Roller gap measuring device and measuring equipment
By designing a roller gap measuring device, the roller gap can be accurately measured, solving the problem of wafer damage or microcracks caused by excessively small roller brush gaps, and improving the safety and efficiency of the wafer cleaning process.
Patent Information
- Application Number
- CN202423221052.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-12-25
AI Technical Summary
In the wafer manufacturing process, the problem of wafer breakage or microcracks caused by excessively small gaps between roller brushes.
Design a roller clearance measuring device, including a housing, a fixed shaft, a measuring shaft, and a measuring instrument. The measuring shaft holds the roller and detects the deflection angle, calculates the roller clearance, and displays the measurement results using a display unit to ensure that the clearance meets the requirements.
It achieves high-precision measurement of roller gap, avoiding wafer damage or microcracks during cleaning and improving the cleaning efficiency of the cleaning module.
Smart Images
Figure CN223512728U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor equipment especially relates to a rolling wheel gap measuring device and measuring equipment. BACKGROUND
[0002] In the wafer manufacturing process, it needs to pass through many times of surface cleaning. The traditional mode utilizes the rolling wheel brush to remove the metal ion, atom, organic matter and particulate matter and other pollutants attached to the wafer surface. The two rolling wheel brushes in the cleaning module need to adjust the predetermined gap and angle, so as to avoid the rolling wheel brush in the process of cleaning the wafer due to the too small gap and the wafer is pressed to cause damage or hidden crack. SUMMARY
[0003] The utility model discloses a kind of rolling wheel gap measuring device and measuring equipment, the gap between two rolling wheel brushes can be accurately measured, avoid the rolling wheel brush in the process of cleaning the wafer due to the too small gap and the wafer is pressed to cause damage or hidden crack.
[0004] In the first aspect, the utility model provides a kind of rolling wheel gap measuring device, comprising:
[0005] Shell;
[0006] Fixed shaft, the fixed shaft is located on the shell;
[0007] Two measuring shafts, one end of each measuring shaft is rotatably connected with the fixed shaft, and the other end is used to be connected with rolling wheel;
[0008] Two measuring devices, two measuring devices are installed on the shell;And two measuring devices and two measuring shafts are one-to-one correspondingly arranged;The measuring device is used to measure the deflection angle of the measuring shaft;
[0009] Display part, the display part is located on the shell, and is used to display the gap between the two rolling wheels measured.
[0010] In optional implementation, the shell is equipped with mounting groove, and the measuring device is located in the mounting groove.
[0011] In optional implementation, the end of the measuring shaft close to the shell is equipped with mounting hole, and the mounting hole is sleeved on the fixed shaft, to realize the rotation of the measuring shaft around the fixed shaft.
[0012] In optional implementation, the end of the measuring shaft away from the shell is equipped with clamping groove, and the clamping groove is used to hold the rolling wheel.
[0013] In optional implementation, the clamping groove is in the shape of circular arc.
[0014] In an optional embodiment, the measuring axis is provided with an identification part, and the measuring instrument detects the offset angle of the identification part.
[0015] In an optional embodiment, the measuring device is positioned opposite to the fixed axis.
[0016] In an optional embodiment, the display unit includes a digital display screen.
[0017] In an optional embodiment, the housing is provided with a through hole.
[0018] Secondly, the present invention provides a measuring device, including a controller and a roller clearance measuring device as described in any of the foregoing embodiments, wherein the controller is connected to the measuring device and the display unit respectively.
[0019] The roller clearance measuring device and measuring equipment provided in this embodiment of the utility model have the following advantages:
[0020] The roller gap measuring device provided in this embodiment of the invention comprises two measuring shafts and two measuring instruments mounted on a housing. One end of each measuring shaft holds a roller, while the other end can rotate relative to the housing. Each measuring shaft holds one of the two rollers. The measuring instruments detect the deflection angle of the measuring shafts, thereby calculating the gap between the two rollers. This high measurement accuracy ensures that the gap between the two rollers meets requirements, preventing excessive pressure on the wafer during wafer surface cleaning, thus preventing wafer damage or microcracks during cleaning and improving the cleaning efficiency of the cleaning module.
[0021] The measuring device provided in this embodiment of the present invention includes the roller gap measuring device described above, which can accurately measure the gap between two rollers. The measurement results are accurate and reliable, which helps to improve the cleaning efficiency of the cleaning module and can also prevent the wafer from being damaged or cracked during the cleaning process. Attached Figure Description
[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0023] Fig. 1 This is a schematic diagram of the roller clearance measuring device and roller clamping structure provided in an embodiment of the present invention;
[0024] Fig. 2 A schematic diagram of the disassembled structure of the roller clearance measuring device provided in this embodiment of the utility model;
[0025] Fig. 3 A schematic diagram of the housing of the roller clearance measuring device provided in this embodiment of the utility model;
[0026] Fig. 4 A cross-sectional structural diagram of the housing of the roller clearance measuring device provided in this embodiment of the utility model.
