Vacuum coating equipment

Abstract

The utility model provides vacuum coating equipment, and belongs to the technical field of semiconductor production equipment, and the vacuum coating equipment comprises a cavity provided with a vacuum chamber; the cover plate is provided with an air inlet; and the gas pipeline comprises a first pipeline and a second pipeline, the first pipeline is arranged in the cavity and extends to the opening end of the vacuum cavity, the second pipeline is arranged on the cover plate and is connected to the gas inlet, and the gas pipeline is divided into the first pipeline and the second pipeline from the butt joint position of the cover plate and the cavity. The first pipeline and the second pipeline are aligned and communicated under the condition that the vacuum chamber is closed by the cover plate, and otherwise, the first pipeline and the second pipeline are disconnected in a staggered manner when the cover plate is opened, so that the process gas can be normally conveyed. And moreover, the first pipeline is arranged on the cavity, the second pipeline is arranged on the cover body, and rotation of the cover body cannot be hindered in the rotating opening and closing process of the cover body, so that the influence of an air path on opening and closing of the cover plate in a traditional structure can be effectively solved.

Description

Technical Field

[0001] This application belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment uses a vacuum chamber to provide the process environment. The substrate is placed inside the vacuum chamber, and the gas source is connected to the vacuum chamber through a gas path to deliver the process gas into the vacuum chamber for processing.

[0003] In existing technologies, a cover plate is rotatably mounted on the upper end of the vacuum chamber. The gas path connecting to the gas source uses a metal braided mesh tube that passes through the edge area of ​​the cover plate or bypasses the cover plate to extend above the cover plate and connects to the air inlet of the cover plate to deliver process gas into the vacuum chamber. This gas path design affects the rotation adjustment of the cover plate. Utility Model Content

[0004] This application aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, this application provides a vacuum coating apparatus capable of addressing the influence of the gas path on the opening and closing of the cover plate.

[0005] The vacuum coating apparatus according to an embodiment of this application includes:

[0006] A cavity, wherein the cavity is provided with a vacuum chamber with one end open;

[0007] A cover plate, which is rotatably disposed at the opening end of the vacuum chamber, and the cover plate is provided with an air inlet;

[0008] A gas pipeline is provided for connecting the air inlet and the gas source. The gas pipeline includes a first pipeline and a second pipeline. The first pipeline is disposed in the cavity and extends to the opening end of the vacuum chamber. The second pipeline is disposed on the cover plate and connected to the air inlet. When the cover plate closes the vacuum chamber, the first pipeline is connected to the second pipeline.

[0009] The vacuum coating apparatus according to the embodiments of this application has at least the following beneficial effects:

[0010] The vacuum coating equipment of this application divides the gas pipeline into a first pipeline and a second pipeline at the junction of the cover plate and the cavity. This ensures that when the vacuum chamber is closed, the first and second pipelines are aligned and connected; conversely, when the cover plate is open, the first and second pipelines are misaligned and disconnected, allowing for normal delivery of process gas. Furthermore, since the first pipeline is located on the cavity and the second pipeline is located on the cover plate, neither obstructs the rotation of the cover plate during its opening and closing. Therefore, this effectively solves the problem of the gas path affecting the opening and closing of the cover plate in traditional structures.

[0011] According to some embodiments of this application, the first conduit includes:

[0012] A first internal conduit is inserted into the cavity, and the first end of the first internal conduit is located at the end face of the opening end of the vacuum chamber.

[0013] A gas source pipeline, wherein the first end of the gas source pipeline is connected to the second end of the first built-in pipeline, and the second end of the gas source pipeline is connected to a gas source.

[0014] According to some embodiments of this application, the first built-in pipe is integrally formed with the cavity.

[0015] According to some embodiments of this application, the first pipeline further includes a first gas inlet block, which is disposed at the second end of the first built-in pipe. The first gas inlet block is provided with a first gas pipe connector, which is connected to the first built-in pipe, and the gas source pipe is connected to the gas pipe connector.

[0016] According to some embodiments of this application, an on / off valve is provided on the gas source pipeline.

[0017] According to some embodiments of this application, the vacuum coating equipment further includes a support portion connected to opposite sides of the bottom of the cavity, and the end of the gas source pipe away from the first built-in pipe extends between the two support portions.

[0018] According to some embodiments of this application, the second conduit includes:

[0019] The second internal conduit passes through the cover plate, with the first end of the second internal conduit located at the end of the cover plate facing the cavity, and the second end of the second internal conduit located at the end of the cover plate away from the cavity.

[0020] An intermediate pipe, which connects the second end of the second built-in pipe to the air inlet.

[0021] According to some embodiments of this application, the second built-in pipe is integrally formed with the cover plate.

