Medium-frequency magnetron sputtering power supply with adjusting structure

Abstract

The utility model relates to the technical field of intermediate-frequency magnetron sputtering power supplies, in particular to an intermediate-frequency magnetron sputtering power supply with an adjusting structure. The medium-frequency magnetron sputtering power source with the adjusting structure comprises a power source shell, a plurality of L-shaped heat dissipation holes distributed at equal intervals are formed in the two corners, located on the top, of the power source shell, and two sets of dustproof components used for sealing the L-shaped heat dissipation holes in the two sides are installed in the power source shell. According to the intermediate-frequency magnetron sputtering power supply with the adjusting structure, when the intermediate-frequency magnetron sputtering power supply is not used any more, after the line wheel is rotated to enable the L-shaped plate to completely shield the L-shaped heat dissipation holes, the line wheel can be locked by screwing the fixing screw rod, at the moment, the L-shaped heat dissipation holes are in a closed state, and the spring B is in a stretched state; therefore, external dust cannot enter the power supply shell through the L-shaped heat dissipation holes, and the cleanliness of the interior of the power supply shell is improved.

Description

Technical Field

[0001] This utility model relates to the field of medium-frequency magnetron sputtering power supply technology, and in particular to a medium-frequency magnetron sputtering power supply with an adjustable structure. Background Technology

[0002] Medium-frequency magnetron sputtering power supplies, as the core power unit of magnetron sputtering technology, are widely used in industrial fields such as thin film preparation, semiconductor processing, and surface coating. During long-term use, their operational stability, ease of maintenance, and dustproof and heat dissipation performance directly affect the equipment's lifespan and the precision of the sputtering process.

[0003] Existing medium-frequency magnetron sputtering power supplies have significant limitations in their structural design. For example, to achieve internal heat dissipation, existing equipment typically has heat dissipation holes on the surface of the casing. When the medium-frequency magnetron sputtering power supply is in use, relatively little dust enters the power supply casing due to the airflow caused by the internal cooling fan. However, when the medium-frequency magnetron sputtering power supply is not in operation, the heat dissipation holes do not provide airflow, which leads to dust accumulation on the surface of internal components, potentially causing problems such as short circuits and accelerated component aging.

[0004] Therefore, it is necessary to provide a new medium-frequency magnetron sputtering power supply with an adjustable structure to solve the above-mentioned technical problems. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a medium-frequency magnetron sputtering power supply with an adjustable structure.

[0006] The medium-frequency magnetron sputtering power supply with an adjustable structure provided by this utility model includes a power supply housing, an opening on the upper plate of the power supply housing, and a cover plate that is slidably connected and used to seal the opening is installed on the power supply housing. Two sets of symmetrically distributed reset components are installed on the cover plate, and the cover plate is opened and closed by the reset components.

[0007] The power supply housing has several L-shaped heat dissipation holes that are evenly distributed on both sides of the top corner, and two sets of dustproof components are installed inside the power supply housing to seal the L-shaped heat dissipation holes on both sides respectively.

[0008] The dustproof component includes a guide rod and a reel. The guide rod is fixedly installed inside the power supply housing and near the top corner of the power supply housing. An L-shaped plate with a sliding connection is fitted on the guide rod. A spring B is fitted on the guide rod. The reel is rotatably installed at the tail of the power supply housing via a bracket. A steel wire is wound on the reel. The steel wire passes through the plate at the tail of the power supply housing and is fixedly connected to the tail end of the L-shaped plate.

[0009] Preferably, a rotating rod is fixedly installed on the shaft of the reel, and the rotating rod passes through a sleeve pipe fixedly installed on the bracket and is rotatably connected to the sleeve pipe. A threaded fixing screw is installed on the sleeve pipe.

[0010] Preferably, one end of the spring B is fixedly connected to the front plate surface of the inner wall of the power supply housing, and the other end of the spring B is fixedly connected to the front plate end of the L-shaped plate.

[0011] Preferably, two symmetrically distributed limiting protrusions are fixedly installed on the L-shaped plate, and the two limiting protrusions are respectively inserted into the two side grooves opened on the guide rod and slidably connected to the side grooves. The L-shaped plate is in sliding contact with the inner wall of the power supply housing.

