Tail gas treatment device in CVD (Chemical Vapor Deposition) process
By designing an exhaust gas treatment device, the safety and environmental pollution issues of exhaust gas treatment in the CVD process were solved, achieving safe exhaust gas treatment and protection of mechanical pumps.
Patent Information
- Application Number
- CN202423133290.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-12-18
AI Technical Summary
The exhaust gas from the CVD process has a complex composition. Undecomposed alkanes, H2, organosilanes, etc., pose an explosion hazard and are corrosive, polluting the environment and affecting the performance of mechanical pumps, making them difficult to treat.
A tail gas treatment device was designed, including a sedimentation furnace body, connecting pipes, a gas collection hood, a leak detector, a neutralization tank, a scraping device, and a pump body. The gas collection hood prevents leakage, the scraping device in the neutralization tank cleans up the sediment, and the pump body treats the tail gas, thus achieving safe treatment of the tail gas.
It effectively prevents exhaust gas leakage, cleans deposits on the inner wall of the neutralization tank, ensures the safety and efficiency of exhaust gas treatment, protects the mechanical pump, and reduces environmental pollution.
Smart Images
Figure CN223505098U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to tail gas treatment equipment technical field, specifically relates to a tail gas treatment device in CVD process. BACKGROUND
[0002] The reaction gas in the process of SiC gas phase deposition includes Ar, H2, alkane and organosilane etc., which cannot be completely used in the high-temperature deposition process, so a large amount of undecomposed organosilane and alkane, decomposition product tar, reaction product HCl, deposition product particle, H2 and Ar etc. are included in the exhaust gas. If the undecomposed alkane and H2 are not properly treated, not only there is an explosion risk, but also the air is polluted, and the undecomposed organosilane and reaction product HCl will produce extremely corrosive hydrochloric acid gas when meeting water in the air, so as to seriously corrode the mechanical pump and production equipment, and pollute the environment, thus cannot be directly discharged into the atmosphere. The decomposition product tar and deposition product particle etc. will be deposited in the mechanical pump and pipeline, not only will explode when meeting air, but also will seriously affect the performance and service life of the mechanical vacuum pump. Since the exhaust gas of CVD process is complex and extremely corrosive, the treatment is very difficult. SUMMARY
[0003] The utility model mainly solves the technical problem of above -mentioned prior art, provides a tail gas treatment device in CVD process.
[0004] The utility model discloses a tail gas treatment device in CVD process, including the deposition furnace body, the top of deposition furnace body is provided with the connecting pipeline, one end of connecting pipeline is connected with the neutralization tank, the one end of connecting pipeline insertion neutralization tank is laterally through the inside setting of neutralization tank, the bottom of neutralization tank is provided with a plurality of legs, the inside of neutralization tank is provided with the annular storage groove, the both sides of storage groove are provided with the protruding ring hoop, be provided with the scraping device in the storage groove, the bottom of neutralization tank is provided with the gear box with the communication of neutralization tank, the bottom of neutralization tank is provided with the through groove with the communication of gear box, the through groove is set in the storage groove, the inside of gear box is provided with the gear, the outside of gear box is provided with motor, the output of motor is through gear box and gear and is mutually inserted, the top of gear extends to the inside of neutralization tank through the through groove, the bottom of neutralization tank is provided with the liquid inlet pipe, be provided with the first pump body on the input end of liquid inlet pipe, the right side top of neutralization tank is provided with the gas pipe and liquid outlet pipe respectively, the top of liquid outlet pipe extends to the ground downwards, be provided with the second pump body on the output of liquid outlet pipe.
[0005] As preferred, a gas collecting cover is sleeved at the connecting position of the connecting pipe and the deposition furnace body, and a detection cover is sleeved at the outer side of the gas collecting cover, and a leakage detector is inserted at the top of the detection cover.
[0006] As preferred, a gas concentration detector is inserted at the top of the neutralization tank.
