Graphite heating infrared hot spot tracking system

Abstract

The utility model relates to the field of advanced manufacturing and automation, in particular to a thermal field system of a single crystal furnace and a polycrystalline furnace. An existing single polycrystalline furnace is difficult to keep the uniformity of a thermal field in the working process, a graphite heating infrared hot spot tracking system comprises graphite heaters arranged at the bottom of the single polycrystalline furnace, the graphite heaters are connected to a power supply through an electric control switch, and the electric control switch is provided with a control port connected with a computer host; an observation window is further arranged, an infrared imager is arranged at the observation window, and the infrared imager faces the in-furnace thermal field; the infrared temperature imager is provided with a port connected with the computer host, and the infrared temperature imager is connected with the computer host through the port. The computer host receives a temperature image of the infrared temperature imager, analyzes and searches the low-temperature area, and improves the temperature of the low-temperature area by improving the power output power of the graphite heater where the low-temperature area is located, so that the uniformity of the temperature of the thermal field is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to advanced manufacturing and automation field, concretely relates to single polycrystal furnace's thermal field system. BACKGROUND

[0002] With the progress of science and technology, the quality requirement of silicon single crystal is higher and higher in production and application, and among many factors influencing the quality of single crystal, the uniformity of the thermal field of single polycrystal furnace is crucial. However, the current single polycrystal furnace is difficult to maintain the uniformity of the thermal field during the working process, which affects the high quality demand of silicon single crystal. SUMMARY

[0003] The utility model discloses a graphite heating infrared hot spot tracking system to solve at least one of the above technical problems.

[0004] The technical problem solved by the utility model can be solved by the following technical scheme:

[0005] Graphite heating infrared hot spot tracking system, including a single polycrystal furnace and computer host, still including the graphite heater of arrangement in the bottom of single polycrystal furnace, and the graphite heater of arrangement forms heating area array;

[0006] The graphite heater includes two terminal ends arranged at both ends, and at least one terminal end is connected to the power supply through the electric control switch, and the electric control switch has a control port connected to the computer host;

[0007] Double-row graphite resistance strips are arranged between the two terminal ends, and the double-row graphite resistance strips and the two terminal ends are connected by an integral forming structure;

[0008] The graphite resistance strip adopts a strip structure with at least two Z-shaped bends;

[0009] The Z-shaped bend includes a strip portion and an arc portion;

[0010] The two strip portions are connected to both ends of the arc portion;

[0011] An observation window is formed on the single polycrystal furnace, and the observation window adopts a double-layer quartz glass window with internal vacuumization;

[0012] An installation bracket is installed at the observation window;

[0013] A metal pipe is fixed on the installation bracket as an observation pipe, and a light shielding layer is covered on the inner side wall of the observation pipe, and the observation pipe faces the observation window but has a gap with the observation window;

[0014] The infrared temperature imager is fixed on the mounting bracket, and a camera of the infrared temperature imager extends into the observation tube and faces the heating area array through the observation tube.

[0015] The infrared temperature imager has a port connected to a computer host, and the infrared temperature imager is connected to the computer host through the port.

[0016] The above design provides a hardware basis for realizing hotspot tracking and temperature uniformity adjustment as a whole.

[0017] In the above design, the observation window is provided with two layers of high-temperature-resistant quartz glass, and a vacuum is drawn between the two layers of glass for heat insulation to prevent high-temperature damage to the infrared temperature imager. The observation window is opened in the upper part of the single multicrystal furnace, and preferably in the top part. Thus, the structure and alloy in the furnace are avoided from shielding the camera of the infrared temperature imager.

[0018] In the above design, compared with using a temperature sensor to detect the temperature, the infrared temperature imager is used to obtain a temperature distribution map of the heating area in the single multicrystal furnace.

[0019] The infrared temperature imager transmits information to the computer host, and the computer host performs image analysis on the temperature distribution map to find a low-temperature area.

[0020] The infrared temperature imager detects the temperature distribution in the furnace, and not only the measurement result is timely and accurate, but also the surface temperature of the single multicrystal silicon workpiece in the single multicrystal furnace can be measured. When a low-temperature area is found in the surface temperature of the single multicrystal silicon workpiece, the computer host can control the electric control switch connected to the graphite heater in the corresponding area to increase the power output of the power supply, raise the temperature of the low-temperature area, and adjust to a state of uniform temperature.

