Temperature control system, temperature control liquid circulating device thereof and exposure equipment

Abstract

The utility model provides a temperature control system, a temperature control liquid circulating device thereof and exposure equipment. The temperature control liquid circulating device comprises a box body and a first baffle plate, the box body is provided with a liquid storage cavity, and a liquid inlet and a liquid storage opening which are communicated with the liquid storage cavity are further formed in the box body. The first baffle is arranged in the liquid cavity, and gaps are formed between at least two end parts of the first baffle and the wall of the liquid storage cavity; the plane where the first baffle is located is located between the liquid inlet and the liquid outlet, and the first baffle is further partially arranged towards an incoming path of the temperature control liquid entering the liquid storage cavity from the liquid outlet, so that the temperature control liquid is shunted, and the flow direction of at least part of the temperature control liquid is changed; the split temperature control liquid flows through the first baffles and then converges at the liquid outlets, so that the contact amount of the temperature control liquid and the liquid stored in the liquid storage cavity can be increased, the heat exchange amount between the temperature control liquid and the liquid stored in the liquid storage cavity is increased, the temperature of the split temperature control liquid is complemented in the re-converging process, and the heat exchange efficiency is improved. The temperature fluctuation range of the temperature control liquid flowing out of the liquid outlet is reduced, and the temperature control precision of the temperature control liquid circulating device is improved.

Description

Technical Field

[0001] This utility model belongs to the field of temperature control technology, specifically relating to a temperature control system and its temperature control circulation device, and an exposure device. Background Technology

[0002] Temperature control systems play a crucial role in exposure processes. The temperature control performance of the terminal components in an exposure machine is primarily affected by the accuracy of the circulating water temperature control system. As a key component of the circulating water system, the water tank not only stores water and regulates flow, but also plays a vital role in controlling the water temperature accuracy. Current technologies suffer from large fluctuations and poor stability in the outlet water temperature during operation. Utility Model Content

[0003] The purpose of this invention is to provide a temperature control system and its temperature control liquid circulation device and exposure equipment, which aims to improve the temperature control accuracy of the temperature control liquid, thereby improving the temperature control accuracy of the temperature control system.

[0004] To achieve the above objectives, this utility model provides a temperature control liquid circulation device for a temperature control system, including a housing and a first baffle.

[0005] The box has a liquid storage chamber, and the box is also provided with an inlet and an outlet that are respectively connected to the liquid storage chamber;

[0006] The first baffle is disposed in the liquid storage chamber and connected to the housing; at least two ends of the first baffle form gaps with the wall of the liquid storage chamber; the plane on which the first baffle is located is between the liquid inlet and the liquid outlet, and the first baffle is also partially arranged toward the path of the temperature control liquid entering the liquid storage chamber from the liquid inlet, thereby diverting the temperature control liquid and changing the flow direction of at least a portion of the temperature control liquid.

[0007] Optionally, the inlet is higher than the outlet, and the inlet and outlet are horizontally offset. The first baffle is arranged vertically, with its upper end lower than the inlet and its lower end higher than the outlet.

[0008] Optionally, the outlet is located on the bottom wall of the storage cavity; in the vertical direction, the liquid level in the storage cavity is h1, the size of the first baffle is h2, and the distance from the lower end of the first baffle to the bottom wall of the storage cavity is h3.

[0009] The ratio of h2 to h1 is not less than 0.5 and not greater than 0.7, and the ratio of h3 to h2 is not less than 0.05 and not greater than 0.3.

[0010] Optionally, the first baffle includes a first sub-baffle and a second sub-baffle arranged at intervals in a vertical direction, the first sub-baffle is located above the second sub-baffle, and the upper end of the first sub-baffle constitutes the upper end of the first baffle, and the lower end of the second sub-baffle constitutes the lower end of the first baffle.

[0011] In the vertical direction, the distance between the lower end of the first sub-baffle and the upper end of the second sub-baffle is h4, and the ratio of h4 to h2 is not less than 0.2 and not greater than 0.3.

[0012] Optionally, the number of the first baffles is at least two, and the at least two first baffles are arranged parallel and spaced apart in the horizontal direction, and the upper end of the first baffle closer to the liquid outlet in two adjacent first baffles is higher than the upper end of the other first baffle.

