Multifunctional adsorption platform for sheet base body

Abstract

The utility model discloses a multifunctional adsorption platform for a sheet substrate in the technical field of mechanical part processing, and aims to solve the problem that a traditional adsorption platform in the prior art cannot cope with warping of a ferromagnetic material. The device comprises a mounting frame, the mounting frame is of a polygonal structure with a hollow center and closed sides, a placement plate is mounted on the top face of the mounting frame, a plurality of adsorption holes are formed in the surface of the placement plate in an array distribution mode, a sealing plate is mounted at the bottom of the mounting frame in a sealed mode, and an air path connecting nozzle is arranged on one side of the mounting frame and communicated with a negative pressure generating device. And a plurality of electromagnet strips are further mounted in the mounting frame. Strong magnetic adsorption and vacuumizing negative pressure adsorption can be carried out on a to-be-machined sheet base body at the same time, the negative pressure is used for providing comprehensive adsorption force, warping of ferromagnetic materials can be avoided through magnetic force, the platform can effectively adsorb various different materials, and the working efficiency is improved. And substrates made of different materials can be stably adsorbed for processing.

Description

Technical Field

[0001] This utility model relates to a multifunctional adsorption platform for thin sheet substrates, belonging to the technical field of mechanical parts processing equipment. Background Technology

[0002] Ferritic stainless steels, such as 430 / 444 / 443, require multiple high-temperature sintering processes when manufacturing stainless steel electronic products, such as fixed resistors and heating products. The substrate is subjected to heating and cooling, which causes the stainless steel sheet to deform and warp, thus affecting product processing positioning and film thickness control in different processes.

[0003] Currently, most adsorption platforms in the printing industry use positioning columns for positioning and negative pressure suction for positioning. However, these platforms can only provide a rough positioning effect for warped stainless steel sheets and cannot flatten the warped areas. This is insufficient for products with film thickness requirements. Typically, after high-temperature sintering, stainless steel sheets will warp and arch in the middle, resulting in an abnormality of thinner center and thicker edges during film printing. If it is an insulating film, this will affect the overall pressure resistance and thermal conductivity. If it is a resistive film, it will affect the resistance value and resistance distribution, all of which are detrimental to product manufacturing. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a multifunctional adsorption platform for thin sheet substrates. It can simultaneously perform strong magnetic adsorption and vacuum negative pressure adsorption on the thin sheet substrate to be processed. In addition to using negative pressure to provide comprehensive adsorption force, it can also use magnetic force to avoid warping caused by ferromagnetic materials. The platform can effectively adsorb a variety of different materials, which is beneficial for the stable adsorption of substrates of different materials for processing.

[0005] To achieve the above objectives, this utility model employs the following technical solution:

[0006] This utility model provides a multifunctional adsorption platform for thin sheet substrates, including a mounting frame. The mounting frame has a polygonal structure with a hollow center and closed sides. A placement plate is mounted on the top surface of the mounting frame. Multiple adsorption holes are arranged in an array on the surface of the placement plate. A sealing plate is sealed on the bottom of the mounting frame. An air inlet is provided on one side of the mounting frame. The air inlet is connected to a negative pressure generating device. Multiple electromagnet bars are also installed inside the mounting frame. Each electromagnet bar can be energized to generate a strong magnet, thereby adsorbing the ferromagnetic thin sheet above the placement plate.

[0007] Specifically, it also includes several positioning rods, the diameter of which matches the diameter of the adsorption holes on the placement plate, and the position of the electromagnet strip to avoid the positioning rods is set.

[0008] Specifically, it also includes a second limiting plate, which is installed in the middle layer of the placement plate and the sealing plate. The second limiting plate has multiple mounting holes that can match the position of the adsorption hole. The positioning rod passes through the adsorption hole and the mounting hole at the same plane position and abuts against the top surface of the sealing plate.

[0009] Specifically, the electromagnet bar includes a strip-shaped support, on which multiple electromagnet cores are evenly arranged, and on one side of the strip-shaped support is a terminal block capable of simultaneously connecting multiple electromagnet cores.