[0021] In the above design, since the temperature in the single multicrystal furnace is often higher than room temperature, the high temperature causes the infrared temperature imager fixed on the side wall of the single multicrystal furnace to be easily damaged and aged. The position of the infrared temperature imager and the connection relationship with the single multicrystal furnace are optimized in the utility model, and on the basis of ensuring that the measurement range is as large as possible, the front end of the observation tube is provided with high-temperature-resistant glass and a gap of 2cm-15cm is reserved between the observation tube and the observation window, which can effectively improve the influence of high temperature on the service life of the infrared temperature imager.

[0022] The front end of the observation tube is connected to the furnace body through a rotating shaft, so that the observation tube can be rotated to adjust the observation angle of the infrared temperature imager. In addition, the light shielding layer in the observation tube can reduce the interference of scattered light, so that the temperature measurement result of the utility model is more accurate.

[0023] The infrared temperature imager can adopt a wide-angle infrared temperature imager to improve the observation area, and preferably, if there is an observation blind area of one infrared temperature imager, preferably, 2-3 observation windows can be arranged on the furnace top and the infrared temperature imagers are arranged to make up for the blind area problem.

[0024] In the above design, the graphite heater is arranged at the bottom of the single polycrystal furnace, the temperature of the dispersedly arranged graphite heater can be individually controlled, which provides a hardware basis for finding a low-temperature area for hotspot tracking and low-temperature compensation to keep the thermal field balanced. The graphite heater is not restricted by the size of raw materials, is easy to process, and can save manufacturing costs. In addition, when the graphite heater is damaged due to collision, oxidation, aging, etc. during use, the damaged graphite heater can be replaced, which is convenient for maintenance and reduces the use cost.

[0025] The above design provides a hardware basis for the whole realization of hotspot tracking and temperature balance adjustment.

[0026] Further, a light transmission port is arranged on the single polycrystal furnace, and the light transmission port adopts a double-layer quartz glass window with internal vacuumization;

[0027] A heat supplement system is mounted on the light transmission port;

[0028] The heat supplement system comprises a holder and a carbon dioxide laser;

[0029] The holder adopts a holder with a control port for connecting with a computer host;

[0030] A metal tube is fixed on the holder as a transmitting tube, a reflective layer is coated on the inner side wall of the transmitting tube, an expansion lens group is arranged in the transmitting tube, and the transmitting tube faces the light transmission port but has a gap with the light transmission port;

[0031] A carbon dioxide laser is also fixed on the holder, the emitting head of the carbon dioxide laser extends into the transmitting tube, the expansion lens group in the transmitting tube is located between the emitting head and the light transmission port, and the laser emitted after expansion by the expansion lens group is directed to the heating area array;

[0032] The control electric switch of the carbon dioxide laser adopts a control electric switch with a communication function with the computer host.

[0033] In the above design, the carbon dioxide laser is fixed on the gimbal. The computer host analyzes the image from the infrared imager to locate the low-temperature area. Once the low-temperature area is identified, the gimbal is adjusted left, right, up, and down so that the laser beam emitted by the carbon dioxide laser mounted on the gimbal is directed towards the low-temperature area. The laser beam is used to irradiate the low-temperature area for temperature compensation. Compared to adjusting the temperature control power supply of the corresponding area of ​​the low-temperature area through the computer host, the advantage is that the carbon dioxide laser can precisely adjust the local temperature to improve the uniformity of the thermal field and improve the manufacturing quality of monocrystalline and polycrystalline silicon.

[0034] In the above design, the light-transmitting opening is equipped with high-temperature resistant double-layered quartz glass to isolate the high temperature inside the furnace, preventing damage to the carbon dioxide laser. The light-transmitting opening can be located on the furnace wall or on the furnace top. When located on the furnace top, the light-transmitting opening and the observation window can be combined into one.

[0035] In the above design, the transmitting tube can effectively mitigate the impact of high temperatures on the lifespan of the carbon dioxide laser. Furthermore, the reflective layer coated on the inner wall of the transmitting tube reduces laser loss, resulting in better temperature compensation of this invention.

[0036] Furthermore, at least three light-transmitting openings are provided, and each light-transmitting opening is equipped with a heat replenishment system.

[0037] In the above design, three light-transmitting ports are set up, and each light-transmitting port is equipped with a heating system. The advantage of this is that the carbon dioxide laser with a single heating system has an irradiation blind zone. By increasing to three heating systems, the blind zone problem can be solved.