[0022] According to some embodiments of this application, the second pipeline further includes a second gas inlet block, which is disposed at the second end of the second built-in pipe. The second gas inlet block is provided with a second gas pipe connector, which is connected to the second built-in pipe, and the intermediate pipe is connected to the second gas pipe connector.

[0023] According to some embodiments of this application, a first sealing ring and a second sealing ring are provided between the cavity and the cover plate. The first sealing ring is disposed at one end of the first pipeline near the cover plate, and the second sealing ring is disposed at the open end of the vacuum chamber. The first sealing ring is located in the area surrounded by the second sealing ring. When the cover plate closes the vacuum chamber, the first pipeline and the second pipeline are sealed together by the first sealing ring, and the cavity and the cover plate are sealed together by the second sealing ring.

[0024] Additional aspects and advantages of this application will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0025] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 This is a cross-sectional view of the cavity in this application;

[0027] Figure 2 This is a schematic diagram of one possible arrangement of the gas pipeline in this application;

[0028] Figure 3 This is a partial structural diagram of the first pipeline in this application;

[0029] Figure 4 This is a partial structural diagram of the second pipeline in this application;

[0030] Figure 5 This is a schematic diagram of an overall structure of this application;

[0031] Figure 6 This is a top view of one of the structures of this application. Detailed Implementation

[0032] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0033] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0034] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0035] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0036] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0037] Reference Figures 1 to 6 This application discloses a vacuum coating apparatus, including a cavity 100, a cover plate 200, and a gas pipeline. The cavity 100 has a vacuum chamber 101 with an open top. The cover plate 200 is rotatably disposed at the open end of the vacuum chamber 101, and has an air inlet 201. When the cover plate 200 rotates to close the open end of the vacuum chamber 101, the air inlet 201 connects to the vacuum chamber 101. The gas pipeline connects the air inlet 201 to a gas source. Specifically, the gas pipeline includes a first pipeline 300 and a second pipeline 400. The first pipeline 300 is disposed in the cavity 100 and extends to the open end of the vacuum chamber 101; while the second pipeline 400 is disposed on the cover plate 200 and connected to the air inlet 201. Furthermore, when the cover plate 200 closes the vacuum chamber 101, the first pipeline 300 connects to the second pipeline 400.

[0038] It is understandable that the first pipe 300 forms an outlet at one end of the cavity 100 that connects to the cover plate 200, while the second pipe 400 forms an inlet at one end of the cover plate 200 that connects to the cavity 100. When the cover plate 200 rotates to close the vacuum chamber 101, the outlet and the inlet are aligned, thereby realizing the connection between the first pipe 300 and the second pipe 400, and thus realizing the connection between the gas source and the air inlet 201.

[0039] In summary, the vacuum coating equipment of this application divides the gas pipeline into a first pipeline 300 and a second pipeline 400 at the junction of the cover plate 200 and the cavity 100. This ensures that when the cover plate 200 is closed in the vacuum chamber 101, the first pipeline 300 and the second pipeline 400 are aligned and connected. Conversely, when the cover plate 200 is open, the first pipeline 300 and the second pipeline 400 are misaligned and disconnected, allowing for normal delivery of process gas. Furthermore, since the first pipeline 300 is located on the cavity 100 and the second pipeline 400 is located on the cover, the opening and closing of the cover does not hinder its rotation, effectively solving the problem of the gas path affecting the opening and closing of the cover plate 200 in traditional structures.

[0040] Reference Figure 2 and Figure 3 In some embodiments of this application, the first pipeline 300 includes a first internal pipeline 301 and a gas source pipeline 302. The first internal pipeline 301 passes through the cavity 100, and its first end is located at the end face of the opening of the vacuum chamber 101. The first end of the gas source pipeline 302 is connected to the second end of the first internal pipeline 301, and its second end is connected to a gas source.

[0041] In this embodiment, by inserting a first built-in pipe 301 through the inner wall of the cavity 100, there are no gas pipes around the cavity 100, which does not affect the opening and closing rotation of the cover plate 200, nor does it hinder other structural settings. Furthermore, since the first built-in pipe 301 is inserted into the cavity 100 and its end is located at the end face of the opening end of the vacuum chamber 101, the alignment of the first pipe 300 and the second pipe 400 can be achieved by utilizing the positioning design between the cover plate 200 and the cavity 100. This improves the positioning accuracy of the first pipe 300 and the second pipe 400, eliminating the need for a separate positioning structure and simplifying the structural design.

[0042] Reference Figure 3 In some embodiments of this application, the first built-in pipe 301 is integrally formed with the cavity 100. That is, the first built-in pipe 301 is formed on the cavity 100, thereby simplifying the structural design.