[0007] As preferred, the scraping device comprises a sleeve ring, an inner gear ring, a plurality of auxiliary balls and a plurality of scrapers, the sleeve ring is arranged in the receiving groove, the inner gear ring is arranged on the outer surface of the sleeve ring, the bottom of the inner gear ring is engaged with the gear, the left and right sides of the inner gear ring and the sleeve ring form a sliding groove, the plurality of auxiliary balls are evenly arranged in the sliding grooves on the left and right sides respectively, and the bottom of the auxiliary ball is overlapped with the circular hoop on the two sides of the receiving groove.
[0008] As preferred, the plurality of scrapers are arranged on the inner wall of the sleeve ring, and the plurality of scrapers are evenly arranged on the inner wall of the sleeve ring, one end of the scraper is provided with a reinforcing scraper, the reinforcing scraper is slidably arranged with the inner wall of the neutralization tank, and the rear side of the scraper is provided with a waste collecting hopper.
[0009] The deposition furnace body and the connecting pipe are connected, the gas collecting cover is arranged at the connecting position of the deposition furnace body and the connecting pipe, the detection cover is arranged on the outer surface of the gas collecting cover, the leakage detector is arranged on the detection cover, the H2 in the pipe is prevented from leaking, the leakage detector can timely alarm when the H2 leaks, the scraping device is arranged in the neutralization tank, the sleeve ring is arranged in the receiving groove, the plurality of auxiliary balls on the side of the sleeve ring are in contact with the circular hoop on the two sides of the receiving groove, the height of the sleeve ring in the receiving groove is increased, the sleeve ring can rotate in the receiving groove, the inner gear ring on the outer ring is engaged with the gear in the bottom gear box, the rotation of the sleeve ring is realized, the plurality of scrapers on the inner wall of the sleeve ring and the reinforcing scraper scrape the inner wall of the neutralization tank, the inside of the neutralization tank is kept clean, the use time is increased, the waste collecting hopper arranged at the rear end of the scraper collects the waste falling from the front end, the outlet pipe is further protected from being blocked, the design of the waste collecting hopper can accelerate the stirring speed of the liquid in the inside, and the liquid and the waste gas are more fully mixed. BRIEF DESCRIPTION OF DRAWINGS
[0010] Figure 1 is a three-dimensional structure schematic view of the utility model;
[0011] Figure 2 is a three-dimensional structure schematic view of the utility model text installation neutralization tank;
[0012] Figure 3 is a side structure schematic view of the utility model;
[0013] Figure 4 This is a cross-sectional structural diagram of the neutralization box of this utility model;
[0014] Figure 5 This is a three-dimensional schematic diagram of a partial structure of the corresponding storage slot in the neutralization box of this utility model;
[0015] Figure 6 yes Figure 2 A magnified structural diagram of point A in the middle.
[0016] In the diagram: 1. Deposition furnace body; 11. Gas collection hood; 12. Connecting pipe; 13. Detection cover; 14. Leak detector; 2. Neutralization box; 21. Gas concentration detector; 22. Gas outlet pipe; 23. Support leg; 24. Liquid inlet pipe; 241. First pump body; 25. Liquid outlet pipe; 251. Second pump body; 26. Collection tank; 27. Circular hoop; 28. Through groove; 29. Gearbox; 291. Gear; 210. Motor; 31. Collar ring; 32. Internal gear ring; 33. Slide groove; 34. Auxiliary ball bearing; 35. Scraper; 36. Reinforced scraper; 37. Waste collection hopper. Detailed Implementation
[0017] The technical solution of this utility model will be further described in detail below through embodiments and in conjunction with the accompanying drawings.
[0018] Example: A tail gas treatment device in a CVD process, such as Figures 1-6 As shown, the deposition furnace body 1 is characterized in that: a connecting pipe 12 is provided at the top of the deposition furnace body 1, and the other end of the connecting pipe 12 is connected to a neutralization box 2. One end of the connecting pipe 12 is inserted into the neutralization box 2 and extends horizontally through the interior of the neutralization box 2. Multiple support legs 23 are provided at the bottom of the neutralization box 2. An annular receiving groove 26 is provided inside the neutralization box 2. Both sides of the receiving groove 26 are provided with protruding circular rings 27. A scraping device is provided inside the receiving groove 26. A gearbox 29 communicating with the neutralization box 2 is provided at the bottom of the neutralization box 2. A through groove 2 communicating with the gearbox 29 is provided at the bottom of the neutralization box 2. 8. A through slot 28 is opened in the storage slot 26. A gear 291 is installed inside the gearbox 29. A motor 210 is installed on the outside of the gearbox 29. The output end of the motor 210 passes through the gearbox 29 and is inserted into the gear 291. The top of the gear 291 extends into the neutralization box 2 through the through slot 28. A liquid inlet pipe 24 is installed at the bottom of the neutralization box 2. A first pump body 241 is installed on the input end of the liquid inlet pipe 24. An air outlet pipe 22 and a liquid outlet pipe 25 are respectively installed on the top right side of the neutralization box 2. The top of the liquid outlet pipe 25 extends downward to the ground. A second pump body 251 is installed on the output end of the liquid outlet pipe 25.
