Three-dimensional material carrying system and semiconductor device processing system

Abstract

The utility model discloses a three-dimensional material carrying system and a semiconductor device processing system, and the three-dimensional material carrying system comprises a plurality of layers of first tracks, air carrying vehicles which are movably arranged on each layer of first track, and a carrying vehicle transferring device, the carrier transferring device comprises a second rail which can move up and down so as to be in butt joint with the first rail, and the second rail is arranged on a lifting driving device for driving the second rail to move up and down. According to the utility model, the carrier transferring device is arranged to realize that the air carrier is arranged on different layers, so that the actual requirement that the air carrier is transferred among different first rails can be effectively met, the dispatching flexibility of crown blocks can be effectively improved, the adjustability of the whole carrying system is improved, and the carrying system is convenient to popularize and apply.

Description

Technical Field

[0001] This utility model relates to the field of material handling, and in particular to three-dimensional material handling systems and semiconductor device processing systems. Background Technology

[0002] In wafer fabs, overhead crane transport systems (OHTs), as shown in patent documents such as patent announcement number CN107323978B, are used to transport materials.

[0003] Large wafer fabrication plants typically have multiple floors, each equipped with an overhead crane system for transporting wafer cassettes and other containers. However, in current technology, the overhead crane systems on each floor operate independently, and the cranes can only move within a fixed floor, making it difficult to call upon the cranes between different floors. Utility Model Content

[0004] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a three-dimensional material handling system and a semiconductor device processing system.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A three-dimensional material handling system includes multiple layers of first tracks and aerial transport vehicles that are movable on each layer of the first tracks. The three-dimensional material handling system also includes a transport vehicle transfer device, which includes a second track that can move up and down to dock with the first track on each layer. The second track is provided by a lifting drive device that drives its up and down movement.

[0007] Preferably, in the three-dimensional material handling system, some or all of the moving drive motors in the aerial transport vehicle are motors with brakes.

[0008] Preferably, in the three-dimensional material handling system, there are multiple transfer devices for the transport vehicle.

[0009] Preferably, in the three-dimensional material handling system, the lifting drive device is a vertical elevator or a lift.

[0010] When the lifting drive device is a vertical elevator, the second track is suspended inside the elevator car.

[0011] When the lifting drive device is a lift, the second track is suspended above the lifting platform of the lift.

[0012] Preferably, in the three-dimensional material handling system, one end of the second track is connected to the first track;

[0013] Alternatively, both ends of the second track are connected to the first track, with one end of the second track being the entry end and the other end being the exit end.

[0014] Preferably, in the three-dimensional material handling system, the second track is multi-layered.

[0015] Preferably, in the three-dimensional material handling system, the first track on each layer is connected to the second track via a docking track.

[0016] Preferably, in the three-dimensional material handling system, the opposite ends of the docking track and the second track are provided with matching alignment detection devices.

[0017] Preferably, in the three-dimensional material handling system, the docking track includes an entry track and an exit track.

[0018] Semiconductor device processing systems, including any of the three-dimensional material handling systems described above.

[0019] The advantages of this utility model's technical solution are mainly reflected in:

[0020] This invention enables the overhead transport vehicle to be moved between different levels by setting up a transport vehicle transfer device. This effectively meets the actual needs of the overhead transport vehicle to be called between different first tracks, thereby effectively improving the flexibility of crane scheduling, increasing the adjustability of the entire transport system, and facilitating its widespread application.

[0021] The overall structure of the transport vehicle transfer device of this utility model is relatively simple. It can not only realize the scheduling of overhead cranes, but also directly transport materials between different floors through the aerial transport vehicle. It is highly efficient and does not require additional material transport elevators and transfer structures, making it easier to implement.

[0022] The transport vehicle transfer device of this utility model can be configured with different structures according to different needs, effectively meeting different usage scenarios and having better applicability. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of one embodiment of the three-dimensional material handling system of this utility model;

[0024] Figure 2 This is a schematic diagram of another embodiment of the three-dimensional material handling system of this utility model;

[0025] Figure 3 This is a schematic diagram of the first track of this utility model being connected to the second track, which enters and exits at one end, via a docking track;

[0026] Figure 4This is a schematic diagram of the first track of this utility model being connected to a second track with U-shaped inlets and outlets at both ends via a docking track;

[0027] Figure 5 This is a schematic diagram showing the first track of this utility model connected to a second track with straight ends via a docking track. Detailed Implementation

[0028] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0029] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] Example 1

[0031] The three-dimensional material handling system disclosed in this utility model will be described below with reference to the accompanying drawings. Figure 1 As shown, it includes multiple layers of first tracks 100 and aerial transport vehicles 200 movable on each layer of the first tracks 100. Each layer of the first tracks 100 can be located on the first floor 310 of a multi-story building 300, such as a multi-story factory or office building. The specific layout of the first tracks 100 can be designed according to actual needs and will not be elaborated here. The specific structure of the aerial transport vehicle 200 is known technology, for example, it can be the structure disclosed in patent documents with authorization announcement numbers CN117142330B and CN114104635B, and is not limited here. Some or all of the moving drive motors in the aerial transport vehicle 200 are motors with brakes. This design is because it is necessary to prevent the aerial transport vehicle 200 from moving during the transfer process to ensure stable transfer.

[0032] As attached Figure 1 Appendix Figure 2As shown, the three-dimensional material handling system also includes a transport vehicle transfer device 400, which includes a second track 410 that can move up and down to dock with the first track 100 on the first floor. The second track 410 is disposed on a lifting drive device 420 that drives it to move up and down.