[0013] Optionally, the first baffle is further provided with a through hole extending horizontally.

[0014] Optionally, the first baffle includes a plurality of flow guiding zones arranged in a top-to-bottom direction, each of the flow guiding zones being provided with a through hole; the porosity of the upper flow guiding zone is greater than that of the lower flow guiding zone.

[0015] Optionally, it further includes a second baffle, which is disposed on the side of the first baffle facing the liquid outlet and partially arranged towards the path of the temperature control liquid; the second baffle is perpendicular to the first baffle or inclined relative to the first baffle.

[0016] To achieve the above objectives, the present invention also provides a temperature control system, including a temperature control mechanism and a temperature control liquid circulation device for the temperature control system as described in any of the preceding claims, wherein the temperature control liquid circulation device for the temperature control system is connected to the temperature control mechanism and is used to provide temperature control liquid to the temperature control mechanism.

[0017] Optionally, the temperature control mechanism includes a temperature control plate, which has a flow channel. The flow channel has an input end and an output end, the input end being connected to the liquid outlet on the housing, and the output end being connected to the liquid inlet on the housing.

[0018] To achieve the above objectives, this utility model also provides an exposure device, including a robotic arm, a target object storage unit, a workpiece stage, and a temperature control system as described above. The robotic arm is configured to transfer the target object between the target object storage unit, the workpiece stage, and the temperature control system.

[0019] Compared with the prior art, the temperature control system, temperature control liquid circulation device, and exposure equipment of this utility model have the following advantages:

[0020] The aforementioned temperature control liquid circulation device for a temperature control system includes a housing and a first baffle. The housing has a liquid storage chamber, and the housing is also provided with an inlet and a outlet respectively communicating with the liquid storage chamber. The first baffle is disposed in the liquid storage chamber, and there are gaps between at least two ends of the first baffle and the wall of the liquid storage chamber. The plane of the first baffle is located between the inlet and the outlet, and the first baffle is also partially arranged towards the path of the temperature control liquid entering the liquid storage chamber from the inlet, thereby diverting the temperature control liquid and changing the flow direction of at least a portion of the temperature control liquid. After the diverted temperature control liquids flow through the first baffle respectively, they converge at the outlet, thereby increasing the contact amount between the temperature control liquid and the liquid in the storage chamber to improve the heat exchange between them. Moreover, the temperature of the diverted temperature control liquids complements each other during the re-convergence process, reducing the temperature fluctuation amplitude of the temperature control liquid flowing out of the outlet and improving the temperature control accuracy of the temperature control liquid circulation device. Attached Figure Description

[0021] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0022] Figure 1 This is a schematic diagram of the structure of a temperature-controlled liquid circulation device in the prior art;

[0023] Figure 2 This is a simulation diagram of the flow path of the temperature control liquid from the inlet into the storage chamber when the temperature control liquid circulation device in the prior art is used.

[0024] Figure 3 This is a temperature cloud map of the liquid storage chamber when a temperature-controlled liquid circulation device in the existing technology is used.

[0025] Figure 4 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 1 of this utility model;

[0026] Figure 5 yes Figure 4 The diagram shows a simulation of the flow path of the temperature control liquid from the inlet into the storage chamber when the temperature control liquid circulation device is in use.

[0027] Figure 6 yes Figure 4 The temperature cloud map inside the liquid storage chamber of the temperature-controlled liquid circulation device shown in the figure is displayed during application.

[0028] Figure 7 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 1 of this utility model. Figure 7 and Figure 4 The difference lies in the direction of observation;

[0029] Figure 8 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 2 of this utility model;

[0030] Figure 9 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 2 of this utility model. Figure 11 and Figure 10 The difference lies in the direction of observation;

[0031] Figure 10 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 3 of this utility model;

[0032] Figure 11 yes Figure 1 , Figure 4 , Figure 8 and Figure 9 A schematic diagram showing the temperature fluctuation of the temperature control fluid flowing out of the outlet when the provided temperature control fluid circulation device is in use.