[0012] Preferably, side plates are fixedly installed on both outer walls of the power supply housing, and each side plate has a sliding groove.

[0013] Preferably, the reset component includes a sliding rod, which is fixedly installed in a sliding groove, and a sliding block is slidably connected to the sliding rod. A curved connecting plate is fixedly installed on the sliding block and is fixedly connected to the side wall of the cover plate. A spring A is sleeved on the sliding rod, one end of which is fixedly connected to the inner groove wall of the sliding groove near the front end face of the power supply housing, and the other end of which is fixedly connected to the sliding block near the front end face of the power supply housing.

[0014] Preferably, a side sliding plate is fixedly installed on the curved connecting plate, and the side sliding plate is located outside the side plate and slidably connected to the outer surface of the side plate. A threaded locking screw is installed on the side sliding plate.

[0015] Preferably, the power supply housing has guide grooves on both sides of the opening, and the two sides of the cover plate are respectively inserted into the two guide grooves and slidably connected to the guide grooves.

[0016] Compared with related technologies, the medium-frequency magnetron sputtering power supply with an adjustable structure provided by this utility model has the following beneficial effects:

[0017] When the medium-frequency magnetron sputtering power supply is no longer in use, rotating the spool completely covers the L-shaped heat dissipation holes with the L-shaped plate, and then tightening the fixing screw locks the spool. At this time, the L-shaped heat dissipation holes are closed, and the spring B is stretched. Therefore, external dust cannot enter the power supply housing through the L-shaped heat dissipation holes, improving the cleanliness of the power supply housing. When the medium-frequency magnetron sputtering power supply is in use, after loosening the fixing screw, the L-shaped plate is driven to slide along the guide rod towards the end of the power supply housing under the pull of the spring B. At this time, the L-shaped plate no longer covers the L-shaped heat dissipation holes, allowing the L-shaped heat dissipation holes to dissipate heat. Attached Figure Description

[0018] Figure 1 One of the structural schematic diagrams of a preferred embodiment of the medium-frequency magnetron sputtering power supply with an adjustable structure provided by this utility model;

[0019] Figure 2 A second schematic diagram of a preferred embodiment of the medium-frequency magnetron sputtering power supply with an adjustable structure provided by this utility model;

[0020] Figure 3 for Figure 2 The diagram shows the structural structure of the power supply housing.

[0021] Figure 4 for Figure 1 The diagram shows the connection structure between the reset component and the cover plate.

[0022] Figure 5 for Figure 2 The diagram shows the structure of the dustproof component.

[0023] The following are the labeling elements in the diagram: 1. Power supply housing; 1a. L-shaped heat dissipation hole; 1b. Guide groove; 11. Side plate; 11a. Sliding groove; 2. Cover plate; 3. Reset component; 31. Sliding rod; 32. Sliding block; 33. Curved connecting plate; 34. Spring A; 35. Side slide plate; 36. Locking screw; 4. Dustproof component; 41. Guide rod; 41a. Side groove; 42. L-shaped plate; 421. Limiting protrusion; 43. Spring B; 44. Wire wheel; 441. Bracket; 442. Socket; 443. Rotating rod; 444. Fixing screw; 45. Steel wire. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0025] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0026] Please see Figures 1 to 5 The present invention provides a medium-frequency magnetron sputtering power supply with an adjustable structure, the medium-frequency magnetron sputtering power supply with an adjustable structure includes a power supply housing 1, a cover plate 2, a reset component 3, and a dustproof component 4.

[0027] In the embodiments of this utility model, please refer to Figures 1 to 5The power supply housing 1 has an opening on its upper surface, and a cover plate 2 with a sliding connection for sealing the opening is installed on the power supply housing 1. Side plates 11 are fixedly installed on both outer walls of the power supply housing 1, and each side plate 11 has a sliding groove 11a. Two sets of symmetrically distributed reset components 3 are installed on the cover plate 2, and the cover plate 2 is opened and closed by the reset components 3.

