Photomask box clamping device

Abstract

The utility model provides a photomask box clamping device which comprises a connecting piece and two fork arms arranged on the connecting piece, the photomask box clamping device further comprises a pressing mechanism arranged on the fork arms, the pressing mechanism comprises a mounting seat, a pressing piece and a driving mechanism, the mounting seat is fixed on the fork arms, the pressing piece is fixed on the mounting seat, and the driving mechanism is fixed on the pressing piece. The pressing piece is rotationally arranged on the mounting seat and connected with the driving mechanism, and under the driving of the driving mechanism, the pressing piece rotates relative to the fork arm so as to enable the pressing piece to press part of the photomask box on the fork arm or enable the pressing piece to be far away from the photomask box and the fork arm. According to the utility model, the clamping of the photomask box is realized through the matching of the pressing piece and the fork arm, so that the photomask box cannot fall off due to collision in the transportation process, and the transportation safety of the photomask box is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment technical field especially relates to a mask box clamping device. BACKGROUND

[0002] In the semiconductor manufacturing process, the mask needs to be placed in the mask box for storage or transfer to prevent the mask from being contaminated by dust particles or chemicals. The mask box needs to be transported and stored before and after use, so a corresponding device is needed to ensure the safety and efficiency of the mask box transfer. Generally, the mask box is transported by a mechanical arm, which is equipped with a fork to pick up the mask box, as shown in the figure. The front end of the fork 2 is provided with two fork arms, which are inserted into the lower part of the protrusions 11 on both sides of the mask box to lift the mask box 1 for transportation. However, during the transportation process, if an obstacle is encountered, the mask box 1 on the fork 2 is prone to falling and causing damage. Figure 1

[0003] Therefore, it is necessary to develop a mask box clamping device to prevent the mask box from falling. SUMMARY

[0004] The utility model aims at providing a mask box clamping device which can press and clamp the mask box to prevent it from falling and being damaged during transportation.

[0005] The utility model provides a mask box clamping device, which comprises a connecting piece and two fork arms arranged on the connecting piece, and further comprises a pressing mechanism arranged on the fork arms. The pressing mechanism comprises a mounting seat, a pressing piece and a driving mechanism. The mounting seat is fixed on the fork arms, and the pressing piece is rotatably arranged on the mounting seat and connected with the driving mechanism. Under the driving of the driving mechanism, the pressing piece rotates relative to the fork arms, so that the pressing piece presses part of the mask box on the fork arms or moves away from the mask box and the fork arms.

[0006] Preferably, the driving mechanism comprises a driving piece and a transmission assembly. The driving piece drives the pressing piece to rotate relative to the fork arms through the transmission assembly.

[0007] Preferably, the transmission assembly comprises a sliding block and a rotating roller. The sliding block is provided with an inclined driving surface, the inclined direction of the driving surface intersects with the extension direction of the fork arms, the rotating roller is connected with the pressing piece and is rotatably supported on the driving surface, and the driving piece drives the sliding block to slide, so that the rotating roller moves along the driving surface to drive the pressing piece to rotate.

[0008] Preferably, the mounting seat is provided with a guide groove consistent with the extension direction of the fork arms, and the sliding block is arranged in the guide groove and slides along the guide groove. ​

[0009] Preferably, the sliding block is provided with a limiting surface which is connected with the driving surface, and the limiting surface is used for positioning the rotating roller to make the pressing part press on the fork arm.

[0010] Preferably, the driving part is a driving cylinder or an electric cylinder.

[0011] Preferably, the transmission assembly comprises a transmission rod which is rotatably arranged on the mounting base, one end of the transmission rod is connected with the driving part, and the other end of the transmission rod is connected with the pressing part, the driving part drives the transmission rod to make lever movement and further drives the pressing part to rotate.

[0012] Preferably, the photo mask box clamping device is provided with a photoelectric sensor.

[0013] Preferably, the pressing mechanism is arranged on the two fork arms.

[0014] Preferably, the mounting base is fixed with the fork arm through a connecting flange, and / or the connecting part is provided with a connecting flange which is connected with a mechanical arm or a robot.

[0015] The photo mask box clamping device has the following advantages: the pressing mechanism is arranged on the fork arm, when the photo mask box is carried, the driving mechanism drives the pressing part to rotate to make the pressing part away from the fork arm, the fork arm is conveniently inserted into the lower part of the protruding edge of the photo mask box, the pressing part is further driven to rotate and press on the photo mask box and the fork arm, that is, the pressing part and the fork arm form a clamping state to clamp the protruding edge of the photo mask box, and the photo mask box is not easily knocked off during the moving process, and the safety of the photo mask box is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 A state diagram of carrying the photo mask box by the hand fork in the prior art is shown.

