Evaporation device
By configuring an air supply unit connected to the evaporator, and utilizing the air supply unit to atomize and accelerate solution evaporation, the problem of low efficiency in existing evaporators is solved, achieving efficient solution evaporation and a simplified delivery system.
Patent Information
- Application Number
- CN202422818683.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-19
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-11-19
AI Technical Summary
Existing evaporators have low evaporation efficiency when processing waste solutions generated during semiconductor manufacturing, which cannot meet the needs of rapid production.
The air supply unit is connected to the evaporation unit. The air supply unit supplies air to the evaporation unit and mixes it with the solution. The solution is atomized and evaporates in the evaporation unit, which increases the evaporation area and speeds up the evaporation rate. At the same time, the air supply unit serves as a power source, simplifying the solution delivery system.
It improves evaporation efficiency, simplifies the solution delivery system, reduces the need for additional solution pumps, and enables a rapid evaporation process.
Smart Images
Figure CN223504834U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to an evaporation device. BACKGROUND
[0002] In the semiconductor industry, the waste solution mainly comes from the etching, cleaning and stripping process in the integrated circuit process, and the main pollutants are ammonia nitrogen and hydrogen peroxide.
[0003] Based on the environmental protection requirement, the above waste solution needs to be treated before being discharged, and the blow-off method is usually used to treat such solution in the industry at present. For example, the ammonia nitrogen solution is treated by blow-off method, that is, the ammonia nitrogen solution is absorbed into ammonium sulfate by blow-off of sodium hydroxide and sulfuric acid, and the treated solution enters the fluorine-containing treatment process, and the final solution is discharged after treatment.
[0004] The waste solution produced after the above blow-off treatment is restricted by the total discharge, and usually needs to be concentrated and reduced in amount. The means of reduction is usually to add an evaporator at the rear end of the waste solution to concentrate and reduce the amount, thereby reducing the operation cost.
[0005] The existing evaporator directly heats and evaporates the waste solution, and this evaporation method is slow and low in efficiency, which is not convenient for rapid production.
[0006] Therefore, it is necessary to provide an evaporation device to improve the evaporation efficiency. SUMMARY
[0007] The utility model discloses a kind of evaporation devices, which is configured with air supply unit, on the one hand, it helps to provide power for liquid injection into evaporation unit, on the other hand, solution can be atomized, which is conducive to accelerating evaporation speed and improving evaporation efficiency.
[0008] The utility model provides an evaporation device, which comprises a storage unit, an evaporation unit and an air supply unit. The discharge port of the storage unit is in communication with the feed inlet of the evaporation unit. The air outlet of the air supply unit is in communication with the feed inlet of the evaporation unit. The air supply unit can supply air to the feed inlet of the evaporation unit and mix with the solution supplied to the feed inlet of the evaporation unit. The air flow helps to atomize the solution and enter the interior of the evaporation unit, thereby increasing the contact area between the interior evaporation chamber of the evaporation unit and the solution to accelerate the evaporation speed. Moreover, the air flow supplied by the air supply unit itself also helps to accelerate the evaporation of the solution, which is conducive to the evaporation of the solution from liquid to gas to further accelerate the evaporation speed.
[0009] Optionally, the evaporation device further comprises a connecting pipe, and the inner diameter of the connecting pipe is greater than the inner diameter of the discharge port of the storage unit.
[0010] The discharge port of the storage unit is communicated with the first position of the connecting pipe, the feeding port of the evaporation unit is communicated with the second position of the connecting pipe, and the air outlet of the air supply unit is communicated with the third position of the connecting pipe.
[0011] In the axial direction of the connecting pipe, the first position is located between the second position and the third position.
[0012] Optionally, the storage unit comprises a storage container and a discharge pipe, the first end of the discharge pipe is located in the storage container, and the second end of the discharge pipe serves as the discharge port of the storage unit and is higher than the first end of the discharge pipe.
[0013] Optionally, the evaporation unit comprises an evaporation container and a condensing member.
[0014] The evaporation container is provided with a liquid discharge port, and the condensing member is arranged in the evaporation container and located above the feeding port of the evaporation unit.
[0015] The condensing member is provided with a flow guide surface for guiding the condensed liquid attached to the surface of the condensing member to the liquid discharge port.
[0016] Optionally, the evaporation unit further comprises a liquid storage member arranged in the evaporation container, the liquid storage member has a liquid storage cavity, the flow guide surface is used for guiding the condensed liquid to the liquid storage cavity, and the liquid discharge port is communicated with the liquid storage cavity.
[0017] Optionally, the condensing member has a condensing cavity, and the condensing member is provided with a cooling liquid inlet and a cooling liquid outlet communicated with the condensing cavity.
[0018] And / or, the flow guide surface is arranged at the bottom of the condensing member and is an inwardly recessed arc surface.
[0019] Optionally, the liquid storage member is arranged on the inner wall of the evaporation container, the liquid storage member extends along the circumference of the inner wall of the evaporation container and forms a closed loop, the liquid storage member and the inner wall of the evaporation container jointly form the annular liquid storage cavity, the top of the liquid storage cavity is open, and the lowest part of the flow guide surface vertically faces the top of the liquid storage cavity.