[0027] Icons: 100-Roller clearance measuring device; 101-Roller; 110-Housing; 111-Fixed shaft; 112-Mounting groove; 113-Through hole; 120-Measuring shaft; 121-Mounting hole; 122-Slot; 130-Measuring instrument; 140-Display unit. Detailed Implementation
[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0029] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0032] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0033] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0034] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0035] Combination Figs. 1 to 4 This utility model provides a roller gap measuring device 100 for accurately measuring the gap between two rollers 101. This roller gap measuring device 100 is not only suitable for measuring the gap between two rollers 101 brushes in a cleaning module, but also for measuring the gap between two columns in other fields or application scenarios.
[0036] The roller gap measuring device 100 includes a housing 110, a fixed shaft 111, two measuring shafts 120, two measuring instruments 130, and a display unit 140. The fixed shaft 111 is mounted on the housing 110. One end of each measuring shaft 120 is rotatably connected to the fixed shaft 111, and the other end is used to connect to a roller 101. The two measuring instruments 130 are mounted on the housing 110; and each measuring instrument 130 corresponds to one measuring shaft 120; the measuring instruments 130 are used to measure the deflection angle of the measuring shaft 120. The display unit 140 is mounted on the housing 110 and is used to display the gap between the two rollers 101 being measured. By setting two measuring shafts 120 and two measuring instruments 130 on the housing 110, one end of each measuring shaft 120 holds a roller 101, and the other end can rotate relative to the housing 110. The two measuring shafts 120 respectively hold two rollers 101. The measuring device 130 can detect the deflection angle of the measuring axis 120, thereby calculating the gap between the two rollers 101. High measurement accuracy ensures that the gap between the two rollers 101 meets requirements, avoiding excessive pressure on the wafer during wafer surface cleaning, preventing wafer damage or microcracks during cleaning, and improving the cleaning efficiency of the cleaning module.
[0037] It is understandable that during wafer surface cleaning, the wafer is positioned between two rollers 101, and the relative movement between the rollers 101 and the wafer enables the rollers 101 to remove impurities from the wafer surface. This relative movement can be either the wafer remaining stationary while the rollers 101 move, or the rollers 101 remaining stationary while the wafer moves. No specific limitation is made here.
[0038] Optionally, the housing 110 is provided with a mounting groove 112, and the measuring device 130 is disposed in the mounting groove 112. The mounting groove 112 is used to limit the position of the measuring device 130. In some embodiments, the measuring device 130 can also be bonded, snapped, riveted, welded, threaded or bolted to the housing 110, etc., which are not specifically limited here.
[0039] Optionally, the measuring shaft 120 has a mounting hole 121 at one end near the housing 110. The mounting hole 121 is fitted onto the fixed shaft 111 to allow the measuring shaft 120 to rotate around the fixed shaft 111. In this embodiment, the fixed shaft 111 is fixedly connected to the housing 110. The measuring device 130 is positioned opposite to the fixed shaft 111, that is, directly above the fixed shaft 111. The measuring device 130 can be, but is not limited to, a laser measuring device.
[0040] Optionally, the measuring shaft 120 is provided with an identification part (not shown), and the measuring device 130 can accurately detect the position of the identification part. When the measuring shaft 120 rotates around the fixed shaft 111, the identification part rotates accordingly around the fixed shaft 111. The measuring device 130 can detect the offset angle of the identification part, thus measuring the deflection angle of the measuring shaft 120.
[0041] Optionally, a slot 122 is provided at the end of the measuring shaft 120 away from the housing 110. The slot 122 is used to hold the roller 101. The slot 122 is arc-shaped. The arc of the slot 122 is consistent with the arc of the outer circumference of the roller 101, so that the holding is more secure and it is beneficial to improve the detection accuracy.
[0042] It is understood that by securing the two measuring shafts 120 with their slots 122 on the two rollers 101 respectively, the two measuring instruments 130 can detect the offset angle of the two measuring shafts 120, and calculate the gap between the two rollers 101 based on the offset angle. It should be noted that the calculation principle for determining the gap between the two rollers 101 based on the offset angle of the two measuring shafts 120 is existing technology, and this calculation process can be automatically performed by the controller. This controller can be a controller within the measuring instrument 130 itself, or an externally connected controller; no specific limitation is made here.