[0017] Figure 2 An embodiment diagram of the photo mask box clamping device of the present application is shown.

[0018] Figure 3 An embodiment diagram of the pressing mechanism of the present application is shown. DETAILED DESCRIPTION

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] This utility model embodiment provides a photomask box clamping device, see Figure 2 As shown, the device includes a connector and two forks 21 on the connector. The photomask box clamping device also includes a clamping mechanism 3 on the forks 21. The clamping mechanism 3 includes a mounting base, a clamping member 31 and a driving mechanism. The mounting base is fixed on the forks 21. The clamping member 31 is rotatably mounted on the mounting base and connected to the driving mechanism. Under the drive of the driving mechanism, the clamping member 31 rotates relative to the forks 21 to clamp part of the photomask box 1 onto the forks 21. That is, when the protrusion 11 of the photomask box 1 is above the forks 21, the clamping member 31 is pressed onto the protrusion 11 and forms a clamping state with the forks 21, or the clamping member 31 is away from the forks 21 so that the protrusion 11 is placed between the forks 21 and the clamping member 31 to facilitate clamping or releasing the photomask box 1. In this embodiment, a clamping mechanism 3 is installed on the fork arm 21. The driving mechanism in the clamping mechanism 3 drives the clamping member 31 to rotate. When the clamping member 31 rotates towards the fork arm 21 and clamps onto the fork arm 21, it cooperates with the fork arm 21 to clamp the photomask box 1. As a result, the photomask box 1 will not fall due to collision during the transportation process, thus improving the safety of the photomask box 1 during transportation.

[0021] As one embodiment of the aforementioned clamping mechanism, the driving mechanism includes a driving member and a transmission assembly. The driving member drives the clamping member to rotate relative to the fork arm via the transmission assembly. See Figure 3 As shown, the mounting base includes a base 32 and a bracket 35 placed on the base 32. The clamping member 31 is rotatably supported on the bracket 35. In this embodiment, the clamping member 31 is rotatably set by lever principle. One end of it is driven to rise and fall by the driving member, which in turn drives the other end to rise and fall. Specifically, the clamping member 31 can be a bent shape composed of two sections. One section is a connecting section 312 that is rotatably connected to the bracket 35, and the other section is a straight extending clamping section 311. The straight extension of the clamping section 311 makes it easy to press against the protrusion 11 of the photomask box, increasing the contact area with the protrusion 11 of the photomask box and improving the clamping strength.

[0022] The transmission assembly in this embodiment includes a slider 34 and a rotating roller 33. The slider 34 has an inclined driving surface, and the rotating roller 33 is rotatably mounted on the end of the clamping member 31 and rolls on the driving surface. When the driving member drives the slider 34 to slide, the rotating roller 33 moves along the driving surface to drive the clamping member 31 to rotate. The slider 34 is slidably mounted on the base 32, which is fixed on the fork arm 1. In this embodiment, the power of the driving member is transmitted to the clamping member 31 through the cooperation of the slider 34 and the rotating roller 33, thereby achieving the rotation of the clamping member 31. Furthermore, the sliding of the slider 34 is easy to achieve, requiring only the driving member to drive it in linear reciprocating motion, while the rotating roller 33 rolls on the slider 34, facilitating the conversion of linear motion into rotational motion. To further ensure the stability of the movement, the mounting base 32 is provided with a guide groove, and the slider 34 is disposed in the guide groove and slides along the guide groove. In this embodiment, the extension direction of the guide groove is consistent with the extension direction of the fork arm 21 so that the slider 34 slides in a straight line. In this embodiment, the extension direction of the guide groove intersects with the extension direction of the driving surface, thereby facilitating the conversion of the linear reciprocating motion of the slider 34 into the lifting and lowering of the rotating roller 33 and the pressing member connected to the rotating roller 33. The slider 34 may be provided with a limiting surface that connects to the driving surface. The limiting surface is used to position the rotating roller 33 so that the clamping member 31 is pressed against the fork arm. The setting of the limiting surface plays the role of locking the clamping member, which can further ensure that the clamping member 31 is stably pressed against the fork arm 21. When the driving member has no power output, the clamping member 31 will not move. In this embodiment, the limiting surface can be set on the top of the driving surface. For example, a groove can be set on the slider, and the inner wall of the groove can serve as the limiting surface. The groove and the rotating roller 33 are used to achieve the limiting. Alternatively, a protrusion protruding from the driving surface can be set on the slider. The surface of the protrusion forms a limiting surface to prevent the rotating roller 33 from rising further. The driving member can be a driving cylinder or an electric cylinder, and it is not limited to these. It can drive the slider 34 to move linearly.