[0020] Optionally, the evaporation device further comprises a heating unit arranged in the evaporation unit.
[0021] Optionally, the evaporation device further comprises a scraping member arranged in the evaporation unit and moving along the inner wall of the evaporation unit.
[0022] Optionally, the scraping member extends along the circumference of the inner wall of the evaporation unit and forms a closed loop, and the scraping member is arranged to move vertically along the inner wall of the evaporation unit.
[0023] In summary, the evaporation device comprises a storage unit, an evaporation unit and an air supply unit; the discharge port of the storage unit is in communication with the feed port of the evaporation unit; and the air outlet of the air supply unit is in communication with the feed port of the evaporation unit.
[0024] In this way, the discharge port of the storage unit is in communication with the feed port of the evaporation unit, so that the storage unit can deliver the solution to the evaporation unit for evaporation and concentration. In addition, the air outlet of the air supply unit is in communication with the feed port of the evaporation unit, so that the air supply unit can supply air to the feed port of the evaporation unit and mix with the solution supplied into the feed port of the evaporation unit. The air flow helps to blow the solution into mist and enter the interior of the evaporation unit, thereby increasing the contact area between the evaporation chamber in the interior of the evaporation unit and the solution, so as to accelerate the evaporation speed. Moreover, the air flow supplied by the air supply unit itself helps to accelerate the evaporation of the solution, which is conducive to the evaporation of the solution from liquid to gas, so as to further accelerate the evaporation speed.
[0025] In addition, when the air supply unit supplies air flow, it not only has the effect of atomizing the solution, but also plays a role in assisting the flow of the supplied solution to the evaporation unit, and can be used as a power source for liquid injection of the evaporation unit. At this time, the air supply unit serves as a power unit for providing power for the delivery of the solution, so that an additional solution pump is not required, thereby simplifying the liquid supply system of the storage unit. BRIEF DESCRIPTION OF DRAWINGS
[0026] Figure 1 FIG. 1 is a perspective structural schematic view of an evaporation device according to an embodiment of the present application;
[0027] Figure 2 FIG. 4 is a schematic view of the internal structure of a storage unit according to an embodiment of the present application;
[0028] Figure 3 FIG. 5 is a schematic view of the internal structure of an evaporation unit according to an embodiment of the present application;
[0029] Figure 4 FIG. 6 is an exploded structural schematic view of a condensing member and a liquid storage member according to an embodiment of the present application;
[0030] Figure 5 FIG. 7 is a structural schematic view of a scraping member according to an embodiment of the present application.
[0031] In the drawings:
[0032] 10 - storage unit; 11 - storage container; 111 - feeding port; 112 - air inlet; 12 - discharge pipe;
[0033] 20 - evaporation unit;
[0034] 21 - evaporation container; 211 - storage barrel; 212 - evaporation barrel; 213 - evaporation cover; 214 - liquid outlet; 215 - first through hole;
[0035] 22 - condensing member; 221 - flow guide surface; 222 - cooling liquid inlet; 223 - cooling liquid outlet; 224 - second through hole;
[0036] 23 - liquid storage member; 231 - liquid storage cavity; 232 - circular ring base; 233 - shielding ring;
[0037] 30 - air supply unit;
[0038] 40 - connecting pipe;
[0039] 50 - cooling box;
[0040] 60 - circulating pump;
[0041] 70 - scraping member; 71 - connecting block; 72 - connecting rod; 73 - air cylinder; 74 - support;
[0042] 80 - heating unit;
[0043] 90 - operation table; 91 - fixed support; 92 - lifting support. DETAILED DESCRIPTION
[0044] The evaporation device of the present application will be further described in detail below in combination with the accompanying drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the drawings are all in a very simplified form and all use non-precise proportions, only for the purpose of facilitating and clarifying the purpose of assisting the description of the embodiments of the present application.
[0045] As used in the present utility model, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the content clearly dictates otherwise. The term "at least two" or "a plurality of" is generally employed in its sense including "two or more" unless the content clearly dictates otherwise. In addition, the terms "first," "second," "third," etc. are used only to describe a certain aspect of the disclosure and do not denote relative importance or imply numbering of ascribed technical features. Thus, features defined with "first," "second," "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present utility model, "mounting," "connection," "connecting," a component "disposed" in another component should be interpreted in a broad sense unless otherwise specified. Generally, it only indicates that there is a connection, coupling, cooperation or transmission relationship between the two components, and the two components can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate component, and cannot be understood as indicating or implying the spatial positional relationship between the two components, i.e. one component can be in any direction inside, outside, above, below or one side of another component, unless the content clearly indicates otherwise. For those skilled in the art, the specific meaning of the above terms in the present utility model can be understood according to the specific circumstances. In addition, directional terms such as upper, lower, up, down, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward direction is toward the top of the corresponding drawing, and downward or downward direction is toward the bottom of the corresponding drawing.
[0046] Please refer to Figure 1 The utility model provides a kind of evaporation device;Including storage unit 10, evaporation unit 20 and air supply unit 30.