[0019] The connecting pipe 12 and the deposition furnace body 1 are connected with a gas collecting cover 11, the outer side of the gas collecting cover 11 is sleeved with a detection cover 13, the detection cover 13 is sleeved with a leakage detector at the top, and the neutralizing tank 2 is inwardly sleeved with a gas concentration detector 21 at the top; since the lower limit of hydrogen explosion in air is 4%, the amount of air extracted by the environment is generally set to be more than 100 times of the tail gas flow. In addition, there is still a problem of incomplete conversion or low efficiency after the tail gas is treated, so that harmful substances in the tail gas cannot be fully converted. Therefore, a leakage alarm 14 can be arranged to set a leakage alarm for harmful gas or incompletely treated tail gas.
[0020] The scraping device comprises a sleeve ring 31, an inner gear ring 32, a plurality of auxiliary balls 34 and a plurality of scrapers 35, the sleeve ring 31 is arranged in the receiving groove 26, the inner gear ring 32 is arranged on the outer surface of the sleeve ring 31, the bottom of the inner gear ring 32 is engaged with the gear 291, the left and right sides of the inner gear ring 32 and the sleeve ring 31 form a sliding groove 33, the plurality of auxiliary balls 34 are evenly arranged in the sliding grooves 33 on the left and right sides respectively, the bottom of the ball is overlapped with the circular hoop on the two sides of the receiving groove 26, the plurality of scrapers 35 are arranged on the inner wall of the sleeve ring 31, and the plurality of scrapers 35 are evenly arranged and arranged between each other, one end of the scraper 35 is provided with a reinforced scraper 36, the reinforced scraper 36 is slidably arranged with the inner wall of the neutralizing tank 2, and the rear side of the scraper 35 is provided with a waste collecting hopper 37.
[0021] The principle of the utility model is that: first, the liquid inlet pipe fills the neutralizing liquid into the neutralizing tank 2 through the first pump body 241, until the liquid exceeds the surface of the connecting pipe 12 in the neutralizing tank 2, at this time, various harmful gases, combustible gases and particulate matters generated by the deposition furnace body 1 are sent to the inside of the neutralizing tank 2 through the connecting pipe 12, meanwhile, the connecting pipe 12 and the deposition furnace body 1 are connected with the gas collecting cover 11, the outer surface of the gas collecting cover 11 is provided with the detection cover 13, which can prevent the internal waste gas from leaking, and the leakage alarm 14 arranged on the detection cover 13 can quickly remind the surrounding personnel once the leakage occurs, at this time, the waste gas is discharged into the neutralizing tank 2 through the reaction of the neutralizing liquid, the various harmful gases, combustible gases and particulate matters in the waste gas are fused and separated by the neutralizing liquid, the reacted gas is discharged through the gas outlet pipe 22, and the full liquid is separated through the liquid outlet pipe 25 and the first pump body 241.