[0010] Specifically, the mounting frame has corresponding connecting ports on both sides, and the electromagnet strip is slidably inserted into the corresponding connecting port, with the end of the electromagnet strip able to form a seal with the connecting port.

[0011] Specifically, the strip bracket can act as a support rod against the bottom of the placement plate.

[0012] Specifically, the strip-shaped bracket can act as a support rod against the top of the sealing plate.

[0013] Specifically, the strip-shaped support is provided with ventilation slots for connecting adjacent chambers that are isolated by the strip-shaped support.

[0014] Specifically, the mounting frame has mounting recesses at both the top and bottom, and an annular sealing strip is provided inside the mounting recesses. The placement plate and the sealing plate are both sealed and installed in the corresponding mounting recesses by the sealing strip.

[0015] Compared with the prior art, the beneficial effects achieved by this utility model are as follows:

[0016] This invention provides a multifunctional adsorption platform that combines negative pressure adsorption with magnetic adsorption. This avoids the problem of stainless steel substrates failing to be properly adsorbed after sintering and developing voids. It can effectively adsorb substrates of various materials simultaneously, facilitating smooth processing. Furthermore, this invention provides a positioning rod for positioning the substrate, further preventing displacement and deformation, and providing stable working conditions for substrate processing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the multifunctional adsorption platform provided in this embodiment of the utility model;

[0018] Figure 2 This is an exploded structural diagram of the multifunctional adsorption platform provided in this embodiment of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the electromagnet bar provided in this embodiment of the utility model;

[0020] Figure 4 This is a front view of the multifunctional adsorption platform provided in this embodiment of the utility model;

[0021] Figure 5 This is a utility model Figure 4 A cross-sectional view of the multifunctional adsorption platform provided in the embodiment along the AA direction;

[0022] Reference numerals in the attached drawings: 1. Mounting frame; 2. Placement plate; 3. Second limiting plate; 4. Electromagnetic strip; 401. Strip bracket; 402. Electromagnetic core; 403. Terminal block; 404. Vent groove; 5. Positioning rod; 6. Sealing plate; 7. Air inlet; 8. Sealing strip; 9. Connecting pipe port. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and should not be used to limit the scope of protection of the present invention.

[0024] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0026] This utility model provides a multifunctional adsorption platform for thin sheet substrates, capable of simultaneously performing strong magnetic adsorption and vacuum negative pressure adsorption on the thin sheet substrate to be processed. Besides utilizing negative pressure to provide comprehensive adsorption force, it also utilizes magnetic force to prevent warping caused by ferromagnetic materials. The platform can effectively adsorb various materials, facilitating stable adsorption of substrates (or base plates) of different materials for processing. To achieve the multifunctional adsorption function of this platform, it includes a mounting frame 1. Specifically, the mounting frame 1 is a polygonal structure with a hollow center and closed sides. Figure 2 The overall frame shown can preferably be quadrilateral. A placement plate 2 is mounted on the top surface of the mounting frame 1. Multiple adsorption holes are arrayed on the surface of the placement plate 2. A sealing plate 6 is sealed at the bottom of the mounting frame 1. An air inlet 7 is provided on one side of the mounting frame 1. The air inlet 7 is used to connect to a negative pressure generating device. By connecting the negative pressure, negative pressure is simultaneously supplied to multiple adsorption holes, allowing the thin substrate placed on it to be well adsorbed. To prevent deformation and warping of the ferromagnetic material during high-temperature production, multiple electromagnet bars 4 are also installed inside the mounting frame 1, so that each electromagnet bar 4 can be energized to generate a strong magnet, thereby adsorbing the ferromagnetic thin plate above the placement plate 2. In this way, the electromagnet bars 4 can adsorb the warped parts close to the surface of the placement plate 2. The negative pressure adsorption effect can adsorb the thin plate substrate close to the surface of the placement plate 2 and attach it to the surface of the placement plate 2. The two work together to achieve stable and flat adsorption of the ferromagnetic thin plate, which is beneficial for further processing of the ferromagnetic thin plate in subsequent work. In addition, the platform can also be used for thin plates of other materials such as PCB, PI film, and ceramics because it retains the adsorption function. With the above mechanism, the platform can flatly adsorb ferritic stainless steel with a thickness ≤3.0mm and warpage ≤5.0mm; the adsorption positioning accuracy can be within 0.05mm; during strong magnetic operation, it is necessary to control the strong magnetic adsorption time within 4 seconds (the time for magnetization and demagnetization); the accuracy of the thickness of the printed film adsorbed by strong magnetic adsorption can be controlled within ±3um.