[0047] The storage unit 10 has a storage cavity for storing the solution. The discharge port of the storage unit 10 is in communication with the feed port of the evaporation unit 20, and the storage unit 10 can deliver the solution to be evaporated and concentrated into the evaporation unit 20 for evaporation and concentration.
[0048] In addition, the air outlet of the air supply unit 30 is in communication with the feed port of the evaporation unit 20, and the air supply unit 30 can supply air into the feed port of the evaporation unit 20 and mix with the solution to be evaporated supplied into the feed port of the evaporation unit 20. The solution is mixed with air and blown by air flow, which helps to form a misty solution to enter the inside of the evaporation unit 20, thereby increasing the contact area between the inside evaporation chamber of the evaporation unit 20 and the solution to speed up the evaporation speed. Moreover, the air flow supplied by the air supply unit 30 itself also helps to speed up the evaporation of the solution, which is beneficial to the evaporation of the solution from liquid to gas to further speed up the evaporation speed. The solution that is not completely evaporated flows to the bottom of the evaporation chamber inside the evaporation unit 20 and then evaporates by heating.
[0049] When airflow is introduced into the air supply unit 30, it not only atomizes the solution but also assists in the flow of the supplied solution to be evaporated into the evaporation unit 20, serving as a power source for the liquid injection into the evaporation unit 20. Therefore, the air supply unit 30 can also be used as a power unit to provide power for the transport of the solution, eliminating the need for an additional solution pump and simplifying the liquid supply system of the storage unit 10.
[0050] Please continue to refer to this. Figure 1 and Figure 2 As shown, the storage unit 10 includes a storage container 11 and a discharge pipe 12, wherein the first end of the discharge pipe 12 ( Figure 2 The lower end of the discharge pipe 12 is located inside the storage container 11 and below the liquid level of the solution inside the storage container 11; this end serves as the inlet end of the discharge pipe 12. The second end of the discharge pipe 12 ( Figure 2 The upper end of the discharge pipe 12 is higher than the first end of the discharge pipe 12, and the second end of the discharge pipe 12 ( Figure 2 The upper end of the discharge pipe 12 is located above the liquid level of the solution in the storage container 11. This end serves as the liquid outlet of the discharge pipe 12 and also as the discharge port of the storage unit 10.
[0051] The above configuration results in the liquid outlet of the discharge pipe 12 being higher than its liquid inlet. Therefore, when the solution in the storage container 11 needs to be transported through the discharge pipe 12, external power is required to drive the solution to flow upwards along the discharge pipe 12. Since the inlet of the evaporation unit 20 is connected to the air supply unit 30, the air supply unit 30 can provide a high-speed airflow. This airflow flows at high speed through the inlet of the evaporation unit 20 into the interior of the evaporation unit 20, creating a negative pressure environment at the inlet of the evaporation unit 20. Furthermore, the inlet of the evaporation unit 20 is connected to the liquid outlet of the discharge pipe 12 (… Figure 2 The upper end of the discharge pipe 12 is connected, so a negative pressure environment is also formed at the liquid outlet end of the discharge pipe 12, which creates a suction effect on the discharge pipe 12 and is used to draw the solution in the storage container 11 upward.
[0052] Therefore, the air supply unit 30 is used in conjunction with the discharge pipe 12 and the storage container 11. It not only helps the solution to be atomized during transportation to accelerate evaporation, but also serves as a power unit to provide power for the transportation of the solution. At this time, there is no need to equip an additional solution pump, which simplifies the liquid supply system of the storage unit 10.
[0053] Please continue to refer to this. Figure 1 and Figure 2 As shown, in this embodiment, the discharge pipe 12 is vertically arranged, and the liquid inlet end of the discharge pipe 12 ( Figure 2The lower end of the discharge pipe 12 is located inside the storage container 11 and extends downward to near the bottom of the storage container 11; the liquid outlet of the discharge pipe 12 Figure 2 The upper end of the discharge pipe 12 extends upward through the top of the storage container 11. In other alternative embodiments, the discharge pipe 12 can also be arranged obliquely. The angle of the discharge pipe 12 can be adjusted adaptively based on actual use requirements.
[0054] In this embodiment, the discharge pipe 12 is a straight pipe structure. In other alternative embodiments, the discharge pipe 12 can be arranged as a bent pipe structure, for example, arranged as an L-shaped structure, and the liquid outlet of the discharge pipe 12 can be arranged in parallel with the top of the storage container 11 after being bent.
[0055] In this embodiment, part of the discharge pipe 12 is arranged inside the storage container 11 and part of the discharge pipe 12 is arranged outside the storage container 11. In other alternative embodiments, the discharge pipe 12 can be arranged completely outside the storage container 11, for example, the liquid inlet of the storage container 11 is connected to the bottom of the storage container 11, the liquid outlet of the storage container 11 is arranged outside the storage container 11 and extends upward above the liquid surface of the solution in the storage container 11 after being bent; the specific arrangement of the discharge pipe 12 can be adjusted flexibly based on actual use requirements.
[0056] In this embodiment, the storage container 11 is a cylindrical barrel structure, the storage container 11 extends vertically along the axis, and the discharge pipe 12 is arranged coaxially with the storage container 11. In other alternative embodiments, the storage container 11 can be arranged as a cuboid or other known shapes, and the shape of the storage container 11 can be adjusted adaptively based on actual use requirements.