[0033] Figure 12 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 4 of this utility model;

[0034] Figure 13 yes Figure 12 A schematic diagram of the structure of the first baffle of the temperature-controlled liquid circulation device shown;

[0035] Figure 14 This is a schematic diagram of the temperature-controlled liquid circulation device provided in Embodiment 5 of this utility model.

[0036] [The annotations in the attached figures are explained below]:

[0037] 10, 100 - Same; 11, 101 - Liquid storage chamber; 12, 102 - Liquid inlet; 13, 103 - Liquid outlet; 104 - Gap; 200 - First baffle; 201 - Through hole; 202 - Flow guiding area; 300 - Second baffle. Detailed Implementation

[0038] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0039] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0040] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0041] Figure 1 A schematic diagram of a prior art temperature-controlled liquid circulation device is shown. (Example) Figure 1 As shown, the temperature-controlled liquid circulation device includes a housing 10, which has a liquid storage chamber 11. The housing 10 is also provided with a liquid inlet 12 and a liquid storage outlet 13 that are respectively connected to the liquid storage chamber 11.

[0042] Optionally, the housing 10 has a cubic structure, with the liquid inlet 12 located on the upper part of the left side wall and the liquid outlet 13 located on the bottom wall. Thus, during normal operation of the temperature-controlled liquid circulation device, the flow path of the temperature-controlled liquid entering the storage chamber 11 from the liquid inlet 12 is as follows: Figure 2As shown, the general flow path is as follows: the liquid enters the storage chamber 11 through the inlet pipe (not shown in the figure), then flows from left to right and downwards towards the outlet pipe (not shown in the figure), and finally flows out of the outlet chamber 11 from the outlet 13 in a downward direction. This flow path is relatively simple, and the contact time between the temperature control liquid and the liquid stored in the storage chamber 11 is short, resulting in low heat exchange efficiency. This leads to a large temperature difference at various locations within the outlet chamber 11 and poor temperature uniformity (e.g., ...). Figure 3 (As shown). Furthermore, by monitoring the temperature of the temperature-controlled liquid flowing out of the outlet 13, the following is obtained: Figure 14 Curve 1 in the figure shows the temperature fluctuation curve. As can be seen from curve 1, the fluctuation range of the temperature-controlled liquid flowing out of the outlet 13 is close to 12 mK. This indicates that the temperature control accuracy of the temperature-controlled liquid circulation device in the prior art is not good.

[0043] Therefore, the purpose of this utility model is to provide a temperature control liquid circulation device with high temperature control accuracy.

[0044] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0045] Figure 4 , Figure 8 , Figure 10 , Figure 12 , Figure 14 The diagram illustrates the structure of the temperature-controlled liquid circulation device provided in different embodiments of this utility model. For example... Figure 4 , Figure 8 , Figure 10 , Figure 12 ,as well as Figure 14 As shown, the temperature-controlled liquid circulation device includes a housing 100 and a first baffle 200. The housing 100 has a liquid storage chamber 101, and the housing 100 is also provided with an inlet 102 and an outlet 103 respectively communicating with the outlet chamber 101. The first baffle 200 is disposed in the outlet chamber 101, and at least two ends of the first baffle 200 form gaps 104 between them and the wall of the outlet chamber 101. Each gap 104 is at least partially used for liquid flow, and the orientations of the ends of the first baffle 200 that form the gaps 104 are different, for example, the upper end and the lower end, or the left end and the right end, etc. The plane on which the first baffle 200 is located is between the inlet 102 and the outlet 103, and the first baffle 200 is partially arranged towards the path of the temperature-controlled liquid entering the outlet chamber 101 from the inlet 102.

[0046] Here, "the path of the temperature control fluid" refers to the path through which the temperature control fluid flows. "The arrangement of the first baffle 200 partially facing the inlet 102 into the outlet chamber 101" means that the first baffle 200 is partially located on the original flow path of the temperature control fluid, such that the first baffle 200 intersects with the original flow path of the temperature control fluid. "The original flow path of the temperature control fluid" refers to the flow path of the temperature control fluid in the storage chamber 101 when the first baffle 200 is not installed, i.e., the flow path of the temperature control fluid in existing temperature control fluid circulation devices, such as... Figure 1 The flow path in the temperature-controlled liquid circulation device is shown.