[0043] Optionally, the display unit 140 is used to display the measured gap value between the two rollers 101, so that the operator can clearly see the gap between the rollers 101. Of course, the displayed content may include not only the gap value, but also the offset angle, the image of the rollers 101, etc., which is not specifically limited here. The display unit 140 includes a digital display screen, which can be a high-definition digital display screen, so that the test results are clear at a glance. The display unit 140 realizes the visualization of the roller 101 gap measurement and also facilitates the adjustment of the roller 101 gap.
[0044] It should be noted that the roller gap measuring device 100 can accurately measure the gap between the rollers 101. If the gap does not meet the cleaning requirements, it can be adjusted. During the gap adjustment process, the display unit 140 can display the gap value in real time, making it easy for operators to quickly adjust to a suitable gap.
[0045] Optionally, the housing 110 is provided with a through hole 113. The through hole 113 allows the operator to hold the device, facilitating the actual operation of the roller clearance measuring device 100 and making measurement more convenient. It also facilitates transportation, movement, and storage. After measurement, the roller clearance measuring device 100 can be hung on a wall or other carrier through the through hole 113 to prevent loss.
[0046] This utility model embodiment also provides a measuring device, including a controller and a roller clearance measuring device 100 as described above. The controller is connected to the measuring device 130 and the display unit 140 respectively. The measuring device 130 transmits the detection results to the controller, the controller calculates the clearance value between the rollers 101 based on the detection results, and transmits the clearance value to the display unit 140 for display.
[0047] It should be noted that the controller can be an external controller or a controller integrated into the measuring instrument 130. The controller can be a general-purpose processor, including but not limited to a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. Of course, the controller can also be integrated as a PLC controller, a microcontroller, etc., without specific limitations.
[0048] It should be understood that the number of measuring shafts 120 can be three, four, or more, and the number of measuring instruments 130 is equal to the number of measuring shafts 120, and they are set in a one-to-one correspondence. This can be used to detect and adjust the gap between multiple parallel rollers 101. No specific limitation is made here.
[0049] In summary, the roller clearance measuring device 100 and measuring equipment provided in this embodiment of the present invention have the following beneficial effects, including:
[0050] The roller gap measuring device 100 provided in this embodiment of the invention comprises two measuring shafts 120 and two measuring instruments 130 arranged on a housing 110. One end of each measuring shaft 120 holds a roller 101, while the other end can rotate relative to the housing 110. The two measuring shafts 120 respectively hold two rollers 101. The measuring instruments 130 can detect the deflection angle of the measuring shafts 120, thereby calculating the gap between the two rollers 101. The device offers high measurement accuracy, ensuring that the gap between the two rollers 101 meets requirements, avoiding excessive pressure on the wafer during wafer surface cleaning, preventing wafer damage or microcracks during cleaning, and improving the cleaning efficiency of the cleaning module.
[0051] The measuring device provided in this embodiment of the present invention includes the roller gap measuring device 100 described above, which can accurately measure the gap between two rollers 101. The measurement results are accurate and reliable, which helps to improve the cleaning efficiency of the cleaning module and can also prevent the wafer from being damaged or cracked during the cleaning process.
[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Any modifications, equivalent substitutions, improvements, etc., should be included within the protection scope of this utility model.
Claims
1. A roller clearance measuring device, characterized in that, include: case; A fixed shaft is provided on the housing; Two measuring axes, one end of each measuring axis is rotatably connected to the fixed axis, and the other end is used to connect to a roller; Two measuring instruments are mounted on the housing; and the two measuring instruments are arranged in a one-to-one correspondence with the two measuring axes; the measuring instruments are used to measure the deflection angle of the measuring axes; A display unit, disposed on the housing, is used to display the measured gap between the two rollers.
2. The roller clearance measuring device according to claim 1, characterized in that, The housing is provided with a mounting groove, and the measuring device is disposed in the mounting groove.
3. The roller clearance measuring device according to claim 1, characterized in that, The measuring shaft has a mounting hole at one end near the housing. The mounting hole is fitted onto the fixed shaft to allow the measuring shaft to rotate around the fixed shaft.
4. The roller clearance measuring device according to claim 1, characterized in that, The measuring shaft has a slot at the end away from the housing, which is used to hold the roller.
5. The roller clearance measuring device according to claim 4, characterized in that, The slot is arc-shaped.
6. The roller clearance measuring device according to claim 1, characterized in that, The measuring axis is provided with an identification part, and the measuring instrument detects the offset angle of the identification part.
7. The roller clearance measuring device according to claim 1, characterized in that, The measuring instrument is positioned opposite to the fixed axis.
8. The roller clearance measuring device according to claim 1, characterized in that, The display unit includes a digital display screen.
9. The roller clearance measuring device according to any one of claims 1 to 8, characterized in that, The housing has through holes.
10. A measuring device, characterized in that, It includes a controller and a roller clearance measuring device as described in any one of claims 1 to 9, wherein the controller is connected to the measuring device and the display unit, respectively.