[0057] In this embodiment, the bottom of the storage container 11 is a horizontal structure. In other alternative embodiments, the bottom of the storage container 11 can be arranged as a concave hemispherical structure. The shape of the bottom of the storage container 11 can be adjusted adaptively based on actual liquid storage and discharge requirements.
[0058] In this embodiment, the air supply unit 30 adopts a hot air blower, which can inject hot air into the liquid inlet of the evaporation unit 20 to ensure good atomization and evaporation effect. The air supply speed and pressure of the air supply unit 30 can be adjusted based on actual use requirements, and reasonable air speed and pressure can be used to ensure good atomization effect and solution suction effect.
[0059] Please continue to refer to Figure 1 In this embodiment, the top of the storage container 11 is also provided with a charging port 111, and the outer peripheral wall of the storage container 11 is provided with an air inlet 112 near the top, and the air inlet 112 is provided with a filter screen, and the air inlet 112 is located above the liquid surface of the solution in the storage container 11 to ensure that the inside of the storage container 11 always maintains a normal pressure state.
[0060] Please continue to refer to Figure 1 As shown in the embodiment, the evaporation device further comprises a connecting pipe 40, the outlet of the storage unit 10 and the inlet of the evaporation unit 20 are communicated through the connecting pipe 40; the outlet of the air supply unit 30 and the connecting pipe 40 are communicated.
[0061] The outlet of the storage unit 10 (the upper end of the outlet pipe 12 in the figure) is connected with the first position A of the connecting pipe 40; the inlet of the evaporation unit 20 is connected with the second position B of the connecting pipe 40; the outlet of the air supply unit 30 is connected with the third position C of the connecting pipe 40. Figure 1 And Figure 2 The upper end of the outlet pipe 12 in the figure) is connected with the first position A of the connecting pipe 40; the inlet of the evaporation unit 20 is connected with the second position B of the connecting pipe 40; the outlet of the air supply unit 30 is connected with the third position C of the connecting pipe 40.
[0062] Along the axial direction of the connecting pipe 40, the first position A is located between the second position B and the third position C. The second position B and the third position C are the two ends of the connecting pipe 40, and the third position C is the middle position of the connecting pipe 40.
[0063] The above arrangement makes the air flow supplied by the air supply unit 30 enter the connecting pipe 40 from the third position C of the connecting pipe 40, then pass through the first position A of the connecting pipe 40 and finally flow to the second position B of the connecting pipe 40, and then pass through the inlet of the evaporation unit 20 and enter the evaporation chamber of the evaporation unit 20.
[0064] Further, the inner diameter of the connecting pipe 40 is greater than the inner diameter of the outlet of the storage unit 10 (the upper end of the outlet pipe 12 in the figure). Figure 1 And Figure 2 For a circular pipe, the inner diameter here refers to the inner circle diameter of the pipe, and for a non-circular pipe, the inner diameter here refers to the inscribed circle diameter of the pipe. The above arrangement of the inner diameter makes the pipe diameter of the connecting pipe 40 larger and the inner diameter of the upper end of the outlet pipe 12 smaller. The fluid resistance in the connecting pipe 40 is greater than the fluid resistance in the outlet pipe 12, so that the air flow supplied by the air supply unit 30 flows along the connecting pipe 40, which forms a negative pressure environment at the upper end of the outlet pipe 12 (the outlet of the storage unit 10), thereby forming a suction effect of the outlet pipe 12 on the solution in the storage container 11.
[0065] In the embodiment, the flow rate and air pressure of the air flow supplied by the air supply unit 30 should ensure that the negative pressure formed at the upper end of the outlet pipe 12 (the outlet of the storage unit 10) can suck the solution in the storage container 11 into the connecting pipe 40.
[0066] This configuration allows the air supply unit 30 to also function as a power source for supplying the solution within the storage container 11. On one hand, the air supply unit 30 is used to draw the solution from the storage container 11; on the other hand, the gas supplied by the air supply unit 30 flows along the connecting pipe 40 and passes through the first position A of the connecting pipe 40. The flow direction of the solution supplied at the first position A (along the radial direction of the connecting pipe 40) is perpendicular to the flow direction of the airflow within the connecting pipe 40 (along the axial direction of the connecting pipe 40), which helps to fully mix the airflow and the solution, thereby achieving a better atomization and evaporation effect.
[0067] Please refer to Figure 1 and Figure 3 As shown, the evaporation unit 20 includes an evaporation container 21 and a condenser 22;
[0068] An opening is provided on the side of the evaporation container 21 as the feed inlet of the evaporation unit 20.
[0069] like Figure 3 As shown, the evaporation container 21 is provided with a drain port 214, and the condenser 22 is disposed inside the evaporation container 21. The condenser 22 is positioned above the liquid level of the solution inside the evaporation container 21 to ensure that the solution inside the evaporation container 21 does not come into contact with the condenser 22. The condenser 22 is also positioned above the feed inlet of the evaporation unit 20 to ensure that the solution entering through the feed inlet does not directly contact the condenser 22. This arrangement allows the water vapor evaporated inside the evaporation container 21 to condense and liquefy upon contact with the condenser 22, thereby achieving concentration and volume reduction of the internal solution.
