Calibration auxiliary device for debugging transmission position in semiconductor cavity

Abstract

The utility model discloses a calibration auxiliary device for debugging a transmission position in a semiconductor cavity, which comprises a carrying platform, the bottom of the carrying platform is provided with a notch flat edge which is accurately aligned with an electrostatic chuck, and the central position of the carrying platform is provided with a central calibration module. Compared with the prior art, the wafer conveying device has the advantages that the wafer conveying position can be quickly calibrated and accurately positioned, the debugging time of engineers is shortened, the labor force is reduced, and the working efficiency is improved, so that the timeliness requirement of the design is met.

Description

Technical Field

[0001] This utility model relates to a calibration device, and more particularly to a calibration auxiliary device for adjusting the transmission position within a semiconductor cavity. Background Technology

[0002] In wafer manufacturing, the closer the wafer center aligns with the center of the electrostatic chuck (ESC), the better. Better adhesion leads to better heat dissipation on the back of the wafer, better meeting process requirements and resulting in higher product yield. During wafer transfer, a robotic arm needs to precisely deliver the wafer to its designated position. Therefore, the robotic arm's position needs to be calibrated beforehand. However, in actual operation, engineers find it difficult to achieve precise positioning with the naked eye, and calibration is time-consuming and inefficient. Therefore, developing a calibration auxiliary device for adjusting the transfer position within a semiconductor cavity has become a pressing problem for those skilled in the art. Utility Model Content

[0003] The present invention addresses the aforementioned shortcomings by providing a calibration auxiliary device for adjusting the transmission position within a semiconductor cavity.

[0004] The above-mentioned objective of this utility model is achieved through the following technical solution: a calibration auxiliary device for adjusting the transmission position in a semiconductor cavity, comprising a stage, the bottom of which is provided with a notch and flat edge for precise alignment with an electrostatic chuck, and a central calibration module is provided at the center of the stage, the central calibration module being used for positioning with a mechanical finger, making the calibration position faster, more accurate and convenient, and achieving rapid and accurate positioning.

[0005] Furthermore, the central calibration module is provided with a calibration guide shape that mates with the tip of the mechanical finger.

[0006] Furthermore, the calibration auxiliary device for adjusting the transmission position within the semiconductor cavity also includes a movable elevation component. The platform is provided with a positioning pin, and the movable elevation component is used to adjust the height between the mechanical finger and the electrostatic chuck. The movable elevation component is provided with positioning holes corresponding to the positioning pins.

[0007] Furthermore, the movable jacking component is sheet-shaped.

[0008] Furthermore, a guide slot is provided in the middle of the platform, the central calibration module is located at the center of the guide slot, and the positioning pins are located on both sides of the central calibration module.

[0009] Furthermore, the stage and the central calibration module are integrally formed and made of acrylic material.

[0010] The advantages of this invention compared to the prior art are: this invention can quickly calibrate the wafer transfer position and accurately position it, reducing the debugging time for engineers, reducing labor, improving work efficiency, and thus meeting the timeliness requirements of the design. Attached Figure Description

[0011] Figure 1 This is an exploded structural diagram of the top side angle of this utility model.

[0012] Figure 2 This is an exploded structural diagram of the bottom side angle of this utility model.

[0013] Figure 3 This is a schematic diagram of the mechanical finger before calibration during operation of this utility model.

[0014] Figure 4 This is a schematic diagram of the mechanical finger after calibration during operation of this utility model. Detailed Implementation

[0015] The present invention will now be described in further detail with reference to the accompanying drawings.

[0016] like Figure 1 , Figure 2 and Figure 3 As shown, a calibration auxiliary device for adjusting the transfer position within a semiconductor cavity includes a stage 1, a central calibration module 2, and a movable elevation assembly 3. The bottom of the stage 1 has a notch 101 that precisely aligns with the positioning notch 401 on the electrostatic chuck 4. The central calibration module 2 is located at the center of the stage 1. The central calibration module 2 is used for positioning with a robotic finger 5, making the calibration position faster, more accurate, and more convenient, achieving rapid and accurate positioning. The central calibration module 2 has a calibration guide shape (such as...) that cooperates with the front end of the robotic finger 5. Figure 1 The cylindrical surface 201 of the side wall of the central calibration module 2 shown in the figure matches the arc-shaped groove 501 at the front end of the mechanical finger 5. The platform 1 and the central calibration module 2 are integrally formed and made of acrylic material.

[0017] The platform 1 has a guide slot 6 in the middle, the center calibration module 2 is located in the center of the guide slot 6, and the guide slots 6 on both sides of the center calibration module 2 are provided with positioning pins 7. The movable elevation component 3 is provided with positioning holes 8 corresponding to the positioning pins 7. The movable elevation component 3 is plate-shaped and is used to adjust the height between the mechanical finger 5 and the electrostatic chuck 4.

[0018] like Figures 1 to 4As shown, the working process of this utility model is as follows: the mechanical finger 5 extends into the cavity until it reaches the central calibration module 2, records the parameters of the arm position on the X-axis, Y-axis, and Z-axis, extends and retracts the mechanical arm to confirm the height between the arm and the ESC, and increases or decreases the movable components to adjust the distance between the arm and the ESC.

[0019] This invention can quickly calibrate the position of the mechanical finger 5, reducing the number of times the position needs to be repeatedly determined and improving the efficiency of engineers; precise positioning provides better conditions for product manufacturing and reduces the probability of product problems.

[0020] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A calibration auxiliary device for adjusting the transfer position within a semiconductor cavity, comprising a stage, characterized in that: The bottom of the stage has a notch with a flat edge that is precisely aligned with the electrostatic chuck, and a center calibration module is located at the center of the stage.

2. The calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 1, characterized in that: The central calibration module is provided with a calibration guide shape that mates with the tip of the mechanical finger.

3. The calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 1, characterized in that: The calibration auxiliary device for adjusting the transfer position within the semiconductor cavity also includes a movable elevation component. The platform is provided with a positioning pin. The movable elevation component is used to adjust the height between the mechanical finger and the electrostatic chuck. The movable elevation component is provided with positioning holes corresponding to the positioning pins.

4. The calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 3, characterized in that: The movable jacking component is sheet-shaped.

5. A calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 3, characterized in that: The platform has a guide slot in the middle, the central calibration module is located in the center of the guide slot, and the positioning pins are located on both sides of the central calibration module.

6. The calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 1, characterized in that: The platform and the central calibration module are integrally formed.

7. A calibration auxiliary device for adjusting the transmission position within a semiconductor cavity according to claim 6, characterized in that: The stage and central calibration module are made of acrylic material.

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