[0027] This utility model provides a multifunctional adsorption platform for a thin film substrate. To further stabilize the relative position of the thin film substrate, corresponding positioning holes are pre-set on the thin film substrate, and then corresponding positioning rods 5 are used for insertion and positioning. Therefore, preferably, the adsorption platform also includes several positioning rods 5. Specifically, the diameter of the positioning rods 5 is matched with the diameter of the adsorption holes on the placement plate 2. In this case, the electromagnet strip 4 should be positioned to avoid the positioning rods 5. To ensure that the thin film substrate is not lifted by the positioning rods 5, the positioning rods 5 should be straight rods with uniform diameter. If the thin film substrate has corresponding slots, the corresponding adsorption holes on the placement plate 2 can also be sealed by the positioning plate to prevent air leakage. To ensure good positioning and installation of the smooth positioning rods 5, the positioning rods 5 also include a second limiting plate 3. Specifically, the second limiting plate 3 is installed in the middle layer between the placement plate 2 and the sealing plate 6. The second limiting plate 3 has multiple mounting holes that match the positions of the adsorption holes. When installed, the positioning rods 5 can penetrate the adsorption holes and mounting holes in the same plane and abut against the top surface of the sealing plate 6. Figure 5 As shown, at this time, the same positioning rod 5 can be limited by two holes at different heights and is resisted by the sealing plate 6 at the bottom, thereby preventing the positioning rod 5 from rotating or becoming unstable in height. This is beneficial for both installation and stable positioning of the thin substrate.

[0028] This utility model provides a multifunctional adsorption platform for a thin sheet substrate. The electromagnet bar 4 should be energized to generate a strong magnet when needed. Therefore, the electromagnet bar 4 can be configured to include a strip-shaped support 401, on which multiple electromagnet cores 402 are evenly arranged. The positions of the electromagnet cores 402 are as follows: Figure 3 As shown, one side of the strip-shaped support 401 is provided with a terminal 403 capable of simultaneously connecting multiple electromagnet cores 402. By simultaneously supplying power to the coils around the corresponding electromagnet core 402, magnetism is generated within a corresponding range (this is a conventional technique and will not be elaborated further here), thereby achieving the attraction of the ferromagnetic thin plate. The electromagnet strip 4 can be adopted as follows: Figure 2 The array distribution shown can also be evenly arranged in the cavity of the mounting frame 1, and can be installed according to actual usage requirements.

[0029] This utility model provides a multifunctional adsorption platform for a thin sheet substrate, specifically providing an installation method for an electromagnet strip 4. Specifically, corresponding connecting pipe ports 9 are provided on both sides of the mounting frame 1. By sliding the electromagnet strip 4 into the corresponding connecting pipe port 9, the electromagnet strip 4 can be easily assembled. The end of the electromagnet strip 4 can form a seal with the connecting pipe port 9, thereby preventing gas leakage and thus affecting the adsorption effect.

[0030] This utility model provides a multifunctional adsorption platform for a thin-film substrate. In some embodiments, the thickness of the placement plate 2 can be reduced. To prevent the placement plate 2 from deforming extensively under strong adsorption after thinning, the strip-shaped support 401 can act as a support rod against the bottom of the placement plate 2, that is, at the junction of the top surface of the strip-shaped support 401 and the bottom surface of the placement plate 2. Similarly, the strip-shaped support 401 can also be configured to act as a support rod against the top of the sealing plate 6, thereby maintaining the material structure properties of the sealing plate 6 while thinning it. When simplifying the design cost of the platform using these methods, the strip-shaped support 401 will form a partition and seal on the inner cavity of the mounting frame 1. Therefore, a venting groove 404 can be provided on the strip-shaped support 401 to connect the adjacent cavities isolated by the strip-shaped support 401, so that the negative pressure air path is not interrupted by the strip-shaped support 401 during operation.