[0047] In this way, the first baffle 200 obstructs the flow of the temperature control liquid along its original flow path, forcing the temperature control liquid to split into multiple streams at the first baffle 200 and causing at least a portion of the temperature control liquid to change its flow direction (e.g., Figure 5 As shown), after being diverted, the multiple streams of temperature-controlled liquid reach the outlet 103 and re-merge after passing the first baffle 200. This effectively increases the contact amount between the temperature-controlled liquid and the liquid in the storage chamber 101, thereby increasing the heat exchange between them and reducing the temperature difference between different locations within the outlet chamber 101 (e.g., ...). Figure 6 (As shown). Furthermore, the temperature control fluids after being diverted undergo temperature complementarity during the re-merging process, reducing the temperature fluctuation range of the temperature control fluid flowing out of the outlet 103 and improving temperature control accuracy and stability.

[0048] It should be noted that, in this article, the liquid flowing into the storage chamber 101 from the inlet 102 and the liquid flowing out of the storage chamber 101 from the outlet 103 are referred to as temperature control liquid, while the liquid stored in the outlet chamber 101 is referred to as storage liquid.

[0049] The temperature-controlled liquid circulation device provided by this utility model will be described next through specific embodiments.

[0050] <Example 1>

[0051] Figure 4 A schematic diagram of the temperature-controlled liquid circulation device provided in this embodiment is shown. Figure 4As shown, the housing 100 has a cubic structure, with the inlet 102 located above the outlet 103. For example, the inlet 102 is located on the upper part of the left side wall of the outlet chamber 101, and the outlet 103 is located on the bottom wall of the storage chamber 101. Thus, the outlet 103 and the inlet 102 are horizontally offset. The first baffle 200 has a rectangular structure and is arranged vertically. More specifically, the inlet 102 and the outlet 103 are offset in the X direction, and the first baffle 200 is arranged on the YZ plane. Figure 1 In the directions shown, the X direction is left and right, the Y direction is front and back, and the Z direction is up and down.

[0052] The front end and rear end of the first baffle 200 are respectively connected to the housing 100. The upper end of the first baffle 200 is lower than the liquid inlet 102, and the lower end of the first baffle 200 is higher than the liquid outlet 103, so that a gap 104 is formed between the upper end of the first baffle 200 and the top wall of the liquid storage cavity 101, and another gap 104 is formed between the lower end of the first baffle 200 and the bottom wall of the liquid storage cavity 101.

[0053] During normal operation of the temperature-controlled liquid circulation device, the liquid level in the outlet chamber 101 is higher than the upper end of the first baffle 200. Therefore, in this embodiment, please refer to... Figure 5 The flow direction of the temperature-controlled liquid entering the outlet chamber 101 from the inlet 102 is roughly as follows: first, it flows from left to right and then downwards, followed by a downward flow. Then, it moves from left to right and reaches the location of the first baffle 200. Guided by the first baffle 200, the temperature-controlled liquid diffuses and splits on the plane of the first baffle 200. A portion of the split temperature-controlled liquid flows upwards and then to the right from the upper end of the first baffle 200, passing over the first baffle 200 before flowing downwards to the outlet 103. The other portion of the split temperature-controlled liquid flows downwards and then to the right from the gap 104 between the lower end of the first baffle 200 and the bottom wall of the storage chamber 101, passing over the first baffle 200 before flowing to the outlet 103. It can be understood that the split temperature-controlled liquids converge when they reach the outlet 103.

[0054] contrast Figure 4 and Figure 1 As can be seen, the temperature-controlled liquid circulation device provided in this embodiment only adds the first baffle 200 compared to the temperature-controlled liquid circulation device of the prior art. Further comparison... Figure 5 and Figure 2As can be seen, the setting of the first baffle 200 cuts off the original flow path of the temperature control liquid and forces the temperature control liquid to split into two streams. One stream of temperature control liquid flows upward and passes over the first baffle 200, while the other stream flows downward and passes over the first baffle 200, and then they are mixed.