[0043] Reference Figure 3In some embodiments of this application, the first pipeline 300 further includes a first gas inlet block 303, which is mounted on the cavity 100 by screws and covers the second end of the first internal pipeline 301. The first gas inlet block 303 is provided with a first air pipe connector 3031, which connects to the first internal pipeline 301. A third sealing ring 3032 is provided between the first gas inlet block 303 and the cavity 100 to ensure a tight seal between the first gas inlet block 303 and the second end of the first internal pipeline 301. A gas source pipeline 302 is connected to the air pipe connector.

[0044] If a connector is directly installed on the second end of the first built-in pipe 301 on the cavity 100 to install the gas source pipe 302, further processing of the cavity 100 is required, resulting in the first built-in pipe 301 occupying a large portion of the cavity 100. However, the structure of this embodiment, which uses a first gas inlet block 303 to connect the gas source pipe 302 and the first built-in pipe 301, simplifies the structural design and ensures the airtightness of the connection. This avoids further processing on the cavity 100 and prevents the first built-in pipe 301 from occupying a large portion of the cavity 100. The cavity 100 only needs to be machined into a single channel to form the first built-in pipe 301, resulting in a simple structure that is easy to manufacture.

[0045] Reference Figure 3 Considering that the end of the first pipeline 300 is open when the cover plate 200 is open, in some embodiments of this application, an on / off valve 304 is provided on the gas source pipeline 302. After processing is completed but before the cover plate 200 is opened, the first pipeline 300 can be closed by the on / off valve 304 to prevent the process gas in the first pipeline 300 from leaking into the air.

[0046] Furthermore, the on / off valve 304 is connected between the first gas inlet block 303 and the gas source pipe 302. This allows the on / off valve 304 to be fixed using the first gas inlet block 303, eliminating the need for a separate mounting structure. Simultaneously, since the first internal pipe 301 is located inside the cavity 100, the on / off valve 304 in this embodiment is positioned at the second end of the first internal pipe 301, being closest to its first end. This allows it to block the process gas in the first pipe 300 from its open position, while quickly delivering the process gas into the second pipe 400 when the cover plate 200 is closed again, thus ensuring efficient process gas delivery during subsequent processing.

[0047] Reference Figure 1 , Figure 2 and Figure 5In some embodiments of this application, the vacuum coating apparatus further includes a support portion 500, which is connected to opposite sides of the bottom of the cavity 100 to support the cavity 100. The end of the gas source pipe 302 away from the first built-in pipe 301 extends between the two support portions 500.

[0048] It is understandable that the first built-in pipe 301 is placed inside the cavity 100 to avoid affecting other structural settings and the opening and closing of the cover plate 200. Similarly, in this embodiment, by fixing the gas source pipe 302 between the support portions 500 on both sides, that is, fixing the gas source pipe 302 in the lower space of the cavity 100, it can also avoid obstructing or interfering with other structural designs. The gas source can be further placed below the cavity 100 for connection.

[0049] Reference Figure 2 and Figure 4 In some embodiments of this application, the second conduit 400 includes a second internal conduit 401 and an intermediate conduit 402. The second internal conduit 401 is vertically inserted into the cover plate 200, with its first end located at the lower end of the cover plate 200 and its second end located at the upper end of the cover plate 200. That is, the second internal conduit 401 is vertically continuous. The intermediate conduit 402 connects the second end of the second internal conduit 401 to the air inlet 201.

[0050] With the cover plate 200 closing the vacuum chamber 101, the second built-in pipe 401 and the first built-in pipe 301 are vertically aligned and connected. Alignment between the two is achieved through the positioning of the cover plate 200 and the chamber 100, ensuring positioning accuracy and simplifying structural design, eliminating the need for additional positioning structures. The intermediate pipe 402 is located above the cover plate 200. During the rotation of the cover plate 200, both the second built-in pipe 401 and the intermediate pipe 402 remain fixed relative to the cover plate 200, thus ensuring smooth delivery of process gas and preventing the gas path from affecting the opening and closing of the cover plate 200.

[0051] Reference Figure 4 Similarly, to simplify the structural design, the second built-in pipe 401 is integrally formed with the cover plate 200. That is, the second built-in pipe 401 is formed on the cover plate 200, for example, by drilling holes to form the second built-in pipe 401.

[0052] Reference Figure 4In some embodiments of this application, the second pipeline 400 further includes a second gas inlet block 403. The second gas inlet block 403 is mounted on the cover plate 200 by screws and covers the second end of the second internal pipeline 401. The second gas inlet block 403 is provided with a second gas pipe connector 4031, which connects to the second internal pipeline 401. A fourth sealing ring 4032 is provided between the second gas inlet block 403 and the cover plate 200 to ensure airtightness between the second gas pipe connector 4031 and the second internal pipeline 401. An intermediate pipeline 402 is connected to the second gas pipe connector 4031.