[0028] The reset component 3 includes a sliding rod 31, which is fixedly installed in the sliding groove 11a. A sliding block 32 is slidably connected to the sliding rod 31. A curved connecting plate 33 is fixedly installed on the sliding block 32 and is fixedly connected to the side wall of the cover plate 2. A spring A34 is sleeved on the sliding rod 31. One end of the spring A34 is fixedly connected to the inner groove wall of the sliding groove 11a near the front end face of the power housing 1, and the other end of the spring A34 is fixedly connected to the sliding block 32 near the front end face of the power housing 1. A side sliding plate 35 is fixedly installed on the curved connecting plate 33. The side sliding plate 35 is located outside the side plate 11 and is slidably connected to the outer plate surface of the side plate 11. A threaded locking screw 36 is installed on the side sliding plate 35.

[0029] It should be noted that: under the action of spring A34, the sliding block 32 is driven to slide along the sliding rod 31 toward the front end face of the power supply housing 1, so the cover plate 2 can stably cover the opening on the upper plate of the power supply housing 1. At this time, tightening the locking screw 36 can lock the cover plate 2, which is simple and convenient to operate.

[0030] When it is necessary to inspect the components inside the power supply housing 1, reverse the locking screw 36 and loosen it. Slide the cover plate 2 along the tail of the power supply housing 1 to expose the opening. At this time, the spring A34 is compressed. Then tighten the locking screw 36 to lock the cover plate 2. Sliding the cover plate 2 will gradually expose the components inside the power supply housing 1. It can display the internal parts of the U-shaped power supply housing 1 as needed, and at the same time facilitate the staff to quickly inspect the internal components of the power supply housing 1 without disassembling a large number of screws. After the inspection is completed, reverse the locking screw 36 and loosen it. Therefore, under the action of the spring force of the spring A34, the cover plate 2 can stably cover the opening on the upper plate of the power supply housing 1. Then tighten the locking screw 36 to lock the cover plate 2.

[0031] Furthermore, guide grooves 1b are provided on both sides of the opening of the power supply housing 1. The two sides of the cover plate 2 are respectively inserted into the two guide grooves 1b and slidably connected to the guide grooves 1b, thereby improving the stability of the cover plate 2 sliding on the power supply housing 1.

[0032] In the embodiments of this utility model, please refer to Figures 1 to 5The power supply housing 1 has several L-shaped heat dissipation holes 1a that are evenly distributed on the two corners of the top, and two sets of dustproof components 4 are installed inside the power supply housing 1 to seal the L-shaped heat dissipation holes 1a on both sides.

[0033] The dustproof component 4 includes a guide rod 41 and a reel 44. The guide rod 41 is fixedly installed inside the power supply housing 1 and near the top corner of the power supply housing 1. An L-shaped plate 42 is slidably connected on the guide rod 41. A spring B43 is also fitted on the guide rod 41. One end of the spring B43 is fixedly connected to the front plate of the inner wall of the power supply housing 1, and the other end of the spring B43 is fixedly connected to the front plate end of the L-shaped plate 42. The reel 44 is rotatably installed at the tail of the power supply housing 1 through a bracket 441. A steel wire 45 is wound on the reel 44. The steel wire 45 passes through the plate at the tail of the power supply housing 1 and is fixedly connected to the tail end of the L-shaped plate 42.

[0034] A rotating rod 443 is fixedly installed on the shaft of the reel 44, and the rotating rod 443 passes through the sleeve 442 fixedly installed on the bracket 441 and is rotatably connected to the sleeve 442. A threaded fixing screw 444 is installed on the sleeve 442.

[0035] It should be noted that when the medium frequency magnetron sputtering power supply is no longer in use, rotating the spool 44 causes the steel wire 45 to slide outward and wrap around the spool 44. This causes the steel wire 45 to pull the L-shaped plate 42 to slide along the guide rod 41 toward the tail of the power supply housing 1 until the L-shaped plate 42 completely covers the L-shaped heat dissipation hole 1a. Then, tightening the fixing screw 444 will lock the spool 44. At this time, the L-shaped heat dissipation hole 1a is in a closed state, and the spring B43 is in a stretched state. Therefore, external dust cannot enter the power supply housing 1 through the L-shaped heat dissipation hole 1a, thus improving the cleanliness of the inside of the power supply housing 1.