[0055] By splitting the temperature-controlled liquid into two streams, the contact amount between the temperature-controlled liquid and the liquid stored in the outlet chamber 101 can be increased. Furthermore, by having one stream of temperature-controlled liquid flow upwards and the other downwards to pass over the first baffle 200, the flow path of the temperature-controlled liquid within the storage chamber 101 can be extended, thereby prolonging the contact time between the temperature-controlled liquid and the liquid stored in the storage chamber 101 and further increasing the contact amount. This allows for better heat exchange between the temperature-controlled liquid and the liquid stored, reducing the temperature difference at different locations within the storage chamber 101 (e.g., ...). Figure 6 (As shown). Moreover, the different flow paths of the two temperature control liquids cause a temperature difference between them before they merge. By merging at the outlet 103, the two temperature control liquids can complement each other in temperature, thereby reducing the fluctuation range of the temperature control liquid flowing out of the outlet 103 and improving the temperature stability of the temperature control liquid flowing out of the outlet 103.

[0056] In practice, the vertical dimension h2 of the first baffle 200 should be appropriate. The reason is that if h2 is too large, the gap 104 formed between the first baffle 200 and the top wall of the liquid storage cavity 101 will be too small, resulting in a decrease in the distance Δh between the upper end of the first baffle 200 and the liquid surface in the liquid storage cavity 101 (e.g., ...). Figure 7 The size of the gap 104 formed by the first baffle 200 and the bottom wall of the liquid storage chamber 101 is also too small. As a result, the temperature control liquid is blocked when flowing through the upper and lower ends of the first baffle 200, making it difficult for the temperature control liquid to pass through the first baffle 200. This causes the liquid level on the side of the first baffle 200 near the liquid inlet 102 to rise, while the liquid level on the side of the first baffle 200 near the liquid outlet 103 to fall. If h2 is too small, the temperature control liquid cannot be well diverted, which makes it difficult to promote sufficient heat exchange between the temperature control liquid and the liquid storage, which is not conducive to improving the temperature control accuracy. It can be understood that Δh is equal to h1-h2-h3, where h1 is the distance from the liquid surface to the bottom wall of the liquid storage cavity 101, i.e., the liquid surface height, and h3 is the distance from the lower end of the first baffle 200 to the bottom wall of the liquid storage cavity 101; the size of the gap 104 formed by the first baffle 200 and the bottom wall of the liquid storage cavity 101 is h3.

[0057] Furthermore, the distance h3 from the lower end of the first baffle 200 to the bottom wall of the liquid storage cavity 101 should also be appropriate. This is because if the distance h3 from the lower end of the first baffle 200 to the bottom wall of the liquid storage cavity 101 is too large, the distance Δh from the upper end of the first baffle 200 to the liquid surface Δh in the liquid storage cavity 101 will inevitably be too small. This causes the upward-diffusing temperature-controlled water to be obstructed when passing the first baffle 200, resulting in only a portion of the upward-flowing temperature-controlled water passing over the first baffle 200 from its upper end, while the other portion can only turn back and flow downwards, passing over the first baffle 200 from its lower end. In other words, most of the temperature-controlled water flows downwards. A small portion of the temperature-controlled water flows upward and passes over the first baffle 200, which fails to effectively achieve the effect of first diverting and then mixing, and is also not conducive to reducing the temperature fluctuation range of the temperature-controlled water flowing out of the outlet 103. If the distance h3 from the lower end of the first baffle 200 to the bottom wall of the outlet cavity 101 is too small, only a small amount of temperature-controlled water flows downward and passes over the first baffle 200, while most of the temperature-controlled water flows upward and passes over the first baffle 200. This also fails to effectively achieve the effect of first diverting and then mixing, and is also not conducive to the outflow of temperature-controlled liquid.

[0058] Experiments have shown that when the ratio of h2 to h1 is not less than 0.5 and not greater than 0.7, and the ratio of h3 to h2 is not less than 0.05 and not greater than 0.3, the temperature control liquid can smoothly pass through the second baffle 200, and the first baffle 200 can also effectively block the temperature control liquid and divert the temperature control liquid, thereby making the temperature fluctuation of the temperature control liquid flowing out from the outlet 103 smaller.