[0070] Please continue to refer to this. Figure 3 As shown, the condenser 22 is provided with a guide surface 221, which is used to guide the condensate adhering to the surface of the condenser 22 to the drain port 214, and discharge the condensate out of the evaporation container 21 through the drain port 214. The drain port 214 can be connected to an external drain pipe, and a valve can be installed on the drain pipe to control the opening and closing of the drain port 214. During the process of the air supply unit 30 introducing airflow into the evaporation container 21 and simultaneously supplying liquid, the drain pipe is closed by the valve, thereby keeping the drain port 214 in a closed state to prevent the atomized solution inside the evaporation container 21 from leaking out of the drain port 214 with the gas, and also to prevent the liquid solution from splashing into the drain port 214 and being discharged. When the liquid filling inside the evaporation container 21 is completed and heating and evaporation are carried out, the drain port 214 can be opened to guide the condensate out, or during the evaporation process, the drain port 214 can be opened intermittently to drain the liquid at regular intervals. Alternatively, a gas-liquid separator can be connected to the drain port 214 so that the drain port 214 is in a normally open state, at which time evaporation and draining are carried out continuously.
[0071] In this embodiment, in order to better collect and discharge the condensed liquid, a liquid storage member 23 is further arranged in the evaporation container 21, the liquid storage member 23 has a liquid storage cavity 231, the flow guide surface 221 is used to guide the condensed liquid to the liquid storage cavity 231, and the liquid discharge port 214 is in communication with the liquid storage cavity 231.
[0072] Please refer to Figure 3 As shown in the figure, the liquid storage member 23 is arranged on the inner wall of the evaporation container 21, the liquid storage member 23 extends along the circumference of the inner wall of the evaporation container 21 and forms a closed loop shape, and the liquid storage member 23 and the inner wall of the evaporation container 21 form the annular liquid storage cavity 231, where the annular shape does not specifically refer to a circular ring shape, as long as the liquid storage cavity 231 forms a closed shape along the circumference, it belongs to the annular category, for example, the liquid storage cavity 231 can also be an elliptical ring, a square ring or a polygonal ring, etc. The top of the liquid storage cavity 231 is open, the liquid storage member 23 is located above the liquid storage cavity 231, and the lowest part of the flow guide surface 221 vertically downwardly faces the top opening of the liquid storage cavity 231.
[0073] In this embodiment, the main body structure of the evaporation container 21 is a cylindrical barrel shape, so the liquid storage member 23 also has a circular ring structure, and the outer peripheral wall of the liquid storage member 23 is conformally fitted with the inner wall of the evaporation container 21 to form a circular ring-shaped liquid storage cavity 231. In other alternative embodiments, the evaporation container 21 can be provided as a rectangular body or other special-shaped structure, and the specific shape of the evaporation container 21 can be adaptively adjusted based on the actual evaporation demand, and the shape of the liquid storage member 23 can also be adaptively adjusted based on the specific shape of the evaporation container 21.
[0074] Please refer to Figure 3 and Figure 4 As shown in the figure, in this embodiment, the liquid storage member 23 includes a circular ring base 232 and a shielding ring 233, the circular ring base 232 is horizontally arranged, the shielding ring 233 is connected to the inner peripheral surface of the circular ring base 232 and extends in the axial direction, and the outer peripheral surface of the circular ring base 232 is conformally and sealingly fitted with the inner wall of the evaporation container 21. Therefore, the circular ring base 232, the shielding ring 233 and the inner wall of the evaporation container 21 form a U-shaped liquid storage cavity 231, and the liquid storage cavity 231 has an opening above.
[0075] Please continue to refer to Figure 3As shown, in the embodiment, the flow guide surface 221 is arranged at the bottom of the condensing member 22 and is an inner concave curved surface. The outer periphery of the flow guide surface 221 is the lowest part, and the outer peripheral surface of the condensing member 22 is fixedly connected to the inner wall of the evaporation container 21. The lowest part of the flow guide surface 221 extends to the inside of the liquid storage cavity 231 through the opening of the liquid storage cavity 231 and is connected to the inner wall of the evaporation container 21. Therefore, the condensed liquid on the lower surface of the condensing member 22 is guided to the inside of the liquid storage cavity 231 along the flow guide surface 221 and flows to the liquid storage cavity 231 along the inner wall of the evaporation container 21. In other alternative embodiments, the lowest part of the flow guide surface 221 can also be located outside the liquid storage cavity 231, and the lowest part of the flow guide surface 221 downwardly faces the opening of the liquid storage cavity 231.
[0076] In the embodiment, the top of the condensing member 22 is an upwardly arched curved surface structure, and the condensing member 22 is a thin-walled structure as a whole, which is similar to an umbrella shape. In other alternative embodiments, the top of the condensing member 22 can be arranged as a flat surface or other shapes. The shape of the top of the condensing member 22 can not be limited and can be adaptively adjusted in combination with the actual assembly space requirement and material requirement and other factors.