[0033] The number of the transport vehicle transfer device 400 can be one or more. Preferably, there are multiple transport vehicle transfer devices 400. The specific number can be designed as needed and is not limited here. The specific position of the transport vehicle transfer device 400 can also be designed as needed and is not limited here.

[0034] The structure of the lifting drive device 420 can be designed as needed; for example, in one embodiment, it includes... Figure 1 As shown, the lifting drive device 420 is a vertical elevator. When the lifting drive device 420 is a vertical elevator, the second track 410 is suspended inside the elevator car. The vertical elevator can be a known type of vertical elevator, which will not be described in detail here. The car can be a structure consisting only of a rectangular frame, or it can be a conventional elevator car structure. The car can be located within an elevator shaft or frame, although neither an elevator shaft nor a frame is mandatory.

[0035] In another embodiment, as shown in the appendix Figure 2 As shown, the lifting drive device 420 can be a lift, such as a known scissor lift, telescopic cylinder lift, or guide rail chain lift, etc. Its specific lifting height can be designed as needed. In this case, the second rail 410 is suspended above the lifting platform of the lift.

[0036] The specific shape of the second track 410 can be designed according to different needs. For example, in one embodiment, as shown in the attached figure... Figure 3 As shown, the second track 410 can be a straight track, and one end of the second track 410 is connected to the first track 100. In this case, the end of the second track 410 that is connected to the first track 100 serves as both the entry end 411 and the exit end 412.

[0037] Of course, in other embodiments, as shown in the appendix Figure 4 Appendix Figure 5 As shown, both ends of the second track 410 are connected to the first track 100, and one end of the second track 410 is the entry end 411 and the other end is the exit end 412. At this time, the second track 410 can be a straight track, an L-shaped track, or a U-shaped track.

[0038] Furthermore, the second track 410 may have only one layer, or more preferably, the second track 410 may have multiple layers, such as 2-3 layers.

[0039] To prevent the aerial transport vehicle from moving arbitrarily on the second track 410 during lifting, the top surface of the second track 410 may have two symmetrical and interconnected inclined surfaces, with the connecting end of the two inclined surfaces lower than their opposite ends. The slope of the inclined surfaces is, for example, between 1° and 5°, and the part of the top surface of the second track 410 that connects with the opposite ends of the two inclined surfaces is a plane.

[0040] Furthermore, to prevent the aerial transport vehicle 200 from affecting the normal operation of other aerial transport vehicles 200 while waiting for transfer at the transport vehicle transfer device 400, as shown in the attached... Figure 1 -Appendix Figure 5 As shown, the first track 100 of each layer is connected to the second track 410 via the docking track 500.

[0041] When only one end of the second track 410 is connected to the first track 100, the docking track 500 has only one channel, through which the aerial transport vehicle 200 can move to the second track 410 or from the second track 410 to the first track 100. More preferably, to avoid interference when the aerial transport vehicle 200 enters and exits the transport vehicle transfer device 400, the docking track 500 includes an entry track 510 and an exit track 520.

[0042] Furthermore, to ensure stable docking between the docking track 500 and the second track 410 and thus smooth movement of the aerial transport vehicle 200, matching alignment detection devices are provided at the opposite ends of the docking track 500 and the second track 410. These alignment detection devices are, for example, known through-beam sensors or reflectors and reflective photoelectric sensors. Preferably, a reflector can be provided at one end of the second track 410 facing the docking track 500. The reflector can be recessed into a mounting groove at the end of the second track 410. Simultaneously, a self-reflective photoelectric sensor is provided at one end of the docking track 500 facing the second track 410. When the self-reflective photoelectric sensor receives a trigger signal, the alignment of the docking track 500 and the second track 410 is confirmed.

[0043] Example 2

[0044] This embodiment discloses a semiconductor device processing system, including the three-dimensional material handling system described above.

[0045] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A three-dimensional material handling system, comprising multiple layers of first tracks and an aerial transport vehicle movable on each layer of the first track, characterized in that: The three-dimensional material handling system also includes a transport vehicle transfer device, which includes a second track that can move up and down to dock with the first track on the first floor. The second track is provided by a lifting drive device that drives its up and down movement.

2. The three-dimensional material handling system according to claim 1, characterized in that: Some or all of the mobile drive motors in the aerial transport vehicle are motors with brakes.

3. The three-dimensional material handling system according to claim 1, characterized in that: The transport vehicle has multiple transfer devices.

4. The three-dimensional material handling system according to claim 1, characterized in that: The lifting drive device is a vertical elevator or a lift. When the lifting drive device is a vertical elevator, the second track is suspended inside the elevator car. When the lifting drive device is a lift, the second track is suspended above the lifting platform of the lift.

5. The three-dimensional material handling system according to claim 1, characterized in that: One end of the second track is connected to the first track; Alternatively, both ends of the second track are connected to the first track, with one end of the second track being the entry end and the other end being the exit end.

6. The three-dimensional material handling system according to claim 1, characterized in that: The second track is multi-layered.

7. The three-dimensional material handling system according to claim 1, characterized in that: The first track on each floor connects to the second track via a docking track.

8. The three-dimensional material handling system according to claim 7, characterized in that: The docking track and the second track are equipped with matching alignment detection devices at their opposite ends.

9. The three-dimensional material handling system according to claim 7, characterized in that: The docking track includes an entry track and a departure track.

10. A semiconductor device fabrication system, characterized in that: Includes the three-dimensional material handling system as described in any one of claims 1-9.

Images