[0059] Based on this, the temperature of the temperature control liquid flowing out from the outlet 103 of the temperature control liquid circulation device described in this embodiment is monitored, and the temperature fluctuation curve is obtained as follows: Figure 11 As shown in curve 2, comparing curve 2 with curve 1, it can be seen that the temperature fluctuation of the temperature control liquid flowing out of the outlet 103 is about 9 mK, which is reduced by about 3 mK, and the temperature control accuracy is improved by about 25%.

[0060] <Example 2>

[0061] Figure 8 This diagram shows the structure of the temperature-controlled liquid circulation device provided in this embodiment. Figure 9 This is a schematic diagram of the temperature-controlled liquid circulation device from another angle. (See diagram below.) Figure 8 and Figure 9As shown, the difference between this embodiment and Embodiment 1 is that the first baffle 200 includes a first sub-baffle 210 and a second sub-baffle 220 arranged at intervals along the vertical direction, with the first sub-baffle 210 located above the second sub-baffle 220. Thus, the upper end of the first sub-baffle 210 constitutes the upper end of the first baffle 200, and the lower end of the second sub-baffle 220 constitutes the lower end of the first baffle 200. The vertical dimension h2 of the first baffle 200 is equal to the distance from the upper end of the first sub-baffle 210 to the lower end of the second sub-baffle.

[0062] In this embodiment, the temperature control liquid entering the storage chamber 101 from the inlet 102 is divided into three streams when it reaches the position of the first baffle 200. One stream flows upward and passes over the first baffle 200 from the upper end of the first sub-baffle 210; another stream flows between the first sub-baffle 210 and the second sub-baffle 220 and passes over the first baffle 200; and the third stream passes over the first baffle 200 from the lower end of the second sub-baffle 220. The three streams of temperature control liquid converge at the outlet 103.

[0063] It should be noted that if the first sub-baffle 210 is partially located on the original flow path of the temperature control liquid and the second sub-baffle 220 is also partially located on the original flow path of the temperature control liquid, the gap between the first sub-baffle 210 and the second sub-baffle 220 is located on the original flow path of the temperature control liquid. In this case, the flow path of the temperature control liquid flowing between the first sub-baffle 210 and the second sub-baffle 220 is not extended.

[0064] In this embodiment, when setting the first baffle 200, in addition to considering the relationship between h2 and h1, and the relationship between h3 and h2, it is also necessary to consider the relationship between the distance h4 between the lower end of the first sub-baffle 210 and the upper end of the second sub-baffle 220 and h2. This is because if h4 is too small, less temperature control fluid will flow between the first sub-baffle 210 and the second sub-baffle 220, and the effect will still be equivalent to that of Embodiment 1. If h4 is too large, most of the temperature control fluid will flow between the first sub-baffle 210 and the second sub-baffle 220, and it will not have an effective diversion effect. In practice, it is preferable that the ratio of h4 to h2 is not less than 0.2 and not greater than 0.3.

[0065] Based on the above structure, the temperature of the temperature-controlled liquid flowing out of the outlet 103 is monitored to obtain the following results: Figure 11 The temperature fluctuation curve is shown in curve 3. Comparing curve 3 and curve 1, it can be seen that the temperature fluctuation of the temperature control liquid flowing out of the outlet 103 of the temperature control liquid circulation device of this embodiment is smaller than that of the prior art.

[0066] <Example 3>

[0067] Figure 10 This is a schematic diagram of the temperature-controlled liquid circulation device provided in this embodiment. Figure 10 As shown, the difference between this embodiment and Embodiment 1 is that the number of first baffles 200 is at least two. These at least two first baffles 200 are arranged horizontally in parallel and spaced apart. One of two adjacent first baffles 200 is closer to the liquid outlet 103 than the other, and the upper end of the first baffle 200 closer to the water outlet is higher than the upper end of the first baffle 200 farther from the water outlet 103. Therefore, the first baffle 200 closer to the water outlet can again divert the temperature control liquid.

[0068] In a specific example, there are two first baffles 200. Taking the case where there are two first baffles 200, the temperature of the temperature-controlled liquid flowing out from the outlet 103 of the temperature-controlled liquid circulation device in this embodiment is monitored to obtain... Figure 11 Curve 4 in the figure. Comparing curve 4 and curve 1, it can be seen that the temperature fluctuation of the temperature control liquid flowing out of the outlet 103 of the temperature control liquid circulation device in this embodiment is smaller than that of the prior art.