[0077] In the embodiment, the condensing member 22 is arranged as an umbrella structure, and the curved surface at the bottom thereof is used as a condensing surface to contact the steam to achieve the condensing effect. In other alternative embodiments, the bottom of the condensing member 22 can also be provided with fins or grooves and other cooling structures to increase the condensing area.
[0078] In the embodiment, the flow guide surface 221 is arranged as a spherical surface structure, so that the condensed liquid attached to the flow guide surface 221 flows to the inside of the liquid storage cavity 231 uniformly. In other alternative embodiments, the liquid storage member 23 can be a straight plate structure, and the flow guide surface thereof can be arranged as an inclined surface. The lowest part of the flow guide surface faces the opening of the liquid storage cavity 231. At this time, the liquid storage cavity 231 can also not be arranged as a circular ring structure. For example, the condensing member 22 can be connected to a local position inside the evaporation container 21 and forms a liquid storage cavity at a local position of the evaporation container 21. The liquid storage cavity is located directly below the lowest part of the flow guide surface. The arrangement shape of the flow guide surface 221 can be adaptively adjusted based on the actual requirement, and the specific structure and arrangement position of the liquid storage cavity and the condensing member 22 can also be adaptively adjusted based on the flow direction of the flow guide surface 221.
[0079] In the embodiment, the circular ring base 232 of the liquid storage member 23 is arranged horizontally. In other alternative embodiments, the circular ring base 232 of the liquid storage member 23 can be slightly inclined and arranged, and the side close to the liquid discharge port 214 is lower, so that the solution in the liquid storage cavity 231 flows and concentrates to the side of the liquid discharge port 214 and is naturally discharged through the liquid discharge port 214.
[0080] In the embodiment, the liquid storage member 23 and the inner wall of the evaporation container 21 form a liquid storage cavity 231. In other alternative embodiments, the liquid storage cavity 231 can be independently arranged on the liquid storage member 23. In other alternative embodiments, the liquid storage member 23 can not be arranged, and the liquid storage cavity 231 can be independently integrated on the inner wall of the evaporation container 21.
[0081] In the embodiment, the liquid storage member 23 and the evaporation container 21 are in a split structure. In other alternative embodiments, the liquid storage member 23 and the evaporation container 21 can be integrally formed, and at this time, it can also be understood that the liquid storage cavity 231 is integrally integrated on the inner wall of the evaporation container 21.
[0082] Please continue to refer to Figure 3 and Figure 4 As shown in FIG. 2, the condensing member 22 has a hollow structure, and has a cooling cavity inside. The outer peripheral surface of the condensing member 22 is provided with a cooling liquid inlet 222 and a cooling liquid outlet 223, and the cooling liquid inlet 222 and the cooling liquid outlet 223 are in communication with the cooling cavity. The cooling liquid inlet 222 and the cooling liquid outlet 223 are arranged opposite to each other along a radial direction of the condensing member 22, so as to facilitate the arrangement of the condensing circulation pipeline.
[0083] As shown in FIG. 2, the condensing member 22 has a hollow structure, and has a cooling cavity inside. The outer peripheral surface of the condensing member 22 is provided with a cooling liquid inlet 222 and a cooling liquid outlet 223, and the cooling liquid inlet 222 and the cooling liquid outlet 223 are in communication with the cooling cavity. The cooling liquid inlet 222 and the cooling liquid outlet 223 are arranged opposite to each other along a radial direction of the condensing member 22, so as to facilitate the arrangement of the condensing circulation pipeline. Figure 1 As shown in FIG. 2, the cooling liquid outlet 223 is connected to the inlet of the cooling box 50 through a pipeline, the outlet of the cooling box 50 is connected to the inlet of the circulating pump 60 through a pipeline, and the outlet of the circulating pump 60 is connected to the cooling liquid inlet 222 through a pipeline. Through the cooling circulation structure, the circulation flow of the cooling liquid inside the condensing member 22 can be ensured, so as to form a better condensing effect.
[0084] Please continue to refer to Figure 3 As shown in FIG. 2, the evaporation container 21 includes a storage barrel 211, an evaporation barrel 212, and an evaporation cover 213. The storage barrel 211 has a barrel structure, and the bottom thereof is closed and the top thereof is open. The evaporation barrel 212 has a cylindrical structure with both ends open, and the bottom of the evaporation barrel 212 is sealingly connected to the open top end of the storage barrel 211. The evaporation cover 213 has an umbrella structure and is sealingly connected to the top of the evaporation barrel 212. The condensing member 22 and the liquid storage member 23 are connected to the inner wall of the evaporation barrel 212 near the upper end thereof.
