Water cooling mechanism of vacuum coating machine

Abstract

The utility model relates to the technical field of coating equipment, in particular to a water cooling mechanism of a vacuum coating machine, which comprises a vacuum cavity, a rotating stand is rotatably connected in the vacuum cavity through a through shaft, a top plate and a bottom plate are respectively arranged at the upper end and the lower end of the rotating stand, a plurality of longitudinal cooling pipes are arranged between the top plate and the bottom plate in a penetrating manner, and the cooling pipes are arranged in parallel. Partition plates are arranged among the cooling pipes in a sleeved mode, and hanging holes are formed in the partition plates. And radiation cooling can be conducted on the workpiece through the arranged cooling pipe, and the cooling efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a water-cooling mechanism for a vacuum coating machine. Background Technology

[0002] Physical vapor deposition (PVD) technology includes vacuum evaporation deposition, ion plating, and magnetron sputtering deposition. The working process of ion plating vacuum coating equipment is as follows: the workpiece is loaded into the vacuum chamber through the door, then the door is closed → vacuuming is performed → when the vacuum level reaches the set value, the workpiece is heated → after reaching the process temperature, the workpiece undergoes ion cleaning → after cleaning, vacuum coating begins → after coating is completed, cooling begins → when the appropriate temperature is reached, the door is opened and the workpiece is removed. The entire production process takes approximately 8 hours, with the cooling time alone taking about 2-3 hours, severely reducing the utilization rate and production efficiency of the equipment. Therefore, it is urgent to improve the equipment's cooling time. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a water cooling mechanism for a vacuum coating machine, which addresses the above-mentioned technical deficiencies and solves the problem of long cooling time for vacuum equipment.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a water cooling mechanism for a vacuum coating machine, including a vacuum chamber, a rotating frame rotatably connected to the vacuum chamber via a through shaft, a top plate and a bottom plate respectively provided at the upper and lower ends of the rotating frame, a longitudinal cooling pipe passing through the top plate and the bottom plate, multiple cooling pipes arranged parallel to each other, a partition plate sleeved between the multiple cooling pipes, and a hanging hole provided in the partition plate.

[0005] To further optimize this technical solution, a liquid collection chamber is provided at the top of the top plate. One end of multiple cooling pipes is connected to the liquid collection chamber. The cooling pipes include upward pipes and downward pipes, which are arranged alternately. The ends of multiple upward pipes away from the liquid collection chamber are connected to the upper manifold, and the ends of multiple downward pipes away from the liquid collection chamber are connected to the lower manifold. The upper manifold and the lower manifold are connected to the circulating cooling system through rotary joints.

[0006] To further optimize this technical solution, the rotary joint includes an annular sleeve, which is fitted on the outside of the through shaft. A sealing mechanism is provided between the annular sleeve and the through shaft. The through shaft is a hollow cylindrical shape. A radial through hole is provided at the position corresponding to the position of the through shaft and the annular sleeve. A middle cavity is provided at the position corresponding to the position of the through hole in the inner cavity of the through shaft. A connecting pipe is provided at the bottom of the middle cavity. The rotary joint is connected to the circulating cooling system through the connecting pipe.

[0007] To further optimize this technical solution, an external cooling chamber is provided on the outer wall of the vacuum chamber, a water inlet is provided at the top of the vacuum chamber, and a water outlet is provided on one side of the bottom of the vacuum chamber. The water inlet and the water outlet are respectively connected to the circulating cooling system.

[0008] Compared with the prior art, the present invention has the following advantages:

[0009] 1. The cooling pipes can be installed to radiate and cool the workpiece, thus improving the cooling efficiency;

[0010] 2. Combining the cooling pipe with the partition plate that fixes the workpiece to be coated simplifies the structure, reduces manufacturing costs, and improves equipment utilization.

[0011] 3. The external cooling chamber and cooling pipes enable multi-directional cooling of the vacuum chamber, further improving cooling efficiency and achieving good cooling results. Attached Figure Description

[0012] Figure 1 This is a cross-sectional view of a water-cooling mechanism for a vacuum coating machine;

[0013] Figure 2 This is a schematic diagram of the structure of the transfer frame in the water cooling mechanism of a vacuum coating machine;

[0014] Figure 3 This is a bottom view of the rotating frame.