[0069] <Example 4>

[0070] Figure 12 This is a schematic diagram of the temperature-controlled liquid circulation device provided in this embodiment. Figure 12 As shown, the difference between this embodiment and Embodiment 1 is that the first baffle 200 is provided with a through hole 201 extending horizontally.

[0071] During operation, each of the through holes 201 forms a liquid flow channel. When the temperature control liquid reaches the first baffle 200, it diffuses and splits into multiple streams on the first baffle 200. The multiple streams of temperature control liquid pass over the first baffle 200 through each of the through holes 201, the upper end of the first baffle 200, and the lower end of the first baffle 200, respectively.

[0072] Optionally, such as Figure 13As shown, the first baffle 200 is divided into multiple flow guiding zones 202 arranged from top to bottom, such as two, three, four, or more. Each flow guiding zone 202 is provided with a through hole 201, and the porosity of the upper flow guiding zone 202 is greater than that of the lower flow guiding zone 202. The reason for this arrangement is that the temperature control fluid is more likely to concentrate and flow downward under the action of gravity. By setting the porosity of the upper flow guiding zone 202 to be greater than that of the lower flow guiding zone 202, the amount of temperature control fluid flowing through the lower end of the first baffle 200 can be appropriately reduced, improving the uniformity of the temperature control fluid distribution in the entire area of ​​the first baffle 200, thereby improving the diversion effect of the first baffle 200 on the temperature control fluid.

[0073] Methods for making the porosity of the upper flow guiding region 202 greater than that of the lower flow guiding region 202 include, but are not limited to, making the diameter of the through holes 201 in the upper flow guiding region 202 greater than that in the lower flow guiding region 202, making the spacing between the through holes 201 in the upper flow guiding region 202 smaller than that in the lower flow guiding region 202, and having more through holes 201 in the upper flow guiding region 202 than in the lower flow guiding region 202.

[0074] <Example 5>

[0075] Figure 14 A schematic diagram of the temperature-controlled liquid circulation device provided in this embodiment is shown. Figure 14 As shown, the difference between the temperature control liquid circulation device in this embodiment and that in Embodiment 1 is that it further includes a second baffle 300. The second baffle 300 is disposed between the first baffle 200 and the liquid outlet 103, and is partially arranged towards the inlet of the temperature control liquid, so as to perform secondary diversion of the temperature control liquid after it has been diverted.

[0076] The second baffle 300 may be perpendicular to the first baffle 200 or inclined relative to the first baffle 200, and may have any suitable shape.

[0077] It should be noted that although the above embodiments one to five are all described with the first baffle 200 arranged in a vertical plane as an example, this is not necessary. In fact, the first baffle can also be arranged horizontally (not shown in the figure), as long as it is arranged below the liquid surface of the liquid storage chamber and partially facing the path of the temperature control liquid, so as to block the temperature control liquid and divert the temperature control liquid.

[0078] Furthermore, the present invention does not limit the shape of the box 100 or the shape of the liquid outlet chamber 101. The "cubic structure" in the above embodiments is only an example and should not constitute an undue limitation on the present invention.

[0079] Furthermore, this embodiment of the invention also provides a temperature control system, which includes a temperature control structure and a temperature control liquid circulation device as described above. The temperature control liquid circulation device is connected to the temperature control structure and is used to provide temperature control liquid to the temperature control structure.

[0080] More specifically, the temperature control mechanism includes a temperature control plate with a flow channel inside. The flow channel has an input end and an output end. The input end is connected to the liquid outlet 103 on the housing 100, and the output end is connected to the liquid inlet 102 on the housing 100. Thus, the circulation path of the temperature control liquid is: liquid storage chamber 101 → liquid outlet 103 → input end → flow channel → output end → liquid inlet 101 → liquid storage chamber 101.

[0081] Those skilled in the art will understand that the temperature control plate is used to support the target object and exchange heat with it to achieve temperature control of the target object. The target object includes, but is not limited to, wafers, substrates, or other semiconductor structures.