[0038] Furthermore, the graphite resistance strip has at least three Z-shaped bends with different lengths in the strip section, which are classified according to length as short Z-shaped bend, medium Z-shaped bend, and long Z-shaped bend;

[0039] The two graphite resistor strips are set in opposite directions;

[0040] One of the graphite resistor strips is arranged from left to right with short Z-shaped bends, medium Z-shaped bends, and long Z-shaped bends;

[0041] Another graphite resistor bar is arranged from left to right with long Z-shaped bends, medium Z-shaped bends, and short Z-shaped bends;

[0042] The short Z-shaped bends and long Z-shaped bends in one graphite resistor strip are arranged close together with the long Z-shaped bends and short Z-shaped bends in another graphite resistor strip, respectively, with gaps between them.

[0043] The two Z-shaped bends in the two graphite resistor strips are arranged far apart with gaps, and there is a window between the two Z-shaped bends.

[0044] In the above design, there is a gap between the two Z-shaped bends in the two resistor bars. This has the advantage of reducing malfunctions caused by excessively rapid local heating or uneven heating of the heated object. The Z-shaped bends of varying lengths arranged side by side have the advantage of weakening the induced magnetic field at various points, ensuring that the object in the heater is heated evenly.

[0045] Further optimization involves the distance between the two Z-shaped bends of the two graphite resistor strips being 250mm to 270mm, and the overall length of the Z-shaped bend in each graphite resistor strip being 175mm to 190mm, forming a window with a width of 250mm to 270mm and a length of 165mm to 175mm.

[0046] The beneficial effect of the above design is that it reduces the problem of excessive heat concentration caused by excessively rapid local heating and uneven heating.

[0047] In existing technologies, temperature sensors are generally used to detect temperature changes inside monocrystalline and polycrystalline furnaces. These temperature sensors are mostly fixed on the inner side wall of the furnace. This technical solution has the following problems: on the one hand, there is a difference between the thermal conductivity of the inner side wall of the furnace and the temperature of the air inside the furnace, which leads to untimely and inaccurate actual measurement results; on the other hand, it is impossible to measure the surface temperature of monocrystalline and polycrystalline silicon workpieces inside the furnace.

[0048] In this invention, an infrared temperature imager is used to detect temperature changes inside a monocrystalline / polycrystalline furnace. Its advantages are that the infrared temperature imager not only provides timely and accurate temperature measurements, but also measures the surface temperature of monocrystalline / polycrystalline silicon workpieces inside the furnace. When a low-temperature zone is detected inside the furnace, the computer host can control the electrical control switch connected to the graphite heater in the corresponding zone to increase the power output, raise the temperature of the low-temperature zone, and adjust it to a uniform temperature state.

[0049] The method of increasing the output power of the power supply corresponding to the low-temperature zone by controlling the computer host to raise the temperature has the problem of response delay. However, the advantage of using a carbon dioxide laser to irradiate the low-temperature zone for supplemental heating is that it can precisely adjust the local temperature and raise the temperature rapidly. Attached Figure Description

[0050] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0051] Figure 1 This is a schematic diagram of the present invention;

[0052] Figure 2 This is a schematic diagram of the graphite heater structure of this utility model.

[0053] Symbol explanation:

[0054] 1. Heating area array; 2. Light transmission port; 3. Gimbal; 4. Carbon dioxide laser; 5. Emitting tube; 6. Wiring terminal; 7. Short Z-shaped bend; 8. Medium Z-shaped bend; 9. Long Z-shaped bend. Detailed Implementation

[0055] To make the above-mentioned objectives, features and advantages of this utility model more readily understood, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0056] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0057] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0058] Furthermore, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in an embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single embodiment or an embodiment selectively excluded from other embodiments.

[0059] Reference Figure 1 , Figure 2 As shown, the graphite heating infrared hotspot tracking system includes a single-crystal furnace and a computer host, as well as graphite heaters arranged at the bottom of the single-crystal furnace, the arranged graphite heaters forming a heating area array 1.

[0060] The graphite heater includes two terminals 6 located at both ends, and at least one terminal 6 is connected to a power source via an electronic control switch, the electronic control switch having a control port connected to a computer host.

[0061] A double row of graphite resistor strips is arranged between the two terminals 6, and the double row of graphite resistor strips and the two terminals 6 adopt an integral forming connection structure.