[0015] In the diagram: 1. Vacuum chamber; 10. External cooling chamber; 101. Water inlet; 102. Water outlet; 2. Rotary frame; 20. Through shaft; 200. Middle cavity; 201. Through hole; 202. Connecting pipe; 21. Top plate; 22. Bottom plate; 23. Liquid collection chamber; 3. Cooling pipe; 31. Upper manifold; 32. Lower manifold; 301. Upward pipe; 302. Downward pipe; 4. Partition plate; 41. Hanging hole; 5. Annular sleeve; 51. Sealing mechanism. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0017] Combination Figures 1 to 3 As shown, a water-cooling mechanism for a vacuum coating machine includes a vacuum chamber 1. A rotating frame 2 is rotatably connected to the vacuum chamber 1 via a through shaft 20. The rotating frame 2 has a top plate 21 and a bottom plate 22 at its upper and lower ends, respectively. A longitudinal cooling pipe 3 passes between the top plate 21 and the bottom plate 22. Multiple cooling pipes 3 are arranged parallel to each other, and a partition plate 4 is sleeved between the multiple cooling pipes 3. The partition plate 4 has a hanging hole 41. In use, multiple coated workpieces can be hung through the hanging holes 41, and the workpieces can be radiated and cooled by the cooling pipes 3.

[0018] The top of the top plate 21 is provided with a liquid collection chamber 23. One end of multiple cooling pipes 3 is connected to the liquid collection chamber 23. The cooling pipes 3 include an upward pipe 301 and a downward pipe 302. The upward pipes 301 and the downward pipes 302 are arranged alternately. The ends of multiple upward pipes 301 away from the liquid collection chamber 23 are connected to an upper manifold 31. The ends of multiple downward pipes 302 away from the liquid collection chamber 23 are connected to a lower manifold 32. The upper manifold 31 and the lower manifold 32 are connected to the circulating cooling system through rotary joints.

[0019] The rotary joint includes an annular sleeve 5, which is fitted onto the outside of the through shaft 20. A sealing mechanism 51 is provided between the annular sleeve 5 and the through shaft 20. The through shaft 20 is a hollow cylindrical shape, with a radial through hole 201 at the position corresponding to the annular sleeve 5. A middle cavity 200 is provided in the inner cavity of the through shaft 20 at the position corresponding to the through hole 201. A connecting pipe 202 is provided at the bottom of the middle cavity 200. The rotary joint is connected to the circulating cooling system through the connecting pipe 202. The outer wall of the vacuum chamber 1 is provided with an outer cooling chamber 10. A water inlet 101 is provided at the top of the vacuum chamber 1, and a water outlet 102 is provided on one side of the bottom of the vacuum chamber 1. The water inlet 101 and the water outlet 102 are respectively connected to the circulating cooling system. In use, the rotary joint, water inlet 101, and water outlet 102 are connected to the circulating cooling system to fully water-cool the vacuum coating machine. The circulating cooling system here includes at least a water pump, a regulating valve, and a heat dissipation or refrigeration mechanism. Conventional technology will not be described in detail here.

[0020] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A water-cooling mechanism for a vacuum coating machine, comprising a vacuum chamber (1), wherein a rotating frame (2) is rotatably connected to the vacuum chamber (1) via a through shaft (20), characterized in that: The rotating frame (2) is provided with a top plate (21) and a bottom plate (22) at its upper and lower ends respectively. A longitudinal cooling pipe (3) is passed between the top plate (21) and the bottom plate (22). Multiple cooling pipes (3) are arranged parallel to each other. A partition (4) is sleeved between the multiple cooling pipes (3). A hanging hole (41) is provided in the partition (4). The top of the top plate (21) is provided with a liquid collection chamber (23). One end of multiple cooling pipes (3) is connected to the liquid collection chamber (23). The cooling pipes (3) include an upward pipe (301) and a downward pipe (302). The upward pipes (301) and the downward pipes (302) are arranged alternately. The ends of multiple upward pipes (301) away from the liquid collection chamber (23) are connected to an upper manifold (31). The ends of multiple downward pipes (302) away from the liquid collection chamber (23) are connected to a lower manifold (32). The upper manifold (31) and the lower manifold (32) are connected to the circulating cooling system through rotary joints.

2. The water-cooling mechanism for a vacuum coating machine according to claim 1, characterized in that: The rotary joint includes an annular sleeve (5), which is sleeved on the outside of the through shaft (20). A sealing mechanism (51) is provided between the annular sleeve (5) and the through shaft (20). The through shaft (20) is a hollow cylindrical shape. A radial through hole (201) is provided at the position corresponding to the annular sleeve (5). A middle cavity (200) is provided in the inner cavity of the through shaft (20) at the position corresponding to the through hole (201). A connecting pipe (202) is provided at the bottom of the middle cavity (200). The rotary joint is connected to the circulating cooling system through the connecting pipe (202).

3. The water-cooling mechanism for a vacuum coating machine according to claim 1, characterized in that: The outer wall of the vacuum chamber (1) is provided with an external cooling chamber (10), the top of the vacuum chamber (1) is provided with a water inlet (101), and the bottom side of the vacuum chamber (1) is provided with a water outlet (102). The water inlet (101) and the water outlet (102) are respectively connected to the circulating cooling system.

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