[0023] As another embodiment of the above-mentioned clamping mechanism (not shown), the transmission component in this embodiment may include a transmission rod rotatably mounted on the mounting base. One end of the transmission rod is connected to the driving member, and the other end is connected to the clamping member. The driving member drives the transmission rod to perform lever motion, thereby causing the clamping member to rotate. This embodiment utilizes the lever principle, which ensures stable force transmission and is easy to implement. That is, one end of the transmission rod is connected to the driving member and moves under the drive of the driving member, thereby causing the other end to drive the clamping member 31 to rotate. In this embodiment, the driving member may be a driving cylinder or an electric cylinder. If the extension direction of the driving cylinder or electric rod is perpendicular to the extension direction of the transmission rod, it can drive the transmission rod to rotate, thus realizing the lever principle. In this embodiment, the driving member is not limited to this; it can drive the transmission rod to rotate. As another embodiment, the transmission rod may be an extension of the clamping member, that is, the clamping member itself constitutes a lever. One end cooperates with the fork arm to achieve clamping, and the other end cooperates with the driving member. Under the drive of the driving member, it rotates itself to cooperate with the fork arm to clamp or open.

[0024] The transmission components described above are not limited to the above embodiments. As long as the clamping component can be rotated under the driving force of the driving component, it can rotate towards the fork arm or away from the fork arm, that is, cooperate with the fork arm to achieve clamping or opening.

[0025] To further ensure the safety of photomask box transfer, this embodiment is equipped with a photoelectric sensor on the photomask box gripping device. The photoelectric sensor detects whether there are obstacles in the transfer path. If there is an obstacle, an alarm is issued, or the main control system of the photomask box gripping device will bypass the obstacle or stop the movement, thus generating an instruction to prevent collision with the obstacle and ensuring the safety of the transfer. This embodiment achieves double protection through photoelectric sensors and a clamping mechanism, further improving the safety of handling.

[0026] Both fork arms 21 are equipped with clamping mechanisms 3, which further improve the clamping force of the photomask box gripping device on the photomask box and ensure the safety of movement. The mounting base on the clamping mechanism 3 is fixed to the fork arm through a connecting flange, thereby enabling quick connection.

[0027] To achieve automated handling of photomask boxes, one embodiment has a connecting flange on the connector that can be connected to a robotic arm or robot. The robotic arm or robot can directly drive the photomask box gripping device to move, thereby completing the transfer of the photomask box.

[0028] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as defined in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A photomask box clamping device, comprising a connector and two forks disposed on the connector, characterized in that: The photomask box clamping device further includes a clamping mechanism disposed on the fork arm. The clamping mechanism includes a mounting base, a clamping member, and a driving mechanism. The mounting base is fixed on the fork arm, and the clamping member is rotatably disposed on the mounting base and connected to the driving mechanism. Under the drive of the driving mechanism, the clamping member rotates relative to the fork arm so that the clamping member presses part of the photomask box onto the fork arm or moves the clamping member away from the photomask box and the fork arm.

2. The photomask box clamping device according to claim 1, characterized in that: The driving mechanism includes a driving component and a transmission assembly. The driving component drives the clamping component to rotate relative to the fork arm through the transmission assembly.

3. The photomask box clamping device according to claim 2, characterized in that: The transmission assembly includes a slider and a rotating roller. The slider has an inclined driving surface, the inclination direction of which intersects the extension direction of the fork arm. The rotating roller is connected to the clamping member and is rolled and supported on the driving surface. When the driving member drives the slider to slide, the rotating roller moves along the driving surface to drive the clamping member to rotate.

4. The photomask box clamping device according to claim 3, characterized in that: The mounting base is provided with a guide groove that is consistent with the extension direction of the fork arm, and the slider is disposed in the guide groove and slides along the guide groove.

5. The photomask box clamping device according to claim 3, characterized in that: The slider is provided with a limiting surface that connects with the driving surface. The limiting surface is used to position the rotating roller so that the pressing member presses against the fork arm.

6. The photomask box clamping device according to claim 2, characterized in that: The driving component is a driving cylinder or an electric cylinder.

7. The photomask box clamping device according to claim 2, characterized in that: The transmission assembly includes a transmission rod rotatably mounted on the mounting base. One end of the transmission rod is connected to the driving member, and the other end is connected to the clamping member. The driving member drives the transmission rod to perform lever motion, thereby driving the clamping member to rotate.

8. The photomask box clamping device according to claim 1, characterized in that: The photomask box clamping device is equipped with a photoelectric sensor.

9. The photomask box clamping device according to claim 1, characterized in that: The clamping mechanism is provided on both of the fork arms.

10. The photomask box clamping device according to claim 1, characterized in that: The mounting base is fixed to the fork arm via a connecting flange, and / or the connector has a connecting flange for connection to a robotic arm or robot.

Images