[0062] The graphite resistor strip adopts a strip structure with at least two Z-shaped bends;

[0063] The Z-shaped bend includes a strip-shaped portion and an arc-shaped portion;

[0064] Two strip-shaped sections are connected to the two ends of an arc-shaped section;

[0065] The single-crystal and polycrystalline furnaces are equipped with observation windows, which are double-layered quartz glass windows with internal vacuum.

[0066] A mounting bracket is installed at the observation window;

[0067] A metal tube is fixed on the mounting bracket as an observation tube. The inner wall of the observation tube is covered with a light-shielding layer. The observation tube faces the observation window but there is a gap between the observation tube and the observation window.

[0068] It also includes an infrared temperature imager, which is fixed on a mounting bracket. The camera of the infrared temperature imager extends into the observation tube, and through the observation tube, the camera of the infrared temperature imager faces the heating area array 1.

[0069] The infrared temperature imager has a port for connecting to a computer host, and the infrared temperature imager connects to the computer host through the port.

[0070] The above design provides the hardware foundation for achieving overall hotspot tracking and temperature equalization.

[0071] In this embodiment, the observation window is fitted with two layers of high-temperature resistant quartz glass, with a vacuum between the two layers for insulation, preventing high-temperature damage to the infrared temperature imager. The observation window is located in the upper part of the monocrystalline / polycrystalline furnace, preferably at the top. This avoids the furnace structure and alloys obstructing the infrared temperature imager's view.

[0072] In this embodiment, instead of using a temperature sensor to detect the temperature, an infrared temperature imager is used to obtain the temperature distribution map of the hot zone inside the single-crystal furnace.

[0073] The infrared temperature imager transmits information to the computer host, which then performs image analysis on the temperature distribution map to locate low-temperature areas.

[0074] Its beneficial effect is that the infrared temperature imager detects the temperature distribution inside the furnace, and the measurement results are timely and accurate. It can also measure the surface temperature of monocrystalline and polycrystalline silicon workpieces inside the monocrystalline and polycrystalline furnace. When a low-temperature zone is found on the surface of the monocrystalline and polycrystalline silicon workpiece, the computer host can control the electronic control switch connected to the graphite heater in the corresponding area to increase the power output, raise the temperature of the low-temperature zone, and adjust it to a uniform temperature state.

[0075] In this embodiment, since the temperature inside the monocrystalline / polycrystalline furnace is often higher than room temperature, the higher temperature makes the infrared temperature imager fixed to the side wall of the furnace prone to damage and aging. This invention optimizes the position of the infrared temperature imager and its connection to the monocrystalline / polycrystalline furnace. While ensuring the measurement range is as large as possible, the front end of the observation tube is equipped with high-temperature resistant glass, and a gap of 2cm-15cm is maintained between the glass and the observation window, which can effectively improve the impact of high temperature on the lifespan of the infrared temperature imager.

[0076] The front end of the observation tube is connected to the furnace body via a rotating shaft, allowing the observation tube to rotate and the observation angle of the infrared temperature imager to be adjusted. Furthermore, the light-shielding layer inside the observation tube reduces interference from scattered light, resulting in more accurate temperature measurement results.

[0077] Infrared temperature imagers can be wide-angle infrared temperature imagers to increase the observation area. Preferably, if an infrared temperature imager has a blind spot, two to three observation windows can be set on the furnace top and infrared temperature imagers can be installed there to compensate for the blind spot problem.

[0078] In this embodiment, graphite heaters are arranged at the bottom of the single-crystal and polycrystalline furnace. The temperature of the dispersed graphite heaters can be individually controlled, providing a hardware basis for low-temperature compensation after hot spot tracking detects low-temperature zones, thereby maintaining a balanced thermal field. The advantages are that the graphite heaters are not limited by the size of the raw materials, are easy to process, and can save manufacturing costs. In addition, when graphite heaters are damaged due to collisions, oxidation, aging, etc. during use, local graphite heaters can be replaced, making maintenance convenient and reducing operating costs.

[0079] The above design provides the hardware foundation for achieving overall hotspot tracking and temperature equalization.

[0080] Reference Figure 1 As shown, a light-transmitting opening 2 is provided on the single-crystal furnace, and the light-transmitting opening 2 adopts a double-layered quartz glass window with internal vacuum.