[0053] It is understandable that this embodiment achieves the connection between the intermediate pipe 402 and the second built-in pipe 401 by setting the second gas inlet block 403. This also helps to simplify the structural design, avoid processing too many structures on the cover plate 200, and also helps to ensure the airtightness of the connection of the intermediate pipe 402.

[0054] Reference Figure 4 In some embodiments of this application, a first sealing ring 102 and a second sealing ring 103 are provided between the cavity 100 and the cover plate 200. The first sealing ring 102 is disposed at one end of the first pipeline 300 near the cover plate 200, and the second sealing ring 103 is disposed at the open end of the vacuum chamber 101, with the first sealing ring 102 located within the area surrounded by the second sealing ring 103. When the cover plate 200 closes the vacuum chamber 101, the first pipeline 300 and the second pipeline 400 are sealed together by the first sealing ring 102, and the cavity 100 and the cover plate 200 are sealed together by the second sealing ring 103.

[0055] With the structural arrangement of this embodiment, the first pipe 300 and the second pipe 400 can be effectively sealed by the first sealing ring 102, while the vacuum chamber 101 is effectively sealed by the second sealing ring 103. Furthermore, since the first sealing ring 102 is located inside the second sealing ring 103, the first pipe 300 and the second pipe 400 can achieve a double seal through the second sealing ring 103, resulting in a reliable sealing effect.

[0056] In summary, the vacuum coating equipment of this application proposes a simpler air intake scheme, which is convenient for air distribution, has a simple appearance, and has a double seal with good air tightness, which can effectively solve the influence of the air path on the opening and closing of the cover plate 200.

[0057] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A vacuum coating equipment, characterized in that, include: A cavity, wherein the cavity is provided with a vacuum chamber with one end open; A cover plate, which is rotatably disposed at the opening end of the vacuum chamber, and the cover plate is provided with an air inlet; A gas pipeline is provided for connecting the air inlet and the gas source. The gas pipeline includes a first pipeline and a second pipeline. The first pipeline is disposed in the cavity and extends to the opening end of the vacuum chamber. The second pipeline is disposed on the cover plate and connected to the air inlet. When the cover plate closes the vacuum chamber, the first pipeline is connected to the second pipeline.

2. The vacuum coating equipment according to claim 1, characterized in that, The first pipeline includes: A first internal conduit is inserted into the cavity, and the first end of the first internal conduit is located at the end face of the opening end of the vacuum chamber. A gas source pipeline, wherein the first end of the gas source pipeline is connected to the second end of the first built-in pipeline, and the second end of the gas source pipeline is connected to a gas source.

3. The vacuum coating equipment according to claim 2, characterized in that, The first built-in pipe is integrally formed with the cavity.

4. The vacuum coating equipment according to claim 3, characterized in that, The first pipeline also includes a first gas inlet block, which is disposed at the second end of the first built-in pipeline. The first gas inlet block is provided with a first gas pipe connector, which is connected to the first built-in pipeline. The gas source pipeline is connected to the gas pipe connector.

5. The vacuum coating equipment according to claim 2, characterized in that, An on / off valve is installed on the gas source pipeline.

6. The vacuum coating equipment according to claim 2, characterized in that, The vacuum coating equipment also includes a support portion connected to opposite sides of the bottom of the cavity, and the end of the gas source pipe away from the first built-in pipe extends between the two support portions.

7. The vacuum coating equipment according to claim 1, characterized in that, The second pipeline includes: The second internal conduit passes through the cover plate, with the first end of the second internal conduit located at the end of the cover plate facing the cavity, and the second end of the second internal conduit located at the end of the cover plate away from the cavity. An intermediate pipe, which connects the second end of the second built-in pipe to the air inlet.

8. The vacuum coating equipment according to claim 7, characterized in that, The second built-in pipe is integrally formed with the cover plate.

9. The vacuum coating equipment according to claim 8, characterized in that, The second pipeline also includes a second gas inlet block, which is disposed at the second end of the second built-in pipe. The second gas inlet block is provided with a second gas pipe connector, which is connected to the second built-in pipe. The intermediate pipe is connected to the second gas pipe connector.

10. The vacuum coating equipment according to claim 1, characterized in that, A first sealing ring and a second sealing ring are provided between the cavity and the cover plate. The first sealing ring is located at the end of the first pipeline near the cover plate, and the second sealing ring is located at the opening end of the vacuum chamber. The first sealing ring is located within the area surrounded by the second sealing ring. When the cover plate closes the vacuum chamber, the first pipeline and the second pipeline are sealed together by the first sealing ring, and the cavity and the cover plate are sealed together by the second sealing ring.

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