[0082] Furthermore, this embodiment of the present invention also provides an exposure device, which includes a robotic arm, a target object storage unit, a workpiece stage, and a temperature control system as described above. The robotic arm is configured to transfer the target object between the target object storage unit, the workpiece stage, and the temperature control system.

[0083] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A temperature control liquid circulation device for a temperature control system, characterized in that, Including the housing and the first baffle; The box has a liquid storage chamber, and the box is also provided with an inlet and an outlet that are respectively connected to the liquid storage chamber; The first baffle is disposed in the liquid storage chamber and connected to the housing; at least two ends of the first baffle form gaps with the wall of the liquid storage chamber; the plane on which the first baffle is located is between the liquid inlet and the liquid outlet, and the first baffle is also partially arranged toward the path of the temperature control liquid entering the liquid storage chamber from the liquid inlet, so as to block the temperature control liquid, thereby diverting the temperature control liquid and changing the flow direction of at least a portion of the temperature control liquid.

2. The temperature control liquid circulation device for a temperature control system according to claim 1, characterized in that, The inlet is higher than the outlet, and the inlet and outlet are horizontally offset. The first baffle is vertically arranged, with its upper end lower than the inlet and its lower end higher than the outlet.

3. The temperature control liquid circulation device for a temperature control system according to claim 2, characterized in that, The outlet is located on the bottom wall of the storage cavity; in the vertical direction, the liquid level in the storage cavity is h1, the size of the first baffle is h2, and the distance from the lower end of the first baffle to the bottom wall of the storage cavity is h3. The ratio of h2 to h1 is not less than 0.5 and not greater than 0.7, and the ratio of h3 to h2 is not less than 0.05 and not greater than 0.

3.

4. The temperature control liquid circulation device for a temperature control system according to claim 3, characterized in that, The first baffle includes a first sub-baffle and a second sub-baffle arranged at intervals along the vertical direction. The first sub-baffle is located above the second sub-baffle, and the upper end of the first sub-baffle constitutes the upper end of the first baffle, and the lower end of the second sub-baffle constitutes the lower end of the first baffle. In the vertical direction, the distance between the lower end of the first sub-baffle and the upper end of the second sub-baffle is h4, and the ratio of h4 to h2 is not less than 0.2 and not greater than 0.

3.

5. The temperature control liquid circulation device for a temperature control system according to claim 2, characterized in that, The number of the first baffles is at least two, and the at least two first baffles are arranged parallel and spaced apart in the horizontal direction. The upper end of the first baffle closer to the liquid outlet in two adjacent first baffles is higher than the upper end of the other first baffle.

6. The temperature control liquid circulation device for a temperature control system according to claim 2, characterized in that, The first baffle is also provided with a through hole extending horizontally.

7. The temperature control liquid circulation device for a temperature control system according to claim 6, characterized in that, The first baffle includes multiple flow guiding zones arranged in a top-to-bottom direction, and each flow guiding zone is provided with a through hole; the porosity of the upper flow guiding zone is greater than that of the lower flow guiding zone.

8. The temperature control liquid circulation device for a temperature control system according to claim 1, characterized in that, It also includes a second baffle, which is disposed on the side of the first baffle near the liquid outlet and partially oriented toward the path of the temperature control liquid; the second baffle is perpendicular to the first baffle or inclined relative to the first baffle.

9. A temperature control system, characterized in that, It includes a temperature control mechanism and a temperature control fluid circulation device for a temperature control system as described in any one of claims 1-8, wherein the temperature control fluid circulation device for a temperature control system is connected to the temperature control mechanism and is used to provide temperature control fluid to the temperature control mechanism.

10. The temperature control system according to claim 9, characterized in that, The temperature control mechanism includes a temperature control plate, which has a flow channel. The flow channel has an input end and an output end. The input end is connected to the liquid outlet on the housing, and the output end is connected to the liquid inlet on the housing.

11. An exposure apparatus, characterized in that, It includes a robotic arm, a target object storage unit, a workpiece stage, and a temperature control system as described in claim 9 or 10, wherein the robotic arm is configured to move the target object between the target object storage unit, the workpiece stage, and the temperature control mechanism.

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