[0022] After being used for a period of time, there will be precipitates and impurities on the inner wall of the neutralization tank 2. At this time, the motor 210 on the outside is started to drive the gear 291 at the output end to start rotating. The gear 291 extends into the neutralization tank 2 through the through slot 28 and meshes with the inner ring gear 32, thereby driving the inner ring gear 32 to start rotating. Since the inner ring gear 32 is arranged on the sleeve ring 31, the sleeve is arranged in the receiving groove 26 of the neutralization tank 2, and the plurality of auxiliary balls 34 on the side surface of the sleeve are in contact with the annular ring 27 on both sides of the receiving groove 26, thereby providing sufficient space for the sleeve and the inner ring gear 32 to rotate in the receiving groove 26, so that the sleeve ring 31 can rotate. The plurality of scrapers 35 arranged on the inner wall of the sleeve ring 31 and the reinforced scraper 36 at the front end of the scraper 35 scrape the inner wall of the neutralization tank 2. The scraped waste is collected by the waste collecting hopper 37 at the rear side, thereby reducing the amount of waste mixed into the neutralizing liquid.
[0023] Finally, it should be noted that the above embodiments are only representative examples of the present application. Obviously, the present application is not limited to the above embodiments, and many variations are possible. Any simple modification, equivalent change and modification made in accordance with the technical essence of the present application to the above embodiments shall be considered as falling within the protection scope of the present application.
Claims
1. An apparatus for tail gas treatment in a CVD process, comprising a deposition furnace body (1), characterized in that: The top of the deposition furnace body (1) is provided with a connecting pipeline (12), the other end of the connecting pipeline (12) is connected with a neutralization tank (2), one end of the connecting pipeline (12) inserted into the neutralization tank (2) is transversely arranged in the inside of the neutralization tank (2), the bottom of the neutralization tank (2) is provided with a plurality of supporting legs (23), the inside of the neutralization tank (2) is provided with an annular receiving groove (26), the two sides of the receiving groove (26) are provided with protruding circular rings (27), the receiving groove (26) is provided with a scraping device, the bottom of the neutralization tank (2) is provided with a gear box (29) communicated with the neutralization tank (2), the bottom of the neutralization tank (2) is provided with a through groove (28) communicated with the gear box (29), the through groove (28) is arranged in the receiving groove (26), the inside of the gear box (29) is provided with a gear (291), the outside of the gear box (29) is provided with a motor (210), the output end of the motor (210) is transversely arranged in the gear box (29) and is inserted into the gear (291), the top of the gear (291) extends to the inside of the neutralization tank (2) through the through groove (28), the bottom of the neutralization tank (2) is provided with a liquid inlet pipe (24), the input end of the liquid inlet pipe (24) is provided with a first pump body (241), the top of the right side of the neutralization tank (2) is provided with an air outlet pipe (22) and a liquid outlet pipe (25), the top of the liquid outlet pipe (25) extends to the ground, the output end of the liquid outlet pipe (25) is provided with a second pump body (251).
2. The apparatus for treating exhaust gas in a CVD process according to claim 1, wherein: The connecting pipeline (12) and the deposition furnace body (1) are connected with a gas collecting cover (11), the outside of the gas collecting cover (11) is sleeved with a detection cover (13), the top of the detection cover (13) is inserted with a leakage detector (14).
3. The apparatus for treating exhaust gas in a CVD process according to claim 1, wherein: The top of the neutralization tank (2) is inwardly inserted with a gas concentration detector (21).
4. The apparatus for treating exhaust gas in a CVD process according to claim 1, wherein: The scraping device comprises a sleeve ring (31), an inner gear ring (32), a plurality of auxiliary balls (34) and a plurality of scrapers (35), the sleeve ring (31) is arranged in the receiving groove (26), the inner gear ring (32) is arranged on the outer surface of the sleeve ring (31), and the bottom of the inner gear ring (32) is engaged with the gear (291), the left and right sides of the inner gear ring (32) and the sleeve ring (31) form a sliding groove (33), a plurality of auxiliary balls (34) are evenly arranged in the sliding grooves (33) on the left and right sides, respectively, and the bottom of the auxiliary ball (34) is overlapped with the circular ring (27) on the two sides of the receiving groove (26).
5. The apparatus for treating exhaust gas in a CVD process according to claim 4, wherein: A plurality of scrapers (35) are arranged on the inner wall of the sleeve ring (31), and the plurality of scrapers (35) are evenly arranged, one end of the scraper (35) is provided with a reinforced scraper (36), the reinforced scraper (36) is slidably arranged with the inner wall of the neutralization tank (2), and the rear side of the scraper (35) is provided with a waste collecting hopper (37).