic plug (4) is filled with sealant.

5. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The conductor (5) has an axial structure.

6. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The top of the conductor (5) is provided with an installation position (7) that connects to the inside of the cavity.

7. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The boss on the upper section of the conductor (5) fixes the upper and lower positions of the insulating sleeve (1).

8. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The conductor (5) passes through the sleeve (3) and is fixed in the upper and lower positions by the boss of the lower section of the conductor (5).

9. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The sleeve (2) with flange end and the ferrule (3) with flange end are provided with snap-fit ​​installation positions (8).

10. The insulating and sealing structure of the vacuum cavity discharge conductor as described in claim 1, characterized in that: The buckle is a vacuum KF buckle.

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