[0036] When using a medium-frequency magnetron sputtering power supply, after loosening the fixing screw 444, the L-shaped plate 42 is driven to slide along the guide rod 41 toward the end of the power supply housing 1 under the pull force of the spring B43. At this time, the L-shaped plate 42 no longer blocks the L-shaped heat dissipation hole 1a, so that the L-shaped heat dissipation hole 1a can dissipate heat.

[0037] Furthermore, two symmetrically distributed limiting protrusions 421 are fixedly installed on the L-shaped plate 42, and the two limiting protrusions 421 are respectively inserted into the two side grooves 41a opened on the guide rod 41 and slidably connected to the side grooves 41a. The L-shaped plate 42 slides in contact with the inner wall of the power supply housing 1. The limiting protrusions 421 provided on the L-shaped plate 42 prevent the L-shaped plate 42 from rotating along the guide rod 41, thereby improving the stability of the L-shaped plate 42 when sliding along the guide rod 41.

[0038] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0039] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A medium-frequency magnetron sputtering power supply with an adjustable structure, characterized in that, Includes a power supply housing (1), the upper plate of the power supply housing (1) is provided with an opening, and a cover plate (2) for sealing the opening is installed on the power supply housing (1) and is slidably connected. Two sets of symmetrically distributed reset components (3) are installed on the cover plate (2), and the cover plate (2) is opened and closed by the reset components (3). The power supply housing (1) has several L-shaped heat dissipation holes (1a) that are evenly distributed on the two corners of the top, and two sets of dustproof components (4) are installed inside the power supply housing (1) to seal the L-shaped heat dissipation holes (1a) on both sides respectively. The dustproof component (4) includes a guide rod (41) and a reel (44). The guide rod (41) is fixedly installed inside the power housing (1) and near the top corner of the power housing (1). An L-shaped plate (42) is slidably connected on the guide rod (41). A spring B (43) is fitted on the guide rod (41). The reel (44) is rotatably installed at the tail of the power housing (1) via a bracket (441). A steel wire (45) is wound on the reel (44). The steel wire (45) passes through the plate at the tail of the power housing (1) and is fixedly connected to the tail end of the L-shaped plate (42).

2. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 1, characterized in that, A rotating rod (443) is fixedly installed on the shaft of the reel (44), and the rotating rod (443) passes through the sleeve (442) fixedly installed on the bracket (441) and is rotatably connected to the sleeve (442). A threaded fixing screw (444) is installed on the sleeve (442).

3. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 2, characterized in that, One end of the spring B (43) is fixedly connected to the front plate of the inner wall of the power supply housing (1), and the other end of the spring B (43) is fixedly connected to the front plate end of the L-shaped plate (42).

4. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 3, characterized in that, Two symmetrically distributed limiting protrusions (421) are fixedly installed on the L-shaped plate (42), and the two limiting protrusions (421) are respectively inserted into the two side grooves (41a) opened by the guide rod (41) and slidably connected to the side grooves (41a). The L-shaped plate (42) slides in contact with the inner wall of the power supply housing (1).

5. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 1, characterized in that, Side plates (11) are fixedly installed on both outer walls of the power supply housing (1), and each side plate (11) has a sliding groove (11a).

6. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 5, characterized in that, The reset component (3) includes a sliding rod (31), which is fixedly installed in the sliding groove (11a). A sliding block (32) is slidably connected to the sliding rod (31). A curved connecting plate (33) is fixedly installed on the sliding block (32), and the curved connecting plate (33) is fixedly connected to the side wall of the cover plate (2). A spring A (34) is sleeved on the sliding rod (31). One end of the spring A (34) is fixedly connected to the inner groove wall of the sliding groove (11a) near the front end face of the power housing (1), and the other end of the spring A (34) is fixedly connected to the sliding block (32) near the front end face of the power housing (1).

7. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 6, characterized in that, A side slide plate (35) is fixedly installed on the curved connecting plate (33), and the side slide plate (35) is located outside the side plate (11) and is slidably connected to the outer plate surface of the side plate (11). A locking screw (36) with a threaded connection is installed on the side slide plate (35).

8. The medium-frequency magnetron sputtering power supply with an adjustable structure according to claim 1, characterized in that, The power supply housing (1) has guide grooves (1b) on both sides of the opening. The two sides of the cover plate (2) are respectively inserted into the two guide grooves (1b) and slidably connected to the guide grooves (1b).

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