[0081] A heating system is installed on the light-transmitting opening 2;

[0082] The heating system includes a gimbal 3 and a carbon dioxide laser 4;

[0083] The gimbal 3 is a gimbal 3 with a control port for connecting to a computer host.

[0084] A metal tube is fixed on the gimbal 3 as a transmitter tube 5. The inner wall of the transmitter tube 5 is coated with a reflective layer. The transmitter tube 5 is equipped with a beam expander lens group. The transmitter tube 5 faces the light transmission port 2 but there is a gap between it and the light transmission port 2.

[0085] A carbon dioxide laser 4 is also fixed on the gimbal 3. The emitting head of the carbon dioxide laser 4 extends into the emitting tube 5. The beam expanding lens group inside the emitting tube 5 is located between the emitting head and the light transmission port 2. The laser emission direction after beam expansion by the beam expanding lens group is towards the heating area array 1.

[0086] The control switch for the carbon dioxide laser 4 is a control switch with communication function with the computer host.

[0087] In this embodiment, the carbon dioxide laser 4 is fixed on the gimbal 3. The computer host analyzes the image from the infrared imager to locate the low-temperature area. Once the low-temperature area is determined to exist, the computer host controls the gimbal 3 to adjust left, right, up, and down so that the laser beam emitted by the carbon dioxide laser 4 mounted on the gimbal 3 is directed towards the low-temperature area. The laser beam is used to irradiate the low-temperature area for temperature compensation. Compared with adjusting the temperature control power supply of the corresponding area of ​​the low-temperature area through the computer host, the advantage is that the carbon dioxide laser 4 can accurately adjust the local temperature to improve the uniformity of the thermal field and improve the manufacturing quality of monocrystalline and polycrystalline silicon.

[0088] In this embodiment, the light-transmitting opening 2 is equipped with high-temperature resistant double-layered quartz glass to isolate the high temperature inside the furnace, preventing damage to the carbon dioxide laser 4. The light-transmitting opening 2 can be located on the furnace wall or on the furnace top. When located on the furnace top, the light-transmitting opening 2 and the observation window can be combined into one.

[0089] In this embodiment, the emitting tube 5 can effectively mitigate the impact of high temperature on the lifespan of the carbon dioxide laser 4. Furthermore, the reflective layer coated on the inner wall of the emitting tube 5 reduces laser loss, resulting in a better temperature compensation effect.

[0090] Furthermore, at least three light-transmitting openings 2 are provided, and a heating system is provided at each light-transmitting opening 2.

[0091] In this embodiment, three light-transmitting ports 2 are provided, and each light-transmitting port 2 is equipped with a heating system. The beneficial effect is that the carbon dioxide laser 4 of a single heating system has an irradiation blind zone. By increasing to three heating systems, the blind zone problem can be solved.

[0092] Reference Figure 2 As shown, the graphite resistor strip has at least three Z-shaped bends with different lengths in the strip section, which are divided into short Z-shaped bend 7, medium Z-shaped bend 8, and long Z-shaped bend 9 according to length;

[0093] The two graphite resistor strips are set in opposite directions;

[0094] One of the graphite resistor strips is arranged from left to right as follows: 7. Short Z-shaped bend; 8. Medium Z-shaped bend; 9. Long Z-shaped bend.

[0095] Another graphite resistor bar is arranged from left to right as follows: 9 long Z-shaped bends, 8 medium Z-shaped bends, and 7 short Z-shaped bends.

[0096] The short Z-shaped bend 7 and the long Z-shaped bend 9 in one graphite resistor strip are arranged close together with the long Z-shaped bend 9 and the short Z-shaped bend 7 in another graphite resistor strip, respectively, with gaps between them.

[0097] The two Z-shaped bends 8 in the two graphite resistor strips are arranged far apart with gaps, and there is a window between the two Z-shaped bends 8.

[0098] In this embodiment, there is a gap between the two Z-shaped bends 8 in the two resistor bars. The beneficial effect of this is to reduce malfunctions caused by excessively rapid local heating or uneven heating of the heated object. The Z-shaped bends of varying lengths arranged side by side have the beneficial effect of weakening the induced magnetic field at various points, ensuring that the object in the heater is heated evenly.

[0099] Further optimization involves the distance between the two Z-shaped bends 8 of the two graphite resistor strips being 250mm to 270mm, and the overall length of the Z-shaped bend 8 in each graphite resistor strip being 175mm to 190mm, forming a window with a width of 250mm to 270mm and a length of 165mm to 175mm.