[0031] This utility model provides a multifunctional adsorption platform for a thin-film substrate. To ensure the airtightness of the inner cavity of the mounting frame 1, the assembled placement plate 2 and sealing plate 6 need to fit together almost seamlessly. Specifically, as shown... Figure 2 As shown, mounting recesses are provided at the top and bottom of the mounting frame 1. An annular sealing strip 8 is provided inside the mounting recess. The placement plate 2 and the sealing plate 6 are both sealed and installed in the corresponding mounting recesses through the sealing strip 8. The contact gap is reduced by the contact between the sealing strip 8 (elastic material) and the adjacent plate, thereby ensuring a good sealing effect.

[0032] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A multifunctional adsorption platform for thin-film substrates, characterized in that, The system includes a mounting frame (1), which is a polygonal structure with a hollow center and closed sides. A placement plate (2) is installed on the top surface of the mounting frame (1). Multiple adsorption holes are arranged in an array on the surface of the placement plate (2). A sealing plate (6) is installed at the bottom of the mounting frame (1). An air inlet (7) is provided on one side of the mounting frame (1). The air inlet (7) is connected to a negative pressure generating device. Multiple electromagnet bars (4) are also installed inside the mounting frame (1). Each electromagnet bar (4) can be energized to generate a strong magnet, thereby adsorbing the ferromagnetic thin plate above the placement plate (2).

2. The multifunctional adsorption platform for thin-film substrates according to claim 1, characterized in that, It also includes several positioning rods (5), the diameter of which matches the diameter of the adsorption hole on the placement plate (2), and the position of the electromagnet strip (4) avoiding the positioning rods (5).

3. The multifunctional adsorption platform for thin-film substrates according to claim 2, characterized in that, It also includes a second limiting plate (3), which is installed in the middle layer of the placement plate (2) and the sealing plate (6). The second limiting plate (3) has multiple mounting holes that can match the position of the adsorption hole. The positioning rod (5) passes through the adsorption hole and the mounting hole in the same plane and abuts against the top surface of the sealing plate (6).

4. The multifunctional adsorption platform for thin-film substrates according to claim 1, characterized in that, The electromagnet bar (4) includes a strip-shaped support (401), on which multiple electromagnet cores (402) are evenly arranged. One side of the strip-shaped support (401) is provided with a terminal (403) that can simultaneously connect multiple electromagnet cores (402).

5. The multifunctional adsorption platform for thin-film substrates according to claim 4, characterized in that, The mounting frame (1) has corresponding connecting ports (9) on both sides. The electromagnet strip (4) is slidably inserted into the corresponding connecting port (9) and the end of the electromagnet strip (4) can form a seal with the connecting port (9).

6. The multifunctional adsorption platform for thin-film substrates according to claim 5, characterized in that, The strip-shaped bracket (401) can act as a support rod against the bottom of the placement plate (2).

7. The multifunctional adsorption platform for thin-film substrates according to claim 6, characterized in that, The strip-shaped bracket (401) can act as a support rod against the top of the sealing plate (6).

8. The multifunctional adsorption platform for thin-film substrates according to claim 7, characterized in that, The strip support (401) is provided with a ventilation slot (404) for connecting adjacent chambers isolated by the strip support (401).

9. The multifunctional adsorption platform for thin-film substrates according to claim 1, characterized in that, The top and bottom of the mounting frame (1) are provided with mounting recesses, and an annular sealing strip (8) is provided in the mounting recesses. The placement plate (2) and the sealing plate (6) are both sealed and installed in the corresponding mounting recesses by the sealing strip (8).

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