[0085] As shown in FIG. 2, the condensing member 22 has a hollow structure, and has a cooling cavity inside. The outer peripheral surface of the condensing member 22 is provided with a cooling liquid inlet 222 and a cooling liquid outlet 223, and the cooling liquid inlet 222 and the cooling liquid outlet 223 are in communication with the cooling cavity. The cooling liquid inlet 222 and the cooling liquid outlet 223 are arranged opposite to each other along a radial direction of the condensing member 22, so as to facilitate the arrangement of the condensing circulation pipeline. Figure 1As shown, in the embodiment, an operation table 90, a fixed support 91 and a lifting support 92 are further provided, wherein the fixed support 91 and the lifting support 92 are arranged on the operation table 90, and the storage unit 10, the evaporation unit 20, the cooling tank 50 and the circulating pump 60 are installed on the operation table 90. The fixed support 91 is connected to the evaporation barrel 212 of the evaporation container 21, so that the bottom of the evaporation barrel 212 is in a suspended state. The lifting support 92 is connected to the bottom of the storage barrel 211, and the lifting support 92 can be a hydraulic cylinder, a pneumatic cylinder or other lifting structure. When the lifting support 92 is lifted, the storage barrel 211 can be lifted. The storage barrel 211 is located directly below the evaporation barrel 212. When the storage barrel 211 is lifted, the top of the storage barrel 211 is sealed against the bottom of the evaporation barrel 212, and the two are engaged to form a sealed evaporation chamber. When the storage barrel 211 is lowered, the storage barrel 211 is separated from the bottom of the evaporation barrel 212, and at this time, the inside of the evaporation container 21 can be cleaned.
[0086] The evaporation device further comprises a heating unit 80 arranged at the bottom of the evaporation barrel 212. Therefore, the heating unit 80 is located below the liquid level of the solution in the evaporation barrel 212, so as to form a good heating and evaporation effect on the solution in the evaporation barrel 212.
[0087] The storage barrel 211 is used to directly store the solution and is used to install the heating unit 80, so the storage barrel 211 has high requirements for corrosion resistance and high temperature resistance of materials; and the evaporation barrel 212 is not in direct contact with the solution and is not in direct contact with the heating unit 80, so the evaporation barrel 212 has low requirements for corrosion resistance and high temperature resistance of materials. Therefore, the barrel body of the evaporation container 21 is arranged in a split structure composed of the storage barrel 211 and the evaporation barrel 212, so that the corresponding materials can be freely selected based on the material requirements, so as to save costs. Moreover, the above-mentioned split structure also facilitates the disassembly of the evaporation container 21, and facilitates the cleaning of the inside thereof.
[0088] In the embodiment, the evaporation cover 213 is adapted to the shape of the condensing piece 22 and is arranged in an arched structure, so as to form a larger avoiding space in the inside of the evaporation container 21, and then adapt to the installation of the condensing piece 22. In other alternative embodiments, the evaporation cover 213 can be arranged in a flat plate structure, and at this time, the installation position of the condensing piece 22 can be adaptively moved downward or the condensing piece 22 can be transformed into a flat plate structure.
[0089] In the embodiment, the heating unit 80 can adopt an electric heater which generates heat by passing current through a resistance wire; the heating unit 80 can also adopt an induction heater which generates heat by electromagnetic induction principle through the interaction of primary and secondary coils; the heating unit 80 can also adopt a clear fire type heater, for example, a clear fire is introduced into the inside of the heater shell to increase the temperature of the surface of the heater. The heating unit 80 can select the existing heating structure, which will not be described here. The specific type of the heating unit 80 can be adaptively selected based on the heating requirements of the solution.
[0090] In the embodiment, the heating unit 80 is laid on the bottom of the storage barrel 211. In other alternative embodiments, the heating unit 80 can be a spiral heating resistance wire, which can be attached to the inner peripheral wall of the storage barrel 211. The specific form of arrangement of the heating unit 80 can be adaptively adjusted based on the specific type of the heating unit 80 and the heating requirements.
[0091] Please Figure 5 As shown in the figure, the evaporation device further comprises a scraping member 70 which is arranged in the evaporation unit 20 and moves along the inner wall of the evaporation unit 20.
[0092] In the embodiment, the scraping member 70 extends along the circumference of the inner wall of the evaporation unit 20 and forms a closed loop shape, and the scraping member 70 is arranged to move vertically along the inner wall of the evaporation unit 20.
[0093] Specifically, since the evaporation container 21 is in a cylindrical barrel structure, the scraping member 70 is arranged in a circular ring structure, the outer peripheral surface of the scraping member 70 is conformally attached to the inner peripheral surface of the evaporation container 21, and the scraping member 70 is arranged to move in the axial direction of the evaporation container 21 (the axial direction of the evaporation container 21 extends vertically). When the scraping member 70 moves relative to the evaporation container 21, it is used to scrape off the attachments on the inner peripheral surface of the evaporation container 21, and to clean the inside of the evaporation container 21. In other alternative embodiments, the closed loop shape of the scraping member 70 can be adaptively deformed based on the shape of the evaporation container 21, for example, when the evaporation container 21 is in a rectangular cuboid structure, the scraping member 70 can be arranged in a rectangular ring structure.
[0094] Please continue to refer to Figure 5 In the embodiment, the central part of the scraping member 70 is provided with a connecting block 71, wherein the connecting block 71 is in a cylindrical structure and is coaxially arranged with the scraping member 70. The outer peripheral surface of the connecting block 71 is connected to the inner peripheral surface of the scraping member 70 through a plurality of connecting rods 72 which are distributed in a radial manner. The connecting block 71 is connected to the output end of a gas cylinder 73, and the gas cylinder 73 drives the axial movement of the scraping member 70.