[0100] In this embodiment, the beneficial effect is to reduce the problem of excessive heat concentration caused by excessively rapid local heating and uneven heating.

[0101] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments may be described, i.e., those features that are not relevant to the currently considered best mode for carrying out the present invention, or those features that are not relevant to implementing the present invention.

[0102] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those of ordinary skill in the art who benefit from this disclosure, the development effort will be a routine task in design, manufacturing, and production without requiring extensive experimentation.

[0103] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A graphite heating infrared hotspot tracking system, comprising a single-crystal furnace and a computer host, characterized in that, It also includes graphite heaters arranged at the bottom of the single and polycrystalline furnaces, forming an array of heating zones; The graphite heater includes two terminals located at both ends, at least one of which is connected to a power source via an electronic control switch, the electronic control switch having a control port connected to a computer host. A double row of graphite resistor strips is arranged between the two terminals, and the double row of graphite resistor strips and the two terminals adopt an integral forming connection structure; The graphite resistor strip adopts a strip structure with at least two Z-shaped bends; The Z-shaped bend includes a strip-shaped portion and an arc-shaped portion; Two strip-shaped sections are connected to the two ends of an arc-shaped section; The single-crystal and polycrystalline furnaces are equipped with observation windows, which are double-layered quartz glass windows with internal vacuum. A mounting bracket is installed at the observation window; A metal tube is fixed on the mounting bracket as an observation tube. The inner wall of the observation tube is covered with a light-shielding layer. The observation tube faces the observation window but there is a gap between the observation tube and the observation window. It also includes an infrared temperature imager, which is fixed on a mounting bracket. The camera of the infrared temperature imager extends into the observation tube, and the camera of the infrared temperature imager faces the array of heated areas through the observation tube. The infrared temperature imager has a port for connecting to a computer host, and the infrared temperature imager connects to the computer host through the port.

2. The graphite heating infrared hotspot tracking system according to claim 1, characterized in that: The single-crystal and polycrystalline furnaces are equipped with light-transmitting openings, which are made of double-layered quartz glass windows with internal vacuum. A heat exchange system is installed on the light-transmitting opening; The heating system includes a gimbal and a carbon dioxide laser; The gimbal is a gimbal with a control port for connecting to a computer host. A metal tube is fixed on the gimbal as a transmitter tube. The inner wall of the transmitter tube is coated with a reflective layer. A beam expander lens group is installed inside the transmitter tube. The transmitter tube faces the light-transmitting port but there is a gap between the transmitter tube and the light-transmitting port. A carbon dioxide laser is also fixed on the gimbal. The emitting head of the carbon dioxide laser extends into the emitting tube. The beam expanding lens group inside the emitting tube is located between the emitting head and the light-transmitting port. The laser emission direction after beam expansion by the beam expanding lens group is towards the heating area array. The control switch for the carbon dioxide laser is a control switch with communication function with the computer host.

3. The graphite heating infrared hotspot tracking system according to claim 2, characterized in that: The light-transmitting openings are provided with at least three, and each light-transmitting opening is equipped with a heat replenishment system.

4. The graphite heating infrared hotspot tracking system according to claim 1, characterized in that, The graphite resistor strip has at least three Z-shaped bends of different lengths, which are classified according to length as short Z-shaped bend, medium Z-shaped bend, and long Z-shaped bend; The two graphite resistor strips are set in opposite directions; One of the graphite resistor strips is arranged from left to right with short Z-shaped bends, medium Z-shaped bends, and long Z-shaped bends; Another graphite resistor bar is arranged from left to right with long Z-shaped bends, medium Z-shaped bends, and short Z-shaped bends; The short Z-shaped bends and long Z-shaped bends in one graphite resistor strip are arranged close together with the long Z-shaped bends and short Z-shaped bends in another graphite resistor strip, respectively, with gaps between them. The two Z-shaped bends in the two graphite resistor strips are arranged far apart with gaps, and there is a window between the two Z-shaped bends.

5. The graphite heating infrared hotspot tracking system according to claim 4, characterized in that, The distance between the two Z-shaped bends of the two graphite resistor strips is 250mm to 270mm. The overall length of the Z-shaped bend in each graphite resistor strip is 175mm to 190mm, forming a window with a width of 250mm to 270mm and a length of 165mm to 175mm.

Images