[0095] Please combine Figure 1 and Figure 3As shown, in this embodiment, the cylinder 73 is installed on the evaporation cover 213 of the evaporation container 21, wherein a bracket 74 is installed outside the evaporation cover 213, and the cylinder body of the cylinder 73 is fixedly installed on the bracket 74.
[0096] like Figure 3 As shown, a first through hole 215 is provided at the center of the evaporator cover 213, and a second through hole 224 is provided at the center of the condenser 22. The first through hole 215 and the second through hole 224 have the same diameter and are coaxially arranged. The output shaft of the cylinder 73 passes through the first through hole 215 and the second through hole 224 and is connected to the connecting block 71 located inside the evaporator 21. Therefore, the scraper 70 can be driven to move vertically by the cylinder 73 located outside the evaporator 21. A sealing ring can be provided between the output shaft of the cylinder 73 and the first through hole 215 and the second through hole 224 to achieve a sealed sliding fit and prevent internal gas leakage.
[0097] In this embodiment, the scraper 70 is configured as a closed-loop structure and moves vertically (along the axial direction of the evaporation container 21) to scrape off deposits from the inner wall of the evaporation container 21. In other alternative embodiments, the scraper 70 can be configured as a plate structure or a rod structure, extending vertically and conforming to the inner peripheral wall of the evaporation container 21. In this case, the scraper 70 can be driven to move circumferentially along the inner peripheral wall of the evaporation container 21 to scrape off deposits from the inner peripheral wall of the evaporation container 21. The specific shape of the scraper 70 and the driving motion can be adaptively adjusted based on changes in the shape of the evaporation container 21.
[0098] In this embodiment, the scraper 70 uses a cylinder as its drive structure. In other alternative embodiments, a linear motor or hydraulic device can be used as the drive structure for the scraper 70.
[0099] In this embodiment, the main body of the drive structure (scraper 70) of the scraper 70 is disposed outside the evaporation container 21 to prevent contact with the solution inside the evaporation container 21. In other alternative embodiments, the drive structure of the scraper 70 may be disposed inside the evaporation container 21 and sealed by a shell to isolate the solution inside the evaporation container 21. The installation position of the drive structure of the scraper 70 may be adjusted according to actual needs.
[0100] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0101] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.
Claims
1. An evaporation device, characterized by The evaporation device comprises a storage unit, an evaporation unit and an air supply unit. The discharge port of the storage unit is in communication with the feeding port of the evaporation unit. The air outlet of the air supply unit is in communication with the feeding port of the evaporation unit. The storage unit comprises a storage container and a discharge pipe, the first end of the discharge pipe is located in the storage container, and the second end of the discharge pipe serves as the discharge port of the storage unit and is higher than the first end of the discharge pipe. The evaporation unit comprises an evaporation container and a condensing member. The evaporation container is provided with a liquid discharge port, and the condensing member is arranged in the evaporation container and located above the feeding port of the evaporation unit. The condensing member is provided with a flow guide surface for guiding the condensed liquid attached to the surface of the condensing member to the liquid discharge port.
2. The evaporation apparatus of claim 1, wherein The evaporation device further comprises a connecting pipe, the inner diameter of the connecting pipe is greater than the inner diameter of the discharge port of the storage unit. The discharge port of the storage unit is in communication with the first position of the connecting pipe, the feeding port of the evaporation unit is in communication with the second position of the connecting pipe, and the air outlet of the air supply unit is in communication with the third position of the connecting pipe. In the axial direction of the connecting pipe, the first position is located between the second position and the third position.
3. The evaporation apparatus of claim 1, wherein The evaporation unit further comprises a liquid storage member arranged in the evaporation container, the liquid storage member has a liquid storage cavity, the flow guide surface is used for guiding the condensed liquid to the liquid storage cavity, and the liquid discharge port is in communication with the liquid storage cavity.
4. The evaporation apparatus of claim 1, wherein The condensing member has a condensing cavity, and the condensing member is provided with a cooling liquid inlet and a cooling liquid outlet in communication with the condensing cavity. The flow guide surface is arranged at the bottom of the condensing member and is an inwardly recessed arc surface.
5. The evaporation apparatus of claim 3, wherein The liquid storage member is arranged on the inner wall of the evaporation container, extends along the circumference of the inner wall of the evaporation container and forms a closed loop, the liquid storage member and the inner wall of the evaporation container jointly form an annular liquid storage cavity, the top of the liquid storage cavity is open, and the lowest part of the flow guide surface vertically faces the top of the liquid storage cavity.
6. The evaporation apparatus of claim 1, wherein The evaporation device further comprises a heating unit arranged in the evaporation unit.
7. The evaporation apparatus of claim 1, wherein The evaporation device further comprises a scraping member arranged in the evaporation unit and moving along the inner wall of the evaporation unit.
8. The evaporation apparatus of claim 7, wherein The scraping member extends along the circumference of the inner wall of the evaporation unit and forms a closed loop, and the scraping member is arranged to move vertically along the inner wall of the evaporation unit.